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1. 发明授权

US07233522B2 NAND memory array incorporating capacitance boosting of channel regions in unselected memory cells and method for operation of same 有权
标题翻译： NAND存储器阵列结合未选择的存储单元中的沟道区域的电容升压及其操作方法
公开(公告)号：US07233522B2
公开(公告)日：2007-06-19
申请号：US10729831
申请日：2003-12-05
申请人： En-Hsing Chen , Andrew J. Walker , Roy E. Scheuerlein , Sucheta Nallamothu , Alper Ilkbahar , Luca G. Fasoli
发明人： En-Hsing Chen , Andrew J. Walker , Roy E. Scheuerlein , Sucheta Nallamothu , Alper Ilkbahar , Luca G. Fasoli
IPC分类号： G11C16/04
CPC分类号： G11C16/3418 , G11C11/5621 , G11C16/0483 , G11C16/10 , G11C16/3427 , H01L27/115 , H01L27/11568 , H01L27/1159
摘要： An exemplary NAND string memory array provides for capacitive boosting of a half-selected memory cell channel to reduce program disturb effects of the half selected cell. To reduce the effect of leakage current degradation of the boosted level, multiple programming pulses of a shorter duration are employed to limit the time period during which such leakage currents may degrade the voltage within the unselected NAND strings. In addition, multiple series select devices at one or both ends of each NAND string further ensure reduced leakage through such select devices, for both unselected and selected NAND strings. In certain exemplary embodiments, a memory array includes series-connected NAND strings of memory cell transistors having a charge storage dielectric, and includes more than one plane of memory cells formed above a substrate.
摘要翻译：示例性的NAND串存储器阵列提供半选择的存储器单元通道的电容性升压以减少半选择单元的程序干扰效应。为了减小升压电平的漏电流劣化的影响，采用较短持续时间的多个编程脉冲来限制这种漏电流可能降低未选择的NAND串中的电压的时间周期。此外，在每个NAND串的一端或两端的多个串联选择装置进一步确保了对于未选择的和选择的NAND串的这种选择装置的减少的泄漏。在某些示例性实施例中，存储器阵列包括具有电荷存储电介质的存储单元晶体管的串联连接的NAND串，并且包括形成在衬底上方的多于一个的存储单元平面。

2. 发明授权

US07433233B2 NAND memory array incorporating capacitance boosting of channel regions in unselected memory cells and method for operation of same 有权
标题翻译： NAND存储器阵列结合未选择的存储单元中的沟道区域的电容升压及其操作方法
公开(公告)号：US07433233B2
公开(公告)日：2008-10-07
申请号：US11764793
申请日：2007-06-18
申请人： En-Hsing Chen , Andrew J. Walker , Roy E. Scheuerlein , Sucheta Nallamothu , Alper Ilkbahar , Luca G. Fasoli
发明人： En-Hsing Chen , Andrew J. Walker , Roy E. Scheuerlein , Sucheta Nallamothu , Alper Ilkbahar , Luca G. Fasoli
IPC分类号： G11C11/34 , G11C16/04
CPC分类号： G11C16/3418 , G11C11/5621 , G11C16/0483 , G11C16/10 , G11C16/3427 , H01L27/115 , H01L27/11568 , H01L27/1159
摘要： An exemplary NAND string memory array provides for capacitive boosting of a half-selected memory cell channel to reduce program disturb effects of the half selected cell. To reduce the effect of leakage current degradation of the boosted level, multiple programming pulses of a shorter duration are employed to limit the time period during which such leakage currents may degrade the voltage within the unselected NAND strings. In addition, multiple series select devices at one or both ends of each NAND string further ensure reduced leakage through such select devices, for both unselected and selected NAND strings. In certain exemplary embodiments, a memory array includes series-connected NAND strings of memory cell transistors having a charge storage dielectric, and includes more than one plane of memory cells formed above a substrate.
摘要翻译：示例性的NAND串存储器阵列提供半选择的存储器单元通道的电容性升压以减少半选择单元的程序干扰效应。为了减小升压电平的漏电流劣化的影响，采用较短持续时间的多个编程脉冲来限制这种漏电流可能降低未选择的NAND串中的电压的时间周期。此外，在每个NAND串的一端或两端的多个串联选择装置进一步确保了对于未选择的和选择的NAND串的这种选择装置的减少的泄漏。在某些示例性实施例中，存储器阵列包括具有电荷存储电介质的存储单元晶体管的串联连接的NAND串，并且包括形成在衬底上方的多于一个的存储单元平面。

