专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5616523A Method of manufacturing sensor 失效
标题翻译：制造传感器的方法
公开(公告)号：US5616523A
公开(公告)日：1997-04-01
申请号：US627819
申请日：1996-04-02
申请人： Gerhard Benz , Jiri Marek , Frank Bantien , Horst Muenzel , Franz Laermer , Michael Offenberg , Andrea Schilp
发明人： Gerhard Benz , Jiri Marek , Frank Bantien , Horst Muenzel , Franz Laermer , Michael Offenberg , Andrea Schilp
IPC分类号： H01L21/306 , G01P15/08 , G01P15/125 , H01L29/84
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0817 , G01P2015/0828
摘要： A method for manufacturing sensors from a multilayer plate with upper and lower monocrystalline silicon layers and an etching layer between them. The upper silicon layer is structured by the introduction of troughs therein extending down to the etching layer. Sensor structures, such as a bending beam that is used in an acceleration sensor, are created by etching the etching layer beneath a part of the silicon layer structured in this manner.
摘要翻译：一种从具有上，下单晶硅层的多层板和它们之间的蚀刻层制造传感器的方法。上硅层通过引入其中向下延伸到蚀刻层的槽而构成。传感器结构，例如用于加速度传感器中的弯曲梁，通过蚀刻以这种方式构造的硅层的一部分下方的蚀刻层来产生。

2. 发明授权

US5542558A Method for manufacturing micro-mechanical components using selective anodization of silicon 失效
标题翻译：使用硅的选择性阳极氧化制造微机械部件的方法
公开(公告)号：US5542558A
公开(公告)日：1996-08-06
申请号：US308245
申请日：1994-09-19
申请人： Gerhard Benz , Jiri Marek , Martin Willmann , Frank Bantien , Horst Muenzel , Franz Laermer , Michael Offenberg , Andrea Schilp
发明人： Gerhard Benz , Jiri Marek , Martin Willmann , Frank Bantien , Horst Muenzel , Franz Laermer , Michael Offenberg , Andrea Schilp
IPC分类号： H01L29/84 , F16C11/06 , F16C23/04 , F16C33/10 , G01P15/08 , H01L21/3063 , H01L21/316 , H01L21/306
CPC分类号： G01P15/0802 , Y10S438/96
摘要： A method for manufacturing micro-mechanical components in which a structure is produced on a silicon layer, which is to be undercut in a further step. The silicon is selectively anodized for this undercutting operation. Thus, the method enables the manufacturing of micro-mechanical components that can be integrated together with bipolar circuit elements.
摘要翻译：一种制造微机械部件的方法，其中在另一步骤中将被切削的硅层上产生结构。对于该底切操作，硅被选择性地阳极氧化。因此，该方法能够制造可与双极电路元件集成在一起的微机械部件。

3. 发明授权

US06214243B1 Process for producing a speed of rotation coriolis sensor 有权
标题翻译：生产旋转速度科里奥利传感器的方法
公开(公告)号：US06214243B1
公开(公告)日：2001-04-10
申请号：US09051878
申请日：1998-10-20
申请人： Horst Muenzel , Franz Laermer , Michael Offenberg , Andrea Schilp , Markus Lutz
发明人： Horst Muenzel , Franz Laermer , Michael Offenberg , Andrea Schilp , Markus Lutz
IPC分类号： B81B702
CPC分类号： G01C19/5747 , B81B3/0051 , B81B2201/0242 , B81B2203/058 , G01C19/5769
摘要： A process for the manufacture of a Coriolis rate-of-rotation sensor with oscillatory support masses spring-suspended on a substrate as well as driving means for the excitation of the planar oscillation of the oscillating masses and evaluation means for the determination of a Coriolis acceleration. Oscillating masses, driving means and integrated stops are structured in a common operation by means of plasma etching from a silicon-on-insulator (SOI) wafer.
摘要翻译：用于制造具有弹簧悬浮在基板上的振荡支撑质量的科里奥利旋转速度传感器的方法以及用于激发振荡块的平面振荡的驱动装置和用于确定科里奥利加速度的评估装置。通过从绝缘体上硅（SOI）晶片进行等离子体蚀刻，振荡质量，驱动装置和集成止动器通过共同的操作构成。

