专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

SG11202001451XA VALVE AND FLUID SUPPLY LINE 未知
公开(公告)号：SG11202001451XA
公开(公告)日：2020-03-30
申请号：SG11202001451X
申请日：2018-08-28
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： F16K31/12 , F16K27/00
摘要： The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve.A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3. The driving pressure control device 4 includes: a driving pressure introduction path 431 connected to a driving pressure supply source G outside a line; an automatic valve 411 that opens and closes the driving pressure introduction path 431; a driving pressure introduction path 433 that couples to a driving pressure introduction port 3a of the valve body 3; an automatic valve 412 that opens and closes the driving pressure introduction path 433 in conjunction with the automatic valve 411 and opens and closes an exhaust passage 44 that discharges a driving pressure from the driving pressure introduction path 433; and a driving pressure introduction path 432 that couples the driving pressure introduction path 431 and the driving pressure introduction path 433 via the automatic valve 411 and the automatic valve 412.

2. 发明专利

SG11201501475PA INTEGRATED TYPE GAS SUPPLYING APPARATUS 未知
公开(公告)号：SG11201501475PA
公开(公告)日：2015-05-28
申请号：SG11201501475P
申请日：2013-10-18
申请人： FUJIKIN KK
发明人： KOYOMOGI MUTSUNORI , HIROSE TAKASHI , YAMAJI MICHIO , MATSUDA TAKAHIRO
IPC分类号： G05D7/00 , F16K27/00
摘要： A plurality of stacked and fixed gas supplying units U, each gas supplying unit U having at least four gas supply lines S is formed by opposingly combining and fixing two flow controllers 3, each flow controller 3 provided with a plurality of flow control units, to a gas inlet-side block 12 and a gas outlet-side block 13 that are disposed in parallel across an interval in plan view and providing each flow controller 3 with an inlet opening and closing valve 1 and an outlet opening and closing valve 5.

3. 发明专利

SG195084A1 PURGE LINE CHANGE BLOCK JOINT AND FLUID CONTROL DEVICE 未知
公开(公告)号：SG195084A1
公开(公告)日：2013-12-30
申请号：SG2013086160
申请日：2013-02-20
申请人： FUJIKIN KK
发明人： YOGO RYUJI , SHIKATA IZURU , KOYOMOGI MUTSUNORI , MAKINO MEGUMU , MATSUDA TAKAHIRO
摘要： PURGE LINE CHANGING BLOCK JOINT AND FLUID CONTROL APPARATUSA purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus provided with such purge line changing block joint is provided. A purge line changing block joint 5 is connected to an upper side of a three-way valve channel portion in at least one line Q of the plurality of lines. The purge line changing block joint 5 includes a process gas inlet channel 5a communicating with a process gas inlet channel 7a of the three-way valve channel portion, an outlet channel 5b communicating the process gas inlet channel 5a and an outlet channel Ba of the three-way valve channel portion, a channel terminal Sc no t in communication with a purge gas inlet channel 9a of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel 5d communicating with the outlet channel 5b and opening on the top surface.Figure 2

4. 发明专利

SG11201507088YA FLUID CONTROL APPARATUS AND THERMAL SENSOR INSTALLATION STRUCTURE WITH RESPECT TO FLUID CONTROL APPARATUS 未知
公开(公告)号：SG11201507088YA
公开(公告)日：2015-10-29
申请号：SG11201507088Y
申请日：2014-02-17
申请人： FUJIKIN KK
发明人： YOKOTA JUN , YOSHIDA TAKAHIRO , NGUYEN THANH TUNG , MATSUDA TAKAHIRO
IPC分类号： F16K27/00 , G05D7/06

5. 发明专利

SG11202003902XA ABNORMALITY DIAGNOSIS METHOD OF FLUID SUPPLY LINE 未知
公开(公告)号：SG11202003902XA
公开(公告)日：2020-05-28
申请号：SG11202003902X
申请日：2018-10-05
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： G05D7/06 , F16K37/00
摘要： Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V1, and V2 communicating with each other fluid-tightly. The abnormality diagnosis method has: a valve operation step of opening/closing any one or more of a valve FV in a flow rate control device, a valve V1, and a valve V2; a pressure adjustment step of setting a part or all of flow passages R1 and R2 leading from the valve V1 to the valve V2 via the flow rate control device to a vacuum state or a pressurization state; a pressure detection step of acquiring temporal pressure characteristics in a flow passage of the flow rate control device F by pressure detection mechanisms P1 and P2; and an abnormality determination step of comparing pressure characteristics at the time of abnormality diagnosis acquired by the pressure detection mechanisms P1 and P2 and pressure characteristics at the time of normality measured in advance under the same conditions, and determining whether or not there is an abnormality.

