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    • 3. 发明专利
    • SCREENING INSPECTION JIG
    • JPH0745675A
    • 1995-02-14
    • JP19100493
    • 1993-08-02
    • HITACHI LTDHITACHI COMPUTER ENG
    • ISOBE TERUOKOIKE JUNICHI
    • H01L21/66
    • PURPOSE:To provide a screening inspection technique by which screening inspections can be accurately accomplished without deforming the lead pins of semiconductor devices. CONSTITUTION:A screening inspection jig is provided with a jig substrate 3, multiple conductor patterns 4 arranged in corresponding to the lead pins 2 of a semiconductor device 1, conductor patterns 11 formed in corresponding to multiple contact pins 12 on the performance board of a desired screening inspection device, through conductors 13 which respectively connect the patterns 4 and 11 to each other, and a fixture 10 from which fixed terminals 10a are projected. The jig is also provided with pin indenters 8 and package indenters 7 respectively arranged corresponding to the outer end sections of the lead pins 2 and package 1a of the semiconductor device 1, guide holes in which positioning pins, etc., provided on the performance board P are put, fixed patterns 5 independent from the conductor patterns 4, solder 14 which joints the fixed terminals 10a of the fixture 10 to fixed patterns 5 on the jig substrate 3.
    • 5. 发明专利
    • OUTER LEAD PIN FOR SEMICONDUCTOR DEVICE
    • JPS63164349A
    • 1988-07-07
    • JP30850686
    • 1986-12-26
    • HITACHI LTDHITACHI VLSI ENG
    • KOIKE JUNICHITSUBOI TOSHIHIRO
    • H01L23/12H01L23/50H05K3/30H05K3/40
    • PURPOSE:To eliminate the need for the increase of the overall size of a package even when the number of signal pins augments by insulating a plurality of signal pins consisting of a conductor material and using the signal pins as one outer lead pin. CONSTITUTION:Two faced conductor sections 3, 3' are solidified by an insulator 4, and changed into one pin 2. The conductor sections 3 are constituted of a substance such as metal, and the pin 2 organized of the insulator 4 such as resin is acquired by disposing that two metal bars oppositely at a proper interval and disposed previously into a die such as a molding die, and by injecting the resin into the molding die. One conductor section 3 of the multiple pin 2 is connected to a wiring 13 for a substrate 12 for mounting by solder 14, and the other conductor section 3' of the multiple pin 2 is connected to a wiring 13' for the substrate 12 for mounting by solder 14'. Even when the number of the pins is doubled, only pins of the same number can be used, and the size of a package can be miniaturized, thus allowing high packaging density on mounting.
    • 6. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS61152054A
    • 1986-07-10
    • JP27281884
    • 1984-12-26
    • HITACHI LTD
    • MURATA JUNKOIKE JUNICHIFUJITA MINORU
    • H01L27/00H01L21/768H01L21/8238H01L27/06H01L27/092
    • PURPOSE:To establish an ohmic contact without enhancing the concentration of impurities in N type and P type semiconductor regions by a method wherein a high-melting point metal silicide layer is formed between the semiconductor regions of two MISFET elements of different conductivity types in a complementary three-dimensional MISFET device. CONSTITUTION:On the primary surface of a substrate 1, element activation regions are formed, surrounded by a relatively thick SiO2 film serving as a field insulating layer, and N-channel MOSFETs are built in the element activation regions. In the diffusion layers of the source 3 and drain 4 of the N-channel MOSFETs, high-melting point metal silicide layers 5 are formed, respectively. The N-channel MOSFETs are isolated from P-channel MOSFETs by insulating films 8. The insulating films 8 also serve as gate insulating films for the P- channel MOSFETs and are locally provided with holes wherein ohmic contact is established between P-channel MOSFET drain regions 10 and N-channel MOSFET source regions 3 with the intermediary of the high-melting point meal silicide layers 5.
