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1. 发明授权

US5552602A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US5552602A
公开(公告)日：1996-09-03
申请号：US398684
申请日：1995-03-06
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Tadokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Tadokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa
IPC分类号： G01N23/04 , G01R31/305 , H01J37/26
CPC分类号： G01R31/305 , G01N23/046 , G01N2223/419 , H01J2237/226
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.
摘要翻译：通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

2. 发明授权

US6051834A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US6051834A
公开(公告)日：2000-04-18
申请号：US126432
申请日：1998-07-30
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.
摘要翻译：通过电子显微镜高速准确地进行薄膜样品中的原子排列和原子物质的三维观察，该电子显微镜测量从试样以高角度发射的电子。扫描透射电子显微镜具有电子检测装置，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 这些光子是电子 - 空穴对的1000倍。

3. 发明授权

US5866905A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US5866905A
公开(公告)日：1999-02-02
申请号：US686740
申请日：1996-07-26
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , G01N23/046 , G01R31/305 , G01N2223/419 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： A scanning transmission electron microscope including an electron detection system having a scattering angle limiting aperture (for the inner angle) and a scattering angle limiting aperture (for the outer angle) between a specimen and an electron detector (comprising a scintillator and a light guide) and only one electron detector is installed.
摘要翻译：一种扫描透射电子显微镜，包括具有散射角限制孔径（内角）的电子检测系统和检体与电子检测器（包括闪烁体和光导体）之间的散射角限制孔径（外角）并且仅安装一个电子检测器。

4. 发明授权

US5717207A Transmission electron microscope with camera system 失效
标题翻译：带相机系统的透射电子显微镜
公开(公告)号：US5717207A
公开(公告)日：1998-02-10
申请号：US685105
申请日：1996-07-22
申请人： Masanari Koguchi , Hiroshi Kakibayashi , Hiroyuki Tanaka , Shigeto Isakozawa , Keiichi Kanehori , Tatsuo Makishima , Kazutaka Tsuji
发明人： Masanari Koguchi , Hiroshi Kakibayashi , Hiroyuki Tanaka , Shigeto Isakozawa , Keiichi Kanehori , Tatsuo Makishima , Kazutaka Tsuji
IPC分类号： H01J37/22 , H01J37/26
CPC分类号： H01J37/265 , H01J37/224 , H01J2237/2445 , H01J2237/2802
摘要： A transmission electron microscope has a camera system that is linked to the optical lens system of the electron microscope by linking the number of electron beam scanning lines of the camera system with the zoom function of the optical lens system. Thus, the number of scanning lines increases as the magnification of the transferred image decreases. Further, the specimen under observation is photographed with a constant number of pixels at all times regardless of the magnification of the transferred image by the optical lens system, thus preventing a reduction in the amount of specimen information.
摘要翻译：透射电子显微镜具有通过将相机系统的电子束扫描线的数量与光学透镜系统的变焦功能相关联而连接到电子显微镜的光学透镜系统的照相机系统。因此，扫描线的数量随着传送图像的放大倍数的减小而增加。此外，无论光学透镜系统的转印图像的放大率如何，始终以恒定数量的像素拍摄观察的样本，从而防止样本信息量的减少。

5. 发明授权

US5488386A Imaging apparatus and operation method of the same 失效
标题翻译：成像装置及其操作方法相同
公开(公告)号：US5488386A
公开(公告)日：1996-01-30
申请号：US160655
申请日：1993-12-02
申请人： Toshio Yamagishi , Masakazu Nanba , Norifumi Egami , Kenkichi Tanioka , Mitsuhiro Kurashige , Kazutaka Tsuji , Yoshiyuki Kaneko , Tatsuo Makishima , Kazuyuki Nagatsuma , Tetsuya Ohshima , Yasushi Nakano
发明人： Toshio Yamagishi , Masakazu Nanba , Norifumi Egami , Kenkichi Tanioka , Mitsuhiro Kurashige , Kazutaka Tsuji , Yoshiyuki Kaneko , Tatsuo Makishima , Kazuyuki Nagatsuma , Tetsuya Ohshima , Yasushi Nakano
IPC分类号： H01J29/04 , H01J29/45 , H01J31/26 , H01J31/38 , H04N5/225 , H04N5/335 , H04N5/355 , H04N5/357 , H04N5/369 , H04N5/378 , G09G3/22
CPC分类号： H01J31/38 , H01J31/26
摘要： A photoconductive target having a transparent electrode layer and a photoconductive layer on a transparent substrate is disposed opposite to a group of integrated electron beam emitters having gate electrodes. A number of the electron emitters are activated to apply electron beams to the photoconductive target and the activated ones of the electron beam emitters are temporally changed over by an electron emitter selector circuit and a gate selector circuit. Signal charge generated and stored in the photoconductive layer is read. A time-series electric signal corresponding to a spatial distribution of the incident light is generated. A thin imaging apparatus suitable for a larger area is thus provided.
摘要翻译：在透明基板上具有透明电极层和光电导层的光导体靶设置成与具有栅电极的一组集成电子束发射体相对。多个电子发射器被激活以将电子束施加到光电导目标上，并且激活的电子束发射器在时间上被电子发射极选择器电路和栅选择器电路切换。读取产生并存储在光电导层中的信号电荷。产生对应于入射光的空间分布的时间序列电信号。因此，提供了适合于较大面积的薄的成像装置。