6. 发明专利

SG11202003896RA VALVE, ABNORMALITY DIAGNOSIS METHOD OF VALVE, AND COMPUTER PROGRAM 未知
公开(公告)号：SG11202003896RA
公开(公告)日：2020-05-28
申请号：SG11202003896R
申请日：2018-10-05
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： F16K37/00 , F16K7/12
摘要： A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.

7. 发明专利

SG11202001538SA FLUID SUPPLY LINE AND MOTION ANALYSIS SYSTEM 未知
公开(公告)号：SG11202001538SA
公开(公告)日：2020-03-30
申请号：SG11202001538S
申请日：2018-08-28
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： G05D7/06 , F16K37/00
摘要： A fluid supply line L1 formed from a plurality of fluid control devices F1 and V11 to V14 communicating with each other in a fluid-tight manner includes: a first connection means that connects between a mechanism outside the fluid supply line L1 and a fluid control device on the fluid supply line L1 and F1; and a second connection means that branches from the first connection means on the fluid supply line L1 and is connected to other fluid control devices F1 and V11 to V14.

8. 发明专利

SG11201910106XA MANAGEMENT SYSTEM, METHOD, AND COMPUTER PROGRAM FOR SEMICONDUCTOR FABRICATION APPARATUS 未知
公开(公告)号：SG11201910106XA
公开(公告)日：2019-11-28
申请号：SG11201910106X
申请日：2018-05-15
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , MATSUDA TAKAHIRO , SHINOHARA TSUTOMU
IPC分类号： G05B19/418 , G05B23/02
摘要： In a semiconductor fabrication apparatus composed of a plurality of components, such as fluid control devices, a manager is to be enabled to identify components by intuition. Information on the identified component is to be provided to the manager in an easy-to-understand manner. In a system in which a manager terminal 3 and an information processor 2 are communicably configured via networks NW1 and NW2, the manager terminal 3 receives component information on a semiconductor fabrication apparatus 1 from the information processor 2. Upon the identification of the position of a component constituting the semiconductor fabrication apparatus 1 on the captured image of the semiconductor fabrication apparatus 1 using an identification processing unit 32, a compositing processing unit 33 creates a composite image in which component information is composited with the captured image at the position of the component identified, and an image display unit 34 displays the composite image. On the other hand, the information processor 2 makes reference to the component information storage unit 2A to extract the component information using an extraction processing unit 21, and transmits the component information to the manager terminal 3. FIG. 3 MANAGEMENT SYSTEM, METHOD, AND COMPUTER PROGRAM FOR SEMICONDUCTOR FABRICATION APPARATUS

9. 发明专利

IL282358D0 Valve device and gas supply system 未知
公开(公告)号：IL282358D0
公开(公告)日：2021-05-31
申请号：IL28235821
申请日：2021-04-15
申请人： FUJIKIN KK , MATSUDA TAKAHIRO , AIKAWA KENJI , HARADA AKIHIRO , WATANABE KAZUNARI , NAKATA TOMOHIRO , SHINOHARA TSUTOMU
发明人： MATSUDA TAKAHIRO , AIKAWA KENJI , HARADA AKIHIRO , WATANABE KAZUNARI , NAKATA TOMOHIRO , SHINOHARA TSUTOMU
摘要： A valve device includes: a valve body which is accommodated in an accommodation recess having a circular cross-sectional shape, and has a first port and a second port in a bottom surface; and a bonnet nut which has an outer screw portion screwed with an inner screw portion formed on an inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has an outer peripheral surface portion fitted to an inner peripheral surface portion of the accommodation recess of the flow path block. A convex portion for defining an orientation of the valve body about an axis with respect to the flow path block is formed on the outer peripheral surface portion.

10. 发明专利

SG193993A1 FASTENING DEVICE FOR LOWER TIER MEMBERS AND FLUID CONTROL DEVICE FURNISHED WITH SAME 未知
公开(公告)号：SG193993A1
公开(公告)日：2013-11-29
申请号：SG2013072889
申请日：2012-03-06
申请人： FUJIKIN KK
发明人： SHINOHARA TSUTOMU , MATSUDA TAKAHIRO , NAKATA TOMOHIRO , YAMAJI MICHIO
摘要： FIXING DEVICE FOR LOWER STAGE MEMBERS AND FLUID CONTROL DEVICE EQUIPPED WITH FIXING DEVICEProvided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members (2) are fixed once and, thereafter, a desired lower-stage member (2) is moved upwardly against an elastic force (21) so as to finely adjust positions of upper surfaces of a plurality of lower-stage members (2) . The elastic member (21) is formed of an annular body made of rubber or a synthetic resin. A cutout (21a, 21b) which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member (21) is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member (21) . FIG. 2

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式