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    • 6. 发明授权
    • Method of fabricating diffraction grating and diffraction grating
    • 衍射光栅和衍射光栅的制作方法
    • US06723474B2
    • 2004-04-20
    • US09795442
    • 2001-03-01
    • Junji TomitaFumio Yamagishi
    • Junji TomitaFumio Yamagishi
    • G03F900
    • G03F7/201G02B5/1857G03F7/0005
    • A method of fabricating a diffraction grating by utilizing a single substrate comprises the steps of forming a photosensitive material layer and a light transmission reducing film having a predetermined pattern integrally with each other on the substrate, exposing the photosensitive material layer by exposure irradiation light via the light transmission reducing film, and developing the photosensitive material layer after exposure. It is composed so that the direction of exposure and the direction of development are opposite to each other. It is possible to fabricate a diffraction grating in which each grating is formed on a predetermined substrate at a predetermined pitch and a root portion in a cross-section of each diffraction grating is constricted. In this way, it is possible to reduce or eliminate interfaces, so that the generation of noise light can be effectively suppressed and a diffraction grating having a high diffraction efficiency can be made.
    • 通过利用单个基板制造衍射光栅的方法包括以下步骤:在基板上形成具有预定图案的感光材料层和相互一体的透光率降低膜,通过曝光照射光将光敏材料层经由 透光降低膜,曝光后显影感光材料层。 它的组成是使曝光方向和发展方向彼此相反。 可以制造衍射光栅,其中每个光栅以预定间距形成在预定基板上,并且每个衍射光栅的横截面中的根部被收缩。 以这种方式,可以减少或消除界面,从而可以有效地抑制噪声光的产生,并且可以制造具有高衍射效率的衍射光栅。