6. 发明授权

US5101255A Amorphous photoelectric conversion device with avalanche 失效
标题翻译：具有雪崩的非晶体光电转换装置
公开(公告)号：US5101255A
公开(公告)日：1992-03-31
申请号：US384080
申请日：1989-07-24
申请人： Sachio Ishioka , Yukio Takasaki , Tadaaki Hirai , Kazutaka Tsuji , Tatsuo Makishima , Yasuhiko Nonaka , Tatsuro Kawamura , Takashi Yamashita , Kazuhisa Taketoshi , Keiichi Shidara , Fumihiko Ando , Kenkichi Tanioka
发明人： Sachio Ishioka , Yukio Takasaki , Tadaaki Hirai , Kazutaka Tsuji , Tatsuo Makishima , Yasuhiko Nonaka , Tatsuro Kawamura , Takashi Yamashita , Kazuhisa Taketoshi , Keiichi Shidara , Fumihiko Ando , Kenkichi Tanioka
IPC分类号： H01L31/0272 , H01L31/09
CPC分类号： H01L31/0272 , H01L31/095
摘要： Disclosed is a photoelectric conversion device which comprises: a photoconductive layer made of amorphous semiconductor material which shows charge multiplication and which converts photo signals into electric signals; and a substrate having electric circuits or the like (for example switching elements) for reading the electric signals. The amorphous semiconductor material used according to the invention shows the charge multiplication action under predetermined intensity of electric field so that a high sensitive photoelectric conversion device having a gain which is not smaller than 1 is realized.
摘要翻译：公开了一种光电转换装置，其包括：由非晶半导体材料制成的光电导层，其显示电荷倍增，并将光信号转换为电信号; 以及具有用于读取电信号的电路等的基板（例如开关元件）。根据本发明使用的非晶半导体材料在预定的电场强度下显示充电倍增动作，从而实现具有不小于1的增益的高灵敏度光电转换装置。

7. 发明授权

US4980736A Electric conversion device 失效
标题翻译：电动转换装置
公开(公告)号：US4980736A
公开(公告)日：1990-12-25
申请号：US155809
申请日：1988-02-16
申请人： Yukio Takasaki , Kazutaka Tsuji , Tatsuo Makishima , Tadaaki Hirai , Sachio Ishioka , Tatsuro Kawamura , Keiichi Shidara , Eikyu Hiruma , Kenkichi Tanioka , Junichi Yamazaki , Kenji Sameshima , Hirokazu Matsubara , Kazuhisa Taketoshi
发明人： Yukio Takasaki , Kazutaka Tsuji , Tatsuo Makishima , Tadaaki Hirai , Sachio Ishioka , Tatsuro Kawamura , Keiichi Shidara , Eikyu Hiruma , Kenkichi Tanioka , Junichi Yamazaki , Kenji Sameshima , Hirokazu Matsubara , Kazuhisa Taketoshi
IPC分类号： H01L31/0376 , H01L31/09 , H01L31/107 , H01L31/20
CPC分类号： H01L31/095 , H01L31/03765 , H01L31/107 , H01L31/204 , Y02E10/548 , Y02P70/521
摘要： A photoelectric conversion device using an amorphous material composed mainly of tetrahedral elements including at least an element of hydrogen and halogens as semiconductor material is disclosed. When a strong electric field is applied to a layer formed by using this amorphous semiconductor, a charge multiplication effect is produced mainly in the interior of the amorphous semiconductor and thus it is possible to obtain a thermally stable photoelectric conversion device having a high sensitivity while keeping a good photoresponse.

