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    • 3. 发明申请
    • Acrylic Polymer and Radiation-Sensitive Resin Composition
    • 丙烯酸聚合物和辐射敏感性树脂组合物
    • US20070269754A1
    • 2007-11-22
    • US10567117
    • 2004-08-04
    • Kouichi FujiwaraHiroshi YamaguchiAtsushi Nakamura
    • Kouichi FujiwaraHiroshi YamaguchiAtsushi Nakamura
    • C08G61/02G03C5/00
    • C08F220/30G03F7/0397Y10S430/108Y10S430/111
    • To provide a resist which is excellent in the solubility in a resist solvent and little dependent on baking temperature and can form developed patterns reduced in line edge roughness. An acrylic polymer characterized by comprising units of the general formula (1), units of general formula (2), and units of general formula (3) and/or units of general formula (4), wherein R, R′, R″ and R′″ are each hydrogen, methyl, or trifluoromethyl; R1 is hydrogen, C1-4 linear or branched alkyl, alkoxy, or C1-4 linear or branched fluoroalkyl; X is a C7-20 polycyclic aliphatic hydrocarbon group consisting of carbon atoms and hydrogen atoms; R2 and R3 are each independently C1-4 linear or branched alkyl; R4 is a C4-20 alicyclic hydrocarbon group; R5 is C1-4 linear or branched alkyl; and R6 and R7 are each hydrogen or C1-4 linear or branched alkyl.
    • 提供一种在抗蚀剂溶剂中溶解性优异且几乎不依赖于烘烤温度的抗蚀剂,并且可以形成线边缘粗糙度减小的显影图案。 一种丙烯酸类聚合物,其特征在于包含通式(1)的单元,通式(2)的单元和通式(3)的单元和/或通式(4)的单元,其中R,R',R' '和R“'分别是氢,甲基或三氟甲基; R 1是氢,C 1-4 - 直链或支链烷基,烷氧基或C 1-4 - 直链或支链氟代烷基; X是由碳原子和氢原子组成的C 7-20多环脂族烃基; R 2和R 3各自独立地为C 1-4 - 直链或支链烷基; R 4是C 4-20脂肪族烃基; R 5是C 1-4烷基直链或支链烷基; 和R 6和R 7各自为氢或C 1-4 - 直链或支链烷基。
    • 4. 发明授权
    • Acrylic polymer and radiation-sensitive resin composition
    • 丙烯酸聚合物和辐射敏感树脂组合物
    • US07704669B2
    • 2010-04-27
    • US10567117
    • 2004-08-04
    • Kouichi FujiwaraHiroshi YamaguchiAtsushi Nakamura
    • Kouichi FujiwaraHiroshi YamaguchiAtsushi Nakamura
    • G03F7/004C08F220/18C08F224/00
    • C08F220/30G03F7/0397Y10S430/108Y10S430/111
    • To provide a resist which is excellent in the solubility in a resist solvent and little dependent on baking temperature and can form developed patterns reduced in line edge roughness. An acrylic polymer characterized by comprising units of the general formula (1), units of general formula (2), and units of general formula (3) and/or units of general formula (4), wherein R, R′, R″ and R′″ are each hydrogen, methyl, or trifluoromethyl; R1 is hydrogen, C1-4 linear or branched alkyl, alkoxy, or C1-4 linear or branched fluoroalkyl; X is a C7-20 polycyclic aliphatic hydrocarbon group consisting of carbon atoms and hydrogen atoms; R2 and R3 are each independently C1-4 linear or branched alkyl; R4 is a C4-20 alicyclic hydrocarbon group; R5 is C1-4 linear or branched alkyl; and R6 and R7 are each hydrogen or C1-4 linear or branched alkyl.
    • 提供一种在抗蚀剂溶剂中溶解性优异且几乎不依赖于烘烤温度的抗蚀剂,并且可以形成线边缘粗糙度减小的显影图案。 一种丙烯酸类聚合物,其特征在于包含通式(1)的单元,通式(2)的单元和通式(3)的单元和/或通式(4)的单元,其中R,R',R“ 和R'“各自为氢,甲基或三氟甲基; R1是氢,C1-4直链或支链烷基,烷氧基或C1-4直链或支链氟代烷基; X是由碳原子和氢原子组成的C7-20多环脂族烃基; R2和R3各自独立地为C1-4直链或支链烷基; R4是C4-20脂环族烃基; R5是C1-4直链或支链烷基; 并且R 6和R 7各自为氢或C 1-4直链或支链烷基。