3. 发明授权

US07023739B2 NAND memory array incorporating multiple write pulse programming of individual memory cells and method for operation of same 有权
标题翻译： NAND存储器阵列结合了各个存储单元的多个写脉冲编程及其操作方法
公开(公告)号：US07023739B2
公开(公告)日：2006-04-04
申请号：US10729844
申请日：2003-12-05
申请人： En-Hsing Chen , Andrew J. Walker , Roy E. Scheuerlein , Sucheta Nallamothu , Alper Ilkbahar , Luca G. Fasoli
发明人： En-Hsing Chen , Andrew J. Walker , Roy E. Scheuerlein , Sucheta Nallamothu , Alper Ilkbahar , Luca G. Fasoli
IPC分类号： G11C16/04 , G11C16/06
CPC分类号： G11C16/10 , G11C11/5671 , G11C16/0466 , G11C16/0483
摘要： An exemplary NAND string memory array provides for capacitive boosting of a half-selected memory cell channel to reduce program disturb effects of the half selected cell. To reduce the effect of leakage current degradation of the boosted level, multiple programming pulses of a shorter duration are employed to limit the time period during which such leakage currents may degrade the voltage within the unselected NAND strings. In addition, multiple series select devices at one or both ends of each NAND string further ensure reduced leakage through such select devices, for both unselected and selected NAND strings. In certain exemplary embodiments, a memory array includes series-connected NAND strings of memory cell transistors having a charge storage dielectric, and includes more than one plane of memory cells formed above a substrate.
摘要翻译：示例性的NAND串存储器阵列提供半选择的存储器单元通道的电容性升压以减少半选择单元的程序干扰效应。为了减小升压电平的漏电流劣化的影响，采用较短持续时间的多个编程脉冲来限制这种漏电流可能降低未选择的NAND串中的电压的时间周期。此外，在每个NAND串的一端或两端的多个串联选择装置进一步确保了对于未选择的和选择的NAND串的这种选择装置的减少的泄漏。在某些示例性实施例中，存储器阵列包括具有电荷存储电介质的存储单元晶体管的串联连接的NAND串，并且包括形成在衬底上方的多于一个的存储单元平面。

4. 发明授权

US07508714B2 Memory array incorporating mirrored NAND strings and non-shared global bit lines within a block 有权
标题翻译：存储器阵列，包含一个块内的镜像NAND串和非共享全局位线
公开(公告)号：US07508714B2
公开(公告)日：2009-03-24
申请号：US11751567
申请日：2007-05-21
申请人： Luca G. Fasoli , Roy E. Scheuerlein , En-Hsing Chen , Sucheta Nallamothu , Maitreyee Mahajani , Andrew J. Walker
发明人： Luca G. Fasoli , Roy E. Scheuerlein , En-Hsing Chen , Sucheta Nallamothu , Maitreyee Mahajani , Andrew J. Walker
IPC分类号： G11C11/34 , G11C16/04
CPC分类号： G11C16/04
摘要： An exemplary NAND string memory array includes at least one plane of memory cells, said memory cells comprising thin film modifiable conductance switch devices and which cells are arranged in a plurality of series-connected NAND strings, said NAND strings including a series select device at each end thereof. Another exemplary NAND string memory array includes a group of more than four adjacent NAND strings within the same memory block each associated with a respective global bit line not shared by the other NAND string of the group. Another exemplary NAND string memory array includes NAND strings on identical pitch as their respective global bit lines.
摘要翻译：示例性NAND串存储器阵列包括存储器单元的至少一个平面，所述存储器单元包括薄膜可修改的电导开关器件，并且哪些单元被布置在多个串联的NAND串中，所述NAND串包括每个的串联选择器件结束。另一示例性的NAND串存储器阵列包括在相同存储器块内的多于四个相邻的NAND串的组，每组相关联的不同于该组的另一个NAND串的相应全局位线。另一示例性的NAND串存储器阵列包括与它们各自的全局位线相同的音调的NAND串。

