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1. 发明授权

US08710438B2 Scanning transmission electron microscope and axial adjustment method thereof 失效
标题翻译：扫描透射电子显微镜及其轴向调整方法
公开(公告)号：US08710438B2
公开(公告)日：2014-04-29
申请号：US13808134
申请日：2011-07-11
申请人： Kuniyasu Nakamura , Hiromi Inada
发明人： Kuniyasu Nakamura , Hiromi Inada
IPC分类号： G21K7/00 , H01J37/26 , H01J37/28 , G01N23/00
CPC分类号： H01J37/263 , H01J37/28 , H01J2237/0451 , H01J2237/1501 , H01J2237/2802
摘要： A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.
摘要翻译：配备有像差校正器的扫描透射电子显微镜能够自动地将会聚孔的位置与光轴的中心对齐，而与操作者的技术和经验无关。扫描透射电子显微镜系统包括电子源; 聚光透镜，被配置为会聚从电子源发射的电子束; 配置成使电子束对样品进行扫描的偏转器; 被配置为校正电子束的像差的像差校正装置; 收敛孔，被配置为确定电子束的收敛角; 以及检测器，其被配置为检测通过所述样品的衍射的电子。该系统获取通过通过样本的电子束形成的罗尼克拉姆的对比度的信息，并且基于该信息确定会聚孔径的位置。

2. 发明申请

US20070158568A1 Apparatus and measuring method of aberration coefficient of scanning transmission electron microscope 审中-公开
标题翻译：扫描透射电子显微镜的像差系数的仪器和测量方法
公开(公告)号：US20070158568A1
公开(公告)日：2007-07-12
申请号：US11645567
申请日：2006-12-27
申请人： Taisuke Nakamura , Kuniyasu Nakamura
发明人： Taisuke Nakamura , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/153 , H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/1532 , H01J2237/1534 , H01J2237/223 , H01J2237/2802
摘要： In the type of scanning transmission electron microscopes carrying an aberration corrector, a method of assuring more simplified and manipulatable adjustment of the corrector and a scanning transmission electron microscope having that function are provided. A Ronchigram image is acquired using a spherical standard specimen and parameters necessary for the adjustment are acquired from the thus obtained Ronchigram.
摘要翻译：在携带像差校正器的扫描透射电子显微镜的类型中，提供了确保校正器的更简化和可操作调节的方法以及具有该功能的扫描透射电子显微镜。使用球形标准样品获得Ronchigram图像，并且从由此获得的Ronchigram获得调整所需的参数。

3. 发明授权

US07227144B2 Scanning transmission electron microscope and scanning transmission electron microscopy 有权
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US07227144B2
公开(公告)日：2007-06-05
申请号：US11328173
申请日：2006-01-10
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.
摘要翻译：扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。首先，对扫描线圈的控制被数字化。此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

4. 发明申请

US20060151701A1 Scanning transmission electron microscope and scanning transmission electron microscopy 有权
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US20060151701A1
公开(公告)日：2006-07-13
申请号：US11328173
申请日：2006-01-10
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM (2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.
摘要翻译：扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。首先，对扫描线圈的控制被数字化。此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

5. 发明授权

US06822233B2 Method and apparatus for scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜的方法和装置
公开(公告)号：US06822233B2
公开(公告)日：2004-11-23
申请号：US10346138
申请日：2003-01-17
申请人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
发明人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
IPC分类号： H01J3704
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.
摘要翻译：扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

6. 发明授权

US6051834A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US6051834A
公开(公告)日：2000-04-18
申请号：US126432
申请日：1998-07-30
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.
摘要翻译：通过电子显微镜高速准确地进行薄膜样品中的原子排列和原子物质的三维观察，该电子显微镜测量从试样以高角度发射的电子。扫描透射电子显微镜具有电子检测装置，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 这些光子是电子 - 空穴对的1000倍。

7. 发明申请

US20130112875A1 SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METHOD THEREOF 失效
标题翻译：扫描传输电子显微镜及其轴向调整方法
公开(公告)号：US20130112875A1
公开(公告)日：2013-05-09
申请号：US13808134
申请日：2011-07-11
申请人： Kuniyasu Nakamura , Hiromi Inada
发明人： Kuniyasu Nakamura , Hiromi Inada
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/263 , H01J37/28 , H01J2237/0451 , H01J2237/1501 , H01J2237/2802
摘要： A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.
摘要翻译：配备有像差校正器的扫描透射电子显微镜能够自动地将会聚孔的位置与光轴的中心对齐，而与操作者的技术和经验无关。扫描透射电子显微镜系统包括电子源; 聚光透镜，被配置为会聚从电子源发射的电子束; 配置成使电子束对样品进行扫描的偏转器; 被配置为校正电子束的像差的像差校正装置; 收敛孔，被配置为确定电子束的收敛角; 以及检测器，其被配置为检测通过所述样品的衍射的电子。该系统获取通过通过样本的电子束形成的罗尼克拉姆的对比度的信息，并且基于该信息确定会聚孔径的位置。

