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    • 5. 发明专利
    • Magnetic head for perpendicular magnetic recording having main pole and shield
    • 具有主要和屏蔽性能的磁性记录磁头
    • JP2013114740A
    • 2013-06-10
    • JP2012234331
    • 2012-10-24
    • Headway Technologies Incヘッドウェイテクノロジーズ インコーポレイテッドSae Magnetics(H K )Ltd新科實業有限公司SAE Magnetics(H.K.)Ltd.
    • SASAKI YOSHITAKAITO HIROYUKISATO KAZUKITANEMURA SHIGEKIARAKI HIRONORISHIMIZU TATSUYA
    • G11B5/31
    • G11B5/1278G11B5/3116G11B5/3146G11B5/315G11B5/3163
    • PROBLEM TO BE SOLVED: To allow a main pole to produce a write magnetic field of sufficient magnitude while allowing a reduction in length of a magnetic path that passes through the main pole and a return path section that is located on the front side of the main pole in a direction of travel of a recording medium.SOLUTION: A magnetic head includes a coil, a main pole 15, a write shield 16, and a return path section 40. The return path section 40 is located on the front side of the main pole 15 in a direction of travel of a recording medium to thereby define a space S1. The coil includes a first coil element 121A and a plurality of second coil elements 122A and 122B extending to pass through the space S1. The second coil elements 122A and 122B are located on the front side of the first coil element 121A in the direction of travel of the recording medium. The return path section 40 includes a first portion 40A located such that the first coil element 121A is interposed between the first portion 40A and a medium facing surface 100, and a second portion 40B located such that the second coil elements 122A and 122B are interposed between the second portion 40B and the medium facing surface 100.
    • 要解决的问题:为了允许主极产生足够大的写入磁场,同时允许减小通过主极的磁路的长度和位于前侧的返回路径部分 的主极在记录介质的行进方向上。 解决方案:磁头包括线圈,主极15,写入屏蔽16和返回路径部分40.返回路径部分40沿着行进方向位于主极15的前侧 的记录介质,从而限定空间S1。 线圈包括第一线圈元件121A和延伸穿过空间S1的多个第二线圈元件122A和122B。 第二线圈元件122A和122B在记录介质的行进方向上位于第一线圈元件121A的前侧。 返回路径部分40包括第一部分40A,第一部分40A被定位成使得第一线圈元件121A插入在第一部分40A和面向介质的表面100之间,第二部分40B被定位成使得第二线圈元件122A和122B介于 第二部分40B和介质面向表面100.版权所有(C)2013,JPO&INPIT
    • 6. 发明专利
    • Main magnetic pole forming method for heat assisted magnetic recording head
    • 用于热辅助磁记录头的主要磁极形成方法
    • JP2012243384A
    • 2012-12-10
    • JP2012009717
    • 2012-01-20
    • Headway Technologies Incヘッドウェイテクノロジーズ インコーポレイテッド
    • ARAKI HIRONORISASAKI YOSHITAKAITO HIROYUKISATO KAZUKITANEMURA SHIGEKIIKEGAWA YUKINORI
    • G11B5/31
    • G11B5/3163G11B5/3116G11B2005/0021Y10T29/4902Y10T29/49021Y10T29/49032Y10T29/49043
    • PROBLEM TO BE SOLVED: To easily form a main magnetic pole of a shape where a rear end surface is vertical or almost vertical to a top surface of a substrate and, on a front end surface, a first end closer to the top surface of the substrate is smaller in width in a track width direction than a second end farther from the top surface of the substrate.SOLUTION: Using a first etching mask having a first opening, an initial housing layer 20P is etched by an RIE to form a groove part 20P1. Then, so as to enable the groove part 20P to be a housing part, using a second etching mask 54 having a second opening, a part of the initial housing layer 20P including the groove part 20P1 is etched by the RIE. Then, a main magnetic pole is formed in the housing part. The first etching mask includes first and second side walls facing each other with a first interval in a track width direction. The second etching mask 54 includes side walls 54a and 54b facing each other with a second interval larger than the first interval.
