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    • 1. 发明申请
    • Method for making a ferroelectric memory cell in a ferroelectric memory device, and a ferroelectric memory device
    • 在铁电存储器件中制造铁电存储单元的方法和铁电存储器件
    • US20060073658A1
    • 2006-04-06
    • US11294392
    • 2005-12-06
    • Henrik LjungcrantzNiclas EdvardssonJohan CarlssonGoran Gustafsson
    • Henrik LjungcrantzNiclas EdvardssonJohan CarlssonGoran Gustafsson
    • H01L21/8242H01L21/20H01L21/00
    • H01L21/32051H01L27/11502
    • In a method for making ferroelectric memory cells in a ferroelectric memory device a first electrode comprising at least one metal layer and optionally at least one metal oxide layer is formed on a silicon substrate which has an optional insulating layer of silicon dioxide. A ferroelectric layer consisting of a thin film of ferroelectric polymer is formed on the top of the first electrode layer and at least a second electrode comprising at least one metal layer and at least one metal oxide layer is formed on the ferroelectric layer. The second electrode is deposited by thermal evaporation of a high-purity evaporation source from an effusion cell onto the ferroelectric layer in a vacuum chamber filled with a gas or a gas mixture. A ferroelectric memory device wherein the memory cell has been made with the above method, comprises at least a first and a second set of respectively parallel electrodes, wherein the electrodes in a set are provided orthogonally to the electrodes of a nearest following set and with memory cells formed in a ferroelectric layer provided between successive electrode sets, such that memory cells are defined in the crossings between the electrodes which contact the ferroelectric layer on each side thereof.
    • 在铁电存储器件中制造铁电存储单元的方法中,在具有任选的二氧化硅绝缘层的硅衬底上形成包括至少一个金属层和任选的至少一个金属氧化物层的第一电极。 在第一电极层的顶部形成由铁电聚合物薄膜构成的铁电层,并且在铁电层上形成至少包含至少一个金属层和至少一个金属氧化物层的第二电极。 通过在填充有气体或气体混合物的真空室中将高纯度蒸发源从渗出室热蒸发到铁电层上来沉积第二电极。 具有上述方法制造存储单元的铁电存储器件包括至少第一组和第二组分别平行的电极,其中一组中的电极与最接近的组的电极和记忆体正交地设置 形成在连续的电极组之间的铁电体层中形成的单元,使得存储单元被限定在与其每一侧接触铁电体层的电极之间的交叉中。
    • 4. 发明申请
    • Data Storage Device
    • 数据存储设备
    • US20080198644A1
    • 2008-08-21
    • US11917571
    • 2006-06-08
    • Per BromsChrister KarlssonGeirr I. LeistadPer HambergStaffan BjorklidJohan CarlssonGoran GustafssonHans Gude Gudesen
    • Per BromsChrister KarlssonGeirr I. LeistadPer HambergStaffan BjorklidJohan CarlssonGoran GustafssonHans Gude Gudesen
    • G11C11/00G11C7/00
    • G06K7/0021B82Y10/00G11B9/02G11B9/1454G11C11/22G11C11/5664G11C13/0009G11C13/0014G11C13/0016
    • In a non-volatile electric memory system a memory unit (4) and a read/write unit (11) are provided as physically separate units. The memory unit (10) is based on a memory material (4) that can be set to at least two distinct physical states by applying an electric field across the memory material. Electrode means and/or contact means are either provided in the memory unit or in the read/write unit and contact means are at least always provided in the read/write unit. Electrodes and contacts are provided in a geometrical arrangement, which defines geometrically one or more memory cells in the memory layer. Contact means in the read/write unit are provided connectable to driving, sensing and control means located in the read/write unit or in an external device connected with the latter. Establishing a physical contact between the memory unit and the read/write unit closes an electrical circuit over the addressed memory cell such that read, write or erase operations can be effected. The memory material of the memory unit can be a ferroelectric or electret material that can be polarized into two discernible polarization states, or it can be a material with a resistive impedance characteristic such that a memory cell of the material can be set to a specific stable resistance value by the application of an electric field.
