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1. 发明专利

SG88740A1 FLUID CONTROL DEVICE 未知
公开(公告)号：SG88740A1
公开(公告)日：2002-05-21
申请号：SG1998002719
申请日：1998-07-28
申请人： FUJIKIN KK , TADAHIRO OHMI
发明人： OHMI TADAHIRO , MIMAMI YUKIO , MORIMOTO AKIHIRO , IKEDA NOBUKAZU , HIRAO KEIJI , HIROSE TAKASHI , YAMAJI MICHIO , YOSHIKAWA KAZUHIRO
IPC分类号： F17D1/02 , F16K27/00
摘要： A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. The first passageway comprises an upstream portion and a downstream portion communicating with the upstream portion at an approximate right angle therewith. The second passageway extends from a terminating end of the upstream portion of the first passageway in alignment with the upstream portion.

2. 发明专利

SG94873A1 REACTOR FOR GENERATING HIGH PURITY MOISTURE 未知
公开(公告)号：SG94873A1
公开(公告)日：2003-03-18
申请号：SG200202050
申请日：2000-07-21
申请人： FUJIKIN KK , TADAHIRO OHMI
发明人： OHMI TADAHIRO , IKEDA NOBUKAZU , MINAMI YUKIO , KAWADA KOUJI , KOMEHANA KATSUNORI , HONIDEN TERUO , HIRAI TOURU , MORIMOTO AKIHIRO , NARIAI TOSHIROU , HIRAO KEIJI , TAGUCHI MASAHARU , NAKAMURA OSAMU
IPC分类号： B01J3/00 , B01J7/00 , B01J12/00 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

3. 发明申请

WO0194925A8 GAS DETECTION SENSOR 审中-公开
标题翻译：气体检测传感器
公开(公告)号：WO0194925A8
公开(公告)日：2002-10-03
申请号：PCT/JP0003658
申请日：2000-06-05
申请人： FUJIKIN KK , OHMI TADAHIRO , KAWADA KOUJI , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , MINAMI YUKIO , KOMEHANA KATUNORI , HONIDEN TERUO
发明人： OHMI TADAHIRO , KAWADA KOUJI , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , MINAMI YUKIO , KOMEHANA KATUNORI , HONIDEN TERUO
IPC分类号： G01N25/32 , G01N27/00 , G01N27/16 , G01N33/00
CPC分类号： G01N25/32 , G01N33/0013
摘要： A gas detection sensor capable of being simplified in structure and detecting, with high accuracy, the concentration of inflammable gas contained in a detected gas and the concentration of oxygen gas contained in the detected gas containing the inflammable gas under the presence of H2O or O2, comprising a first detection sensor which has a diaphragm with a platinum coated film applied on a gas contact surface in contact with the detected gas and a thermocouple which is obtained by moving for fixing one end side of each of two dissimilar metals closely to the non-gas contact surface of the diaphragm and is heated by the contact reaction of the inflammable gas and a second detection sensor which has a diaphragm with a gas contact surface in contact with the detected gas and a thermocouple obtained by moving for fixing one end side of each of two dissimilar metals closely to the non-gas contact surface of the diaphragm and detects the temperature of the detected gas, whereby the detection signals of the inflammable gas can be transmitted by the heating of the sensors due to contact reaction of the inflammable gas.
摘要翻译：一种气体检测传感器，其结构简单，并且在H 2 O或O 2存在下，高精度地检测包含在检测气体中的可燃性气体的浓度和包含在含有易燃气体的检测气体中的氧气浓度，包括第一检测传感器，其具有施加在与所检测到的气体接触的气体接触表面上的铂涂覆膜的隔膜和通过移动以将两个不同金属中的每一个的一端侧紧密地固定到非电解槽的热电偶，隔膜的气体接触表面被可燃性气体的接触反应和具有与检测到的气体接触的气体接触表面的隔膜的第二检测传感器加热，以及通过移动固定每个两个不同的金属与隔膜的非气体接触表面紧密相邻，并检测检测到的气体的温度，从而进行检测可燃气体的信号由于可燃性气体的接触反应而通过传感器的加热而传递。