    • 要解决的问题:为了容易地形成后端表面垂直或几乎垂直于基板的顶表面的形状的主磁极,并且在前端表面上,靠近顶部的第一端 基板的表面在轨道宽度方向上的宽度比距离基板的顶表面更远的第二端较小。 解决方案:使用具有第一开口的第一蚀刻掩模,通过RIE蚀刻初始外壳层20P以形成凹槽部分20P1。 然后,为了使凹槽部分20P成为壳体部分,使用具有第二开口的第二蚀刻掩模54,通过RIE蚀刻包括凹槽部分20P1的初始壳体层20P的一部分。 然后,在壳体部分中形成主磁极。 第一蚀刻掩模包括在轨道宽度方向上以第一间隔彼此面对的第一和第二侧壁。 第二蚀刻掩模54包括彼此面对的具有大于第一间隔的第二间隔的侧壁54a和54b。 版权所有(C)2013,JPO&INPIT
    • 7. 发明专利
    • Manufacturing method of near-field light generating element, and manufacturing method of thermally assisted magnetic recording head
    • 近场光产生元件的制造方法及热辅助磁记录头的制造方法
    • JP2011181163A
    • 2011-09-15
    • JP2010233757
    • 2010-10-18
    • Headway Technologies Incヘッドウェイテクノロジーズ インコーポレイテッド
    • SASAKI YOSHITAKAITO HIROYUKITANEMURA SHIGEKIARAKI HIRONORI
    • G11B5/31
    • G11B5/314B24B37/048G11B5/3163G11B2005/0021
    • PROBLEM TO BE SOLVED: To manufacture a near-field light generating element having a front end face whose upper end has a sharp shape.
      SOLUTION: An outer face of the near-field light generating element 16 includes slopes 16b and 16c, and an edge 16d that connects the slopes 16b and 16c. In a manufacturing method for the near-field light generating element 16, first, a polishing stop layer is formed on a metal layer, and the polishing stop layer and the metal layer are etched so that the slope 16b is formed on the metal layer. Then, a covered layer 18A which is formed of an inorganic material other than metal and has a lower etching speed than that of the metal layer in a subsequently performed second etching process is formed so as to cover the metal layer and the polishing stop layer. Then, the covered layer 18A is polished until the polishing stop layer is exposed. Then, by the second etching process, the polishing stop layer and the metal layer are etched using the covered layer 18A as an etching mask. By this, the slope 16c and the edge 16d are formed in the metal layer, and the near-field light generating element 16 is manufactured.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:制造具有上端具有尖锐形状的前端面的近场光产生元件。 解决方案:近场光产生元件16的外表面包括斜面16b和16c以及连接斜面16b和16c的边缘16d。 在近场光发生元件16的制造方法中,首先,在金属层上形成研磨停止层,并且在金属层上形成研磨停止层和金属层,使斜面16b形成。 然后,形成覆盖金属层和抛光停止层的覆盖层18A,其由金属以外的无机材料形成,蚀刻速度低于金属层的蚀刻速度。 然后,对被覆层18A进行研磨,直到研磨停止层露出为止。 然后,通过第二蚀刻工艺,使用覆盖层18A作为蚀刻掩模蚀刻抛光停止层和金属层。 由此,在金属层中形成斜面16c和边缘16d,制造近场光产生元件16。 版权所有(C)2011,JPO&INPIT
    • 9. 发明专利
    • Method of manufacturing magnetic head for perpendicular magnetic recording
    • 磁性磁记录制作方法
    • JP2011040160A
    • 2011-02-24
    • JP2010228340
    • 2010-10-08
    • Headway Technologies Incヘッドウェイテクノロジーズ インコーポレイテッド
    • ARAKI HIRONORISASAKI YOSHITAKAITO HIROYUKITANEMURA SHIGEKIISHIZAKI KAZUO
    • G11B5/31
    • G11B5/3116G11B5/1278G11B5/3163
