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1. 发明专利

JP2005276425A Manufacturing method of thin film magnetic head 有权
标题翻译：薄膜磁头的制造方法
公开(公告)号：JP2005276425A
公开(公告)日：2005-10-06
申请号：JP2005080441
申请日：2005-03-18
申请人： Headway Technologies Inc , Sae Magnetics (Hk) Ltd , エスエイイーマグネティックス(エイチ.ケイ.)リミテッド , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , KAMIKAMA TAKEHIRO , ARAKI HIRONORI
IPC分类号： G11B5/127 , G11B5/187 , G11B5/31 , H04R31/00
CPC分类号： G11B5/1877 , G11B5/31 , Y10T29/49032 , Y10T29/49039 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film magnetic head capable of easily making write track width narrower. SOLUTION: This manufacturing method of a thin film magnetic head comprises the steps for forming a first magnetic layer; eliminating both sides of the first magnetic layer in the direction of track width so as to leave behind a prescribed residual region of the first magnetic layer; forming an insulating layer around the residual region of the first magnetic layer; forming a gap layer made of nonmagnetic material; forming a second magnetic pole layer magnetically connected to a first magnetic pole; and patterning the second magnetic layer by etching using a mask. Consequently, the insulating layer is mainly exposed from a region even though the region comparatively far from the second magnetic layer in the gap layer is eliminated. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够容易地使写入磁道宽度变窄的薄膜磁头的制造方法。解决方案：这种薄膜磁头的制造方法包括用于形成第一磁性层的步骤; 沿着磁道宽度的方向消除第一磁性层的两侧，以留下第一磁性层的规定的残留区域; 在所述第一磁性层的残留区域周围形成绝缘层; 形成由非磁性材料制成的间隙层; 形成磁性地连接到第一磁极的第二磁极层; 以及通过使用掩模的蚀刻图案化第二磁性层。因此，绝缘层主要从区域露出，即使在间隙层中与第二磁性层相对较远的区域被消除。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2004035999A Etching method for magnetic material film and method of producing thin film magnetic head 审中-公开
公开(公告)号：JP2004035999A
公开(公告)日：2004-02-05
申请号：JP2002308316
申请日：2002-10-23
申请人： Headway Technologies Inc , Sae Magnetics (Hk) Ltd , エスエーイーマグネティクス(エイチ.ケー.)リミティド , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ARAKI HIRONORI , KAMIKAMA TAKEHIRO
IPC分类号： C23C28/00 , C23F4/00 , G11B5/31 , G11B5/39 , H01F41/34
CPC分类号： B82Y25/00 , B82Y10/00 , C23F4/00 , G11B5/3116 , G11B5/313 , G11B5/3146 , G11B5/3163 , G11B5/3909 , G11B5/3967 , G11B2005/3996 , H01F41/34
摘要： PROBLEM TO BE SOLVED: To deposit a finely patterned magnetic material film. SOLUTION: In a thin film magnetic head, an upper magnetic pole layer 27 prescribing a record track width has a first layer 27a in contact with a record gap layer 25 and a second layer 27b arranged on the first layer 27a. The upper magnetic pole layer 27 is formed as follows. At first, a magnetic layer is formed on the record gap layer 25. Next, the second layer 27b is formed on the magnetic layer by a plating method. Then, the magnetic layer 26 is selectively etched by reactive ion etching with the second layer 27b as a mask, and the first layer 27a is formed. In the reactive ion etching, an etching gas comprising a halogen based gas and a carbon oxide based gas is used. COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2011044221A Method of manufacturing magnetic head for perpendicular magnetic recording including two side shields 有权
标题翻译：制造包括双面胶片在内的磁性记录磁头的方法
公开(公告)号：JP2011044221A
公开(公告)日：2011-03-03
申请号：JP2010054501
申请日：2010-03-11
申请人： Headway Technologies Inc , Sae Magnetics (Hk) Ltd , ヘッドウェイテクノロジーズインコーポレイテッド , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ISHIZAKI KAZUO , ARAKI HIRONORI , ITO HIROYUKI , TANEMURA SHIGEKI , IIJIMA ATSUSHI