    • 在非易失性电存储器系统中,存储器单元(4)和读/写单元(11)被提供为物理上分离的单元。 存储器单元(10)基于可通过在存储器材料上施加电场而被设置为至少两种不同物理状态的存储器材料(4)。 电极装置和/或接触装置被提供在存储器单元或读/写单元中,并且接触装置至少总是设置在读/写单元中。 电极和触点以几何布置提供,其几何地限定存储器层中的一个或多个存储器单元。 读/写单元中的接触装置可连接到位于读/写单元中的驱动,感测和控制装置或与其连接的外部设备。 在存储器单元和读/写单元之间建立物理接触关闭寻址的存储单元上的电路,从而可以实现读,写或擦除操作。 存储单元的存储材料可以是铁电或驻极体材料,其可以被极化成两个可识别的极化状态,或者它可以是具有电阻阻抗特性的材料,使得材料的存储单元可以被设置为特定的稳定 通过施加电场的电阻值。
    • 6. 发明申请
    • Organic electronic circuit and method for making the same
    • 有机电子电路及其制作方法
    • US20060091435A1
    • 2006-05-04
    • US11185860
    • 2005-07-21
    • Rickard LiljedahlGoran Gustafsson
    • Rickard LiljedahlGoran Gustafsson
    • H01L29/94
    • G11C11/22B82Y10/00
    • In an organic electronic circuit (C), particularly a memory circuit with an organic ferroelectric or electret material (2) the active material comprises fluorine atoms and consists of various organic materials. The active material is located between first and second electrode sets constituting respectively bottom and top electrodes (1a;1b) of the device. A cell with a capacitor-like structure is defined in the active material (2) and can be accessed for an addressing operation via the electrodes. At least one top electrode (1b) comprises a layer of gold in contact with active material. A second layer (12) on the top electrode (1b) comprises conducting material different from gold or can alternatively also be made of gold. A via connection (13) extends between the second electrode layer (12) and a bottom electrode (1a) or another electrode (1b) in the bottom electrode layer. In case the second electrode layer (12) is made of gold the via metal of the via connection can also be gold and integral with the second electrode layer (12). In a method for establishing a top via electrode connection in the device (M), a first top electrode layer of gold is deposited and a via hole etched therethrough and down to the bottom electrode layer, and via metal is deposited to form a via connection (13) and then a second top electrode layer (12) is deposited above the first electrode layer of gold and contacting the via connection.
    • 在有机电子电路(C)中,特别是具有有机铁电或驻极体材料的存储电路(2),活性材料包含氟原子并由各种有机材料组成。 活性材料位于构成装置的底部和顶部电极(1a,1b)的第一和第二电极组之间。 具有电容器状结构的电池被限定在活性材料(2)中,并且可以通过电极进行寻址操作。 至少一个顶部电极(1b)包括与活性材料接触的金属层。 顶部电极(1b)上的第二层(12)包括与金不同的导电材料,或者也可以由金制成。 通孔连接(13)在底部电极层中的第二电极层(12)和底部电极(1a)或另一个电极(1b)之间延伸。 在第二电极层(12)由金制成的情况下,通孔连接的通孔金属也可以是金并且与第二电极层(12)成一体。 在用于在器件(M)中建立顶部通孔电极连接的方法中,沉积金的第一顶部电极层,并且蚀刻通孔并向下蚀刻到底部电极层,并且通过金属沉积以形成通孔连接 (13),然后在金的第一电极层上方沉积第二顶电极层(12),并接触通孔连接。
    • 8. 发明授权
    • Organic electronic circuit and method for making the same
    • 有机电子电路及其制作方法
    • US07291859B2
    • 2007-11-06
    • US11185860
    • 2005-07-21
    • Rickard LiljedahlGoran Gustafsson
    • Rickard LiljedahlGoran Gustafsson
    • H01L35/24
    • G11C11/22B82Y10/00
    • In an organic electronic circuit, particularly memory circuit with an organic ferroelectric or electret material the active material comprises fluorine atoms and consists of various organic materials. The active material is located between first and second electrode sets constituting respectively bottom and top electrodes of the device. A cell with a capacitor like structure is defined in the active material and can be accessed for an addressing operation via the electrodes. At least one top electrode comprises a layer of gold in contact with active material. A second layer on the top electrode comprises conducting material different from gold or can alternatively also be made of gold. A via connection extends between the second electrode layer and a bottom electrode or another electrode in the bottom electrode layer. In case the second electrode layer is made of gold the via metal of the via connection can also be gold and integral with the second electrode layer. In a method for establishing a top via electrode connection in the device, a first top electrode layer of gold is deposited and a via hole etched therethrough and down to the bottom electrode layer, and via metal is deposited to form a via connection and then a second top electrode layer is deposited above the first electrode layer of gold and contacting the via connection.
