专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US6152175A Process gas supply unit 失效
标题翻译：工艺气体供应单元
公开(公告)号：US6152175A
公开(公告)日：2000-11-28
申请号：US89346
申请日：1998-06-03
申请人： Masahito Itoh , Toshiyasu Inagaki , Minoru Ueta , Masahiko Yada , Hiroshi Itafuji
发明人： Masahito Itoh , Toshiyasu Inagaki , Minoru Ueta , Masahiko Yada , Hiroshi Itafuji
IPC分类号： F16K27/00 , F17D1/04 , F16K51/00
CPC分类号： F16K27/003 , F17D1/04 , Y10T137/87571 , Y10T137/87684 , Y10T137/87885
摘要： A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.
摘要翻译：没有常规管道的工艺气体供应单元。过程气体供应单元可以包括质量流量控制器，输入阀，输出阀，净化阀，真空阀，止回阀，调节器和过滤器的组件。模块通过螺栓从预定方向附接至至少一个部件。模块通过螺栓从相同的预定方向安装在基板上，并且用相同的预定方向的螺栓将基板安装在安装面板上。

2. 发明授权

US6109303A Process gas supply unit 有权
标题翻译：工艺气体供应单元
公开(公告)号：US6109303A
公开(公告)日：2000-08-29
申请号：US296671
申请日：1999-04-22
申请人： Hiroshi Itafuji , Toshiyasu Inagaki
发明人： Hiroshi Itafuji , Toshiyasu Inagaki
IPC分类号： F16K27/00 , F16K51/00 , F16K11/20
CPC分类号： F16K27/003 , Y10T137/5109 , Y10T137/87885
摘要： A process gas supply unit includes an upper module block provided with flow passages, a passage block provided with flow passages connected with the flow passages of the upper module block, and a base block provided with a connection passage connected with the flow passages of the passage block. The upper module block is attached with a component used for the supply of process gas and is down mounted on the passage block by bolts. The base block is mounted underneath the adjacent passage blocks. Accordingly, a sequence of the components are communicated through the flow passages of the upper module block and the passage block, and the connection passage of the base block.
摘要翻译：一种处理气体供应单元，包括设置有流动通道的上部模块块，设置有与上部模块块的流动通道连接的流动通道的通道块，以及设置有与通道的流动通道连接的连接通道的基座块。上部模块块附有用于供应工艺气体的部件，并通过螺栓下降安装在通道块上。基座安装在相邻通道块的下方。因此，这些部件的顺序通过上部模块块和通道块的流动通道以及基础块的连接通道进行连通。

3. 发明申请

US20090165872A1 Gas Supply Unit and Gas Supply System 有权
标题翻译：天然气供应单位和供气系统
公开(公告)号：US20090165872A1
公开(公告)日：2009-07-02
申请号：US12226416
申请日：2006-06-02
申请人： Shuji Moriya , Hideki Nagaoka , Tsuneyuki Okabe , Hiroshi Itafuji , Hiroki Doi , Minoru Ito
发明人： Shuji Moriya , Hideki Nagaoka , Tsuneyuki Okabe , Hiroshi Itafuji , Hiroki Doi , Minoru Ito
IPC分类号： F15C1/06
CPC分类号： F17D1/04 , Y10T137/87177 , Y10T137/87885
摘要： A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.
摘要翻译：气体供给单元和气体供给系统，其尺寸小且便宜。气体供应单元安装在操作气体输送管道上，并具有通过流路块连接并控制操作气体的流体控制装置。气体供应单元具有第一流路块，其一侧包括在流体控制装置中的入口打开/关闭阀，并且还具有第二流路块，其一侧包括一个净化阀流体控制装置被连接。第一流路块和第二流路块在与操作气体的输送方向垂直的方向上分层。入口打开/关闭阀和净化阀布置在安装在操作气体输送管线上的质量流量控制器和安装单元的安装表面之间。