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To attain an accurate alignment of a pole layer and two side shields with respect to each other, a control of respective shapes of the pole layer and two side shields, and a reduction in the distance between the pole layer and each of the two side shields. SOLUTION: The magnetic head includes: the pole layer 12; two side shields 13C1, 13C2; and an encasing layer 25 having a pole groove 25a that accommodates the pole layer and the two side shields, and first and second side shield grooves 25b1, 25b2. In the method of manufacturing the magnetic head, the pole groove and first and second initial side shield grooves are formed in a nonmagnetic layer using an etching mask layer having first to third openings, and wall faces of first and second initial side shield grooves that are closer to the pole groove are etched by a dry etching to thereby complete the first and second side shield grooves 25b1, 25b2. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题为了获得相对于彼此的极性层和两个侧面屏蔽件的精确对准，控制极性层和两个侧面屏蔽件的各个形状以及极点之间的距离的减小层和两个侧面屏蔽中的每一个。解决方案：磁头包括：极层12; 两个侧屏13C1，13C2; 以及具有容纳极性层和两个侧面屏蔽的极槽25a以及第一和第二侧面屏蔽槽25b1,25b2的封装层25。在制造磁头的方法中，使用具有第一至第三开口的蚀刻掩模层将第一和第二初始侧屏蔽槽形成为非磁性层，第一和第二初始侧屏蔽槽的壁面为通过干蚀刻蚀刻更靠近极槽的凹槽，从而完成第一和第二侧屏蔽槽25b1,25b2。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2009151917A Thin film magnetic head 有权
标题翻译：薄膜磁头
公开(公告)号：JP2009151917A
公开(公告)日：2009-07-09
申请号：JP2008220311
申请日：2008-08-28
申请人： Headway Technologies Inc , Sae Magnetics (Hk) Ltd , ヘッドウェイテクノロジーズインコーポレイテッド , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , KAMIKAMA TAKEHIRO , ARAKI HIRONORI
IPC分类号： G11B5/31 , G11B5/127 , G11B5/187 , H04R31/00
CPC分类号： G11B5/1877 , G11B5/31 , Y10T29/49032 , Y10T29/49039 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To provide a thin film magnetic head capable of easily making write track width narrower. SOLUTION: The thin film magnetic head 40 has a structure wherein a first magnetic pole layer 10, a second magnetic pole layer 26, a recording gap layer 25 and a thin film coil 116 are layered. The first (lower) magnetic pole layer 10 and the second (upper) magnetic pole layer 26 are magnetically connected and have a fourth lower magnetic pole part 10d and a first upper magnetic pole part 26a, respectively. The thin film coil 116 has a first conduction part 112 and a second conduction part 111, the second conduction part 111 is disposed between the lower magnetic pole layer 10 and the first conduction part 112 and the lower magnetic pole layer 10 and the first conduction part 112 come in contact with the second conduction part 111 via an insulating film 15 for separation. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够容易地使写入轨道宽度变窄的薄膜磁头。解决方案：薄膜磁头40具有层叠第一磁极层10，第二磁极层26，记录间隙层25和薄膜线圈116的结构。第一（下）磁极层10和第二（上）磁极层26磁性连接，并且分别具有第四下磁极部10d和第一上磁极部26a。薄膜线圈116具有第一导电部分112和第二导电部分111，第二导电部分111设置在下磁极层10和第一导电部分112之间，下磁极层10和第一导电部分 112经由用于分离的绝缘膜15与第二导电部111接触。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2005116090A Thin-film magnetic head, magnetic recording device using the same, and manufacturing method thereof 审中-公开
标题翻译：薄膜磁头，使用该磁头的磁记录装置及其制造方法
公开(公告)号：JP2005116090A
公开(公告)日：2005-04-28
申请号：JP2003350587
申请日：2003-10-09
申请人： Headway Technol Inc , Sae Magnetics (Hk) Ltd , エスエーイーマグネティクス(エイチ.ケー.)リミティド , ヘッドウェイ・テクノロジーズ・インコーポレーテッドHeadway Technologies,Inc.
