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    • 6. 发明专利
    • Image pickup target
    • 图像捕捉目标
    • JPS5937637A
    • 1984-03-01
    • JP14626482
    • 1982-08-25
    • Toshiba Corp
    • YANO KENSAKU
    • H01J29/45H01J31/26
    • H01J29/456
    • PURPOSE:To prevent reaction between H2 plasma and a transparent conductive film to keep a good image plane by increasing hydrogen contents continuously or in steps in direction from a hole blocking film to an electron beam landing film. CONSTITUTION:ITO52 as a transparent conductive film and SiOx as a hole blocking film are attached in a thickness of about 250Angstrom . Then an a-Si:H film 54 is attached in a thickness of 500-1,000Angstrom in a condition of a total pressure of 3X10 Torr, and H2/(H2+Ar)=
    • 目的:为了防止H2等离子体和透明导电膜之间的反应,通过连续地或从空穴阻挡膜到电子束着色膜的方向逐步增加氢含量来保持良好的图像平面。 构成:作为透明导电膜的ITO52和作为空穴阻挡膜的SiO x以约250Ang的厚度附着。 然后在3×10 -3 Torr的总压力和H 2 /(H 2 + Ar)= <30​​%的条件下,将a-Si:H膜54附着在500-1,000A的厚度。 透明导电膜ITO52在该条件下不显示反应。 在与上述条件相同的压力和H2 /(H2 + Ar)= <40%的条件下,a-Si:H膜55附着在500-1,000埃的厚度,此外,a-Si:H 在与上述相同的压力和H2 /(H2 + Ar)= <50%的条件下,膜56以约3mu的厚度附着。 最后,作为电子束着色膜57附着约1000A的Sb2S3。图像拾取管的图像非常好,暗电流为目标电压的1nA以下至50-60V,光谱灵敏度性能良好 并接近光谱发光效率。
    • 7. 发明专利
    • Target for image pickup tube
    • 图像抽吸管目标
    • JPS5780637A
    • 1982-05-20
    • JP15708480
    • 1980-11-10
    • Hitachi LtdNippon Hoso Kyokai
    • NONAKA IKUMITSUINOUE SHIGENORISHIDARA KEIICHITANIOKA KENKICHI
    • H01J29/45H01L31/08
    • H01J29/456
    • PURPOSE: To improve highlight sticking by doping fluoride to an Se-As-Te photoconductive film at a specified dope concentration and from the side of the light incident surface to the specified depth.
      CONSTITUTION: An N type transparent electrode 3 consisting of a transparent electrode 2 whose principal component is SnO
      2 and CeO
      2 is formed on a glass substrate 1. Besides, a photoconductive film 4 (Se: 94wt%, As: 6wt%, T
      1 = 30nm) of an Se-As P type noncrystal semiconductor, photoconductive film 5 (Se: 64wt%, As: 3wt%, Te: 33wt%, T
      2 =60nm) of an Se-As-Te noncrystal semiconductor, and photoconductive film 7 (Se: 72→97wt%, As: 28→3wt%, T
      3 =60nm) of an Se-As P type noncrystal semiconductor are formed on it. An LiF dope layer 6(LiF: 0.4± 0.1wt%, T
      3 = 60±6nm) is formed on the region of the photoconductive films 4 and 5. As a result, image pickup current is raised and highlight sticking is improved.
      COPYRIGHT: (C)1982,JPO&Japio
    • 目的:通过以特定的浓度浓度和从光入射表面一侧到指定深度,将氟化物掺杂到Se-As-Te光电导膜来改善高光斑。 构成:在玻璃基板1上形成由主要成分为SnO 2和CeO 2的透明电极2构成的N型透明电极3.此外,光导膜4(Se:94重量%,As:6重量%,T1 = 30nm) 的Se-As-Te非晶体半导体,Se-As-Te非晶体半导体的光电导膜5(Se:64重量%,As:3重量%,Te:33重量%,T2 = 60nm)和感光膜7(Se: 在其上形成Se-As P型非晶半导体的72 97重量%,As:28 3重量%,T3 = 60nm)。 在感光膜4和5的区域上形成LiF掺杂层6(LiF:0.4+或-0.1重量%,T3 = 60+或-6nm)。结果,摄像电流升高,突出显示粘附 改进。