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    • 5. 发明授权
    • Methods of forming patterned masks
    • 形成图案化掩模的方法
    • US08476002B2
    • 2013-07-02
    • US13609027
    • 2012-09-10
    • Zishu ZhangAnton J. deVilliersRobert CarrFarrell Good
    • Zishu ZhangAnton J. deVilliersRobert CarrFarrell Good
    • G03F7/26
    • H01L21/02115H01L21/02274H01L21/0273H01L21/0337H01L21/31138
    • Some embodiments include methods in which spaced-apart first features are formed from a first material having a reflow temperature. Second material is formed along sidewalls of the first features, and third material is formed over the second material and the first features. The third material may be formed at a temperature above the reflow temperature of the first material, and the second material may support the first features so that the first features do not collapse even though they are exposed to such temperature. In some embodiments the third material has an undulating topography. Fourth material may be formed within the valleys of the undulating topography, and subsequently the first features may be removed together with at least some of the third material to leave a pattern comprising second features formed from the second material and pedestals formed from the fourth material.
    • 一些实施例包括其中间隔开的第一特征由具有回流温度的第一材料形成的方法。 第二材料沿着第一特征的侧壁形成,第三材料形成在第二材料上和第一特征上。 第三材料可以在高于第一材料的回流温度的温度下形成,并且第二材料可以支撑第一特征,使得第一特征即使暴露于这样的温度也不会折叠。 在一些实施例中,第三材料具有起伏的形貌。 第四材料可以形成在波状形貌的谷中,并且随后可以与第三材料中的至少一些一起去除第一特征以留下包括由第二材料形成的第二特征的图案和由第四材料形成的基座。
    • 9. 发明申请
    • Conical piston solids discharge and pumping centrifugal separator
    • 锥形活塞固体排放和泵送离心分离器
    • US20050233883A1
    • 2005-10-20
    • US10973949
    • 2004-10-26
    • Robert Carr
    • Robert Carr
    • B04B11/05B04B11/06B04B11/08
    • B04B11/05B04B11/06B04B15/06B04B2005/0485
    • A centrifugal separator includes a cylindrical bowl having a conical lower end with an opening through which feed liquid is injected during a feed mode of operation. The feed liquid is separated into centrate and solids, which accumulate along the inner surface of the bowl. A piston assembly includes a conical piston disposed within the cylindrical bowl, coupled to a piston actuator by a two-part piston shaft. During the feed mode of operation, the piston shaft is disconnected, and the piston is held in an uppermost position by hydraulic pressure from the feed liquid as the bowl is rotated, and a centrate valve on the piston is opened to permit the centrate to flow out to a centrate discharge port. After solids are separated and accumulated on an interior surface of the bowl, the rotation of the bowl is stopped and residual centrate is drained therefrom. In a solids discharge and pumping mode of operation, the piston shaft is connected and the piston actuator urges the piston axially downward, closing the centrate valve and forcing the accumulated solids from the bowl via the opening in the conical lower end of the bowl and into a passage leading to a solids outlet port.
    • 离心分离器包括具有锥形下端的圆柱形碗,其具有开口,在进料操作模式期间通过该开口喷射进料液体。 进料液体被分离成浓度和固体,其沿着碗的内表面积聚。 活塞组件包括设置在圆柱形碗内的锥形活塞,通过两部分活塞轴联接到活塞致动器。 在供料运行模式下,活塞轴断开,当缸体转动时,活塞通过液压从进料液中保持在最高位置,活塞上的中心阀打开,允许中心液流动 出口到中心排放口。 在将固体分离并积聚在碗的内表面之后,停止碗的旋转并从其中排出残留的中心液。 在固体排放和泵送操作模式中,活塞轴被连接并且活塞致动器沿轴向向下推动活塞,关闭中心阀并且迫使来自碗的积聚的固体通过碗的锥形下端中的开口进入 通往固体出口的通道。
    • 10. 发明申请
    • Methods of Forming Patterned Masks
    • 形成图案面具的方法
    • US20130004889A1
    • 2013-01-03
    • US13609027
    • 2012-09-10
    • Zishu ZhangAnton deVilliersRobert CarrFarrell Good
    • Zishu ZhangAnton deVilliersRobert CarrFarrell Good
    • G03F1/76G03F1/80G03F1/68
    • H01L21/02115H01L21/02274H01L21/0273H01L21/0337H01L21/31138
    • Some embodiments include methods in which spaced-apart first features are formed from a first material having a reflow temperature. Second material is formed along sidewalls of the first features, and third material is formed over the second material and the first features. The third material may be formed at a temperature above the reflow temperature of the first material, and the second material may support the first features so that the first features do not collapse even though they are exposed to such temperature. In some embodiments the third material has an undulating topography. Fourth material may be formed within the valleys of the undulating topography, and subsequently the first features may be removed together with at least some of the third material to leave a pattern comprising second features formed from the second material and pedestals formed from the fourth material.
    • 一些实施例包括其中间隔开的第一特征由具有回流温度的第一材料形成的方法。 第二材料沿着第一特征的侧壁形成,第三材料形成在第二材料上和第一特征上。 第三材料可以在高于第一材料的回流温度的温度下形成,并且第二材料可以支撑第一特征,使得第一特征即使暴露于这样的温度也不会折叠。 在一些实施例中,第三材料具有起伏的形貌。 第四材料可以形成在波状形貌的谷中,并且随后可以与第三材料中的至少一些一起去除第一特征以留下包括由第二材料形成的第二特征的图案和由第四材料形成的基座。