5. 发明授权

US07221588B2 Memory array incorporating memory cells arranged in NAND strings 有权
标题翻译：包含排列在NAND串中的存储单元的存储器阵列
公开(公告)号：US07221588B2
公开(公告)日：2007-05-22
申请号：US10729843
申请日：2003-12-05
申请人： Luca G. Fasoli , Roy E. Scheuerlein , En-Hsing Chen , Sucheta Nallamothu , Maitreyee Mahajani , Andrew J. Walker
发明人： Luca G. Fasoli , Roy E. Scheuerlein , En-Hsing Chen , Sucheta Nallamothu , Maitreyee Mahajani , Andrew J. Walker
IPC分类号： G11C11/34
CPC分类号： G11C16/04
摘要： An exemplary NAND string memory array includes at least one plane of memory cells, said memory cells comprising thin film modifiable conductance switch devices and which cells are arranged in a plurality of series-connected NAND strings, and NAND strings including a series select device at each end thereof. Another exemplary NAND string memory array includes a group of more than four adjacent NAND strings within the same memory block each associated with a respective global bit line not shared by the other NAND string of the group. Another exemplary NAND string memory array includes NAND strings on identical pitch as their respective global bit lines.
摘要翻译：示例性NAND串存储器阵列包括至少一个存储器单元平面，所述存储器单元包括薄膜可修改的电导开关器件，并且哪些单元被布置在多个串联的NAND串中，以及包括每个的串联选择器件的NAND串结束。另一示例性的NAND串存储器阵列包括在相同存储器块内的多于四个相邻的NAND串的组，每组相关联的不同于该组的另一个NAND串的相应全局位线。另一示例性的NAND串存储器阵列包括与它们各自的全局位线相同的音调的NAND串。

6. 发明授权

US07505321B2 Programmable memory array structure incorporating series-connected transistor strings and methods for fabrication and operation of same 有权
标题翻译：并联串联晶体管串的可编程存储器阵列结构及其制造和操作的方法
公开(公告)号：US07505321B2
公开(公告)日：2009-03-17
申请号：US10335078
申请日：2002-12-31
申请人： Roy E. Scheuerlein , Christopher Petti , Andrew J. Walker , En-Hsing Chen , Sucheta Nallamothu , Alper Ilkbahar , Luca Fasoli , Igor Koutnetsov
发明人： Roy E. Scheuerlein , Christopher Petti , Andrew J. Walker , En-Hsing Chen , Sucheta Nallamothu , Alper Ilkbahar , Luca Fasoli , Igor Koutnetsov
IPC分类号： G11C11/34 , G11C16/04 , G11C5/06 , G11C8/00
CPC分类号： H01L27/11568 , G11C11/5621 , G11C16/0483 , H01L27/115 , H01L27/1159
摘要： A three-dimensional flash memory array incorporates thin film transistors having a charge storage dielectric arranged in series-connected NAND strings to achieve a 4F2 memory cell layout. The memory array may be programmed and erased using only tunneling currents, and no leakage paths are formed through non-selected memory cells. Each NAND string includes two block select devices for respectively coupling one end of the NAND string to a global bit line, and the other end to a shared bias node. Pairs of NAND strings within a block share the same global bit line. The memory cells are preferably depletion mode SONOS devices, as are the block select devices. The memory cells may be programmed to a near depletion threshold voltage, and the block select devices are maintained in a programmed state having a near depletion mode threshold voltage. NAND strings on more than one layer may be connected to global bit lines on a single layer. By interleaving the NAND strings on each memory level and using two shared bias nodes per block, very little additional overhead is required for the switch devices at each end of the NAND strings. The NAND strings on different memory levels are preferably connected together by way of vertical stacked vias, each preferably connecting to more than one memory level. Each memory level may be produced with less than three masks per level.
摘要翻译：三维闪存阵列包括具有布置在串联连接的NAND串中的电荷存储电介质的薄膜晶体管，以实现4F2存储单元布局。可以仅使用隧穿电流对存储器阵列进行编程和擦除，并且不通过未选择的存储器单元形成泄漏路径。每个NAND串包括用于分别将NAND串的一端耦合到全局位线的两个块选择器件，另一端连接到共享偏置节点。块内的一对NAND串共享相同的全局位线。存储器单元优选地是耗尽型SONOS器件，块选择器件也是如此。存储器单元可以被编程为接近耗尽阈值电压，并且块选择器件保持在具有接近耗尽模式阈值电压的编程状态。多个层上的NAND串可以连接到单个层上的全局位线。通过在每个存储器级别交错NAND串并且每个块使用两个共享偏置节点，对于NAND串的每一端的开关器件需要非常少的附加开销。不同存储器级别的NAND串优选通过垂直堆叠的通孔连接在一起，每个优选地连接到多于一个的存储器级。每个存储器级别可以以每级别少于三个掩码来生成。

