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1. 发明专利

JP2014203507A プラズモンジェネレータの製造方法有权
标题翻译： PLASMON发电机的制造方法
公开(公告)号：JP2014203507A
公开(公告)日：2014-10-27
申请号：JP2013223049
申请日：2013-10-28
申请人：ヘッドウェイテクノロジーズインコーポレイテッド , Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： TANEMURA SHIGEKI , SASAKI YOSHITAKA , ITO HIROYUKI , IKEGAWA YUKINORI , ARAKI HIRONORI , TOMITA SEIICHIRO
IPC分类号： G11B5/31 , G11B5/02
CPC分类号： G11B5/3163 , G11B5/314 , G11B5/6088 , G11B5/84 , G11B2005/0021 , Y10T29/49032
摘要：【課題】信頼性の高いプラズモンジェネレータを製造する。【解決手段】プラズモンジェネレータの製造方法は、金属多結晶体よりなり、後にプラズモンジェネレータとなるプラズモンジェネレータ予定部を含む初期膜501を形成する工程と、少なくともプラズモンジェネレータ予定部において、金属多結晶体を構成する複数の結晶粒が成長するように、加熱用光を用いて初期膜501を加熱する工程と、初期膜501の加熱を停止する工程と、加熱を停止する工程の後で、初期膜501を加工してプラズモンジェネレータを形成する工程とを備えている。プラズモンジェネレータを形成する工程は、プラズモンジェネレータ予定部に、近接場光を発生する前端面を形成する工程を含む。【選択図】図9
摘要翻译：要解决的问题：制造高可靠性等离子体发生器。解决方案：等离子体发生器的制造方法包括以下步骤：形成包括由金属多晶材料形成的待等离子体发生器部分的初始膜501和稍后成为等离子体发生器在至少等离子体发生器部分上使用加热光加热初始膜501，以便生长构成金属多晶材料的多个晶粒; 停止初始膜501的加热; 并且在停止加热的步骤之后处理初始膜501以形成等离子体激元发生器。形成等离子体发生器的步骤包括在待等离子体发生器部分上形成用于产生近场光的前端面的步骤。

2. 发明专利

JP2014038103A Sensing unit 有权
标题翻译：感应单元
公开(公告)号：JP2014038103A
公开(公告)日：2014-02-27
申请号：JP2013197372
申请日：2013-09-24
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド , Sae Magnetics(H K )Ltd , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , SHIMIZU TATSUJI , HORINAKA TAKEHIRO , ISHIZAKI KAZUO , TANEMURA SHIGEKI
IPC分类号： G01P15/105 , H01L43/02 , H01L43/08
CPC分类号： G01P15/105 , G01P15/08 , G01P15/0802 , Y10T29/49002 , Y10T29/49007 , Y10T29/4913 , Y10T29/49146 , Y10T29/49171 , Y10T29/49176 , Y10T29/4922
摘要： PROBLEM TO BE SOLVED: To provide a sensing unit having a simple constitution, and a method for manufacturing the same.SOLUTION: In a sensing unit 10, a spring portion 30 having a support portion 32 and a movable portion 34 is conductive. A signal of a sensor portion 40 provided on the movable portion of the spring portion 30 is transmitted via the spring portion 30. The sensing unit 10 has a simple constitution with a small number of components, and it is not necessary to provide wiring for each sensor portion 40. As a result, reduction in a manufacturing cost, simplification of manufacturing or the like are achieved.
摘要翻译：要解决的问题：提供具有简单结构的感测单元及其制造方法。解决方案：在感测单元10中，具有支撑部分32和可移动部分34的弹簧部分30是导电的。设置在弹簧部分30的可动部分上的传感器部分40的信号通过弹簧部分30传递。传感单元10具有简单的结构，具有少量的部件，并且不需要为每个部件提供布线传感器部分40.结果，实现制造成本的降低，制造简化等。

