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1. 发明申请

US20060227409A1 MEMS MIRROR WITH AMPLIFIED MOTION 有权
标题翻译：具有放大运动的MEMS镜
公开(公告)号：US20060227409A1
公开(公告)日：2006-10-12
申请号：US11093512
申请日：2005-03-30
申请人： Flavio Pardo , Maria Simon
发明人： Flavio Pardo , Maria Simon
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A MEMS device achieves a large angle of rotation of a plate about 2 independent axes by employing a handle portion of the plate which is isolated by respective springs coupling the handle portion to each of two actuators. A first actuator, which rotates the mirror about the same axis as done in U.S. Pat. No. 6,781,744 is essentially the same structure disclosed therein, but with the mirror plate thereof shrunken in size. This shrunken plate is coupled by a spring to the mirror plate of the instant invention. Movement of the shrunken plate causes corresponding movement of the handle portion, and hence the mirror. A second actuator, coupled by another spring to the mirror plate of the instant invention, rotates about a second axis that is perpendicular to the first axis and parallel to the substrate. The second actuator includes an actuator plate and an electrode thereunder.
摘要翻译： MEMS器件通过采用板的手柄部分来实现大约2个独立轴线的大的旋转角度，所述手柄部分由相应的弹簧隔开，弹簧将手柄部分连接到两个致动器中的每一个。第一致动器，其使反射镜围绕相同的轴旋转，如美国专利No. 号6,781,744基本上是在其中公开的结构，但其反射板的尺寸缩小。该收缩板通过弹簧联接到本发明的镜板上。收缩板的移动引起手柄部分因此反射镜的相应移动。通过另一个弹簧耦合到本发明的镜板的第二致动器围绕垂直于第一轴线并平行于衬底的第二轴线旋转。第二致动器包括致动器板和其下的电极。

2. 发明申请

US20060138605A1 Method for attaching chips in a flip-chip arrangement 有权
公开(公告)号：US20060138605A1
公开(公告)日：2006-06-29
申请号：US11020590
申请日：2004-12-23
申请人： Flavio Pardo , Maria Simon
发明人： Flavio Pardo , Maria Simon
IPC分类号： H01L23/58
CPC分类号： H01L24/83 , B81B2201/042 , B81C3/001 , B81C2203/0181 , B81C2203/032 , H01L23/345 , H01L24/29 , H01L24/90 , H01L25/50 , H01L2224/83191 , H01L2224/83234 , H01L2224/8385 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/07802 , H01L2924/14
摘要： Targeted heating is employed to essentially only heat a material that is used as a spacer and to bond a first chip of a flip-chip to a second chip thereof and not the rest of the chips. In order to heat only the spacer-bonding material, one or more wires are located within, or adjacent to, the spacer-bonding material, and an electrical current is passed through the one or more wires causing them to heat. At the time of final bonding the heat generated by the one or more wires causes the spacer-bonding material to heat to its final curing temperature.

3. 发明申请

US20060126151A1 Segmented MEMS mirror for adaptive optics or maskless lithography 有权
标题翻译：用于自适应光学或无掩模光刻的分段式MEMS镜
公开(公告)号：US20060126151A1
公开(公告)日：2006-06-15
申请号：US11009447
申请日：2004-12-10
申请人： Vladimir Aksyuk , Cristian Bolle , Maria Simon
发明人： Vladimir Aksyuk , Cristian Bolle , Maria Simon
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： An apparatus having a plurality of arrayed MEMS devices, each device having a parallel-plate actuator and a reflective plate, both of which are mechanically coupled to a flexible beam attached between two anchors. Advantageously, the use of parallel-plate actuators in the apparatus alleviates stringent requirements for the alignment of lithographic masks employed in the fabrication process. In one embodiment, each flexible beam has a relatively small thickness and a relatively large length to effect a relatively large displacement range for the corresponding reflective plate. Movable electrodes of different parallel-plate actuators are configured to act as an electrical shield for the flexible beams, which reduces inter-device crosstalk in the apparatus. Reflective plates of different MEMS devices form a segmented mirror, which is suitable for adaptive-optics and/or maskless lithography applications.
摘要翻译：具有多个阵列MEMS器件的设备，每个器件具有平行板致动器和反射板，它们都被机械耦合到连接在两个锚之间的柔性梁。有利地，在设备中使用平行板致动器减轻了在制造过程中采用的光刻掩模的对准的严格要求。在一个实施例中，每个柔性梁具有相对较小的厚度和较大的长度，以对相应的反射板施加相对大的位移范围。不同平行板致动器的可移动电极被配置为用作柔性梁的电屏蔽，这减少了装置中的装置间串扰。不同MEMS器件的反射板形成分段镜，适用于自适应光学和/或无掩模光刻应用。

