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1. 发明授权

US07189976B2 Method for generating high-speed particle and system for generating high-speed particle 有权
标题翻译：用于生成高速粒子的方法和用于产生高速粒子的系统
公开(公告)号：US07189976B2
公开(公告)日：2007-03-13
申请号：US10533441
申请日：2003-12-19
申请人： Hironori Takahashi , Takashi Inoue , Shinji Ohsuka , Yutaka Tsuchiya
发明人： Hironori Takahashi , Takashi Inoue , Shinji Ohsuka , Yutaka Tsuchiya
IPC分类号： H01S3/10 , G21K1/00 , H05H1/24
CPC分类号： G21G1/12 , A61N2005/1088 , H05H6/00
摘要： The present invention relates to a high-speed particle generating method and so on for generating high-speed particles from a high-speed particle generating target by condensing a pulsed laser beam to a micro-spot on the surface of a high-speed particle generating target. The high-speed particle generating method is a method that generates high-speed particles by condensing a pulsed laser beam generated from a pulsed laser beam generator through an irradiation optical system at a predetermined condensing point, and irradiating the pulsed laser beam to the high-speed particle generating target that is set at the predetermined condensing point, the method including a first step of preparing a reference data, a second step of measuring the wave front of the pulsed laser beam, and a third step of compensating the wave front of the pulsed laser beam based on the reference data.
摘要翻译：本发明涉及一种高速粒子产生方法等，用于通过将脉冲激光束与高速粒子产生的表面上的微点集中而从高速粒子产生靶产生高速粒子目标。高速粒子产生方法是通过在脉冲激光束发生器产生的脉冲激光束通过照射光学系统在预定的聚光点聚光并将脉冲激光束照射到高速粒子发生方法，设定在所述规定的聚光点的高速粒子产生目标，所述方法包括准备基准数据的第一步骤，测量所述脉冲激光束的波前的第二步骤，以及补偿所述脉冲激光束的波前的第三步骤，基于参考数据的脉冲激光束。

2. 发明申请

US20060013269A1 Method for generating high-speed particle and system for generating high-speed particle 有权
标题翻译：用于生成高速粒子的方法和用于产生高速粒子的系统
公开(公告)号：US20060013269A1
公开(公告)日：2006-01-19
申请号：US10533441
申请日：2003-12-19
申请人： Hironori Takahashi , Takashi Inoue , Shinji Ohsuka , Yutaka Tsuchiya
发明人： Hironori Takahashi , Takashi Inoue , Shinji Ohsuka , Yutaka Tsuchiya
IPC分类号： H01S3/10
CPC分类号： G21G1/12 , A61N2005/1088 , H05H6/00
摘要： The present invention relates to a high-speed particle generating method and so on for generating high-speed particles from a high-speed particle generating target by condensing a pulsed laser beam to a micro-spot on the surface of a high-speed particle generating target. The high-speed particle generating method is a method that generates high-speed particles by condensing a pulsed laser beam generated from a pulsed laser beam generator through an irradiation optical system at a predetermined condensing point, and irradiating the pulsed laser beam to the high-speed particle generating target that is set at the predetermined condensing point, the method including a first step of preparing a reference data, a second step of measuring the wave front of the pulsed laser beam, and a third step of compensating the wave front of the pulsed laser beam based on the reference data.
摘要翻译：本发明涉及一种高速粒子产生方法等，用于通过将脉冲激光束与高速粒子产生的表面上的微点集中而从高速粒子产生靶产生高速粒子目标。高速粒子产生方法是通过在脉冲激光束发生器产生的脉冲激光束通过照射光学系统在预定的聚光点聚光并将脉冲激光束照射到高速粒子发生方法，设定在所述规定的聚光点的高速粒子产生目标，所述方法包括准备基准数据的第一步骤，测量所述脉冲激光束的波前的第二步骤，以及补偿所述脉冲激光束的波前的第三步骤，基于参考数据的脉冲激光束。

