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    • 9. 发明授权
    • Thin film transistor and method of forming the same
    • 薄膜晶体管及其形成方法
    • US08853699B2
    • 2014-10-07
    • US12902786
    • 2010-10-12
    • Seung-Ha ChoiKyoung-Jae ChungYoung-Wook Lee
    • Seung-Ha ChoiKyoung-Jae ChungYoung-Wook Lee
    • H01L29/10H01L29/423H01L29/786H01L27/12H01L29/66
    • H01L29/7869H01L27/1214H01L27/1225H01L29/42384H01L29/66742H01L29/66969
    • Disclosed are a thin film transistor and a method of forming the thin film transistor, wherein the thin film transistor includes a gate electrode, an oxide semiconductor pattern, a first gate insulating layer pattern interposed between the gate electrode and the oxide semiconductor pattern, wherein the first gate insulating layer pattern has an island shape or has two portions of different thicknesses from each other, a source electrode and a drain electrode electrically connected to the oxide semiconductor pattern, wherein the source electrode and the drain electrode are separated from each other, and a first insulating layer pattern placed between the source electrode and drain electrode and the oxide semiconductor pattern, wherein the first insulating layer pattern partially contacts the source electrode and drain electrode and the first gate insulating layer pattern, and wherein the first insulating layer is enclosed by an outer portion.
    • 公开了一种薄膜晶体管和形成薄膜晶体管的方法,其中薄膜晶体管包括栅电极,氧化物半导体图案,插入在栅电极和氧化物半导体图案之间的第一栅绝缘层图案,其中 第一栅极绝缘层图案具有岛状或具有彼此不同厚度的两个部分,与氧化物半导体图案电连接的源电极和漏电极,其中源电极和漏电极彼此分离,以及 位于源电极和漏极之间的第一绝缘层图案和氧化物半导体图案,其中第一绝缘层图案部分地接触源电极和漏电极以及第一栅极绝缘层图案,并且其中第一绝缘层被 外部。