4. 发明授权

US5569852A Capacitive accelerometer sensor and method for its manufacture 失效
标题翻译：电容式加速度传感器及其制造方法
公开(公告)号：US5569852A
公开(公告)日：1996-10-29
申请号：US355760
申请日：1994-12-14
申请人： Jiri Marek , Frank Bantien , Horst Muenzel , Michael Offenberg
发明人： Jiri Marek , Frank Bantien , Horst Muenzel , Michael Offenberg
IPC分类号： G01P15/08 , G01P15/125 , H01L29/84
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： A contacting of a capacitive accelerometer sensor of monocrystalline material is achieved by a capacitive accelerometer sensor having a structure etched out of a monocrystalline layer arranged on a substrate, including a seismic mass that is only joined to the substrate by suspension segments and executing a movement in its longitudinal direction in response to the occurrence of an acceleration of parallel, plate-like first fingers extending out from this mass at right angles to their longitudinal direction and of plate-like second fingers running parallel to the first fingers and anchored to the substrate. The first and second fingers form a capacitor arrangement. The suspension segments, which are anchored with their end region that is distant from the seismic mass to the substrate, and second fingers are electrically isolated, by an isolation strip, from the other remaining layer of monocrystalline material. A passivation layer extends over the isolation strip, and at least partially over the remaining layer. Conductors arranged on the passivation layer and serving as connecting leads for the capacitor arrangement extend across the isolation strip up to the connections of the capacitor arrangement, and are contacted there.
摘要翻译：单晶材料的电容式加速度计传感器的接触是通过电容式加速度计传感器实现的，该传感器具有从布置在基底上的单晶层中蚀刻出的结构，包括仅通过悬挂段连接到基底的地震质量块，其纵向方向响应于从该质量块与其纵向方向成直角地延伸的平行的板状第一指状物的加速度以及平行于第一指状物并且锚固到基底的板状第二指状物的加速度。第一和第二指形成电容器布置。将其远离地震质体的端部区域锚定到基底的悬挂段和第二指状物通过隔离带与另一个剩余的单晶材料层电隔离。钝化层在隔离带上延伸，并且至少部分地覆盖剩余层。布置在钝化层上并且用作电容器布置的连接引线的导体跨过隔离带延伸直到电容器装置的连接，并且在那里接触。

5. 发明授权

US06268232B1 Method for fabricating a micromechanical component 有权
标题翻译：微机械部件的制造方法
公开(公告)号：US06268232B1
公开(公告)日：2001-07-31
申请号：US09302224
申请日：1999-04-29
申请人： Helmut Skapa , Horst Muenzel , Franz Laermer , Michael Offenberg , Heinz-Georg Vossenberg
发明人： Helmut Skapa , Horst Muenzel , Franz Laermer , Michael Offenberg , Heinz-Georg Vossenberg
IPC分类号： H01L2100
CPC分类号： G01P15/0802 , B81B2201/0235 , B81C1/00571 , B81C2201/0109 , B81C2201/014 , B81C2201/056 , B81C2203/0109 , G01P1/023
摘要： A method for fabricating a micromechanical component, in particular a surface-micromechanical acceleration sensor, involves preparing a substrate and providing an insulation layer on the substrate, in which a patterned circuit trace layer is buried. A conductive layer, including a first region and a second region, is provided on the insulation layer, and a movable element is configured in the first region by forming a first plurality of trenches and by using an etching agent to remove at least one portion of the insulation layer from underneath the conductive layer. A contact element is formed and electrically connected to the circuit trace layer in the second region by configuring a second plurality of trenches, and the resultant movable element is encapsulated in the first region. The second plurality of trenches for forming the contact element in the second region is first formed after the encapsulation of the movable element formed in the first region.
摘要翻译：用于制造微机械部件，特别是表面微机械加速度传感器的方法涉及准备衬底并在衬底上提供绝缘层，其中掩埋有图案化的电路迹线层。包括第一区域和第二区域的导电层设置在绝缘层上，并且可移动元件通过形成第一多个沟槽而被构造在第一区域中，并且通过使用蚀刻剂去除至少一部分绝缘层从导电层下面。通过构造第二多个沟槽，形成接触元件并在第二区域中电连接到电路迹线层，并且所得到的可移动元件被封装在第一区域中。在第二区域中形成接触元件的第二多个沟槽首先在形成在第一区域中的可移动元件的封装之后形成。