3. 发明授权

US5552716A Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 失效
标题翻译：定位用于测量电压的装置的电光探针的方法
公开(公告)号：US5552716A
公开(公告)日：1996-09-03
申请号：US213005
申请日：1994-03-14
申请人： Hironori Takahashi , Shinichiro Aoshima , Isuke Hirano , Yutaka Tsuchiya
发明人： Hironori Takahashi , Shinichiro Aoshima , Isuke Hirano , Yutaka Tsuchiya
IPC分类号： G01R19/00 , G01R31/302 , G01R31/308 , G01R29/12
CPC分类号： G01R31/308
摘要： An method of positioning an E-O probe applied to an apparatus for the measurement of voltage. In the first step, the relative position of the E-O probe against the magnifying optical system in the first condition of being focused the magnifying optical system on the base of the E-O probe, and the focal point difference between the focal plane of the magnifying optical system in the second condition that the E-O probe is substantially out of the optical path for observation of the surface of the device and the focal plane in the first condition are stored. The relative position and the focal point difference are fixed in the apparatus for the measurement of voltage regardless of the device to be measured. Next, in the second step, the focus of the magnifying optical system is adjusted to the observation position of the surface of the device in the second condition, and then in the third step, the magnifying optical system, the E-O probe, and the probe stage are separated from the device by the focal point difference stored in the first step by the Z-axis stage, and in the fourth step, the E-O probe is moved to the relative position of the E-O probe stored in the first step relative to the magnifying optical system by the probe stage.
摘要翻译：将用于测量电压的设备的E-O探头定位的方法。在第一步骤中，在将放大光学系统聚焦在EO探针的基座上的第一条件下，EO探针对放大光学系统的相对位置以及放大光学系统的焦平面之间的焦点差在第二条件下，EO探针基本上不在用于观察装置的表面的光路中，并且在第一条件下存储焦平面。无论要测量的装置如何，相对位置和焦点差都固定在用于测量电压的装置中。接下来，在第二步骤中，放大光学系统的焦点在第二条件下被调整到装置的表面的观察位置，然后在第三步骤中，放大光学系统，EO探针和探针通过Z轴级在第一步骤中存储的焦点差与装置分离阶段，并且在第四步骤中，将EO探针移动到相对于第一步骤中存储的EO探针的相对位置通过探针台放大光学系统。

4. 发明授权

US5164667A Voltage detecting device 失效
标题翻译：电压检测装置
公开(公告)号：US5164667A
公开(公告)日：1992-11-17
申请号：US619913
申请日：1990-11-30
申请人： Hironori Takahashi , Shinichiro Aoshima , Takuya Nakamura , Yutaka Tsuchiya
发明人： Hironori Takahashi , Shinichiro Aoshima , Takuya Nakamura , Yutaka Tsuchiya
IPC分类号： G01R1/07 , G01R15/24 , G01R19/155
CPC分类号： G01R1/071 , G01R15/242 , G01R19/155
摘要： A voltage detecting device using an electro-optical material with a refractive index which is changed by a voltage at a part of an object comprising a light source, comprises an electro-optical material for changing the optical path of the light beam from the light source in accordance with the refraction index of the electro-optical material and a slit or optical fiber extractor at a predetermined position at the output of the electro-optical material for extracting the quantity of light of the light beam at the predetermined position and a detector detecting a voltage at the part of the object from the quantity of light extracted.
摘要翻译：使用折射率由包含光源的物体的一部分的电压改变的电光材料的电压检测装置包括用于改变来自光源的光束的光路的电光材料根据电光材料的折射率和在电光材料的输出处的预定位置处的狭缝或光纤提取器，用于提取在预定位置处的光束的光量和检测器检测从提取的光量的物体的一部分的电压。

5. 发明授权

US4996475A Electro-optic voltage detector having a transparent electrode 失效
标题翻译：具有透明电极的电光电压检测器
公开(公告)号：US4996475A
公开(公告)日：1991-02-26
申请号：US200575
申请日：1988-05-31
申请人： Hironori Takahashi , Shinichiro Aoshima , Yutaka Tsuchiya
发明人： Hironori Takahashi , Shinichiro Aoshima , Yutaka Tsuchiya
IPC分类号： G01R1/07 , G01R15/24
CPC分类号： G01R1/071 , G01R15/242
摘要： A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of the electro-optic material which is caused by the voltage in the object, is detected as a change of polarization of a light beam passing through the electro-optic material. In order to accomplish precise detection of the voltage, a mirror in the form of a thin metal film or a multilayered dielectric film is disposed at the tip of electro-optic material and, at the same time, a transparent electrode is disposed on the side of electro-optic material opposite to the side where the mirror is disposed. As a result, lines of electric force produced by the voltage developing in the object are aligned in the electro-optic material parallel to the center line of the optical probe and the change in refractive index becomes uniform.