8. 发明授权

US4160074A Polyisocyanate foam having isotropic cells and method and apparatus for preparing same 失效
标题翻译：具有各向同性电池的聚异氰酸酯泡沫及其制备方法和装置
公开(公告)号：US4160074A
公开(公告)日：1979-07-03
申请号：US872678
申请日：1978-01-26
申请人： Hiroshi Komada , Kuniyasu Nakamura , Ryoichi Miyagaki
发明人： Hiroshi Komada , Kuniyasu Nakamura , Ryoichi Miyagaki
IPC分类号： B29C33/30 , B29C44/58 , C08J9/00
CPC分类号： C08J9/00 , B29C44/10 , B29C44/586 , B29C33/30 , B29K2075/00 , C08J2375/04 , Y10S264/84
摘要： A polyisocyanate foam having isotropic cells is manufactured by a foaming operation in an apparatus comprising a mold composed of side walls capable of extending and returning, or folding and unfolding, in directions perpendicular to the free rising direction. Mold extending means are provided to spread out the side walls of the mold perpendicular to the free rising direction. While the foamable composition is in a creamy state, it is allowed to rise freely in one direction (the free rising direction), while the side walls of the mold are in their folded condition, until a height detecting means is actuated. Then the side walls of the mold are unfolded to enlarge the cross-sectional area of the mold so that the foamable composition is then permitted further to expand freely in directions perpendicular to the initial free rising direction, until the foamable composition is transformed from the creamy state to the tack-free state, whereby a polyisocyanate foam product having essentially spherical isotropic cells is obtained.
摘要翻译：具有各向同性电池的多异氰酸酯泡沫体通过发泡操作在包括由能够在垂直于自由上升方向的方向上延伸和返回或折叠和展开的侧壁构成的模具的装置中制造。提供模延伸装置以垂直于自由上升方向展开模具的侧壁。当可发泡组合物处于乳状状态时，允许其在一个方向（自由上升方向）上自由上升，同时模具的侧壁处于折叠状态，直到高度检测装置被致动。然后模具的侧壁展开以扩大模具的横截面积，从而允许可发泡组合物进一步在垂直于初始自由上升方向的方向上自由扩张，直到可发泡组合物从奶油状状态为无粘性状态，由此获得具有基本上球形各向同性电池的多异氰酸酯泡沫产品。

9. 发明申请

US20140138542A1 SCANNING ELECTRON MICROSCOPE AND SCANNING TRANSMISSION ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜和扫描传输电子显微镜
公开(公告)号：US20140138542A1
公开(公告)日：2014-05-22
申请号：US14232526
申请日：2012-07-19
申请人： Hiromi Inada , Kuniyasu Nakamura
发明人： Hiromi Inada , Kuniyasu Nakamura
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/263 , G01N23/2206 , H01J37/153 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/0455 , H01J2237/0492 , H01J2237/153 , H01J2237/1532 , H01J2237/21 , H01J2237/221 , H01J2237/225 , H01J2237/226 , H01J2237/24475 , H01J2237/2448 , H01J2237/2611 , H01J2237/2802
摘要： A scanning transmission electron microscope according to the present invention includes an electron lens system having a small spherical aberration coefficient for enabling three-dimensional observation of a 0.1 nm atomic size structure. The scanning transmission electron microscope according to the present invention also includes an aperture capable of changing an illumination angle; an illumination electron lens system capable of changing the probe size of an electron beam probe and the illumination angle; a secondary electron detector (9); a transmission electron detector (13); a forward scattered electron beam detector (12); a focusing unit (16); an image processor for identifying image contrast; an image processor for computing image sharpness; a processor for three-dimensional reconstruction of an image; and a mixer (18) for mixing a secondary electron signal and a specimen forward scattered electron signal.
摘要翻译：根据本发明的扫描透射电子显微镜包括具有小球面像差系数的电子透镜系统，用于实现0.1nm原子尺寸结构的三维观察。根据本发明的扫描透射电子显微镜还包括能够改变照明角度的孔; 能够改变电子束探头的探头尺寸和照明角度的照明电子透镜系统; 二次电子检测器（9）; 透射电子检测器（13）; 前向散射电子束检测器（12）; 聚焦单元（16）; 用于识别图像对比度的图像处理器; 用于计算图像清晰度的图像处理器; 用于图像的三维重建的处理器; 以及用于混合二次电子信号和样本前向散射电子信号的混合器（18）。

10. 外观设计

USD571385S1 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：USD571385S1
公开(公告)日：2008-06-17
申请号：US29266560
申请日：2006-09-25
申请人： Mitsuru Onuma , Kuniyasu Nakamura , Koichirou Saito , Takahito Hashimoto , Hiromi Inada
设计人： Mitsuru Onuma , Kuniyasu Nakamura , Koichirou Saito , Takahito Hashimoto , Hiromi Inada
CPC分类号： H01J2237/28

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