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1. 发明专利

DE60200524T2 未知
公开(公告)号：DE60200524T2
公开(公告)日：2005-06-23
申请号：DE60200524
申请日：2002-02-08
申请人： FUJIKIN KK
发明人： KOMEHANA KATSUNORI , MINAMI YUKIO , KAWADA KOJI , MORIMOTO AKIHIRO , IKEDA NOBUKAZU , NAKAMURA OSAMU , HON IDENN TERUO , HIRAI TORU
IPC分类号： H01L21/20 , B01J12/00 , C01B5/00
摘要： A reactor (2) for generating moisture in which the starting material gases are caused to undergo turbulence so as to increase the efficiency of the moisture-generating reaction. The reactor (2) for generating moisture comprises a first inlet-side reactor structural component (4) which is adapted to supply the starting material gases from a starting material gas feed port into the inlet side of an interior space; a second outlet-side reactor structural component (2) which is adapted to transfer generated gas to a moisture gas take-out port (30a) from a moisture gas feed passage (28); a reflector (12) clamped air-tightly between the first and second structural components (4,20) and having a plurality of blowing holes (16) at predetermined locations for communicating with the inlet-side interior space (8); a reactor chamber (18) formed with a narrow gap d provided between the reflector (12) and the second structural component (20); a nozzle hole (24) formed in the second structural component (20) for communicating with the moisture gas feed passage (28); and a coating catalyst layer (21) formed on a wall surface (20a) of the reaction chamber opposing the reflector (12); wherein when hydrogen and oxygen gas fed from the starting material gas feed port flow into the reaction chamber (18) through the blowing holes (16) in the reflector (12), they react and generate moisture gas by a non-combustive pathway by the catalytic effect of the coating catalyst layer (21).

2. 发明专利

SG11202001451XA VALVE AND FLUID SUPPLY LINE 未知
公开(公告)号：SG11202001451XA
公开(公告)日：2020-03-30
申请号：SG11202001451X
申请日：2018-08-28
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： F16K31/12 , F16K27/00
摘要： The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve.A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3. The driving pressure control device 4 includes: a driving pressure introduction path 431 connected to a driving pressure supply source G outside a line; an automatic valve 411 that opens and closes the driving pressure introduction path 431; a driving pressure introduction path 433 that couples to a driving pressure introduction port 3a of the valve body 3; an automatic valve 412 that opens and closes the driving pressure introduction path 433 in conjunction with the automatic valve 411 and opens and closes an exhaust passage 44 that discharges a driving pressure from the driving pressure introduction path 433; and a driving pressure introduction path 432 that couples the driving pressure introduction path 431 and the driving pressure introduction path 433 via the automatic valve 411 and the automatic valve 412.

3. 发明专利

SG11201908394WA System, Method, And Computer Program For Analyzing Operation Of Fluid Control Device 未知
公开(公告)号：SG11201908394WA
公开(公告)日：2019-10-30
申请号：SG11201908394W
申请日：2018-03-13
申请人： FUJIKIN KK
发明人： SUZUKI YUYA , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , HARADA AKIHIRO , TANNO RYUTARO , SHINOHARA TSUTOMU
IPC分类号： F16K37/00 , G01M3/00
摘要： SYSTEM, METHOD, AND COMPUTER PROGRAM FOR ANALYZING OPERATION OF FLUID CONTROL DEVICE A cause of abnormality of a fluid control device and/or data with which abnormality can be predicted can be collected to be analyzed, and abnormality can be predicted based on a result of the analysis. A fluid control device 8 and a server 72 are configured to be able to communicate with each other through networks NW1 and 2. The fluid control device 8 includes an operation information acquisition mechanism that acquires a plurality of types of operation information about the fluid control device 8. The server 72 includes a determination processing unit 721 that determines whether the fluid control device 8 has an abnormality, an information collection unit 724 that collects the operation information and an abnormality determination result for the fluid control device 1, an information storage unit 725 that stores the operation information and the determination result collected, an information extraction unit 726 that refers to the information storage unit 725, and extracts, analysis target including same predetermined operation information and another of the operation information as well as information related to the determination result, 72 selectively for each of a plurality of the fluid control devices 1, and a correlation analysis unit 727 that analyzes correlation between a predetermined operation of the fluid control device 8 and occurrence of abnormality through comparison using the information extracted. Fig. 14