4. 发明申请

US20080068123A1 Photo-sensitive MEMS structure 失效
标题翻译：光敏MEMS结构
公开(公告)号：US20080068123A1
公开(公告)日：2008-03-20
申请号：US11982002
申请日：2007-10-31
申请人： Vladimir Aksyuk , Maria Simon , Richart Slusher
发明人： Vladimir Aksyuk , Maria Simon , Richart Slusher
IPC分类号： G01J5/12 , H01H37/52 , H02N10/00
CPC分类号： H02N10/00 , B81B2201/0292 , G01J5/40
摘要： A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.
摘要翻译：热敏设备包括具有顶表面的基底，一个或多个条可旋转地接合到该表面并具有双压电晶片部分，以及可旋转地接合到该表面并且基本上刚性地连接到一个或多个条的板。每个双压电晶片部分响应于加热而弯曲。一个或多个杆和板被配置成响应于加热的一个或多个双压电晶片部分而使板移动离开顶表面更远。

5. 发明申请

US20060152105A1 Photo-sensitive MEMS structure 失效
公开(公告)号：US20060152105A1
公开(公告)日：2006-07-13
申请号：US11036438
申请日：2005-01-13
申请人： Vladimir Aksyuk , Maria Simon , Richart Slusher
发明人： Vladimir Aksyuk , Maria Simon , Richart Slusher
IPC分类号： H02N10/00
CPC分类号： H02N10/00 , B81B2201/0292 , G01J5/40
摘要： A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.

6. 发明申请

US20070228869A1 Stable electro-mechanical actuators 有权
标题翻译：稳定的机电执行器
公开(公告)号：US20070228869A1
公开(公告)日：2007-10-04
申请号：US11394950
申请日：2006-03-31
申请人： Vladimir Aksyuk , Carl Nuzman , Maria Simon , Alan Weiss
发明人： Vladimir Aksyuk , Carl Nuzman , Maria Simon , Alan Weiss
IPC分类号： G02B26/08 , H02N1/00 , G02B7/182
CPC分类号： H02N1/008 , G02B7/1827 , G02B26/0841
摘要： An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a mechanical restoring force to the first capacitor plate. The deformable connector is configured to restore the first capacitor plate to be at an equilibrium rest position in response to no control voltage being applied across the capacitor. The comb drive is more engaged at the equilibrium rest position than at a mechanical stability threshold of the comb drive. The capacitor plates are disengaged at the equilibrium rest position.
摘要翻译：机电致动器包括梳状驱动器和可变形连接器。梳状驱动器具有第一电容器板和第二电容器板。电容器板具有能够进行数字化的齿。可变形连接器构造成对第一电容器板施加机械恢复力。可变形连接器被配置为响应于不跨越电容器施加控制电压而将第一电容器板恢复到平衡静止位置。梳齿驱动器在平衡静止位置比在梳齿驱动器的机械稳定性阈值处更多地啮合。电容器板在平衡静止位置脱离。

7. 发明申请

US20070085533A1 Microelectromechanical magnetometer 失效
公开(公告)号：US20070085533A1
公开(公告)日：2007-04-19
申请号：US11250123
申请日：2005-10-13
申请人： Cristian Bolle , Maria Simon
发明人： Cristian Bolle , Maria Simon
IPC分类号： G01R33/02
CPC分类号： G01R33/038 , G01R33/0286
摘要： An apparatus comprising a substrate and a MEM device. The MEM includes a comb capacitor and a magnetic element physically connected to one electrode of the comb capacitor. The magnetic element is capable of moving the one electrode in a manner that alters a capacitance of the comb capacitor. The apparatus also includes at least one spring physically connecting the magnetic element to the substrate.