发明人： SASAKI YOSHITAKA , KAMIKAMA TAKEHIRO , ITO HIROYUKI , ISHIZAKI KAZUO , TANEMURA SHIGEKI , ARAKI HIRONORI
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/3123 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To provide a thin-film magnetic head that copes with high recording aerial density of at least 100 (Gb/p), ensures sufficient overwrite characteristics even though a track width is narrow, and also copes with a high frequency having a yoke length of 5.5 μm or smaller, and also to provide a magnetic recording device thereof and a method for manufacturing the magnetic recording device. SOLUTION: A second yoke section (a third magnetic film) 222 positioned at an upper portion includes: a wide portion 223; a narrow portion 224; and a inclined flare section 225. The wide portion 223 has a flat surface and is connected to a first magnetic film 211 by back gap sections 216-218 at the back side with a medium facing surface as a reference. The narrow portion 224 composes a second pole section and has a surface existing at a position that is lower than the surface of the wide portion 223. The inclined flare section 225 continues to incline toward the surface of the wide portion 223 from the surface of the narrow portion 224, and the width of the inclined flare portion 225 is gradually increased. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种能够处理至少100（Gb / p）的高记录空中密度的薄膜磁头，即使轨道宽度窄，也能确保足够的重写特性，并且还可以应付磁轭长度为5.5μm以下的高频，以及磁记录装置以及磁记录装置的制造方法。位于上部的第二磁轭部（第三磁性膜）222包括：宽部223; 狭窄部分224; 和倾斜的扩口部分225.宽部分223具有平坦表面，并且通过后侧的后间隙部分216-218以介质面向表面作为基准连接到第一磁性膜211。窄部分224构成第二极部分，并且具有存在于比宽部分223的表面低的位置处的表面。倾斜的喇叭口部分225从宽的部分223的表面继续朝向宽部分223的表面倾斜窄部224，倾斜扩口部225的宽度逐渐增大。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2014203507A プラズモンジェネレータの製造方法有权
标题翻译： PLASMON发电机的制造方法
公开(公告)号：JP2014203507A
公开(公告)日：2014-10-27
申请号：JP2013223049
申请日：2013-10-28
申请人：ヘッドウェイテクノロジーズインコーポレイテッド , Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： TANEMURA SHIGEKI , SASAKI YOSHITAKA , ITO HIROYUKI , IKEGAWA YUKINORI , ARAKI HIRONORI , TOMITA SEIICHIRO
IPC分类号： G11B5/31 , G11B5/02
CPC分类号： G11B5/3163 , G11B5/314 , G11B5/6088 , G11B5/84 , G11B2005/0021 , Y10T29/49032
摘要：【課題】信頼性の高いプラズモンジェネレータを製造する。【解決手段】プラズモンジェネレータの製造方法は、金属多結晶体よりなり、後にプラズモンジェネレータとなるプラズモンジェネレータ予定部を含む初期膜501を形成する工程と、少なくともプラズモンジェネレータ予定部において、金属多結晶体を構成する複数の結晶粒が成長するように、加熱用光を用いて初期膜501を加熱する工程と、初期膜501の加熱を停止する工程と、加熱を停止する工程の後で、初期膜501を加工してプラズモンジェネレータを形成する工程とを備えている。プラズモンジェネレータを形成する工程は、プラズモンジェネレータ予定部に、近接場光を発生する前端面を形成する工程を含む。【選択図】図9
摘要翻译：要解决的问题：制造高可靠性等离子体发生器。解决方案：等离子体发生器的制造方法包括以下步骤：形成包括由金属多晶材料形成的待等离子体发生器部分的初始膜501和稍后成为等离子体发生器在至少等离子体发生器部分上使用加热光加热初始膜501，以便生长构成金属多晶材料的多个晶粒; 停止初始膜501的加热; 并且在停止加热的步骤之后处理初始膜501以形成等离子体激元发生器。形成等离子体发生器的步骤包括在待等离子体发生器部分上形成用于产生近场光的前端面的步骤。

7. 发明专利

JP2013229088A Perpendicular magnetic recording head with magnetic return path section 有权
标题翻译：具磁性返回路段的全磁性记录头
公开(公告)号：JP2013229088A
公开(公告)日：2013-11-07
申请号：JP2012274306
申请日：2012-12-17
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド , Sae Magnetics(H K )Ltd , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , ARAKI HIRONORI , TOMITA SEIICHIRO , SATO KAZUKI , TANEMURA SHIGEKI , SHIMIZU TATSUYA
