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    • 1. 发明授权
    • Method for generating high-speed particle and system for generating high-speed particle
    • 用于生成高速粒子的方法和用于产生高速粒子的系统
    • US07189976B2
    • 2007-03-13
    • US10533441
    • 2003-12-19
    • Hironori TakahashiTakashi InoueShinji OhsukaYutaka Tsuchiya
    • Hironori TakahashiTakashi InoueShinji OhsukaYutaka Tsuchiya
    • H01S3/10G21K1/00H05H1/24
    • G21G1/12A61N2005/1088H05H6/00
    • The present invention relates to a high-speed particle generating method and so on for generating high-speed particles from a high-speed particle generating target by condensing a pulsed laser beam to a micro-spot on the surface of a high-speed particle generating target. The high-speed particle generating method is a method that generates high-speed particles by condensing a pulsed laser beam generated from a pulsed laser beam generator through an irradiation optical system at a predetermined condensing point, and irradiating the pulsed laser beam to the high-speed particle generating target that is set at the predetermined condensing point, the method including a first step of preparing a reference data, a second step of measuring the wave front of the pulsed laser beam, and a third step of compensating the wave front of the pulsed laser beam based on the reference data.
    • 本发明涉及一种高速粒子产生方法等,用于通过将脉冲激光束与高速粒子产生的表面上的微点集中而从高速粒子产生靶产生高速粒子 目标。 高速粒子产生方法是通过在脉冲激光束发生器产生的脉冲激光束通过照射光学系统在预定的聚光点聚光并将脉冲激光束照射到高速粒子发生方法, 设定在所述规定的聚光点的高速粒子产生目标,所述方法包括准备基准数据的第一步骤,测量所述脉冲激光束的波前的第二步骤,以及补偿所述脉冲激光束的波前的第三步骤, 基于参考数据的脉冲激光束。
    • 2. 发明申请
    • Method for generating high-speed particle and system for generating high-speed particle
    • 用于生成高速粒子的方法和用于产生高速粒子的系统
    • US20060013269A1
    • 2006-01-19
    • US10533441
    • 2003-12-19
    • Hironori TakahashiTakashi InoueShinji OhsukaYutaka Tsuchiya
    • Hironori TakahashiTakashi InoueShinji OhsukaYutaka Tsuchiya
    • H01S3/10
    • G21G1/12A61N2005/1088H05H6/00
    • The present invention relates to a high-speed particle generating method and so on for generating high-speed particles from a high-speed particle generating target by condensing a pulsed laser beam to a micro-spot on the surface of a high-speed particle generating target. The high-speed particle generating method is a method that generates high-speed particles by condensing a pulsed laser beam generated from a pulsed laser beam generator through an irradiation optical system at a predetermined condensing point, and irradiating the pulsed laser beam to the high-speed particle generating target that is set at the predetermined condensing point, the method including a first step of preparing a reference data, a second step of measuring the wave front of the pulsed laser beam, and a third step of compensating the wave front of the pulsed laser beam based on the reference data.
    • 本发明涉及一种高速粒子产生方法等,用于通过将脉冲激光束与高速粒子产生的表面上的微点集中而从高速粒子产生靶产生高速粒子 目标。 高速粒子产生方法是通过在脉冲激光束发生器产生的脉冲激光束通过照射光学系统在预定的聚光点聚光并将脉冲激光束照射到高速粒子发生方法, 设定在所述规定的聚光点的高速粒子产生目标,所述方法包括准备基准数据的第一步骤,测量所述脉冲激光束的波前的第二步骤,以及补偿所述脉冲激光束的波前的第三步骤, 基于参考数据的脉冲激光束。
    • 4. 发明授权
    • Charged particle guide apparatus and image viewing apparatus for charged
particle microscope using the same
    • 带电粒子引导装置和使用其的带电粒子显微镜的图像观察装置
    • US5811805A
    • 1998-09-22
    • US702183
    • 1996-08-23
    • Nobuyuki OsakabeJunji EndoTetsuji KodamaTsuneyuki UrakamiHiroshi TsuchiyaShinji Ohsuka
    • Nobuyuki OsakabeJunji EndoTetsuji KodamaTsuneyuki UrakamiHiroshi TsuchiyaShinji Ohsuka
    • H01J37/22H01J37/244H01J37/26
    • H01J37/22H01J37/244
    • An electron-microscope image viewing apparatus capable of measuring of a moving speed or a vibration frequency of an atomic structure, a magnetic structure, an electric structure or the like of a specimen even when the structure changes at a high rate. The apparatus includes a charged particle source for emitting charged particles, an illuminating electron lens system for illuminating a specimen with a beam of the charged particles, an image magnifying/projecting lens system for magnifying an image of the specimen formed by charged particles scattered upon transmission through the specimen and projecting the magnified image onto an image forming plane, at least one charged particle extracting means provided on the image forming plane of the image magnifying/projecting lens system for taking out the charged particles from a predetermined portion of the charged particle beam projected onto the image forming plane, at least one charged particle detector for detecting the charged particles taken out through the charged particle extracting means, and a signal processing means for processing a signal outputted from the charged particle detector.