3. 发明专利

JP2013171613A Heat-assisted magnetic recording head with heat sink layers 有权
标题翻译：热辅助记录头与散热片
公开(公告)号：JP2013171613A
公开(公告)日：2013-09-02
申请号：JP2012203820
申请日：2012-09-18
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド , Sae Magnetics(H K )Ltd , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , ARAKI HIRONORI , TANEMURA SHIGEKI , YASUDA KAZUMASA , FUJII TAKASHI
IPC分类号： G11B5/31 , G11B5/02
CPC分类号： G11B5/3136 , G11B5/1278 , G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To suppress a temperature rise of a plasmon generator and a main pole while protecting the main pole from heat generated by the plasmon generator.SOLUTION: A heat assisted magnetic recording head includes: a main pole 31 and a plasmon generator 50 aligned together along a traveling direction of a recording medium; a first heat sink layer 45 comprising two portions, each located on an opposite side of the plasmon generator 50 in a track width direction; a second heat sink layer 46 comprising two portions, each located on an opposite side of the main pole 31 in the track width direction; and a non-magnetic layer 30 located between the plasmon generator 50 and the main pole 31. The first and second heat sink layers 45, 46 are made of SiC or AlN. The non-magnetic layer 30 is made of a material having smaller thermal conductivity than alumina at 25°C.
摘要翻译：要解决的问题：为了抑制等离子体发生器和主极的温度升高，同时保护主极免受由等离子体激元产生的热量的影响。解决方案：热辅助磁记录头包括：主极31和等离子体激元发生器50 沿着记录介质的行进方向对齐在一起; 第一散热层45，包括两个部分，每个分别位于轨道宽度方向上的等离子体发生器50的相对侧上; 第二散热层46，其包括两个部分，每个分别位于主磁极31的沿磁道宽度方向的相对侧上; 以及位于等离子体发生器50和主极31之间的非磁性层30.第一和第二散热层45,46由SiC或AlN制成。非磁性层30由在25℃下具有比氧化铝更小的热导率的材料制成。

4. 发明专利

JP2013118037A Magnetic head for perpendicular magnetic recording having main pole and shield 有权
标题翻译：具有主要和屏蔽性能的磁性记录磁头
公开(公告)号：JP2013118037A
公开(公告)日：2013-06-13
申请号：JP2012139016
申请日：2012-06-20
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド , Sae Magnetics(H K )Ltd , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , SATO KAZUKI , TANEMURA SHIGEKI , ARAKI HIRONORI , IIJIMA ATSUSHI
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/17 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To prevent the skew-induced problems and provide improved write characteristics.SOLUTION: A main pole 15 has a top surface 15T and a bottom end 15L each including first, second, and third portions located contiguously in this order of increasing distance from a medium facing surface 100. A first virtual plane P1 and a second virtual plane P2, each being perpendicular to the medium facing surface 100 and to a direction T of travel of a recording medium, are assumed. The first virtual plane P1 passes through an end of an end face of the main pole 15 located on the medium facing surface 100, in which the end is located forward in the direction T of travel of the recording medium. The second virtual plane P2 passes through an end of the end face of the main pole 15, in which the end is located backward in the direction T of travel of the recording medium. The first and third portions are each inclined relative to the first and second virtual planes P1 and P2 and to the medium facing surface 100.
摘要翻译：要解决的问题：为了防止偏斜引起的问题并提供改进的写入特性。解决方案：主极15具有顶表面15T和底端15L，每个包括第一部分，第二部分和第三部分，该第一部分，第二部分和第三部分以与从面向介质的表面100增加距离的顺序连续地定位。第一虚拟平面P1和假设第二虚拟平面P2各自垂直于介质面向表面100和记录介质的行进方向T. 第一虚拟平面P1穿过位于介质对向表面100上的主极15的端面的端部，其中端部位于记录介质的行进方向T的前方。第二虚拟平面P2通过主极15的端面的端部，其中端部位于记录介质的行进方向T的后方。第一和第三部分各自相对于第一和第二虚拟平面P1和P2以及面向介质的表面100倾斜。（C）2013，JPO和INPIT

