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    • 9. 发明授权
    • Method and apparatus for precursor delivery system for irradiation beam instruments
    • 用于照射束仪的前驱体输送系统的方法和装置
    • US08394454B2
    • 2013-03-12
    • US12399579
    • 2009-03-06
    • Rocky KrugerAaron SmithThomas M. Moore
    • Rocky KrugerAaron SmithThomas M. Moore
    • C23C16/00C23C8/00
    • C23C16/4481C23C16/45561C23C16/48C23C16/52C23C16/54
    • A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube for injecting gasses into the vacuum chamber of the instrument and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.
    • 具有真空室的照射束装置的前体输送系统包括用于将气体注入仪器的真空室的注入管和具有入口和出口的主气体管线。 出口连接到注射管,入口连接到连接到载气源的顺序一对阀。 用于保持前体材料的坩埚在一对阀和注射管之间的位置处选择性地连接到主气体管线。 载气源可以通过一对载气阀的顺序操作选择性地连接到入口,使得载气的脉冲有助于前体材料流到注射管。 通过阀选择性地将主管线连接到与仪器真空连通的外壳,能够快速清洗前体之间的系统。 还公开了使用该系统的CVD和蚀刻的方法。
    • 10. 发明申请
    • APPARATUS FOR PRECURSOR DELIVERY SYSTEM FOR IRRADIATION BEAM INSTRUMENTS
    • 用于辐射光束仪器的前驱递送系统的装置
    • US20130025536A1
    • 2013-01-31
    • US13357741
    • 2012-01-25
    • Rocky KrugerAaron SmithThomas M. Moore
    • Rocky KrugerAaron SmithThomas M. Moore
    • C23C16/452
    • C23C16/4481C23C16/45561C23C16/48C23C16/52C23C16/54
    • A precursor delivery system for an irradiation beam instrument includes an injection tube for injecting gasses into the instrument vacuum chamber and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum.
    • 用于照射束仪器的前体传送系统包括用于将气体注入仪器真空室的注入管和具有入口和出口的主气体管线。 出口连接到注射管,入口连接到连接到载气源的顺序一对阀。 用于保持前体材料的坩埚在一对阀和注射管之间的位置处选择性地连接到主气体管线。 载气源可以通过一对载气阀的顺序操作选择性地连接到入口,使得载气的脉冲有助于前体材料流到注射管。 通过阀选择性地将主管线连接到与仪器真空连通的外壳,能够快速清洗前体之间的系统。