    • 即使当结构以高速率变化时,也可以测量试样的原子结构,磁性结构,电结构等的移动速度或振动频率的电子显微镜图像观察装置。 该装置包括用于发射带电粒子的带电粒子源,用于用带电粒子束照射样本的照明电子透镜系统,用于放大由透射时散射的带电粒子形成的样本的图像的图像放大/投影透镜系统 通过样本并将放大图像投影到图像形成平面上,至少一个带电粒子提取装置,设置在图像放大/投影透镜系统的图像形成平面上,用于从带电粒子束的预定部分中取出带电粒子 投影到图像形成平面上的至少一个带电粒子检测器,用于检测通过带电粒子提取装置取出的带电粒子;以及信号处理装置,用于处理从带电粒子检测器输出的信号。
    • 5. 发明申请
    • PHOTODIODE ARRAY
    • 光斑阵列
    • US20130270666A1
    • 2013-10-17
    • US13881949
    • 2011-10-24
    • Kenichi SatoKazuhisa YamamuraShinji Ohsuka
    • Kenichi SatoKazuhisa YamamuraShinji Ohsuka
    • H01L27/144
    • H01L27/1446H01L27/146H01L27/14643H01L31/02027
    • This photodiode array 10 includes quenching resistors 7 which are connected in series to respective avalanche photodiodes APDs, a peripheral wiring WL which surrounds a region in which the plurality of avalanche photodiodes APDs are formed, and a plurality of relay wirings 8 which are electrically connected to the peripheral wiring WL, so as to respectively connect at least two places of the peripheral wiring WL. One of an anode and a cathode of each avalanche photodiode APD is electrically connected to any one of the relay wirings 8 via the quenching resistor 7, and the other of the anode and the cathode of each avalanche photodiode APD is electrically connected to another electrode 6 provided on a semiconductor substrate.
    • 该光电二极管阵列10包括与相应的雪崩光电二极管APD串联连接的淬火电阻器7,围绕形成有多个雪崩光电二极管APD的区域的外围布线WL,以及多个继电器布线8, 周边布线WL,以分别连接外围布线WL的至少两个位置。 每个雪崩光电二极管APD的阳极和阴极之一经由淬火电阻7与继电器布线8中的任何一个电连接,并且每个雪崩光电二极管APD的阳极和阴极中的另一个电连接到另一个电极6 设置在半导体基板上。
    • 7. 发明授权
    • Light measuring apparatus for quantifying photons
    • 用于量子光子的光测量装置
    • US5715049A
    • 1998-02-03
    • US748837
    • 1996-11-14
    • Shinji OhsukaHisayoshi Takamoto
    • Shinji OhsukaHisayoshi Takamoto
    • G01N21/64G01J1/02G01J1/44G01J11/00G01J1/46
    • G01J11/00
    • When incident light is incident to a photodetector, photoelectrons are emitted therefrom and then multiplied to output an electric current signal. This current signal is integrated over a predetermined period of time in an integrator to be converted to a voltage signal. This voltage signal is converted to a digital signal by an AD converter. This digital signal is supplied to a histogramming memory, which generates a pulse height distribution of voltage signal. Based on a pulse height distribution N(h) generated with incidence of measurement-object light to the photodetector, a pulse height distribution of single photoelectron events p.sub.1 (h) generated by a generator of pulse height distribution of single photoelectron events, and pulse height distributions of k-photoelectron events p.sub.k (h) (k=2, 3, . . . ) calculated and generated in a generator of pulse height distributions of k-photoelectron events, an estimating unit estimates a distribution of numbers of photoelectrons emitted with incidence of the measurement-object light to the photodetector, and thereby obtains the intensity of the measurement-object light.