5. 发明专利

JP2013114740A Magnetic head for perpendicular magnetic recording having main pole and shield 有权
标题翻译：具有主要和屏蔽性能的磁性记录磁头
公开(公告)号：JP2013114740A
公开(公告)日：2013-06-10
申请号：JP2012234331
申请日：2012-10-24
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド , Sae Magnetics(H K )Ltd , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , SATO KAZUKI , TANEMURA SHIGEKI , ARAKI HIRONORI , SHIMIZU TATSUYA
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To allow a main pole to produce a write magnetic field of sufficient magnitude while allowing a reduction in length of a magnetic path that passes through the main pole and a return path section that is located on the front side of the main pole in a direction of travel of a recording medium.SOLUTION: A magnetic head includes a coil, a main pole 15, a write shield 16, and a return path section 40. The return path section 40 is located on the front side of the main pole 15 in a direction of travel of a recording medium to thereby define a space S1. The coil includes a first coil element 121A and a plurality of second coil elements 122A and 122B extending to pass through the space S1. The second coil elements 122A and 122B are located on the front side of the first coil element 121A in the direction of travel of the recording medium. The return path section 40 includes a first portion 40A located such that the first coil element 121A is interposed between the first portion 40A and a medium facing surface 100, and a second portion 40B located such that the second coil elements 122A and 122B are interposed between the second portion 40B and the medium facing surface 100.
摘要翻译：要解决的问题：为了允许主极产生足够大的写入磁场，同时允许减小通过主极的磁路的长度和位于前侧的返回路径部分的主极在记录介质的行进方向上。解决方案：磁头包括线圈，主极15，写入屏蔽16和返回路径部分40.返回路径部分40沿着行进方向位于主极15的前侧的记录介质，从而限定空间S1。线圈包括第一线圈元件121A和延伸穿过空间S1的多个第二线圈元件122A和122B。第二线圈元件122A和122B在记录介质的行进方向上位于第一线圈元件121A的前侧。返回路径部分40包括第一部分40A，第一部分40A被定位成使得第一线圈元件121A插入在第一部分40A和面向介质的表面100之间，第二部分40B被定位成使得第二线圈元件122A和122B介于第二部分40B和介质面向表面100.版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2012243384A Main magnetic pole forming method for heat assisted magnetic recording head 有权
标题翻译：用于热辅助磁记录头的主要磁极形成方法
公开(公告)号：JP2012243384A
公开(公告)日：2012-12-10
申请号：JP2012009717
申请日：2012-01-20
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ARAKI HIRONORI , SASAKI YOSHITAKA , ITO HIROYUKI , SATO KAZUKI , TANEMURA SHIGEKI , IKEGAWA YUKINORI
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , G11B5/3116 , G11B2005/0021 , Y10T29/4902 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043
摘要： PROBLEM TO BE SOLVED: To easily form a main magnetic pole of a shape where a rear end surface is vertical or almost vertical to a top surface of a substrate and, on a front end surface, a first end closer to the top surface of the substrate is smaller in width in a track width direction than a second end farther from the top surface of the substrate.SOLUTION: Using a first etching mask having a first opening, an initial housing layer 20P is etched by an RIE to form a groove part 20P1. Then, so as to enable the groove part 20P to be a housing part, using a second etching mask 54 having a second opening, a part of the initial housing layer 20P including the groove part 20P1 is etched by the RIE. Then, a main magnetic pole is formed in the housing part. The first etching mask includes first and second side walls facing each other with a first interval in a track width direction. The second etching mask 54 includes side walls 54a and 54b facing each other with a second interval larger than the first interval.