6. 发明授权

US4982151A Voltage measuring apparatus 失效
标题翻译：电压测量仪
公开(公告)号：US4982151A
公开(公告)日：1991-01-01
申请号：US390768
申请日：1989-08-08
申请人： Hironori Takahashi , Shinichiro Aoshima , Yutaka Tsuchiya
发明人： Hironori Takahashi , Shinichiro Aoshima , Yutaka Tsuchiya
IPC分类号： G01R19/00 , G01R1/07 , G01R15/24 , G02F1/03
CPC分类号： G01R15/242 , G01R1/071
摘要： A voltage measuring apparatus comprises an optical probe furnished with an electro-optic material whose refractive index is changed in accordance with a voltage developing in a given part of an object and an auxiliary electrode for terminating electric lines of force coming from the given part, a light source for producing light to be inputted to the electro-optic material, a light polarization detector for detecting a polarization state of output light from the electro-optic material, and a power source for applying a variable voltage to the auxiliary electrode. An absolute value of the voltage in the given part can be determined as a specific value of the variable voltage obtained when no change is detected in the polarization state of the output light.
摘要翻译：电压测量装置包括配备有电光材料的光学探针，该光学材料的折射率根据对象的给定部分中产生的电压而变化，以及用于终止来自给定部分的电力线的辅助电极，用于产生要输入到电光材料的光的光源，用于检测来自电光材料的输出光的偏振状态的光偏振检测器和用于向辅助电极施加可变电压的电源。可以将给定部分中的电压的绝对值确定为在输出光的偏振状态中检测不到变化时获得的可变电压的特定值。

7. 发明授权

US5625296A Electro-optic voltage measurement apparatus 失效
标题翻译：电光电压测量装置
公开(公告)号：US5625296A
公开(公告)日：1997-04-29
申请号：US597226
申请日：1996-02-06
申请人： Hironori Takahashi , Yutaka Tsuchiya , Takeshi Kamiya
发明人： Hironori Takahashi , Yutaka Tsuchiya , Takeshi Kamiya
IPC分类号： G01R15/24 , G01R19/00 , G01R31/302 , G01R31/311 , G02F1/01 , H01L21/66 , G01R31/308 , G01R31/02
CPC分类号： G01R31/311
摘要： A processing unit notifies a drive unit of a designated number N (=1, 2, . . . ). The drive unit supplies a drive signal of a frequency f.sub.0 to a target measurement device, and supplies a modulation signal of a frequency N.multidot.f.sub.0 +.DELTA.f to an optical modulator. In this state, a continuous emission light beam is emitted from a light source, incident on an E-O probe sequentially through a polarizer and a first optical system, influenced by a periodical voltage waveform generated at a target measurement portion at a fundamental period 1/f.sub.0 to modulate the polarized state, and output from the E-O probe. The optical signal whose polarized state is modulated is input to the optical modulator and modulated. Thereafter, a polarization direction is selected by an optical selection unit, and the optical signal is input to an photodetector 510 and heterodyne-detected. The processing unit reproduces the waveform of the voltage signal generated at the target measurement portion by calculation of Fourier transform on the basis of the obtained photodetection signal and displays the waveform.
摘要翻译：处理单元向驱动单元通知指定数量N（= 1,2，...）。驱动单元向目标测量装置提供频率f0的驱动信号，并将频率Nxf0 + DELTA f的调制信号提供给光调制器。在这种状态下，从光源发射连续发射光束，其依次通过偏振器和第一光学系统入射到EO探测器上，受到在基本周期1 / f0的目标测量部分产生的周期性电压波形的影响以调制极化状态，并从EO探头输出。将调制了偏振状态的光信号输入到光调制器并进行调制。此后，通过光学选择单元选择偏振方向，并且将光信号输入到光电检测器510并进行外差检测。处理单元通过基于获得的光电检测信号计算傅立叶变换来再现在目标测量部分产生的电压信号的波形，并显示波形。