4. 发明专利

DE60200524D1 未知
公开(公告)号：DE60200524D1
公开(公告)日：2004-07-01
申请号：DE60200524
申请日：2002-02-08
申请人： FUJIKIN KK
发明人： KOMEHANA KATSUNORI , MINAMI YUKIO , KAWADA KOJI , MORIMOTO AKIHIRO , IKEDA NOBUKAZU , NAKAMURA OSAMU , HON IDENN TERUO , HIRAI TORU
IPC分类号： H01L21/20 , B01J12/00 , C01B5/00
摘要： A reactor (2) for generating moisture in which the starting material gases are caused to undergo turbulence so as to increase the efficiency of the moisture-generating reaction. The reactor (2) for generating moisture comprises a first inlet-side reactor structural component (4) which is adapted to supply the starting material gases from a starting material gas feed port into the inlet side of an interior space; a second outlet-side reactor structural component (2) which is adapted to transfer generated gas to a moisture gas take-out port (30a) from a moisture gas feed passage (28); a reflector (12) clamped air-tightly between the first and second structural components (4,20) and having a plurality of blowing holes (16) at predetermined locations for communicating with the inlet-side interior space (8); a reactor chamber (18) formed with a narrow gap d provided between the reflector (12) and the second structural component (20); a nozzle hole (24) formed in the second structural component (20) for communicating with the moisture gas feed passage (28); and a coating catalyst layer (21) formed on a wall surface (20a) of the reaction chamber opposing the reflector (12); wherein when hydrogen and oxygen gas fed from the starting material gas feed port flow into the reaction chamber (18) through the blowing holes (16) in the reflector (12), they react and generate moisture gas by a non-combustive pathway by the catalytic effect of the coating catalyst layer (21).

5. 发明专利

SG102028A1 REACTOR FOR GENERATING MOISTURE 未知
公开(公告)号：SG102028A1
公开(公告)日：2004-02-27
申请号：SG200200439
申请日：2002-02-01
申请人： FUJIKIN KK
发明人： KOMEHANA KATSUNORI , MINAMI YUKIO , KAWADA KOJI , MORIMOTO AKIHIRO , IKEDA NOBUKAZU , NAKAMURA OSAMU , HONIDEN TERUO , HIRAI TORU
IPC分类号： B01J12/00 , H01L21/20 , C01B5/00
摘要： A reactor (2) for generating moisture in which the starting material gases are caused to undergo turbulence so as to increase the efficiency of the moisture-generating reaction. The reactor (2) for generating moisture comprises a first inlet-side reactor structural component (4) which is adapted to supply the starting material gases from a starting material gas feed port into the inlet side of an interior space; a second outlet-side reactor structural component (2) which is adapted to transfer generated gas to a moisture gas take-out port (30a) from a moisture gas feed passage (28); a reflector (12) clamped air-tightly between the first and second structural components (4,20) and having a plurality of blowing holes (16) at predetermined locations for communicating with the inlet-side interior space (8); a reactor chamber (18) formed with a narrow gap d provided between the reflector (12) and the second structural component (20); a nozzle hole (24) formed in the second structural component (20) for communicating with the moisture gas feed passage (28); and a coating catalyst layer (21) formed on a wall surface (20a) of the reaction chamber opposing the reflector (12); wherein when hydrogen and oxygen gas fed from the starting material gas feed port flow into the reaction chamber (18) through the blowing holes (16) in the reflector (12), they react and generate moisture gas by a non-combustive pathway by the catalytic effect of the coating catalyst layer (21).