    • PROBLEM TO BE SOLVED: To form a magnetic pole layer for preventing problems caused by skew, precisely defining track width, and improving recording characteristics. SOLUTION: The magnetic pole layer includes a track width defining section and a wide section. A storage layer includes a groove section which is disposed on a bottom formation layer 42, and stores the magnetic pole layer. The groove section includes a first portion for storing at least a portion of the track width defining section, and a second portion for storing at least a portion of the wide section. A method of manufacturing magnetic heads includes: a process for etching a non-magnetic layer 43P, such that an initial groove including the first portion is formed in the non-magnetic layer 43P; a process for forming an initial groove mask 54 covering the first portion; and a second etching process for etching the non-magnetic layer 43P, such that the groove section is completed. In the early stage of the second etching process, the initial groove mask 54 covers a portion of the upper surface of the bottom formation layer 42 in a region where the second portion is scheduled to be formed. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了形成用于防止由偏斜引起的问题的磁极层,精确地限定轨道宽度和改善记录特性。 解决方案:磁极层包括轨道宽度限定部分和宽部分。 存储层包括设置在底部形成层42上的槽部,并存储磁极层。 槽部包括用于存储轨道宽度限定部分的至少一部分的第一部分和用于存储宽部分的至少一部分的第二部分。 一种制造磁头的方法包括:用于蚀刻非磁性层43P的工艺,使得在非磁性层43P中形成包括第一部分的初始槽; 用于形成覆盖第一部分的初始凹槽掩模54的工艺; 以及用于蚀刻非磁性层43P的第二蚀刻工艺,使得槽部分完成。 在第二蚀刻工艺的早期阶段,初始槽掩模54在第二部分被预定形成的区域中覆盖底部形成层42的上表面的一部分。 版权所有(C)2011,JPO&INPIT
    • 10. 发明专利
    • Method of manufacturing magnetic head for vertical magnetic recording
    • 制造用于垂直磁记录的磁头的方法
    • JP2011034669A
    • 2011-02-17
    • JP2010228339
    • 2010-10-08
    • Headway Technologies Incヘッドウェイテクノロジーズ インコーポレイテッド
    • SASAKI YOSHITAKAITO HIROYUKIARAKI HIRONORITANEMURA SHIGEKIISHIZAKI KAZUOHORINAKA TAKEHIRO
    • G11B5/31
    • G11B5/3163G11B5/1278G11B5/3116
    • PROBLEM TO BE SOLVED: To form a magnetic pole layer capable of avoiding a problem caused by a skew and improving recording characteristics.
      SOLUTION: A magnetic head includes the magnetic pole layer and a housing layer 12 having a groove 12a for housing the magnetic pole layer. A method of manufacturing a magnetic head includes a process for forming a non-magnetic layer which becomes the housing layer 12 by forming the groove 12a later, a process for forming the groove 12a in the non-magnetic layer to make the non-magnetic layer serve as the housing layer 12, and a process for forming the magnetic pole layer housed in the groove 12a of the housing layer 12. The non-magnetic layer is formed by Al
      2 O
      3 . The process for forming the groove 12a in the non-magnetic layer includes a process for executing taper etching to the non-magnetic layer by reactive ion etching which uses an etching gas including at least BCl
      3 and N
      2 out of BCl
      3 , Cl
      2 , and N
      2 .
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:形成能够避免由于偏斜引起的问题和提高记录特性的磁极层。 解决方案:磁头包括磁极层和具有用于容纳磁极层的凹槽12a的壳体层12。 一种制造磁头的方法包括一种通过稍后形成槽12a形成成为壳体层12的非磁性层的工艺,在非磁性层中形成凹槽12a的工艺,以使非磁性层 用作壳体层12,以及用于形成容纳在壳体层12的凹槽12a中的磁极层的工艺。非磁性层由Al 2 < / SB>。 用于在非磁性层中形成凹槽12a的工艺包括通过反应离子蚀刻对非磁性层进行锥形蚀刻的工艺,该方法使用至少包括BCl 3 SB 3和/ B> SB> 3 ,Cl 2 的SB> 2 和N 2 。 版权所有(C)2011,JPO&INPIT