摘要翻译：要解决的问题：为了容易地形成后端表面垂直或几乎垂直于基板的顶表面的形状的主磁极，并且在前端表面上，靠近顶部的第一端基板的表面在轨道宽度方向上的宽度比距离基板的顶表面更远的第二端较小。解决方案：使用具有第一开口的第一蚀刻掩模，通过RIE蚀刻初始外壳层20P以形成凹槽部分20P1。然后，为了使凹槽部分20P成为壳体部分，使用具有第二开口的第二蚀刻掩模54，通过RIE蚀刻包括凹槽部分20P1的初始壳体层20P的一部分。然后，在壳体部分中形成主磁极。第一蚀刻掩模包括在轨道宽度方向上以第一间隔彼此面对的第一和第二侧壁。第二蚀刻掩模54包括彼此面对的具有大于第一间隔的第二间隔的侧壁54a和54b。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2011181163A Manufacturing method of near-field light generating element, and manufacturing method of thermally assisted magnetic recording head 有权
标题翻译：近场光产生元件的制造方法及热辅助磁记录头的制造方法
公开(公告)号：JP2011181163A
公开(公告)日：2011-09-15
申请号：JP2010233757
申请日：2010-10-18
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI
IPC分类号： G11B5/31
CPC分类号： G11B5/314 , B24B37/048 , G11B5/3163 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To manufacture a near-field light generating element having a front end face whose upper end has a sharp shape.
SOLUTION: An outer face of the near-field light generating element 16 includes slopes 16b and 16c, and an edge 16d that connects the slopes 16b and 16c. In a manufacturing method for the near-field light generating element 16, first, a polishing stop layer is formed on a metal layer, and the polishing stop layer and the metal layer are etched so that the slope 16b is formed on the metal layer. Then, a covered layer 18A which is formed of an inorganic material other than metal and has a lower etching speed than that of the metal layer in a subsequently performed second etching process is formed so as to cover the metal layer and the polishing stop layer. Then, the covered layer 18A is polished until the polishing stop layer is exposed. Then, by the second etching process, the polishing stop layer and the metal layer are etched using the covered layer 18A as an etching mask. By this, the slope 16c and the edge 16d are formed in the metal layer, and the near-field light generating element 16 is manufactured.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：制造具有上端具有尖锐形状的前端面的近场光产生元件。解决方案：近场光产生元件16的外表面包括斜面16b和16c以及连接斜面16b和16c的边缘16d。在近场光发生元件16的制造方法中，首先，在金属层上形成研磨停止层，并且在金属层上形成研磨停止层和金属层，使斜面16b形成。然后，形成覆盖金属层和抛光停止层的覆盖层18A，其由金属以外的无机材料形成，蚀刻速度低于金属层的蚀刻速度。然后，对被覆层18A进行研磨，直到研磨停止层露出为止。然后，通过第二蚀刻工艺，使用覆盖层18A作为蚀刻掩模蚀刻抛光停止层和金属层。由此，在金属层中形成斜面16c和边缘16d，制造近场光产生元件16。版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2011060408A Heat-assisted magnetic recording head with laser diode fixed to slider 有权
标题翻译：热辅助磁记录头，激光二极管固定在滑块上
公开(公告)号：JP2011060408A
公开(公告)日：2011-03-24
申请号：JP2010074164
申请日：2010-03-29
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI
IPC分类号： G11B5/31 , G11B5/02 , G11B5/60
CPC分类号： G11B5/314 , G11B5/105 , G11B5/6088 , G11B2005/001 , G11B2005/0021 , H01S5/0224 , H01S5/02272 , H01S5/0228 , H01S5/02292
摘要： PROBLEM TO BE SOLVED: To easily perform alignment of laser light with a waveguide, while using an edge-emitting laser diode and to shorten the path of the laser light from the laser-light emission part of the laser diode to the waveguide. SOLUTION: A heat-assisted magnetic recording head 200 includes a slider 201, an edge-emitting laser diode 202 and an external mirror 203. The slider 201 has a magnetic pole, a waveguide 26 and a near-field light generating element. The laser diode 202 includes an emitting end face 202c including laser light emission part and a mounting surface 202a facing the slider 201. The external mirror 203 includes a first reference surface 203c that faces the emitting end face 202c, a second reference surface 203d that is parallel to the mounting surface 202a, and a reflecting surface 203c that connects the first and second reference surfaces to each other and reflects the laser light emitted from the emission part toward the waveguide 26. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了容易地执行激光与波导的对准，同时使用边缘发射激光二极管并缩短从激光二极管的激光发射部分到波导的激光的路径。解决方案：热辅助磁记录头200包括滑块201，边缘发射激光二极管202和外反射镜203.滑块201具有磁极，波导26和近场光产生元件。激光二极管202包括包括激光发射部分和面向滑块201的安装表面202a的发射端面202c。外部反射镜203包括面向发射端面202c的第一参考表面203c，第二参考表面203d，平行于安装表面202a的反射表面203c和将第一和第二参考表面彼此连接并将从发射部分发射的激光反射到波导26的反射表面203c。（C）2011，JPO和INPIT