4. 发明申请

WO2004005569A8 PARTS FOR FLUID 审中-公开
标题翻译：流体部件
公开(公告)号：WO2004005569A8
公开(公告)日：2005-06-16
申请号：PCT/JP0308696
申请日：2003-07-09
申请人： FUJIKIN KK , MATSUHASHI RYO , SUETSUGU KAZUHIRO , MIYAGAWA HIDEYUKI , KITA TOSHIO , SOGABE KYOTA , YOSHIKAWA KAZUHIRO , MORIMOTO AKIHIRO , SATO JYUNJI , DAIDO KUNIHIKO , SOGAO MASAHIKO , CHIKAIKE YOSHIAKI
发明人： MATSUHASHI RYO , SUETSUGU KAZUHIRO , MIYAGAWA HIDEYUKI , KITA TOSHIO , SOGABE KYOTA , YOSHIKAWA KAZUHIRO , MORIMOTO AKIHIRO , SATO JYUNJI , DAIDO KUNIHIKO , SOGAO MASAHIKO , CHIKAIKE YOSHIAKI
IPC分类号： C22C38/00 , C22C38/42 , C22C38/44 , C22C38/46 , C22C38/58 , F16K25/00 , F16K27/00 , F16K27/02 , F16L19/08
CPC分类号： F16K27/0236 , C22C38/001 , C22C38/42 , C22C38/44 , F16K27/00 , F16L19/103 , F16L58/184
摘要： A part (1) for a fluid having a plurality of constituting members (2, 3, 4, 5 and 6), wherein a specific metal member thereof (for example, a bolt (5)) having a surface exposed to the exterior thereof comprises an alloy which has a chemical composition in wt %: C: 0.001 to 0.01 %, Si: 5 % or less, Mn: 2 % or less, P: 0.03 % or less, S: 100 ppm or less, O: 50 ppm or less, Cr: 18 to 25 %, Ni: 15 to 25 %, Mo: 4.5 to 7.0 %, Cu: 0.5 to 3.0 %, N: 0.1 to 0.3 %, and the balance: substantially Fe and inevitable impurities.
摘要翻译：一种用于具有多个构成构件（2,3,4,5和6）的流体的部分（1），其中具有暴露于其外部的表面的特定金属构件（例如，螺栓（5））包含化学成分为C：0.001〜0.01％，Si：5％以下，Mn：2％以下，P：0.03％以下，S：100ppm以下的合金，O：50 ppm以下，Cr：18〜25％，Ni：15〜25％，Mo：4.5〜7.0％，Cu：0.5〜3.0％，N：0.1〜0.3％，余量：Fe和不可避免的杂质。

5. 发明授权

US6422264B2 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
标题翻译：平行分流式流体供给装置和流体切换式压力式流量控制方法以及用于同一流体供给装置的流体切换型压力式流量控制系统
公开(公告)号：US6422264B2
公开(公告)日：2002-07-23
申请号：US73464000
申请日：2000-12-13
申请人： FUJIKIN KK , OHMI TADAHIRO , TOKYO ELECTRON LTD
发明人： OHMI TADAHIRO , KAGATSUME SATOSHI , SUGIYAMA KAZUHIKO , MINAMI YUKIO , NISHINO KOUJI , DOHI RYOUSUKE , YONEHANA KATSUNORI , IKEDA NOBUKAZU , YAMAJI MICHIO , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , MORIMOTO AKIHIRO , UNO TOMIO , IDETA EIJI , MATSUMOTO ATSUSHI , UENOYAMA TOYOMI , HIROSE TAKASHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time DELTAt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要翻译：一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点的特定延迟时间DELTAt中达到设定流量Qs。本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

6. 发明公开

EP1593888A4 VALVE FOR VACUUM DISCHARGE SYSTEM 有权
标题翻译：阀用于真空排放系统
公开(公告)号：EP1593888A4
公开(公告)日：2006-02-01
申请号：EP04709363
申请日：2004-02-09
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , IKEDA NOBUKAZU , YAMAJI MICHIO , KITANO MASAFUMI , MORIMOTO AKIHIRO
IPC分类号： H01L21/205 , F16K7/14 , F16K27/00 , F16K51/02 , F16K7/12
CPC分类号： F16K7/14 , F16K27/003 , F16K51/02
摘要： A valve in accordance with the reduction in diameter of piping in a vacuum discharge system, the reduction realizing downsizing of apparatuses for a vacuum discharge system and resultant reduced costs and shortened time for vacuum discharge. In the valve, inside corrosion, clogging, seat leakage, etc. by accumulation of dissociated products produced by decomposition of gas can be prevented from occurring. Specifically, passive aluminum is used for piping components, such as the valve, adapted for a vacuum discharge system so as to control decomposition of gas caused by rise in temperature during baking, so that components suitable for the reduction in diameter sizes in the vacuum discharge system are provided. Corrosion, clogging, seat leakage, etc. caused by decomposition of gas are prevented from occurring.