    • 在有机电子电路中,特别是具有有机铁电或驻极体材料的存储电路,活性材料包含氟原子并由各种有机材料组成。 活性物质位于构成装置的底部和顶部电极的第一和第二电极组之间。 具有电容器结构的电池被定义在活性材料中,并且可以通过电极进行寻址操作。 至少一个顶部电极包括与活性材料接触的金属层。 顶部电极上的第二层包括与金不同的导电材料,或者也可以由金制成。 通孔连接在第二电极层和下电极层中的底电极或另一电极之间延伸。 在第二电极层由金制成的情况下,通孔连接的通孔金属也可以是金并且与第二电极层成一体。 在用于在器件中建立顶部通孔电极连接的方法中,沉积金的第一顶部电极层,并且蚀刻通孔并向下蚀刻到底部电极层,并且通过金属沉积以形成通孔连接,然后将 第二顶部电极层沉积在金的第一电极层上方并接触通孔连接。
    • 10. 发明授权
    • Method for manufacturing an optoelectrical component and an
optoelectrical component manufactured according to the method
    • 根据该方法制造的光电元件和光电元件的制造方法
    • US5930438A
    • 1999-07-27
    • US931304
    • 1997-09-16
    • Goran PalmskogOlle Jonny HagelGoran GustafssonPaul Eriksen
    • Goran PalmskogOlle Jonny HagelGoran GustafssonPaul Eriksen
    • G02B6/13G02B6/06G02B6/12G02B6/122G02B6/30G02B6/10
    • G02B6/30G02B6/1221
    • The optoelectrical components which up to now have been used in the fibre-optical region have had waveguides of quartz and glass with hermetic encapsulating, which components have had too high manufacturing costs for profitable use. Through making polymeric single mode (SM) waveguides from plastic, for example, benzocyclobutene polymer (BCB) a simple reliable and inexpensive concept for making waveguides can be obtained. Two of the commercially available grades of BCB/DOW Chemicals have furthermore a refractive index difference which permits manufacturing of buried waveguides with SM characteristics. These two types of BCB material have shown themselves to be especially usable for manufacturing of so-called buried SM waveguides: a heat curable grade (1,4) used for under- and over-cladding for waveguides and a photo-definable derivative (3) used as the waveguide material. Encapsulating of a waveguide chip can in this way be made with plastics, at the same time as the connector interface can be formed in the end surfaces of the components.
    • 目前已经在光纤区域中使用的光电组件已经具有石英和玻璃的波导,具有气密封装,这些部件具有太高的制造成本以获得有利的使用。 通过从塑料制造聚合单模(SM)波导,例如苯并环丁烯聚合物(BCB),可以获得制造波导的简单可靠且廉价的概念。 两种商业级BCB / DOW Chemicals还具有折射率差异,其允许制造具有SM特性的掩埋波导。 这两种类型的BCB材料已经显示出自己特别可用于制造所谓的掩埋SM波导:用于波导的低于和过度包覆的可热固化等级(1,4)和可光学定义的衍生物(3 )用作波导材料。 以这种方式,可以用塑料制造波导芯片的封装,同时可以在部件的端面中形成连接器接口。