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1. 发明授权

US07583096B2 Probing apparatus and probing method 失效
标题翻译：探测仪器和探测方法
公开(公告)号：US07583096B2
公开(公告)日：2009-09-01
申请号：US11747559
申请日：2007-05-11
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

2. 发明申请

US20070262783A1 PROBING APPARATUS AND PROBING METHOD 失效
标题翻译：探测装置和探测方法
公开(公告)号：US20070262783A1
公开(公告)日：2007-11-15
申请号：US11747559
申请日：2007-05-11
申请人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/02
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

3. 外观设计

USD592230S1 Wafer carrying-in/out machine 有权
标题翻译：晶圆进/出机
公开(公告)号：USD592230S1
公开(公告)日：2009-05-12
申请号：US29297744
申请日：2007-11-16
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
设计人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane

4. 发明授权

US08310261B2 Probing apparatus and probing method 失效
标题翻译：探测仪器和探测方法
公开(公告)号：US08310261B2
公开(公告)日：2012-11-13
申请号：US12488186
申请日：2009-06-19
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/20 , G01R31/10
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

5. 发明授权

US07887280B2 Processing apparatus 有权
标题翻译：处理装置
公开(公告)号：US07887280B2
公开(公告)日：2011-02-15
申请号：US11747646
申请日：2007-05-11
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/28
CPC分类号： H01L21/67775 , H01L21/67265 , H01L21/67766 , H01L21/68 , Y10S414/139
摘要： There is provided a processing apparatus capable of modifying an existing processing apparatus having a single loading port to one having dual loading ports by providing an additional loading port without increasing a foot print thereof and also capable of realizing a complete automation of a wafer transfer by utilizing an existing automatic transfer line. The processing apparatus includes a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon waters; a sub-chuck, disposed under the second loading port, for positioning the wafers; and a wafer transfer unit having a transfer arm for transferring the wafers between the sub-chuck and the prober chamber, the transfer arm being rotatable and movable vertically.
摘要翻译：提供了一种处理装置，其能够通过提供附加的加载端口而将具有单一加载端口的现有处理装置修改为具有双加载端口的处理装置，而不增加其脚印，并且还能够通过利用来实现晶片传送的完全自动化现有的自动传输线。所述加工设备包括装载室，所述装载室具有：第一和第二装载端口，其定位成在探测室侧面彼此间隔开，每个装载端口安装在水面上; 设置在所述第二装载口下方的用于定位所述晶片的副卡盘; 以及晶片转印单元，其具有用于在子卡盘和检测室之间传送晶片的转移臂，所述转移臂可旋转并可垂直移动。

6. 外观设计

USD607424S1 Wafer carrying-in/out apparatus 有权
标题翻译：晶圆进/出装置
公开(公告)号：USD607424S1
公开(公告)日：2010-01-05
申请号：US29266907
申请日：2006-10-02
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
设计人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane

7. 发明申请

US20070264104A1 PROCESSING APPARATUS 有权
标题翻译：加工设备
公开(公告)号：US20070264104A1
公开(公告)日：2007-11-15
申请号：US11747646
申请日：2007-05-11
申请人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
IPC分类号： B65G25/00 , B66C17/08
CPC分类号： H01L21/67775 , H01L21/67265 , H01L21/67766 , H01L21/68 , Y10S414/139
摘要： There is provided a processing apparatus capable of modifying an existing processing apparatus having a single loading port to one having dual loading ports by providing an additional loading port without increasing a foot print thereof and also capable of realizing a complete automation of a wafer transfer by utilizing an existing automatic transfer line. The processing apparatus includes a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon waters; a sub-chuck, disposed under the second loading port, for positioning the wafers; and a wafer transfer unit having a transfer arm for transferring the wafers between the sub-chuck and the prober chamber, the transfer arm being rotatable and movable vertically.
摘要翻译：提供了一种处理装置，其能够通过提供附加的加载端口而将具有单一加载端口的现有处理装置修改为具有双加载端口的处理装置，而不增加其脚印，并且还能够通过利用来实现晶片传送的完全自动化现有的自动传输线。所述加工设备包括装载室，所述装载室具有：第一和第二装载端口，其定位成在探测室侧面彼此间隔开，每个装载端口安装在水面上; 设置在所述第二装载口下方的用于定位所述晶片的副卡盘; 以及晶片转印单元，其具有用于在子卡盘和检测室之间传送晶片的转移臂，所述转移臂可旋转并可垂直移动。

