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1. 发明专利

JPH04205936A FORMED MEDIUM FOR TRANSFER AND PRODUCTION THEREOF 失效
公开(公告)号：JPH04205936A
公开(公告)日：1992-07-28
申请号：JP33707590
申请日：1990-11-30
申请人： HITACHI LTD
发明人： KATO KEIZO , HORIGOME SHINKICHI , SUZUKI MAKOTO , ITO SHO
IPC分类号： B29D17/00 , G11B7/26
摘要： PURPOSE:To reduce defects and to obtain a high-quality optical disk substrate by forming the rugged information pattern of a formed medium for transfer by etching. CONSTITUTION:A photoresist 3 is formed on a mirror-finished stamper with no information pattern, an information pattern 6 is formed in the photoresist 3 and etching is carried out to obtain a formed medium for transfer. Since the information pattern 6 is formed in the surface of the stamper by etching with the photoresist 3 as a mask, stress is not produced in the stamper and a high-quality patterned stamper free from a deposit causing defects is stably obtd. A high-quality optical disk substrate with a formed satisfactory information pattern can be obtd.

2. 发明专利

JPH03250434A TRACKING SYSTEM FOR OPTICAL DISK 失效
公开(公告)号：JPH03250434A
公开(公告)日：1991-11-08
申请号：JP4541190
申请日：1990-02-28
申请人： HITACHI LTD
发明人： OTAKE MASATOSHI , YONEZAWA SEIJI , SUKETA YASUSHI , ITO SHO
IPC分类号： G11B7/095
摘要： PURPOSE:To attain a composite tracking system always suppressing a tracking shear by delaying the convergence of a correction signal due to the OFF operation of a forecasting correcting system from the response speed of a wobbling tracking system. CONSTITUTION:A capacitor C and a resistor R connected to the output side of a switch 31 for turning on/off the forecasting correction coefficient of a feedforward system using a stored optimum correction value to be added to a push-pull tracking system act as a discharge loop having a time constant set up as a time delayed from the response speed of the wobbling tracking system only when the switch 31 is OFF and the correction coefficient of the forecasting correction system acts so as to be gradually converged always in the zero direction. Even if the response speed of the wobbling tracking system is slow, the correction coefficient is converted upon zero at a speed relatively slower than the response speed, so that a laser beam is always guided to the center of tracks.

3. 发明专利

JPH03177014A PHOTOLITHOGRAPHIC METHOD 失效
公开(公告)号：JPH03177014A
公开(公告)日：1991-08-01
申请号：JP31532289
申请日：1989-12-06
申请人： HITACHI LTD , HITACHI MAXELL
发明人： ITO SHO , FUJITA MASUMI
IPC分类号： G03F7/38 , G03F7/20 , H01L21/027 , H01L21/30
摘要： PURPOSE:To increase the density of a pattern by installing an optical filter, the transmittance of a central section of which is lowered, onto the pupil surface of a projection exposure device, forming an image on a wafer in an image including a higher-order diffraction image and using the reduction of the size of a zero-order diffraction image. CONSTITUTION:The light of a light source 1 is collected by a converging chain 2, and applied to a flies-eye-lens 3, and a light-source image 8 is formed. The image of the light-source image is formed onto a reticle 5, to which a pattern is shaped, by a condenser lens 4. The image of the reticle 5 is formed onto a wafer 7, to which a photo-resist film is shaped, by a projection optical system 6, and exposed. An optical filter 10 is mounted onto the pupil surface 9 of the projection optical system 6. A part in which a light non-transmitting section 13 is formed at a central section on a transparent substrate 12 is used as the optical filter 10. When the diameter of the filter 10 is represented by (a) and the diameter of the non-transmitting section in the center by r0, a super- resolution image can be formed onto the wafer by properly selecting the value of r0/a. Accordingly, a semiconductor device having the pattern having high density can be manufactured at low cost.

