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    • 3. 发明授权
    • Recess gate transistor
    • 凹槽门晶体管
    • US08012828B2
    • 2011-09-06
    • US12251054
    • 2008-10-14
    • Ji-Young MinSi-Hyung LeeHeedon HwangSi-Young ChoiSangbom KangDongsoo Woo
    • Ji-Young MinSi-Hyung LeeHeedon HwangSi-Young ChoiSangbom KangDongsoo Woo
    • H01L21/336
    • H01L29/66553H01L21/28079H01L21/28114H01L29/4236
    • A recess gate of a semiconductor device is provided, comprising: a substrate having a recess formed therein; a metal layer formed at the bottom of the recess; a polysilicon layer formed over the metal layer; and a source region and a drain region formed adjacent to the polysilicon layer and spaced from the metal layer. A method of forming a semiconductor device is also provided, comprising forming a substrate and a source and drain layer; forming a recess and depositing a gate insulation layer therein; forming a first conductive layer on the gate insulation layer; forming a first conductive layer pattern by recessing the first conductive layer; forming a second conductive layer on the first conductive layer pattern; forming a second conductive layer pattern by patterning the second conductive layer to overlap the source and drain layer; depositing an insulating layer on the second conductive layer pattern and the source and drain layer; and planarizing the insulating layer to form a cap on the second conductive layer pattern.
    • 提供半导体器件的凹槽,其包括:形成有凹部的基板; 形成在所述凹部的底部的金属层; 形成在所述金属层上的多晶硅层; 以及与所述多晶硅层相邻形成并与所述金属层隔开形成的源极区域和漏极区域。 还提供了一种形成半导体器件的方法,包括形成衬底和源极和漏极层; 形成凹部并在其中沉积栅极绝缘层; 在所述栅绝缘层上形成第一导电层; 通过使所述第一导电层凹陷来形成第一导电层图案; 在所述第一导电层图案上形成第二导电层; 通过图案化所述第二导电层以与所述源极和漏极层重叠而形成第二导电层图案; 在第二导电层图案和源极和漏极层上沉积绝缘层; 并且平坦化绝缘层以在第二导电层图案上形成帽。
    • 4. 发明申请
    • RECESS GATE TRANSISTOR
    • 记忆闸门晶体管
    • US20090173994A1
    • 2009-07-09
    • US12251054
    • 2008-10-14
    • Ji-Young MinSi-Hyung LeeHeedon HwangSi-Young ChoiSangbom KangDongsoo Woo
    • Ji-Young MinSi-Hyung LeeHeedon HwangSi-Young ChoiSangbom KangDongsoo Woo
    • H01L29/78H01L21/336
    • H01L29/66553H01L21/28079H01L21/28114H01L29/4236
    • A recess gate of a semiconductor device is provided, comprising: a substrate having a recess formed therein; a metal layer formed at the bottom of the recess; a polysilicon layer formed over the metal layer; and a source region and a drain region formed adjacent to the polysilicon layer and spaced from the metal layer. A method of forming a semiconductor device is also provided, comprising forming a substrate and a source and drain layer; forming a recess and depositing a gate insulation layer therein; forming a first conductive layer on the gate insulation layer; forming a first conductive layer pattern by recessing the first conductive layer; forming a second conductive layer on the first conductive layer pattern; forming a second conductive layer pattern by patterning the second conductive layer to overlap the source and drain layer; depositing an insulating layer on the second conductive layer pattern and the source and drain layer; and planarizing the insulating layer to form a cap on the second conductive layer pattern.
    • 提供半导体器件的凹槽,其包括:形成有凹部的基板; 形成在所述凹部的底部的金属层; 形成在所述金属层上的多晶硅层; 以及与所述多晶硅层相邻形成并与所述金属层隔开形成的源极区域和漏极区域。 还提供了一种形成半导体器件的方法,包括形成衬底和源极和漏极层; 形成凹部并在其中沉积栅极绝缘层; 在所述栅绝缘层上形成第一导电层; 通过使所述第一导电层凹陷来形成第一导电层图案; 在所述第一导电层图案上形成第二导电层; 通过图案化所述第二导电层以与所述源极和漏极层重叠而形成第二导电层图案; 在第二导电层图案和源极和漏极层上沉积绝缘层; 并且平坦化绝缘层以在第二导电层图案上形成帽。