    • 当入射光入射到光检测器时,从其发射光电子,然后相乘以输出电流信号。 该电流信号在积分器中在预定时间段内积分以被转换成电压信号。 该电压信号由AD转换器转换为数字信号。 该数字信号被提供给直方图存储器,其产生电压信号的脉冲高度分布。 基于通过测量对象光入射到光电检测器产生的脉冲高度分布N(h),由单个光电子事件的脉冲高度分布的发生器产生的单个光电子事件p1(h)的脉冲高度分布和脉冲高度 在k光电子事件的脉冲高度分布的发生器中计算和产生的k光电子事件pk(h)(k = 2,3,...)的分布,估计单元估计发射的光电子数量的分布 的测量对象光,并且由此获得测量对象光的强度。
    • 8. 发明授权
    • Photodiode array
    • 光电二极管阵列
    • US09184190B2
    • 2015-11-10
    • US13881949
    • 2011-10-24
    • Kenichi SatoKazuhisa YamamuraShinji Ohsuka
    • Kenichi SatoKazuhisa YamamuraShinji Ohsuka
    • H01L31/107H01L27/144H01L27/146H01L31/02
    • H01L27/1446H01L27/146H01L27/14643H01L31/02027
    • This photodiode array 10 includes quenching resistors 7 which are connected in series to respective avalanche photodiodes APDs, a peripheral wiring WL which surrounds a region in which the plurality of avalanche photodiodes APDs are formed, and a plurality of relay wirings 8 which are electrically connected to the peripheral wiring WL, so as to respectively connect at least two places of the peripheral wiring WL. One of an anode and a cathode of each avalanche photodiode APD is electrically connected to any one of the relay wirings 8 via the quenching resistor 7, and the other of the anode and the cathode of each avalanche photodiode APD is electrically connected to another electrode 6 provided on a semiconductor substrate.
    • 该光电二极管阵列10包括与相应的雪崩光电二极管APD串联连接的淬火电阻器7,围绕形成有多个雪崩光电二极管APD的区域的外围布线WL,以及多个继电器布线8, 周边布线WL,以分别连接外围布线WL的至少两个位置。 每个雪崩光电二极管APD的阳极和阴极之一经由淬火电阻7与继电器布线8中的任何一个电连接,并且每个雪崩光电二极管APD的阳极和阴极中的另一个电连接到另一电极6 设置在半导体基板上。
    • 10. 发明授权
    • Radiation imaging apparatus
    • 辐射成像装置
    • US4931647A
    • 1990-06-05
    • US186342
    • 1988-04-26
    • Teruo HirumaShinji Ohsuka
    • Teruo HirumaShinji Ohsuka
    • G01T1/20G01T1/28G01T1/29G03B42/02H04N5/32
    • H04N5/32G01T1/20G01T1/28
    • A radiation imaging apparatus comprising scintillators for converting radiation from a sample into scintillation light, image intensifiers for amplifying the scintillation light and forming an amplified image of the radiation, the image guides for directing the scintillation light to the respective image intensifiers. The observing field of a sample is conceptually partitioned into plural sections with each section corresponding to a respective one of the image intensifiers. One end of each image guide faces a respective section of the sample and the other end of each image guide is connected to a respective image intensifier.
    • 一种辐射成像装置,包括用于将来自样品的辐射转换成闪烁光的闪烁体,用于放大闪烁光的图像增强器和形成辐射的放大图像的图像引导器,用于将闪烁光引导到各个图像增强器。 样本的观测场在概念上被划分为多个部分,每个部分对应于图像增强器中的相应一个。 每个图像引导件的一端面向样品的相应部分,并且每个图像引导件的另一端连接到相应的图像增强器。