7. 发明授权

US07005350B2 Method for fabricating programmable memory array structures incorporating series-connected transistor strings 有权
标题翻译：用于制造并入串联晶体管串的可编程存储器阵列结构的方法
公开(公告)号：US07005350B2
公开(公告)日：2006-02-28
申请号：US10335089
申请日：2002-12-31
申请人： Andrew J. Walker , En-Hsing Chen , Sucheta Nallamothu , Roy E. Scheuerlein , Alper Ilkbahar , Luca Fasoli , Igor Koutnetsov , Christopher Petti
发明人： Andrew J. Walker , En-Hsing Chen , Sucheta Nallamothu , Roy E. Scheuerlein , Alper Ilkbahar , Luca Fasoli , Igor Koutnetsov , Christopher Petti
IPC分类号： H01L21/336
CPC分类号： H01L27/11568 , G11C16/0483 , H01L27/115 , H01L27/11502
摘要： A three-dimensional flash memory array incorporates thin film transistors having a charge storage dielectric arranged in series-connected NAND strings to achieve a 4F2 memory cell layout. The memory array may be programmed and erased using only tunneling currents, and no leakage paths are formed through non-selected memory cells. Each NAND string includes two block select devices for respectively coupling one end of the NAND string to a global bit line, and the other end to a shared bias node. Pairs of NAND strings within a block share the same global bit line. The memory cells are preferably depletion mode SONOS devices, as are the block select devices. The memory cells may be programmed to a near depletion threshold voltage, and the block select devices are maintained in a programmed state having a near depletion mode threshold voltage. NAND strings on more than one layer may be connected to global bit lines on a single layer. By interleaving the NAND strings on each memory level and using two shared bias nodes per block, very little additional overhead is required for the switch devices at each end of the NAND strings. The NAND strings on different memory levels are preferably connected together by way of vertical stacked vias, each preferably connecting to more than one memory level. Each memory level may be produced with less than three masks per level.
摘要翻译：三维闪存阵列包括具有布置在串联连接的NAND串中的电荷存储电介质的薄膜晶体管，以实现4F 2存储单元布局。可以仅使用隧穿电流对存储器阵列进行编程和擦除，并且不通过未选择的存储器单元形成泄漏路径。每个NAND串包括用于分别将NAND串的一端耦合到全局位线的两个块选择器件，另一端连接到共享偏置节点。块内的一对NAND串共享相同的全局位线。存储器单元优选地是耗尽型SONOS器件，块选择器件也是如此。存储器单元可以被编程为接近耗尽阈值电压，并且块选择器件保持在具有接近耗尽模式阈值电压的编程状态。多个层上的NAND串可以连接到单个层上的全局位线。通过在每个存储器级别交错NAND串并且每个块使用两个共享偏置节点，对于NAND串的每一端的开关器件需要非常少的附加开销。不同存储器级别的NAND串优选通过垂直堆叠的通孔连接在一起，每个优选地连接到多于一个的存储器级。每个存储器级别可以以每级别少于三个掩码来生成。

8. 发明授权

US06960794B2 Formation of thin channels for TFT devices to ensure low variability of threshold voltages 有权
标题翻译：形成TFT器件的薄通道，以确保阈值电压的低变化
公开(公告)号：US06960794B2
公开(公告)日：2005-11-01
申请号：US10334649
申请日：2002-12-31
申请人： Andrew J. Walker , S. Brad Herner , Maitreyee Mahajani , En-Hsing Chen , Roy E. Scheuerlein , Sucheta Nallamothu , Mark Clark
发明人： Andrew J. Walker , S. Brad Herner , Maitreyee Mahajani , En-Hsing Chen , Roy E. Scheuerlein , Sucheta Nallamothu , Mark Clark
IPC分类号： H01L27/12 , H01L29/786 , H01L29/76
CPC分类号： H01L29/78696 , H01L27/12 , H01L29/78675
摘要： A thin film transistor with a channel less than 100 angstroms thick, preferably less than 80 angstroms thick, preferably less than 60 angstroms thick. The very thin channel reduces variability of threshold voltage from one TFT to the next. This is particularly advantageous for TFT memory arrays. It is possible that an extremely thin channel restricts the size of grains, forcing many small grains to be formed.
摘要翻译：一个薄膜晶体管，其通道厚度小于100埃，优选小于80埃，优选小于60埃。非常薄的通道降低了从一个TFT到下一个TFT的阈值电压的变化。这对于TFT存储器阵列是特别有利的。可能的是，极细的通道限制了晶粒的尺寸，迫使许多小晶粒形成。