    • 9. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS61150252A
    • 1986-07-08
    • JP27086084
    • 1984-12-24
    • HITACHI LTD
    • KOIKE JUNICHITAKEDA KATSUMISAGARA KAZUYOSHI
    • H01L23/50H01L23/498H05K3/30H05K3/34
    • PURPOSE:To enable electrical connection of high reliability by a method wherein a cut is formed in the side surface of a lead pin in the longitudinal direction, and lead pins are fixed to a package substrate by pressure-welding the side surfaces of lead pins to through-hole walls under outer stress. CONSTITUTION:A lead pin 4 used for the titled device 1 has a large-diameter head 4b at one end of the pin main body 4a of small-diameter bar form and is provided with a cut 4c tapered toward the axis in the longitudinal direction of the side surface of the pin main body 4a. The pin 4 is inserted into a through- hole 13 which is much smaller in diameter than the main body of the pin 4 formed to the package substrate 2 and formed by extension of a wiring 3 on the wall while the pin main body 4a is pressed in the axial direction with a fixing tool, and is fixed to the substrate 2 by the pressure-welding of the side surface of the pin main body 4a to the through-hole wall 13 by release of said pressing after insertion. Besides, a solder 14 is risen on the wiring 3 around the projection of a lead pin 4 at the aperture part; thereby, the planting of lead pins 4 can be attained without damaging the wiring 3.
    • 10. 发明专利
    • Manufacture of semiconductor device
    • 半导体器件的制造
    • JPS61105873A
    • 1986-05-23
    • JP22005985
    • 1985-10-04
    • Hitachi Ltd
    • KAMIGAKI YOSHIAKIITO KIYOOONISHI SHINJIYOSHIDA ISAOMASUDA HIROOKOIKE JUNICHI
    • H01L21/265H01L29/78
    • H01L29/78
    • PURPOSE:To obtain a semiconductor device in a high-withstand voltage structure by a method wherein the high-concentration impurity region constituting the drain region is formed by the mask away from the gate electrode compared to the low= concentration impurity region. CONSTITUTION:An oxide film is formed on a substrate 1 by performing a thermal oxidation and after a 4,000-Angstrom thick polycrystalline silicon layer, wherein phosphorus is contained in high concentration, is desposited thereon, a gate insulating film 3 and a gate electrode 4 are formed. After that, a thermal oxidation is performed and phosphorus is ion-implanted in the substrate 1 as wide as 2X10 cm through oxide films 8-1 and 8-2, which are formed at the time of the foregoing thermal oxidation, and ion-implanted layers 5-1 and 5-2 are formed. Subsequently, wet and dry thermal oxidation are performed and 210-Angstrom thick oxide films 6-1 and 6-3 are formed on the substrate. At this time, a 3,000-Angstrom thick oxide film 6-2 is formed on the periphery of the electrode 4, because an impurity, phosphorus, is being contained in the polycrystalline silicon layer in high concentration. After then, arsenic is ion-implanted as wide as 6mu10 cm . After that, a thermal treatment is performed and phosphorus impurity layers 5-1 and 5-2 and arsenic impurity layers 7-1 and 7-2 are formed as the final diffusion layers.
    • 目的:为了通过以下方法获得高耐压结构的半导体器件:与低浓度杂质区相比,构成漏极区的高浓度杂质区由掩模形成,远离栅电极。 构成:通过进行热氧化在基板1上形成氧化膜,在其上分布有高浓度磷的4,000埃厚的多晶硅层之后,栅极绝缘膜3和栅电极4为 形成。 之后,通过在上述时刻形成的氧化膜8-1和8-2,进行热氧化,并将磷离子注入到宽度为2×10 13 cm -2的衬底1中 形成热氧化和离子注入层5-1和5-2。 随后,进行湿干和干热氧化,并在衬底上形成210埃厚的氧化膜6-1和6-3。 此时,由于在多晶硅层中含有高浓度的杂质,因此在电极4的周围形成有3,000埃厚的氧化膜6-2。 之后,将砷离子注入到6mu10·15cm -2以上。 之后,进行热处理,并且形成磷杂质层5-1和5-2以及砷杂质层7-1和7-2作为最终扩散层。