4. 发明专利

JPH01223649A MAGNETO-OPTICAL DISK CARRIER AND ITS MANUFACTURE 失效
公开(公告)号：JPH01223649A
公开(公告)日：1989-09-06
申请号：JP4744488
申请日：1988-03-02
申请人： HITACHI LTD
发明人： ITO SHO
IPC分类号： G11B11/10 , G11B11/105
摘要： PURPOSE:To eliminate the need of an uneven pattern and to improve the reliability and the productivity by using a magnetized pattern on a magneto-optical recording medium as a guide track, an address and clock signal information. CONSTITUTION:On a glass substrate 12, a photosensitive resin film 11 on which a guide track, an address and a clock signal consist of an uneven pattern is formed, and on this film, a conductive film 13 is formed. Subsequently, on the film 13, a magnetic film 14 of high magnetic permeability and high saturation magnetic flux density is formed, a backing plate 15 consisting of the same material is stuck to the film 14 and drawn out of the substrate 12 and the film 11, and a magnetization transfer use stamper 16 is generated. Next, a magneto-optical disk 17 is placed on a base 18 of a transfer device, the stamper 16 is attached to a base 21, and the stamper 16 is allowed to adhere closely to a magnetic recording film of the disk 17. In such a state, when a current is allowed to flow to a coil 20, a magnetic field generated thereby is concentrated on a projecting part of the stamper 16, and a magnetized pattern of a guide track, an address, etc. is formed on the disk 17. In such a way, deterioration of the recording film is decreased, and the reliability and the productivity are improved.

5. 发明专利

JPS6435244A RETARDATION MEASURING APPARATUS 失效
公开(公告)号：JPS6435244A
公开(公告)日：1989-02-06
申请号：JP19002587
申请日：1987-07-31
申请人： HITACHI LTD
发明人： ITO SHO , MIYAMURA YOSHINORI , ICHIKAWA MAGOI
IPC分类号： G01N21/21 , G11B7/26
摘要： PURPOSE:To measure retardation quickly, by a method wherein a ratio is determined between an amplitude of a component vibrating with the frequency doubling the rotation frequency of a rotary analyzer and an average DC value component to compute an arcsine value thereof and the results are multiplied by a measuring wavelength to be divided by 2pi. CONSTITUTION:After made parallel with a collimator 2, light from a light source 1 is turned to a linearly polarized light with a polarizer 3 and then, to a circularly polarized light passing through a 1/4 wavelength plate 4. The circularly polarized light passes through a sample 5 to be measured to be turned to an elliptically polarized light, which is made incident into an analyzer 6 turning at revolutions omega with the ongoing direction thereof as axis. The light is focused with a lens 7 onto a photo detector 8 to be converted into an electrical signal and AC and DC components are amplified separately with an AC amplifier 9 and a DC amplifier 10. Amplitude of the AC component is detected with a peak holding circuit 11 and the DC components is pick out with a low pass filter. A ratio is determined with a divider 13 between the results and an arcsine of the ratio is obtained with an arithmetic device 14 to be multiplied by lambda/2pi with an arithmetic device 15.

6. 发明专利

JPS62251717A DEVICE FOR CORRECTING DIRECTION OF LASER BEAM 失效
公开(公告)号：JPS62251717A
公开(公告)日：1987-11-02
申请号：JP9455886
申请日：1986-04-25
申请人： HITACHI LTD , HITACHI MAXELL
发明人： ITO SHO , HARA FUMIO , WATANABE HITOSHI , HAYAMA MASAFUMI
IPC分类号： G11B7/09 , G02B26/10
摘要： PURPOSE:To eliminate the necessity of any excessive optical system and make the design, assemblage, and adjustment of a precise optical working machine easier, by making parallel laser beams having fixed emitting directions and locations obtainable even when the emitting direction from a laser device varies. CONSTITUTION:Laser beams separated by a beam splitter 8 are converged on a two-dimensional position sensor 6 by a lens 7 and an output voltage is produced in accordance with the laser beam position on the sensor 6. The output voltage is compared with a reference voltage at a comparator circuit 5 and a two-axis driving mechanism 4 is driven by outputting a voltage proportional to the difference so as to move a lens 2 in order to make the emitting directions of the beams parallel with each other. The laser beams are further separated by another beam splitter 12 and irradiated upon another two-dimensional position sensor 11 and a voltage is outputted in accordance with the position of the laser beam on the sensor 11. A comparator circuit 10 compares the output voltage with a reference voltage and outputs a voltage proportional to the difference. The voltage drives a two-directional angle driving mechanism and inclines a beam shifter 3 against the direction of the laser beams so as to make the directions and positions of the passed laser beams constant.