6. 发明专利

SG11202003902XA ABNORMALITY DIAGNOSIS METHOD OF FLUID SUPPLY LINE 未知
公开(公告)号：SG11202003902XA
公开(公告)日：2020-05-28
申请号：SG11202003902X
申请日：2018-10-05
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： G05D7/06 , F16K37/00
摘要： Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V1, and V2 communicating with each other fluid-tightly. The abnormality diagnosis method has: a valve operation step of opening/closing any one or more of a valve FV in a flow rate control device, a valve V1, and a valve V2; a pressure adjustment step of setting a part or all of flow passages R1 and R2 leading from the valve V1 to the valve V2 via the flow rate control device to a vacuum state or a pressurization state; a pressure detection step of acquiring temporal pressure characteristics in a flow passage of the flow rate control device F by pressure detection mechanisms P1 and P2; and an abnormality determination step of comparing pressure characteristics at the time of abnormality diagnosis acquired by the pressure detection mechanisms P1 and P2 and pressure characteristics at the time of normality measured in advance under the same conditions, and determining whether or not there is an abnormality.

7. 发明专利

SG11202003896RA VALVE, ABNORMALITY DIAGNOSIS METHOD OF VALVE, AND COMPUTER PROGRAM 未知
公开(公告)号：SG11202003896RA
公开(公告)日：2020-05-28
申请号：SG11202003896R
申请日：2018-10-05
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： F16K37/00 , F16K7/12
摘要： A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.

8. 发明专利

SG11202001538SA FLUID SUPPLY LINE AND MOTION ANALYSIS SYSTEM 未知
公开(公告)号：SG11202001538SA
公开(公告)日：2020-03-30
申请号：SG11202001538S
申请日：2018-08-28
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： G05D7/06 , F16K37/00
摘要： A fluid supply line L1 formed from a plurality of fluid control devices F1 and V11 to V14 communicating with each other in a fluid-tight manner includes: a first connection means that connects between a mechanism outside the fluid supply line L1 and a fluid control device on the fluid supply line L1 and F1; and a second connection means that branches from the first connection means on the fluid supply line L1 and is connected to other fluid control devices F1 and V11 to V14.

9. 发明专利

SG94873A1 REACTOR FOR GENERATING HIGH PURITY MOISTURE 未知
公开(公告)号：SG94873A1
公开(公告)日：2003-03-18
申请号：SG200202050
申请日：2000-07-21
申请人： FUJIKIN KK , TADAHIRO OHMI
发明人： OHMI TADAHIRO , IKEDA NOBUKAZU , MINAMI YUKIO , KAWADA KOUJI , KOMEHANA KATSUNORI , HONIDEN TERUO , HIRAI TOURU , MORIMOTO AKIHIRO , NARIAI TOSHIROU , HIRAO KEIJI , TAGUCHI MASAHARU , NAKAMURA OSAMU
IPC分类号： B01J3/00 , B01J7/00 , B01J12/00 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

10. 发明专利

JP2002338208A HEATER EQUIPMENT FOR WATER GENERATING REACTION FURNACE 失效
公开(公告)号：JP2002338208A
公开(公告)日：2002-11-27
申请号：JP2001141830
申请日：2001-05-11
申请人： FUJIKIN KK
发明人： KOMEHANA KATSUNORI , MINAMI YUKIO , IKEDA SHINICHI , MORIMOTO AKIHIRO , KAWADA KOJI , NAKAMURA OSAMU , MOTOIDEN AKIO , HIRAI NOBORU
IPC分类号： C01B5/00
摘要： PROBLEM TO BE SOLVED: To provide a water generating reaction furnace, in which water generating reaction is efficiently and stably continued by keeping the internal temperature spatially uniform and eliminating the change of the temperature with time. SOLUTION: In the water generating reaction furnace 2 composed of a water generating reaction furnace body 3 for generating gaseous water from gaseous hydrogen and gaseous oxygen and a heater equipment 60 accelerating the water generating reaction by heating the furnace body, the heater equipment 60 is constituted of a cylindrical body 56 arranged to surround the reaction furnace body 3 and a heater wire 58 buried inside the thick wall of the cylindrical body 56 to be closely contact. The inside of the cylindrical body 56 is set to a fixed temperature in this way. The cylindrical body 56 is provided with an inlet side cover body 62 and an outlet side cover body 64 to improve the temperature uniformity. The cylindrical body 56 is formed by combining two half- cylindrical bodies 56a and 56b to simplify the structure. The heater wire 58 and the cylindrical body 56 or the half-cylindrical bodies 56a and 56b are integrally formed by a squeeze casting process, and then, the degree of contact of the heater wire 58 with the cylindrical body 56 is improved.

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