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    • 3. 发明申请
    • STAGE APPARATUS AND ALIGNER
    • 阶段装置和对准器
    • US20100141923A1
    • 2010-06-10
    • US12525084
    • 2008-01-25
    • Youichi MotomuraToshiyuki KonoKeiichi Tanaka
    • Youichi MotomuraToshiyuki KonoKeiichi Tanaka
    • G03B27/58
    • F16F15/02F16F2224/0275G03F7/70716G03F7/70766
    • There is provided a stage apparatus at low cost by constituting a counter mass constituting a movable portion of the stage apparatus at low cost.In a stage apparatus used for fabrication or for inspection, by fastening two pieces of first frames (1) and two pieces of second frames (2) by bolts in a positional relationship of making the first frames (1) and the second frames (2) respectively opposed to each other, a counter mass constituting a movable portion of the stage apparatus is constituted, by attaching ceramic-made air pads (4) to air pad attaching faces respectively formed at upper faces and lower faces of two pieces of the first frames (1) on both sides in a length direction, four air bearings are constituted at four corners of the counter mass of the stage apparatus, and the counter mass is floated up by the four air bearings.
    • 通过以低成本构成构成舞台装置的可动部分的计数器块,以低成本提供了舞台装置。 在用于制造或检查的平台装置中,通过以使第一框架(1)和第二框架(2)的位置关系用螺栓紧固两个第一框架(1)和两个第二框架(2) ),通过将陶瓷制的气垫(4)附接到分别形成在两个第一部分的两个第一部分的上表面和下表面上的气垫安装面,构成台架装置的可移动部分的反质量块 在长度方向两侧的框架(1)中,四个空气轴承构成在平台装置的反质量块的四个角处,并且对质量由四个空气轴承浮起。