8. 发明授权

US5237388A Polarized light measuring apparatus and phase plate measuring apparatus 失效
标题翻译：偏光测量装置和相板测量装置
公开(公告)号：US5237388A
公开(公告)日：1993-08-17
申请号：US762457
申请日：1991-09-19
申请人： Isuke Hirano , Hironori Takahashi , Tsuneyuki Urakami , Tamiki Takemori , Yutaka Tsuchiya , Shinichiro Aoshima
发明人： Isuke Hirano , Hironori Takahashi , Tsuneyuki Urakami , Tamiki Takemori , Yutaka Tsuchiya , Shinichiro Aoshima
IPC分类号： G01J4/00 , G01J4/04 , G01M11/02
CPC分类号： G01J4/04
摘要： Young's interferometer consisting of a single slit and a double slit member, and an analyzer are arranged along the axis of light to be measured. Parallel slits of the double slit member are provided with respective polarizers whose paralyzing directions are at .+-.45.degree. to the longitudinal direction of the parallel slits. The polarizing direction of the analyzer is set in parallel with the parallel slits. The incident light passes through Young's interferometer and the analyzer to form an interference fringe, which is detected by an image detector unit. An image analyzer unit produces an intensity profile of the interference fringe and determines the polarization state of the incident light, for instance, by comparing the produced intensity profile with conceivable profiles stored in advance.
摘要翻译：由单个狭缝和双缝隙构件组成的杨氏干涉仪和分析器沿着待测量的光轴设置。双缝构件的平行狭缝设置有各自的偏振器，其麻痹方向与平行狭缝的纵向方向成+/- 45度。分析仪的偏振方向与平行狭缝平行设置。入射光通过杨氏干涉仪和分析仪，形成一个由图像检测器单元检测的干涉条纹。图像分析器单元产生干涉条纹的强度分布并且确定入射光的偏振状态，例如通过将产生的强度分布与预先存储的可想到的曲线进行比较。

9. 发明授权

US5179565A Low noise pulsed light source utilizing laser diode and voltage detector device utilizing same low noise pulsed light source 失效
标题翻译：低噪声脉冲光源利用激光二极管和电压检测器使用同样的低噪声脉冲光源
公开(公告)号：US5179565A
公开(公告)日：1993-01-12
申请号：US710392
申请日：1991-06-05
申请人： Yutaka Tsuchiya , Shinichiro Aoshima , Hironori Takahashi , Takuya Nakamura
发明人： Yutaka Tsuchiya , Shinichiro Aoshima , Hironori Takahashi , Takuya Nakamura
IPC分类号： G01R15/22 , H01S5/062 , H01S5/0683
CPC分类号： G01R15/22 , H01S5/06835 , H01S5/06216
摘要： A low noise pulsed light source utilizing a laser diode for generating a short pulsed light of a high repetitive frequency. The low noise pulsed light source includes a laser diode drived by an electric pulse generator for emitting repetitive pulsed light; a current source for supplying a bias current to the laser diode; and a photodetector for detecting the repetitive pulsed light emitted from the laser diode; and control means. The control means modulates at least one of the bias current from the current source and the amplitude of a pulse signal generated from the electric pulse generator in accordance with an output signal from the photodetector such that the intensity of the pulsed light is kept unchanged and any noise involved in the same is reduce. A feedback system including the photodetector and the control means has a peak in its frequency characteristics within a frequency band for light detecting in a light measuring system utilizing the low noise pulsed light source.

10. 发明授权

US5128950A Low noise pulsed light source using laser diode 失效
标题翻译：低噪声脉冲光源使用激光二极管
公开(公告)号：US5128950A
公开(公告)日：1992-07-07
申请号：US560773
申请日：1990-07-31
申请人： Yutaka Tsuchiya , Hironori Takahashi , Takuya Nakamura
发明人： Yutaka Tsuchiya , Hironori Takahashi , Takuya Nakamura
IPC分类号： G01R15/24 , H01S5/0683
CPC分类号： G01R15/247 , H01S5/06835
摘要： A low noise pulsed light source using a laser diode for generating a short pulsed light of a high repetitive frequency. The low noise pulsed light source includes a laser diode drived by an electric pulse generator for emitting repetitive pulsed light; a current source for supplying a bias current to the laser diode; and a photodetector for detecting the repetitive pulsed light emitted from the laser diode; and control means. The control means modulates at least one of the bias current from the current source and the amplitude of a pulse signal generated from the electric pulse generator in accordance with an output signal from the photodetector such that the intensity of the pulsed light is kept unchanged and any noise involved in the same is reduced.

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