9. 发明专利

JP2011040160A Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：磁性磁记录制作方法
公开(公告)号：JP2011040160A
公开(公告)日：2011-02-24
申请号：JP2010228340
申请日：2010-10-08
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ARAKI HIRONORI , SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ISHIZAKI KAZUO
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To form a magnetic pole layer for preventing problems caused by skew, precisely defining track width, and improving recording characteristics. SOLUTION: The magnetic pole layer includes a track width defining section and a wide section. A storage layer includes a groove section which is disposed on a bottom formation layer 42, and stores the magnetic pole layer. The groove section includes a first portion for storing at least a portion of the track width defining section, and a second portion for storing at least a portion of the wide section. A method of manufacturing magnetic heads includes: a process for etching a non-magnetic layer 43P, such that an initial groove including the first portion is formed in the non-magnetic layer 43P; a process for forming an initial groove mask 54 covering the first portion; and a second etching process for etching the non-magnetic layer 43P, such that the groove section is completed. In the early stage of the second etching process, the initial groove mask 54 covers a portion of the upper surface of the bottom formation layer 42 in a region where the second portion is scheduled to be formed. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了形成用于防止由偏斜引起的问题的磁极层，精确地限定轨道宽度和改善记录特性。解决方案：磁极层包括轨道宽度限定部分和宽部分。存储层包括设置在底部形成层42上的槽部，并存储磁极层。槽部包括用于存储轨道宽度限定部分的至少一部分的第一部分和用于存储宽部分的至少一部分的第二部分。一种制造磁头的方法包括：用于蚀刻非磁性层43P的工艺，使得在非磁性层43P中形成包括第一部分的初始槽; 用于形成覆盖第一部分的初始凹槽掩模54的工艺; 以及用于蚀刻非磁性层43P的第二蚀刻工艺，使得槽部分完成。在第二蚀刻工艺的早期阶段，初始槽掩模54在第二部分被预定形成的区域中覆盖底部形成层42的上表面的一部分。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2011034669A Method of manufacturing magnetic head for vertical magnetic recording 有权
标题翻译：制造用于垂直磁记录的磁头的方法
公开(公告)号：JP2011034669A
公开(公告)日：2011-02-17
申请号：JP2010228339
申请日：2010-10-08
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , ARAKI HIRONORI , TANEMURA SHIGEKI , ISHIZAKI KAZUO , HORINAKA TAKEHIRO
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： PROBLEM TO BE SOLVED: To form a magnetic pole layer capable of avoiding a problem caused by a skew and improving recording characteristics.
SOLUTION: A magnetic head includes the magnetic pole layer and a housing layer 12 having a groove 12a for housing the magnetic pole layer. A method of manufacturing a magnetic head includes a process for forming a non-magnetic layer which becomes the housing layer 12 by forming the groove 12a later, a process for forming the groove 12a in the non-magnetic layer to make the non-magnetic layer serve as the housing layer 12, and a process for forming the magnetic pole layer housed in the groove 12a of the housing layer 12. The non-magnetic layer is formed by Al
2 O
3 . The process for forming the groove 12a in the non-magnetic layer includes a process for executing taper etching to the non-magnetic layer by reactive ion etching which uses an etching gas including at least BCl
3 and N
2 out of BCl
3 , Cl
2 , and N
2 .
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：形成能够避免由于偏斜引起的问题和提高记录特性的磁极层。解决方案：磁头包括磁极层和具有用于容纳磁极层的凹槽12a的壳体层12。一种制造磁头的方法包括一种通过稍后形成槽12a形成成为壳体层12的非磁性层的工艺，在非磁性层中形成凹槽12a的工艺，以使非磁性层用作壳体层12，以及用于形成容纳在壳体层12的凹槽12a中的磁极层的工艺。非磁性层由Al 2 < / SB>。用于在非磁性层中形成凹槽12a的工艺包括通过反应离子蚀刻对非磁性层进行锥形蚀刻的工艺，该方法使用至少包括BCl 3 SB 3和/ B> SB> 3 ，Cl 2 的SB> 2 和N 2 。版权所有（C）2011，JPO＆INPIT

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