8. 发明授权

US4900975A Target of image pickup tube having an amorphous semiconductor laminate 失效
标题翻译：具有非晶半导体层叠体的图像拾取管的目标
公开(公告)号：US4900975A
公开(公告)日：1990-02-13
申请号：US67229
申请日：1987-06-29
申请人： Yasuharu Shimomoto , Sachio Ishioka , Yukio Takasaki , Tadaaki Hirai , Kazutaka Tsuji , Tatsuo Makishima , Hirokazu Matsubara , Kenji Sameshima , Junichi Yamazaki , Kenkichi Tanioka , Mitsuo Kosugi , Keiichi Shidara , Tatsuro Kawamura , Eikyuu Hiruma , Takashi Yamashita
发明人： Yasuharu Shimomoto , Sachio Ishioka , Yukio Takasaki , Tadaaki Hirai , Kazutaka Tsuji , Tatsuo Makishima , Hirokazu Matsubara , Kenji Sameshima , Junichi Yamazaki , Kenkichi Tanioka , Mitsuo Kosugi , Keiichi Shidara , Tatsuro Kawamura , Eikyuu Hiruma , Takashi Yamashita
IPC分类号： H01L31/08 , H01J29/45 , H01J31/38
CPC分类号： H01J29/456
摘要： A target of an image pickup tube is formed by laminating at least a transparent conductive film, an amorphous layer consisting essentially of silicon, and an amorphous layer consisting essentially of selenium in the above order on a light-transmitting substrate.
摘要翻译：图像拾取管的目标是通过在透光性基板上层叠至少透明导电膜，基本上由硅构成的非晶层和基本上由硒组成的非晶层。

9. 发明授权

US4884011A Light-detecting device 失效
标题翻译：光检测装置
公开(公告)号：US4884011A
公开(公告)日：1989-11-28
申请号：US143384
申请日：1988-01-13
申请人： Tatsuo Makishima , Tadaaki Hirai , Kazutaka Tsuji , Sachio Ishioka , Takashi Yamashita , Keiichi Shidara , Junichi Yamazaki , Masaaki Aiba
发明人： Tatsuo Makishima , Tadaaki Hirai , Kazutaka Tsuji , Sachio Ishioka , Takashi Yamashita , Keiichi Shidara , Junichi Yamazaki , Masaaki Aiba
IPC分类号： H01J31/38 , H01J29/45 , H01L31/0272 , H04N5/228
CPC分类号： H01L31/0272 , H01J29/456
摘要： A light-detecting device for converting a light to an electrical signal utilizes a charge multiplication function and has a stable gain.The light-detecting device comprises a photo-electric conversion unit for converting a measurement light to an electrical signal, a power supply for applying an electric field to the photo-electric conversion unit, a light source for applying an incident light to the photo-electric conversion unit, signal detection means for detecting the charge converted by the photo-electric conversion unit based on the incident light from the light source, and signal hold means for holding the output signal of the signal detection means at a predetermined level.
摘要翻译：用于将光转换为电信号的光检测装置利用电荷倍增函数并具有稳定的增益。光检测装置包括用于将测量光转换为电信号的光电转换单元，向光电转换单元施加电场的电源，用于将入射光施加到光电转换单元的光源，电转换单元，用于基于来自光源的入射光检测由光电转换单元转换的电荷的信号检测装置，以及用于将信号检测装置的输出信号保持在预定水平的信号保持装置。

10. 发明授权

US4952839A Photoconductive device and method of operating the same 失效
标题翻译：光导元件及其操作方法
公开(公告)号：US4952839A
公开(公告)日：1990-08-28
申请号：US420773
申请日：1989-10-12
申请人： Kenkichi Tanioka , Mitsuo Kosugi , Junichi Yamazaki , Keiichi Shidara , Kazuhisa Taketoshi , Tatsuro Kawamura , Eikyuu Hiruma , Shiro Suzuki , Takashi Yamashita , Masaaki Aiba , Yochizumi Ikeda , Tadaaki Hirai , Yukio Takasaki , Sachio Ishioka , Tatsuo Makishima , Kenji Sameshima , Tsuyoshi Uda , Naohiro Goto , Yasuhiko Nonaka , Eisuke Inoue , Kazutaka Tsuji , Hirofumi Ogawa
发明人： Kenkichi Tanioka , Mitsuo Kosugi , Junichi Yamazaki , Keiichi Shidara , Kazuhisa Taketoshi , Tatsuro Kawamura , Eikyuu Hiruma , Shiro Suzuki , Takashi Yamashita , Masaaki Aiba , Yochizumi Ikeda , Tadaaki Hirai , Yukio Takasaki , Sachio Ishioka , Tatsuo Makishima , Kenji Sameshima , Tsuyoshi Uda , Naohiro Goto , Yasuhiko Nonaka , Eisuke Inoue , Kazutaka Tsuji , Hirofumi Ogawa
IPC分类号： H01J29/45
CPC分类号： H01J29/456
摘要： A photoconductive device having a photoconductive layer which includes an amorphous semiconductor layer capable of charge multiplication in at least a part thereof is disclosed. The method of operating such a photoconductive device is also disclosed. By using the avalanche effect of the amorphous semiconductor layer, it is possible to realize a highly sensitive photoconductive device while maintaining low lag property.

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