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    • 2. 发明授权
    • Voltage detection apparatus
    • 电压检测装置
    • US5583444A
    • 1996-12-10
    • US618406
    • 1996-03-19
    • Takuya NakamuraIsuke HiranoShinichiro AoshimaHironori TakahashiTsuneyuki Urakami
    • Takuya NakamuraIsuke HiranoShinichiro AoshimaHironori TakahashiTsuneyuki Urakami
    • G01R19/00G01R1/07G01R15/16G01R15/22G01R31/28G01R31/312G01R31/302
    • G01R1/071G01R31/312G01R15/22G01R15/241
    • This invention has as its object to provide a voltage measurement apparatus which has a compact probe unit, and which can perform a measurement in a non-contact manner. The voltage measurement apparatus includes detection means for detecting an electric field generated in a space by a voltage applied to the surface of a device to be measured, light-emitting means for modulating output light by superposing a detected signal obtained from the detection means on a bias current which is supplied to inductively radiate the output light, a constant current source for supplying the bias current to the light-emitting means, extraction means for extracting a signal component of the output light from the light-emitting means, and light-transmission means for guiding the output light from the light-emitting means to the extraction means, and measures the applied voltage to the surface of the device to be measured by bringing the detection means close to the device to be measured in a non-contact manner.
    • 本发明的目的是提供一种电压测量装置,其具有紧凑的探针单元,并且可以以非接触方式进行测量。 电压测量装置包括检测装置,用于通过施加到被测量装置的表面的电压来检测在空间中产生的电场;发光装置,用于通过将从检测装置获得的检测信号叠加在一个 提供用于感应放射输出光的偏置电流,用于向发光装置提供偏置电流的恒流源,用于从发光装置提取输出光的信号分量的提取装置,以及光传输 用于将来自发光装置的输出光引导到提取装置的装置,并且通过以非接触的方式使检测装置靠近被测量装置来测量施加到要测量装置的表面的电压。
    • 4. 发明授权
    • Voltage measuring apparatus having an electro-optic member
    • 具有电光元件的电压测量装置
    • US5444365A
    • 1995-08-22
    • US113239
    • 1993-08-30
    • Hironori TakahashiTsuneyuki UrakamiShinichiro AoshimaIsuke Hirano
    • Hironori TakahashiTsuneyuki UrakamiShinichiro AoshimaIsuke Hirano
    • G01R15/24G01R1/07G01R19/00G01R31/302G01R31/319G01R1/04
    • G01R1/071Y10S435/808
    • A change in voltage can be sensitively detected at a local part of a measured object. A set of laser medium and E-O probe are disposed between a pair of mirrors, a first one and a second one, forming a laser resonator. A linearly polarized light is emitted from the laser medium. The polarized light enters the E-O probe, and returns after being reflected by the second mirror. When a voltage is given to the E-O probe from the measured object, depending on the voltage, a refractive index of the E-O probe is changed, the light emitted from the E-O probe is ovally polarized, and a resonance status of the laser resonator then varies. Therefore, the light intensity emitted through the partially penetrating first mirror to the outside of the laser resonator corresponds to the voltage at the measured object in the proximity of the E-O probe. Consequently, a voltage distribution on the measured object such as IC with fine structures can be two-dimensionally detected.
    • 可以在测量对象的局部部分敏感地检测电压变化。 一组激光介质和E-O探头设置在一对反射镜之间,第一和第二反射镜形成激光谐振器。 从激光介质发射线偏振光。 偏振光进入E-O探头,并在被第二个反射镜反射之后返回。 当从测量对象向EO探针施加电压时,根据电压,EO探针的折射率改变,从EO探针发射的光被卵巢极化,然后激光谐振器的共振状态变化 。 因此,通过部分穿透的第一反射镜发射到激光谐振器的外部的光强度对应于E-O探头附近的测量对象处的电压。 因此,可以二维地检测诸如具有精细结构的IC的测量对象上的电压分布。
    • 5. 发明授权
    • Voltage detection apparatus
    • 电压检测装置
    • US5703491A
    • 1997-12-30
    • US703768
    • 1996-08-27
    • Takuya NakamuraIsuke HiranoShinichiro AoshimaHironori TakahashiTsuneyuki Urakami
    • Takuya NakamuraIsuke HiranoShinichiro AoshimaHironori TakahashiTsuneyuki Urakami
    • G01R19/00G01R1/07G01R15/16G01R15/22G01R31/28G01R31/312G01R31/032
    • G01R1/071G01R31/312G01R15/22G01R15/241
    • This invention has as its object to provide a voltage measurement apparatus which has a compact probe unit, and which can perform a measurement in a non-contact manner. The voltage measurement apparatus includes detection means for detecting an electric field generated in a space by a voltage applied to the surface of a device to be measured, light-emitting means for modulating output light by superposing a detected signal obtained from the detection means on a bias current which is supplied to inductively radiate the output light, a constant current source for supplying the bias current to the light-emitting means, extraction means for extracting a signal component of the output light from the light-emitting means, and light-transmission means for guiding the output light from the light-emitting means to the extraction means, and measures the applied voltage to the surface of the device to be measured by bringing the detection means close to the device to be measured in a non-contact manner.
    • 本发明的目的是提供一种电压测量装置,其具有紧凑的探针单元,并且可以以非接触方式进行测量。 电压测量装置包括检测装置,用于通过施加到被测量装置的表面的电压来检测在空间中产生的电场;发光装置,用于通过将从检测装置获得的检测信号叠加在一个 提供用于感应放射输出光的偏置电流,用于向发光装置提供偏置电流的恒流源,用于从发光装置提取输出光的信号分量的提取装置,以及光传输 用于将来自发光装置的输出光引导到提取装置的装置,并且通过以非接触的方式使检测装置靠近被测量装置来测量施加到要测量装置的表面的电压。
    • 7. 发明授权
    • Optical apparatus
    • 光学仪器
    • US5307199A
    • 1994-04-26
    • US735792
    • 1991-07-25
    • Tsuneyuki UrakamiShinichiro AoshimaYutaka Tsuchiya
    • Tsuneyuki UrakamiShinichiro AoshimaYutaka Tsuchiya
    • G02F1/29G02F1/01G02F1/03
    • G02F1/293
    • The optical apparatus includes first and second deflection members, a mask, a pumping light source, and a controller. The first and second deflection members are formed of nonlinear optical material whose refractive index is changed upon light radiation. The mask is arranged on an optical path extending from a front side of the first deflection member to a rear side of a second deflection member. The mask has a predetermined transmission pattern. The pumping light source radiates first and second beams on predetermined regions of the first and second deflection members. This changes the refractive indices of the predetermined regions to bend the optical path. The controller variably controls the intensity of the first and second beams.
    • 光学装置包括第一和第二偏转构件,掩模,泵浦光源和控制器。 第一偏转构件和第二偏转构件由折射率在光辐射下变化的非线性光学材料形成。 掩模布置在从第一偏转构件的前侧延伸到第二偏转构件的后侧的光路上。 掩模具有预定的传输图案。 泵浦光源在第一和第二偏转构件的预定区域上辐射第一和第二光束。 这改变了预定区域的折射率以弯曲光路。 控制器可变地控制第一和第二光束的强度。