8. 发明申请

US20060267449A1 Torsional electrostatic actuator 有权
标题翻译：扭转静电执行器
公开(公告)号：US20060267449A1
公开(公告)日：2006-11-30
申请号：US11140313
申请日：2005-05-27
申请人： Vladimir Aksyuk , Maria Simon
发明人： Vladimir Aksyuk , Maria Simon
IPC分类号： B23K11/10 , H02N1/00
CPC分类号： H02N1/006 , H02N1/008
摘要： Multiple drives are coupled together to cause rotation about a single axis by an arrangement in which two moveable electrode plates flank a fixed electrode plate such that the opposite direction rotations of the two moveable electrode plates are combined. To this end, at least one arm from at least one of the moveable electrode plates is connected to at least one arm of a moveable electrode plate on the opposite side of the fixed electrode plate, e.g., by a spring. The electrode plates may have comb projections. A post may be coupled at one of its ends to the top of one of the moveable electrode plates, and the post's other end is coupled to a plate, e.g., a mirror or other structure to be moved.
摘要翻译：多个驱动器通过其中两个可移动电极板位于固定电极板的方式使得两个可移动电极板的相反方向旋转被组合的布置而联接在一起以引起围绕单个轴的旋转。为此，来自至少一个可移动电极板的至少一个臂例如通过弹簧与固定电极板的相对侧上的可移动电极板的至少一个臂连接。电极板可以具有梳状突起。柱可以在其一端连接到可移动电极板中的一个的顶部，并且柱的另一端联接到板，例如反射镜或其它结构以移动。

9. 发明申请

US20050219675A1 Tip-tilt-piston actuator 有权
标题翻译：尖端倾斜活塞致动器
公开(公告)号：US20050219675A1
公开(公告)日：2005-10-06
申请号：US10813951
申请日：2004-03-31
申请人： Vladimir Aksyuk , Maria Simon
发明人： Vladimir Aksyuk , Maria Simon
IPC分类号： B81B3/00 , G02B26/08 , H02N1/00
CPC分类号： G02B26/0841 , G02B26/0833
摘要： A freely rotatable micromechanical plate is achieved by employing at least three rotatable plates that are each suspended from a substrate via respective springs, and are coupled via other respective springs to at least three moveable plate attachment points, so that rotation of the rotatable plates about an axis transfers motion to the moveable plate attachment points. Respective posts couple the movement of each respective moveable plate attachment point to a moveable plate. In operation, the rotatable plates may be individually rotated, and the resulting motion of each rotatable plate is passed to its respective moveable plate attachment point. The combined motion of the moveable plate attachment points is passed to the moveable plate via the posts. Using proper control, the plate may be made to tip, tilt and piston. Advantageously, the piston motion may achieve a high vertical movement frequency response.
摘要翻译：可自由旋转的微机械板通过采用至少三个可旋转的板来实现，每个可转动的板各自经由相应的弹簧从基板悬挂，并且经由其它相应的弹簧联接到至少三个可移动的板附接点，使得可旋转板围绕轴向移动板连接点传递运动。相应的柱将每个相应的可移动板连接点的运动耦合到可移动板。在操作中，可旋转板可以单独旋转，并且每个可旋转板的所得运动被传递到其相应的可移动板附接点。可移动板连接点的组合运动经由柱传递到可移动板。使用适当的控制，可将板制成尖端，倾斜和活塞。有利地，活塞运动可以实现高垂直运动频率响应。

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