8. 发明申请

US20090267626A1 PROBING APPARATUS AND PROBING METHOD 失效
标题翻译：探测装置和探测方法
公开(公告)号：US20090267626A1
公开(公告)日：2009-10-29
申请号：US12488186
申请日：2009-06-19
申请人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
发明人： Hiroki HOSAKA , Shuji Akiyama , Tadashi Obikane
IPC分类号： G01R31/02
CPC分类号： G01R31/2893
摘要： There is provided a probing apparatus capable of modifying an existing probing apparatus having a single loading port to one having dual loading ports while saving the space without increasing a foot print thereof and also capable of increasing an inspection efficiency by cooperating with an automatic transfer line for the apparatus having a single loading port. The probing apparatus includes a prober chamber in which a wafer is inspected and a loader chamber having: a first and a second loading ports positioned to be spaced apart from each other at the side of a prober chamber, each of the loading ports mounting thereon a cassette accommodating therein a plurality of waters; and a wafer transfer unit for transferring the wafers between the loading ports and the prober chamber. The loading ports are arranged along a route where the cassette is transferred by an automatic transfer device.
摘要翻译：提供了一种探测装置，其能够将具有单个装载端口的现有探测装置修改为具有双重加载端口的探测装置，同时节省空间而不增加其脚印，并且还能够通过与自动传送线协作来提高检查效率，该装置具有单个装载口。探测装置包括探测室，其中检查晶片，并且装载器室具有：第一和第二装载端口，定位成在探测室侧面彼此间隔开，其中每个装载端口安装在其上在其中容纳多个水的盒; 以及用于在装载端口和探测室之间传送晶片的晶片传送单元。装载端口沿着通过自动传送装置传送盒的路线布置。

9. 外观设计

USD602882S1 Wafer carrying-in/out apparatus 有权
标题翻译：晶圆进/出装置
公开(公告)号：USD602882S1
公开(公告)日：2009-10-27
申请号：US29322398
申请日：2008-08-04
申请人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane
设计人： Hiroki Hosaka , Shuji Akiyama , Tadashi Obikane

10. 发明授权

US07701236B2 Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer 失效
标题翻译：探针装置的每个检查单元设置有摄像单元以拍摄晶片的图像
公开(公告)号：US07701236B2
公开(公告)日：2010-04-20
申请号：US12120546
申请日：2008-05-14
申请人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
发明人： Shuji Akiyama , Tadashi Obikane , Masaru Suzuki , Yasuhito Yamamoto , Kazuya Yano , Yuji Asakawa , Kazumi Yamagata , Shigeki Nakamura , Eiichi Matsuzawa , Kazuhiro Ozawa , Fumito Kagami , Shinji Kojima
IPC分类号： G01R1/073 , G01R31/28
CPC分类号： G01R31/2893
摘要： A prove apparatus includes a first and a second loading port for mounting therein two carriers facing each other, a wafer transfer mechanism having a rotation center between the loading ports, and a first and a second inspection unit being symmetrical to each other and disposed in accordance with the arrangement of the loading ports. In this configuration, wafers are directly transferred between the carrier and a wafer chuck of the inspection unit by the wafer transfer mechanism. The wafer transfer mechanism has three arms for unloading two wafers from the carrier. The prove apparatus has a compact size and achieves a high throughput.
摘要翻译：证明装置包括：第一和第二装载端口，用于在其中安装两个彼此面对的载体;晶片传送机构，其具有在装载端口之间的旋转中心;以及第一和第二检查单元，彼此对称并且按照具有装载端口的布置。在这种结构中，通过晶片传送机构将晶片直接传送到检查单元的载体和晶片卡盘之间。晶片传送机构具有用于从载体卸载两个晶片的三个臂。证明设备具有紧凑的尺寸并且实现了高吞吐量。

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