9. 发明授权

US07383476B2 System architecture and method for three-dimensional memory 有权
标题翻译：三维内存的系统架构和方法
公开(公告)号：US07383476B2
公开(公告)日：2008-06-03
申请号：US10774758
申请日：2004-02-09
申请人： Matthew P. Crowley , Luca G. Fasoli , Alper Ilkbahar , Mark G. Johnson , Bendik Kleveland , Thomas H. Lee , Roy E. Scheuerlein
发明人： Matthew P. Crowley , Luca G. Fasoli , Alper Ilkbahar , Mark G. Johnson , Bendik Kleveland , Thomas H. Lee , Roy E. Scheuerlein
IPC分类号： G11C29/00 , G11C11/00
CPC分类号： G06F11/1008 , G11C7/22 , G11C17/00
摘要： In one embodiment, a chip-level architecture is provided comprising a monolithic three-dimensional write-once memory array and at least two of the following system blocks: an Error Checking & Correction Circuit (ECC); a Checkerboard Memory Array containing sub arrays; a Write Controller; a Charge Pump; a Vread Generator; an Oscillator; a Band Gap Reference Generator; and a Page Register/Fault Memory. In another embodiment, a chip-level architecture is provided comprising a monolithic three-dimensional write-once memory array, ECC, and smart write. The monolithic three-dimensional write-once memory array comprises a first conductor, a first memory cell above the first conductor, a second conductor above the first memory cell, and a second memory cell above the second conductor, wherein the second conductor is the only conductor between the first and second memory cells.
摘要翻译：在一个实施例中，提供了包括单片三维一次写入存储器阵列和以下系统块中的至少两个的芯片级结构：错误检查和校正电路（ECC）; 包含子数组的棋盘存储器阵列; 写控制器电荷泵; Vread发生器; 振荡器带隙参考发生器; 和页面寄存器/故障存储器。在另一个实施例中，提供了包括单片三维一次写入存储器阵列ECC和智能写入的芯片级架构。单片三维一次写入存储器阵列包括第一导体，第一导体上方的第一存储单元，第一存储单元上方的第二导体和第二导体上方的第二存储单元，其中第二导体是唯一的第一和第二存储单元之间的导体。

10. 发明授权

US08659028B2 Three-dimensional memory device incorporating segmented array line memory array 有权
公开(公告)号：US08659028B2
公开(公告)日：2014-02-25
申请号：US11764789
申请日：2007-06-18
申请人： Roy E. Scheuerlein , Alper Ilkbahar , Luca G. Fasoli
发明人： Roy E. Scheuerlein , Alper Ilkbahar , Luca G. Fasoli
IPC分类号： H01L27/10
CPC分类号： G11C7/18 , G11C16/0416 , G11C16/0466 , G11C17/12 , G11C17/18 , G11C2213/71 , G11C2213/77 , Y10S257/91
摘要： A three-dimensional (3D) high density memory array includes multiple layers of segmented bit lines (i.e., sense lines) with segment switch devices within the memory array that connect the segments to global bit lines. The segment switch devices reside on one or more layers of the integrated circuit, preferably residing on each bit line layer. The global bit lines reside preferably on one layer below the memory array, but may reside on more than one layer. The bit line segments preferably share vertical connections to an associated global bit line. In certain EEPROM embodiments, the array includes multiple layers of segmented bit lines with segment connection switches on multiple layers and shared vertical connections to a global bit line layer. Such memory arrays may be realized with much less write-disturb effects for half selected memory cells, and may be realized with a much smaller block of cells to be erased.

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