4. 发明授权

US6062605A Weldless joint 失效
标题翻译：无缝接头
公开(公告)号：US6062605A
公开(公告)日：2000-05-16
申请号：US166278
申请日：1998-10-05
申请人： Kenichi Goshima , Hiroshi Itafuji , Shigenobu Nishida
发明人： Kenichi Goshima , Hiroshi Itafuji , Shigenobu Nishida
IPC分类号： F16L19/00 , B01J4/00 , F16L19/02 , F16L27/08 , F16L55/00 , F16L17/00 , F16L21/05 , F16L27/00
CPC分类号： F16L27/0832 , F16L19/0206 , F16L19/0231 , F16L19/0237
摘要： In a weldless joint 13, screwing a fastening member 13 into a joint body allows two pipes to move closer to each other in an axial direction without rotating. The two pipes can be thus connected without welded. Packings and disposed in the joint body prevent the leakage of gas through the contact surfaces of the pipes and, further, the leakage of gas from the inside of the joint body to the outside thereof. Accordingly, no packing or sealing element is needed on the periphery of the fastening member.
摘要翻译：在无焊缝13中，将紧固构件13拧入接头体中，允许两个管在轴向方向上彼此靠近移动而不旋转。这两个管道可以无焊接连接。在接头体内的填充物，能够防止气体从管接触面泄漏，另外从接合体内部泄漏到外部。因此，在紧固构件的周边上不需要填料或密封元件。

5. 发明授权

US08361231B2 Liquid vaporization system 有权
标题翻译：液体蒸发系统
公开(公告)号：US08361231B2
公开(公告)日：2013-01-29
申请号：US13498902
申请日：2010-03-30
申请人： Masayuki Kouketsu , Hiroshi Itafuji
发明人： Masayuki Kouketsu , Hiroshi Itafuji
IPC分类号： C23C16/00 , B05C11/00
CPC分类号： B01B1/005
摘要： Provided is a liquid vaporization system capable of promoting vaporization of a liquid material while solving a problem of residual liquid material. A liquid vaporization system has a liquid vaporization apparatus having a pump and a vaporizer. The vaporizer has a case, a heater provided inside the case, a heat storage plate heated by the heater, and a mesh. The mesh is formed by interweaving wires and has an overall flat plate shape. By overlapping the mesh on an upper surface of the heat storage plate, minute irregularities are formed on the heat storage plate by the mesh. A nozzle is provided above the mesh, whereby the liquid material is dropped from the nozzle onto the heat storage plate. The liquid material spreads over the heat storage plate in a thin film and is heated and vaporized on the upper surface of the heat storage plate.
摘要翻译：提供一种能够促进液体材料的蒸发同时解决残留液体材料的问题的液体蒸发系统。液体蒸发系统具有液体蒸发装置，其具有泵和蒸发器。蒸发器具有壳体，设置在壳体内部的加热器，由加热器加热的蓄热板和网。网格通过交织线形成并具有整体平板形状。通过在存储板的上表面上重叠网格，通过网格在储热板上形成微小的凹凸。在网格上方设有喷嘴，由此液体材料从喷嘴落到储热板上。液体材料以薄膜的形式在储热板上展开，并在储热板的上表面被加热和汽化。

6. 发明申请

US20070295401A1 Flow Path Block 审中-公开
标题翻译：流路阻塞
公开(公告)号：US20070295401A1
公开(公告)日：2007-12-27
申请号：US11660860
申请日：2005-09-05
申请人： Katsuya Okumura , Hiroshi Itafuji , Hiroki Doi , Yasunori Nishimura
发明人： Katsuya Okumura , Hiroshi Itafuji , Hiroki Doi , Yasunori Nishimura
IPC分类号： G05D11/00
CPC分类号： F16K27/003 , F15B13/0807 , Y10T29/49405 , Y10T137/2587
摘要： The invention has an object to provide a flow path block capable of reducing pressure loss, providing an extremely long flow path and a complex flow path, and achieving weight reduction, and a manufacturing method thereof. A flow path block (1) comprises a block body (11) formed with through holes (21) and a groove (22) communicating with the through holes (21) and a lid member (12) which covers the groove (22). The groove (22) can be formed with any depth and width by a cutting tool to reduce pressure loss. The groove (22) can also be formed in a long shape by the cutting tool, so that a very long flow path can be provided when the groove (22) is covered with the lid member (12). The groove (22) can be made freely by the cutting tool to provide a complex flow path. Further, the thickness of the block body (11) can be reduced to achieve weight reduction.
摘要翻译：本发明的目的是提供一种能够减少压力损失，提供非常长的流动路径和复杂的流动路径并实现减轻重量的流路块及其制造方法。流路块（1）包括形成有通孔（21）的块体（11）和与通孔（21）连通的槽（22）和覆盖槽（22）的盖构件（12）。槽（22）可以通过切削工具以任何深度和宽度形成，以减少压力损失。槽（22）也可以通过切割工具形成为长形状，使得当凹槽（22）被盖构件（12）覆盖时，可以提供非常长的流动路径。槽（22）可以通过切削工具自由地形成以提供复杂的流动路径。此外，可以减小块体（11）的厚度，以实现重量减轻。