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/17 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To avoid problems caused by a large area of an end face of a magnetic return path section, which is located on the rear side with respect to a main magnetic pole in a moving direction of a recording medium, being exposed on a medium facing surface.SOLUTION: A magnetic head includes a coil, a mail magnetic pole 15, a shield 16, a magnetic return path section 30, and an accommodating section 50, which are located above an upper surface 1a of a substrate 1. The accommodating section 50 accommodates at least a portion of the magnetic return path section 30. The magnetic return path section 30 is located between the main magnetic pole 15 and the upper surface 1a of the substrate 1 and connects a portion of the main magnetic pole 15 away from a medium facing surface 80 with the shield 16 to form a space for a portion of the coil to pass through. The accommodating section 50 includes an intervening section 50A which stands between the magnetic return path section 30 and the medium facing surface 80, and the intervening section 50A has a sloped surface 50Aa facing the magnetic return path section 30. The magnetic return path section 30 includes a sloped section 31B which is located between a portion of the coil and the sloped surface 50Aa and extending along the sloped surface 50Aa.
摘要翻译：要解决的问题：为了避免在记录介质的移动方向上相对于主磁极位于后侧的磁性返回路径部分的大面积面积引起的问题被暴露在面向介质的表面。解决方案：磁头包括位于基板1的上表面1a上方的线圈，邮磁磁极15，屏蔽层16，磁返回路径部分30和容纳部分50。容纳部50容纳回磁通路部30的至少一部分。磁返回路径部30位于主磁极15与基板1的上表面1a之间，并且将主磁极15的一部分远离具有屏蔽16的介质面向表面80，以形成用于线圈的一部分通过的空间。容纳部分50包括位于磁返回路径部分30和介质相对表面80之间的中间部分50A，并且中间部分50A具有面向磁返回路径部分30的倾斜表面50Aa。磁返回路径部分30包括位于线圈的一部分和倾斜表面50Aa之间并沿着倾斜表面50Aa延伸的倾斜部分31B。

8. 发明专利

JP2013065389A Method of manufacturing plasmon generator 有权
标题翻译：制造等离子发生器的方法
公开(公告)号：JP2013065389A
公开(公告)日：2013-04-11
申请号：JP2012097331
申请日：2012-04-23
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI , SATO KAZUKI , YASUDA KAZUMASA
IPC分类号： G11B5/31 , G11B5/02 , G11B7/22
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To manufacture a plasmon generator whose front end face including a near-field light generating part is small in width.SOLUTION: A plasmon generator 50 includes a propagation part 51 for propagating a surface plasmon. The propagation part 51 has a bottom surface 51a, a top surface 51b, a first side surface 51c, a second side surface 51d and a front end face 51e. The front end face 51e includes a near-field light generating part 51g. A method of manufacturing the plasmon generator 50 includes the steps of: forming a base part; forming a metal film that is to later become the plasmon generator; and forming a filler layer. The base part includes a base surface and a protruding part that protrudes from the base surface. The protruding part has a top surface that is different in level from the base surface, and a first sidewall 241Pb connecting the top surface of the protruding part to the base surface. The metal film includes an adhesion part adhering to the first sidewall 241Pb. The filler layer has a second sidewall disposed such that the adhesion part is interposed between the first sidewall 241Pb and the second sidewall.