7. 发明公开

EP1536030A4 PIPE JOINT 审中-公开
标题翻译： ROHRVERBINDUNG
公开(公告)号：EP1536030A4
公开(公告)日：2005-08-31
申请号：EP03741295
申请日：2003-07-09
申请人： FUJIKIN KK
发明人： MATSUHASHI RYO , SUETSUGU KAZUHIRO , MIYAGAWA HIDEYUKI , KITA TOSHIO , SOGABE KYOTA , YOSHIKAWA KAZUHIRO , MORIMOTO AKIHIRO , SATO JYUNJI , DAIDO KUNIHIKO , SHIMOMURA YOSHINORI , NAKAHAMA TAKAYASU
IPC分类号： C22C38/00 , C22C38/42 , C22C38/44 , C22C38/46 , F16K25/00 , F16K27/00 , F16L19/02 , F16L19/04 , F16L19/08 , C22C38/58
CPC分类号： F16L19/061 , C22C38/001 , C22C38/42 , C22C38/44 , F16L19/08
摘要： Pipe joint (30) comprising pipe-shaped body (31) in which pipe (32) is inserted from the rear end side; front ring (33) and back ring (34) fitted round portion of the pipe (32) protruding from the rear end side of the body (31); and cap nut (35) for tightening the front ring (33) and back ring (34) so as to fix the pipe (32) to the body (31). The back ring (34) is constituted of an alloy comprising, on the basis of weight %, 0.001 to 0.01% of C, 5% or less of Si, 2% or less of Mn, 0.03% or less of P, 100 ppm or less of S, 50 ppm or less of O, 18 to 25% of Cr, 15 to 25% of Ni, 4.5 to 7.0% of Mo, 0.5 to 3.0% of Cu and 0.1 to 0.3% of N, the remainder composed substantially of Fe and other unavoidable impurities.
摘要翻译：包括管状体（31）的管接头（30），其中管（32）从后端侧插入其中; 安装在从本体（31）的后端侧突出的管（32）的圆形部分上的前环（33）和后环（34）; 和用于拧紧前环（33）和后环（34）以将管（32）固定到主体（31）的盖螺母（35）。背环（34）由以重量％计含有C：0.001〜0.01％，Si：5％以下，Mn：2％以下，P：0.03％以下，P：100ppm 以下的S，50ppm以下的O，18〜25％的Cr，15〜25％的Ni，4.5〜7.0％的Mo，0.5〜3.0％的Cu和0.1〜0.3％的N，基本上是铁和其他不可避免的杂质。

8. 发明公开

EP1096351A4 PARALLEL BYPASS TYPE FLUID FEEDING DEVICE, AND METHOD AND DEVICE FOR CONTROLLING FLUID VARIABLE TYPE PRESSURE SYSTEM FLOW RATE USED FOR THE DEVICE 审中-公开
标题翻译：旁路类型和调节压力系统与可变液体压力流量的方法和设备布置成平行液装置这FLÜSSIGLEITSSPEISEVORRICHTUNGUSED
公开(公告)号：EP1096351A4
公开(公告)日：2004-12-15
申请号：EP00913087
申请日：2000-04-03
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGATSUME SATOSHI , SUGIYAMA KAZUHIKO , MINAMI YUKIO , NISHINO KOUJI , DOHI RYOUSUKE , YONEHANA KATSUNORI , IKEDA NOBUKAZU , YAMAJI MICHIO , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , MORIMOTO AKIHIRO , UNO TOMIO , IDETA EIJI , MATSUMOTO ATSUSHI , UENOYAMA TOYOMI , HIROSE TAKASHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid feeding device having a plurality of flow paths disposed in parallel with each other starting at a regulator for pressure regulation, wherein a mass flow controller for flow control or a pressure system flow control device is disposed in each flow path so that the opening and closing operations for fluid supply in each flow path do not provide a transient variation in a stable supply to the other flow paths and, when the fluid supply in a flow path is changed from close to open, a set flow rate is reached a specified delay time after the start of the operation of the mass flow controller in that flow path.
摘要翻译：用的流线从一个调节器，用于压力调整分支出来的多个流体供给装置中，流线平行地布置，worin的量度取，DASS模具手术，也就是，开口或一个流路的开闭将没有在其它流动通道的稳流瞬态效应。为了这个目的，每个流动通道设置有一个时间延迟型质量流量控制器MFC所以没有当一个封闭流体通道打开时，质量流量控制器上没有流动通道达在一个特定的延迟时间ΔT的一组流量Qs 从起点。这样提供了一种方法和用于其中的气体类型的多元性可与精度高流速通过一个压力式流量控制装置来控制上述装置的速率。为了做到端，用于计算气体的流动的公式理论上推导做了与压力比不低于临界压力比更高流动。从做过公式，则流程因数被定义，所以做了式可以被应用到许多用流动因素气体类型。该方法包括：在下游侧计算通过传递到孔口雅丁式QC = KP1（K =常数）具有压力P1的气体的QC流量上设置节流孔上游侧的两次或更多次高于压力P2 ，worin流量因数FF为每种气体的计算如下： FF =（K /伽马S）A2 /（卡帕+ 1）U <1 /（卡帕-1）>是κ/ A（卡帕 + 1）RUU <1.2> 和worin，如果气体类型A的计算的流速是QA，并且，当将B型气体被允许在相同的压力下，通过相同的孔中流动的上游侧并在上游侧相同的温度，流率QB的计算公式如下： QB =（FFB / FFA）QA 其中YS =标准状态的气体的浓度; Kappa值=气体的比热的比值; R为气体的=常数; K =比例常数不依赖于气体的类型; FFA =气体类型A的流动系数; 气体类型B. 的和FFB =流量系数