6. 发明授权

US5461917A Acceleration sensor 失效
标题翻译：加速度传感器
公开(公告)号：US5461917A
公开(公告)日：1995-10-31
申请号：US131821
申请日：1993-10-05
申请人： Jiri Marek , Dietrich Schubert , Helmut Baumann , Horst Muenzel , Michael Offenberg , Martin Willmann
发明人： Jiri Marek , Dietrich Schubert , Helmut Baumann , Horst Muenzel , Michael Offenberg , Martin Willmann
IPC分类号： G01P15/02 , G01P15/08 , G01P15/125 , H01L29/84
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0828
摘要： An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.
摘要翻译：描述了一种加速度传感器和制造加速度传感器的方法，其中可移动传感器元件位于形成在三个硅板中间的中空空间中。在生产过程中，空气可以通过两个外板中的一个的孔从中空空间移除。然后孔被附加的板封闭，这允许将限定的压力设定在中空空间中。

7. 发明授权

US6117701A Method for manufacturing a rate-of-rotation sensor 失效
标题翻译：旋转传感器的制造方法
公开(公告)号：US6117701A
公开(公告)日：2000-09-12
申请号：US907601
申请日：1997-08-08
申请人： Nicholas Buchan , Horst Muenzel , Franz Laermer , Michael Offenberg , Udo Bischof , Markus Lutz
发明人： Nicholas Buchan , Horst Muenzel , Franz Laermer , Michael Offenberg , Udo Bischof , Markus Lutz
IPC分类号： G01C19/56 , G01C19/5755 , G01C19/5769 , G01P15/08 , H01L29/84 , H01L41/08 , H01L21/00 , G01P15/00
CPC分类号： G01C19/5755 , G01C19/5769 , G01P15/0802 , G01P2015/0814
摘要： A rate-of-rotation sensor includes a three-layer system. The rate-of-rotation sensor and the conductor traces are patterned out of the third layer. The conductor traces are electrically insulated (isolated) by cutouts from other regions of the third layer and by a second electrically insulating layer from a first layer. Thus, a simple electrical contacting (configuration) is achieved that is patterned out of a three-layer system. Since the same etching process is used for the first and the third layer, an especially efficient manufacturing is possible.
摘要翻译：旋转速度传感器包括三层系统。转速传感器和导体迹线从第三层图案化。导体迹线通过从第三层的其它区域的切口和与第一层的第二电绝缘层的切口电绝缘（隔离）。因此，实现了由三层系统构图的简单的电接触（构造）。由于在第一和第三层使用相同的蚀刻工艺，所以可以进行特别有效的制造。

8. 发明申请

US20050280515A1 Device and method to detect presence in a motor vehicle 失效
标题翻译：检测机动车辆的存在的装置和方法
公开(公告)号：US20050280515A1
公开(公告)日：2005-12-22
申请号：US11111197
申请日：2005-04-20
申请人： Jiri Marek , Horst Muenzel , Michael Arndt
发明人： Jiri Marek , Horst Muenzel , Michael Arndt
IPC分类号： B60Q1/00 , B60Q1/50 , G08B21/22
CPC分类号： B60Q1/50 , G08B21/22
摘要： A device to detect the presence of a living being in a motor vehicle includes a carbon dioxide sensor to measure a concentration value representing the carbon dioxide concentration in the motor vehicle, an analysis unit to compare the concentration value or a change value representing the change in the concentration value over time to a threshold, a transmitting device activated when the concentration value or the change value exceeds the threshold and emitting radiated signals by way of an antenna and a receiving device that activates an indicator device when these radiated signals are received by way of an additional antenna.
摘要翻译：用于检测机动车辆中存在的装置的装置包括：二氧化碳传感器，用于测量表示机动车辆中的二氧化碳浓度的浓度值;比较浓度值的分析单元或表示变化的变化值随着时间的浓度值到阈值，当浓度值或变化值超过阈值时激活的发送装置，并且通过天线发射辐射信号和当这些辐射信号被接收时激活指示符装置的接收装置的附加天线。

