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    • 6. 发明授权
    • Method of positioning an electrooptic probe of an apparatus for the
measurement of voltage
    • 定位用于测量电压的装置的电光探针的方法
    • US5552716A
    • 1996-09-03
    • US213005
    • 1994-03-14
    • Hironori TakahashiShinichiro AoshimaIsuke HiranoYutaka Tsuchiya
    • Hironori TakahashiShinichiro AoshimaIsuke HiranoYutaka Tsuchiya
    • G01R19/00G01R31/302G01R31/308G01R29/12
    • G01R31/308
    • An method of positioning an E-O probe applied to an apparatus for the measurement of voltage. In the first step, the relative position of the E-O probe against the magnifying optical system in the first condition of being focused the magnifying optical system on the base of the E-O probe, and the focal point difference between the focal plane of the magnifying optical system in the second condition that the E-O probe is substantially out of the optical path for observation of the surface of the device and the focal plane in the first condition are stored. The relative position and the focal point difference are fixed in the apparatus for the measurement of voltage regardless of the device to be measured. Next, in the second step, the focus of the magnifying optical system is adjusted to the observation position of the surface of the device in the second condition, and then in the third step, the magnifying optical system, the E-O probe, and the probe stage are separated from the device by the focal point difference stored in the first step by the Z-axis stage, and in the fourth step, the E-O probe is moved to the relative position of the E-O probe stored in the first step relative to the magnifying optical system by the probe stage.
    • 将用于测量电压的设备的E-O探头定位的方法。 在第一步骤中,在将放大光学系统聚焦在EO探针的基座上的第一条件下,EO探针对放大光学系统的相对位置以及放大光学系统的焦平面之间的焦点差 在第二条件下,EO探针基本上不在用于观察装置的表面的光路中,并且在第一条件下存储焦平面。 无论要测量的装置如何,相对位置和焦点差都固定在用于测量电压的装置中。 接下来,在第二步骤中,放大光学系统的焦点在第二条件下被调整到装置的表面的观察位置,然后在第三步骤中,放大光学系统,EO探针和探针 通过Z轴级在第一步骤中存储的焦点差与装置分离阶段,并且在第四步骤中,将EO探针移动到相对于第一步骤中存储的EO探针的相对位置 通过探针台放大光学系统。
    • 8. 发明授权
    • Voltage measuring apparatus
    • 电压测量仪
    • US4982151A
    • 1991-01-01
    • US390768
    • 1989-08-08
    • Hironori TakahashiShinichiro AoshimaYutaka Tsuchiya
    • Hironori TakahashiShinichiro AoshimaYutaka Tsuchiya
    • G01R19/00G01R1/07G01R15/24G02F1/03
    • G01R15/242G01R1/071
    • A voltage measuring apparatus comprises an optical probe furnished with an electro-optic material whose refractive index is changed in accordance with a voltage developing in a given part of an object and an auxiliary electrode for terminating electric lines of force coming from the given part, a light source for producing light to be inputted to the electro-optic material, a light polarization detector for detecting a polarization state of output light from the electro-optic material, and a power source for applying a variable voltage to the auxiliary electrode. An absolute value of the voltage in the given part can be determined as a specific value of the variable voltage obtained when no change is detected in the polarization state of the output light.
    • 电压测量装置包括配备有电光材料的光学探针,该光学材料的折射率根据对象的给定部分中产生的电压而变化,以及用于终止来自给定部分的电力线的辅助电极, 用于产生要输入到电光材料的光的光源,用于检测来自电光材料的输出光的偏振状态的光偏振检测器和用于向辅助电极施加可变电压的电源。 可以将给定部分中的电压的绝对值确定为在输出光的偏振状态中检测不到变化时获得的可变电压的特定值。