7. 外观设计

USD379844S Air operated valve 失效
公开(公告)号：USD379844S
公开(公告)日：1997-06-10
申请号：US35854
申请日：1995-03-08
申请人： Hiroshi Itafuji
设计人： Hiroshi Itafuji

8. 外观设计

USD368130S Air operated valve 失效
公开(公告)号：USD368130S
公开(公告)日：1996-03-19
申请号：US35852
申请日：1995-03-08
申请人： Hiroshi Itafuji
设计人： Hiroshi Itafuji

9. 发明授权

US5368062A Gas supplying system and gas supplying apparatus 失效
标题翻译：供气系统和供气装置
公开(公告)号：US5368062A
公开(公告)日：1994-11-29
申请号：US010325
申请日：1993-01-28
申请人： Katsuya Okumura , Yoshihisa Sudo , Kenichi Goshima , Hiroshi Itafuji , Akihiro Kojima
发明人： Katsuya Okumura , Yoshihisa Sudo , Kenichi Goshima , Hiroshi Itafuji , Akihiro Kojima
IPC分类号： C23C16/44 , C23C16/455 , F17C5/06 , F16K11/20
CPC分类号： C23C16/45512 , C23C16/4401 , C23C16/4408 , C23C16/455 , C23C16/45561 , F17C5/06 , F17C2205/0323 , F17C2205/0382 , F17C2227/044 , F17C2250/0636 , F17C2260/042 , F17C2270/0518 , Y10T137/4259 , Y10T137/86445 , Y10T137/87249
摘要： A gas supplying system for supplying a corrosive gas or the like to a semiconductor manufacturing apparatus or the like. A plurality of kinds of component gases are introduced into a chamber and mixed therein to form a desired supply gas. After supplying the desired supply gas, the chamber is evacuated and an inert gas is charged into the chamber to substitute a residual supply gas remaining in the chamber by the inert gas. The evacuation of the chamber and the charging of the inert gas into the chamber are repeated two or more times. Accordingly, the residual supply gas can be efficiently removed from the chamber and substituted by the inert gas.
摘要翻译：用于向半导体制造装置等供给腐蚀性气体等的气体供给系统。将多种组分气体引入室中并混合在其中以形成所需的供给气体。在供应期望的供应气体之后，将室抽真空，并将惰性气体装入室中以用惰性气体代替残留在室中的残留供应气体。将室抽真空并将惰性气体充入室中重复两次或更多次。因此，能够从室中有效地除去残留的供给气体，并被惰性气体取代。

10. 发明授权

US08573560B2 Vacuum control valve and vacuum control system 有权
标题翻译：真空控制阀和真空控制系统
公开(公告)号：US08573560B2
公开(公告)日：2013-11-05
申请号：US13413593
申请日：2012-03-06
申请人： Hiroshi Itafuji , Masayuki Kouketsu
发明人： Hiroshi Itafuji , Masayuki Kouketsu
IPC分类号： F16K31/00
CPC分类号： H01L21/6719 , H01L21/67253 , Y10T137/0318 , Y10T137/2562 , Y10T137/2572 , Y10T137/7758 , Y10T137/7761 , Y10T137/777
摘要： The invention provides a vacuum control valve configured to control the vacuum pressure in the vacuum chamber. The vacuum control valve includes a control valve main body, an operation unit, a cylinder, a biasing unit, and a bellofram. The operation unit and the cylinder include a valve opening manipulation chamber and a shutoff load generation chamber. The shutoff load generation chamber is configured to have a common axial center line with the valve opening manipulation chamber and to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid. And the shutoff load generation chamber may be formed in an interior of the rod.
摘要翻译：本发明提供了一种配置成控制真空室中的真空压力的真空控制阀。真空控制阀包括控制阀主体，操作单元，气缸，偏压单元和打开阀。操作单元和气缸包括开阀操作室和关闭负载产生室。关闭负荷产生室被构造成与阀打开操作室具有共同的轴向中心线，并且根据工作流体的供给沿着减小升程的方向产生施加到操作单元的负载。并且关闭负载产生室可以形成在杆的内部。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式