9. 发明公开

EP1167574A4 METAL MATERIAL HAVING FORMED THEREON CHROMIUM OXIDE PASSIVE FILM AND METHOD FOR PRODUCING THE SAME, AND PARTS CONTACTING WITH FLUID AND SYSTEM FOR SUPPLYING FLUID AND EXHAUSTING GAS 无效
标题翻译：金属材料FACT形无源氧化铬的制造方法，并与液体立场与系统接触部分用于输送液体和气体
公开(公告)号：EP1167574A4
公开(公告)日：2007-10-24
申请号：EP00900373
申请日：2000-01-13
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , SHIRAI YASUYUKI , IKEDA NOBUKAZU , IDETA EIJI , MORIMOTO AKIHIRO , OGUSHI TETSUTARO , KONISHI TAKEHISA
IPC分类号： H01L21/28 , C23C8/02 , C23C26/00 , C23C30/00
CPC分类号： C23C8/02 , C23C26/00 , Y10T428/24322 , Y10T428/24355 , Y10T428/31678
摘要： A metallic material having, formed thereon, a chromium oxide passive film, characterized in that the metallic material has a surface roughness (Ra) of 1,5 mu m or less and the passive film is formed by a method comprising coating the metallic material with chromium and then subjecting the resultant coated material to a heat treatment in an oxidizing gas atmosphere. The present invention can be used for forming a chromium oxide film which contains no oxide film of another metal and is excellent in corrosion resistance on an arbitrary type of metal at a low cost in a short period of time, and thus for providing a system for supplying a highly corrosive fluid in safety.

10. 发明公开

EP0878443A4 METHOD FOR GENERATING MOISTURE, REACTOR FOR GENERATING MOISTURE, METHOD FOR CONTROLLING TEMPERATURE OF REACTOR FOR GENERATING MOISTURE, AND METHOD FOR FORMING PLATINUM-COATED CATALYST LAYER 失效
标题翻译：用于生产防潮，反应器水分生产，一种用于控制反应器的水分发生和方法的温度用于生产具有铂催化剂层的涂布
公开(公告)号：EP0878443A4
公开(公告)日：2006-09-27
申请号：EP97901265
申请日：1997-01-27
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAWADA KOJI , TANABE YOSHIKAZU , NITTA TAKAHISA , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , HIRAO KEIJI , MOROKOSHI HIROSHI , MINAMI YUKIO
IPC分类号： C01B5/00 , B01J4/04 , B01J8/02 , B01J8/06 , B01J12/00 , B01J19/24
CPC分类号： C01B5/00
摘要： The invention further reduces a size and cost of a reactor for generating water from oxygen and hydrogen, provides high-purity water in an amount necessary for practical use safely, stably and continuously, and allows a platinum-coated catalyst layer formed on an inner wall of a reactor body to maintain high catalytic activity over a long period of time. Specifically, the reactor comprises a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, has a gas-diffusing member provided in an internal space of the body, and has a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet is diffused by the gas-diffusing member and then comes into contact with the platinum coating to enhance reactivity, thereby producing water from hydrogen and oxygen. A temperature of the reactor for generating moisture, wherein hydrogen is reacted with oxygen at a high temperature to generate moisture, is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas so that hydrogen is reacted with oxygen while preventing explosive combustion of hydrogen and oxygen. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.
摘要翻译：本发明进一步减小了尺寸和用于产生由氧气和氢气水的反应器的成本，提供了高纯度的水到所需量实际使用安全，稳定地和连续地，并允许形成在到内壁上的镀铂催化剂层反应器主体的在一段长时间内保持高的催化活性。具体地，该反应器包括一个由耐热材料制成，并在入口和出口，用于水/水分气体具有主体，具有气体扩散构件在所述主体的内部空间中设置于，并且具有铂在内部涂覆上主体的壁面上。氢气和氧气从所述入口供给由气体扩散构件扩散，然后与铂涂层接触，以提高反应性，从而由氢气和氧气产生水。该反应器用于产生湿气，worin氢的温度在高温下与氧反应生成的水分，被保持为低于氢或含氢气体，从而也氢进行反应与氧气的燃点温度，同时防止爆炸燃烧的氢气和氧气。在反应器主体的内壁涂覆铂的催化剂层通过处理所述体的内壁的表面上，清洗处理过的表面，在壁表面上形成的氧化物或氮化物的非金属材料构成的阻挡涂布形成，以及形成在该阻挡涂层的铂涂层。

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