摘要翻译：要解决的问题：制造包括近场光产生部分的前端面的宽度小的等离子体激元发生器。解决方案：等离子体发生器50包括用于传播表面等离子体激元的传播部分51。传播部51具有底面51a，顶面51b，第一侧面51c，第二侧面51d和前端面51e。前端面51e包括近场光产生部51g。制造等离子体发生器50的方法包括以下步骤：形成基部; 形成以后成为等离子体发生器的金属膜; 并形成填料层。基部包括基部表面和从基部表面突出的突出部分。突出部分具有与基部表面不同的顶表面，以及将突出部分的顶表面连接到基底表面的第一侧壁241Pb。金属膜包括附着在第一侧壁241Pb上的粘接部。填充层具有第二侧壁，该第二侧壁设置成使得粘附部分插入在第一侧壁241Pb和第二侧壁之间。版权所有（C）2013，JPO＆INPIT

9. 发明专利

JP2011134428A Heat-assisted magnetic recording head with internal mirror 有权
标题翻译：热辅助磁记录头与内镜
公开(公告)号：JP2011134428A
公开(公告)日：2011-07-07
申请号：JP2010161422
申请日：2010-07-16
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ARAKI HIRONORI , SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ISHIZAKI KAZUO , HORINAKA TAKEHIRO
IPC分类号： G11B5/31
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/001 , G11B2005/0021 , Y10T29/49032
摘要： PROBLEM TO BE SOLVED: To prevent reduction in utilizing efficiency of light caused by an internal mirror. SOLUTION: A heat-assisted magnetic recording head has an internal mirror 30 that includes a reflecting film support body 27 and a reflecting film 35. The internal mirror 30 reflects light that comes from above a waveguide 26 so that the reflected light travels through the waveguide 26 toward a medium facing surface. The reflecting film support body 27 includes first and second inclined surfaces 272a and 272b. The reflecting film 35 includes first and second portions 351 and 352 that are located on the first and second inclined surfaces 272a and 272b, respectively. The step of forming the reflecting film support body 27 includes two-taper etching for an initial support body. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了防止由内部反射镜引起的光的利用效率的降低。解决方案：热辅助磁记录头具有包括反射膜支撑体27和反射膜35的内反射镜30.内反射镜30反射来自波导26上方的光，使得反射光行进通过波导26朝向面向介质的表面。反射膜支撑体27包括第一和第二倾斜表面272a和272b。反射膜35包括分别位于第一和第二倾斜表面272a和272b上的第一和第二部分351和352。形成反射膜支撑体27的步骤包括用于初始支撑体的双锥度蚀刻。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2011023093A Heat-assisted magnetic recording head with laser diode fixed to slider 有权
标题翻译：热辅助磁记录头，激光二极管固定在滑块上
公开(公告)号：JP2011023093A
公开(公告)日：2011-02-03
申请号：JP2010019274
申请日：2010-01-29
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI
IPC分类号： G11B5/31 , G11B5/02 , G11B5/60
CPC分类号： G11B5/314 , G11B5/4866 , G11B2005/001 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To provide a heat-assisted magnetic recording head that allows easy alignment of laser light with a waveguide while using an edge-emitting laser diode as the light source for emitting light that is used for generating near-field light.
SOLUTION: A heat-assisted magnetic recording head 200 includes a slider 201, an edge-emitting laser diode 202 fixed to the slider 201, and an external mirror 203 provided outside the slider 201. The slider 201 includes a magnetic pole, a waveguide, a near-field light generating element, and a substrate. The laser diode 202 includes: an active layer; an emitting end face that lies at an end in a direction parallel to the plane of the active layer and includes an emission part for emitting laser light; and a bottom surface that lies at an end in a direction perpendicular to the plane of the active layer. The laser diode is arranged so that the bottom surface faces the top surface 201c of the slider 201. The external mirror 203 reflects the laser light emitted from the emission part toward the waveguide.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种热辅助磁记录头，其允许在使用边缘发射激光二极管作为用于发射近场的光的光源时容易地对准激光与波导光。解决方案：热辅助磁记录头200包括滑块201，固定到滑块201的边缘发射激光二极管202和设置在滑块201外部的外部反射镜203.滑块201包括磁极，波导，近场光产生元件和衬底。激光二极管202包括：有源层; 位于与有源层的平面平行的方向上的端部的发射端面，并且包括用于发射激光的发射部分; 以及位于与有源层的平面垂直的方向上的端部的底表面。激光二极管被布置成使得底表面面向滑块201的顶表面201c。外反射镜203将从发射部分发射的激光朝向波导反射。版权所有（C）2011，JPO＆INPIT

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