9. 发明授权

US07394349B2 Device and method to detect presence in a motor vehicle 失效
标题翻译：检测机动车辆的存在的装置和方法
公开(公告)号：US07394349B2
公开(公告)日：2008-07-01
申请号：US11111197
申请日：2005-04-20
申请人： Jiri Marek , Horst Muenzel , Michael Arndt
发明人： Jiri Marek , Horst Muenzel , Michael Arndt
IPC分类号： B60Q1/00 , H04Q7/00 , G01N7/00
CPC分类号： B60Q1/50 , G08B21/22
摘要： A device to detect the presence of a living being in a motor vehicle includes a carbon dioxide sensor to measure a concentration value representing the carbon dioxide concentration in the motor vehicle, an analysis unit to compare the concentration value or a change value representing the change in the concentration value over time to a threshold, a transmitting device activated when the concentration value or the change value exceeds the threshold and emitting radiated signals by way of an antenna and a receiving device that activates an indicator device when these radiated signals are received by way of an additional antenna.
摘要翻译：用于检测机动车辆中存在的装置的装置包括：二氧化碳传感器，用于测量表示机动车辆中的二氧化碳浓度的浓度值;比较浓度值的分析单元或表示变化的变化值随着时间的浓度值到阈值，当浓度值或变化值超过阈值时激活的发送装置，并且通过天线发射辐射信号和当这些辐射信号被接收时激活指示符装置的接收装置的附加天线。

10. 发明授权

US06318175B1 Micromechanical sensor and method for the manufacture thereof 有权
标题翻译：微机械传感器及其制造方法
公开(公告)号：US06318175B1
公开(公告)日：2001-11-20
申请号：US09585141
申请日：2000-06-01
申请人： Joerg Muchow , Horst Muenzel , Michael Offenberg , Winfried Waldvogel
发明人： Joerg Muchow , Horst Muenzel , Michael Offenberg , Winfried Waldvogel
IPC分类号： G01P1500
CPC分类号： G01H11/06 , G01L9/0042 , G01L9/0054 , G01L9/0073 , G01P15/0802 , G01P15/123 , G01P15/125 , G01P2015/0814 , G01P2015/0817 , G01P2015/0828
摘要： A micromechanical sensor includes a support of silicon substrate having an epitaxial layer of silicon applied on the silicon substrate. A part of the epitaxial layer is laid bare to form at least one micromechanical deflection part by an etching process. The bared deflection part is made of polycrystalline silicon which has grown in polycrystalline form during the epitaxial process over a silicon-oxide layer which has been removed by etching. In the support region and/or at the connection to the silicon substrate, the exposed deflection part passes into single crystal silicon. By large layer thicknesses, a large working capacity of the sensor is possible. The sensor structure provides enhanced mechanical stability, processability, and possibilities of shaping, and it can be integrated, in particular, in a bipolar process or mixed process (bipolar-CMOS, bipolar-CMOS-DMOS).
摘要翻译：微机械传感器包括具有施加在硅衬底上的硅的外延层的硅衬底的支撑体。通过蚀刻工艺将外延层的一部分裸露以形成至少一个微机械偏转部分。裸露的偏转部分由多晶硅制成，该多晶硅在外延生长过程中在已通过蚀刻去除的氧化硅层上形成多晶体。在支撑区域和/或与硅衬底的连接处，暴露的偏转部分进入单晶硅。通过大层厚度，传感器的大工作容量是可能的。该传感器结构提供增强的机械稳定性，可加工性和成形的可能性，并且其可以特别集成在双极工艺或混合工艺（双极CMOS，双极CMOS-DMOS）中。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式