7. 发明专利

JPS62246157A METHOD AND DEVICE FOR DEVELOPING OPTICAL DISK MASTER 失效
公开(公告)号：JPS62246157A
公开(公告)日：1987-10-27
申请号：JP8802586
申请日：1986-04-18
申请人： HITACHI LTD , HITACHI MAXELL
发明人： ITO SHO , YASUI TOSHIAKI
IPC分类号： G11B7/26 , G03F7/00 , G03F7/30
摘要： PURPOSE:To attain an excellent uniform development capacity and realize good reproducibility and easy handling by quickly moving a developing tank with an air cylinder and quickly immersing a photoresist disk in a developer to start development and tacking out the disk from the developer and pouring water onto the disk like a shower simultaneously to quickly stop development. CONSTITUTION:A glass disk 2 to which a photoresist film 1 to which a signal pattern is exposed is stuck is fixed onto a turntable 23 by vacuum. A shaft 5 starts to slowly rotate, and a photoresist disk 15 is completely immersed in a developer 16 to start development, and formation of a rugged pattern is started, and the diffracted light of the first order of an He-Ne laser light diffracted by this rugged pattern is made incident on a sensor 9. When a ratio of the output of the diffracted light sensor 9 to that of a light-transmissive sensor 8 reaches a certain value, discharge of the developer 16 is started, and a pure water 21 is poured onto the photoresist film 1 like a shower, and the photoresist disk 15 is put in pure water when the quantity of the pure water reaches a certain value.

8. 发明专利

JPS61224145A OPTICAL INFORMATION RECORDING AND REPRODUCING SYSTEM 失效
公开(公告)号：JPS61224145A
公开(公告)日：1986-10-04
申请号：JP6358785
申请日：1985-03-29
申请人： HITACHI LTD
发明人： YONEZAWA SEIJI , OTAKE MASATOSHI , ITO SHO , TSUYOSHI TOSHIAKI , ICHINO KAZUO , NAKAGAKI HARUSHIGE
IPC分类号： G11B7/00 , G11B7/0045 , G11B7/007 , G11B7/09
摘要： PURPOSE:To obtain an optical tracking device attaining accurate tracking by eliminating an offset (deviation component) produced by the deflection of a diffracted luminous flux on a photodetector face. CONSTITUTION:A pre-wobbling tracking pit 20 comprising one set or over of elliptic pits arranged to a header region on a disc while being shifted to the left/right of the track in advance is arranged. In the data recording/ reproduction, a tracking error signal by the pre-wobbling method with accurate deviation without offset from the track center of the light spot position is detected from the pre-wobbling pit 20 arranged to the header region and the error signal is used to correct a push-pull tracking error signal including the offset utilizing the distribution of diffracted light from a pre-group 15 having a depth of 1/8 wavelength. Thus, the light spot traces the track with high accuracy to record and reproduce the data.

9. 发明专利

JPS61120359A Optical disk replica 失效
标题翻译：光盘回复
公开(公告)号：JPS61120359A
公开(公告)日：1986-06-07
申请号：JP24065184
申请日：1984-11-16
申请人： Hitachi Ltd
发明人： MIYAMURA YOSHINORI , ITO SHO
IPC分类号： G11B7/24
摘要： PURPOSE: To decrease the eccentricity between the rugged pattern on a replica surface and central hole and to obtain a less eccentric optical replica by packing a resin around the central hole and curing the resin in the stage of manufacturing the replica.
CONSTITUTION: The rugged pattern corresponding to signals is provided to a pattern-constituting resin 3 on a substrate 2. A metallic plate of Al or the like which is opaque but if flat is usable in addition to optical transparent glass, etc. as the replica substrate 2. The formation of the pattern is executed by a 2P (photo-polymerization) method. A round-bar shaped centering jig 5 subjected to a release treatment at the surface is set at the center of the sub strate. The setting is executed by disposing the jig in such a manner that the center thereof matches nearly exactly with the center of the rugged pattern on a stamper 6. A photosetting resin or the like is cast to the region in the central part 4 of the substrate and is cured by exposure or heat treatment and thereafter the jig 5 is pulled to strip the replica 7.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：降低复制表面上凹凸图案与中心孔之间的偏心距，并通过在中心孔周围填充树脂并在制造复制品阶段固化树脂来获得较不偏心的光学复制品。构成：将对应于信号的粗糙图案提供给基板2上的图案构成树脂3.除了光学透明玻璃等之外，还可以使用不透明但平坦的Al等的金属板作为复制品基板2.通过2P（光聚合）法进行图案的形成。在表面的中心处设置经受表面剥离处理的圆棒状定心夹具5。通过以夹具的中心与压模6上的凹凸图案的中心几乎完全一致的方式设置夹具来执行设置。将光固化树脂等浇铸到基板的中心部分4中的区域并通过曝光或热处理固化，然后拉出夹具5以剥离复制品7。

10. 发明专利

JPS5855444B2 JPS5855444B2 - 失效
公开(公告)号：JPS5855444B2
公开(公告)日：1983-12-09
申请号：JP13054778
申请日：1978-10-25
申请人： Hitachi Ltd
发明人： YAMAMOTO MANABU , MURAYAMA SEIICHI , ITO SHO , OOISHI KONOSUKE
IPC分类号： G01J4/04 , G01N21/21 , G01N21/31
CPC分类号： G01N21/3103

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