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    • 10. 发明授权
    • Scanning electron microscope
    • 扫描电子显微镜
    • US06403968B1
    • 2002-06-11
    • US09347844
    • 1999-07-02
    • Eiichi HazakiMasaki KuriharaKaname Takahashi
    • Eiichi HazakiMasaki KuriharaKaname Takahashi
    • H01J3720
    • H01J37/20H01J2237/0216H01J2237/28
    • Oil from an oil source is introduced into an inside of a reciprocal oil hydraulic pressure cylinder through a port, and a lock shaft is pushed against a lock plate by the oil pressure to restrict movement of a tilt table. A cylindrical portion made of a material having a large friction coefficient to the lock plate is attached to a top end of the lock shaft so as to contact with the lock plate in a surface contact state. Releasing of stage locking is performed by introducing the oil into the inside of the reciprocal oil hydraulic pressure cylinder through another port to draw back the lock shaft by the oil pressure. Thereby, the stiffness of the sample stage lock mechanism in the x-direction becomes large and the friction force in the y- and z-directions also becomes large. Therefore, vibration of the tilt table in the x-, y- and z-directions can be effectively suppressed.
    • 来自油源的油通过端口被引入往复式油压缸的内部,并且通过油压将锁定轴推向锁定板以限制倾斜台的移动。 由锁定板具有大的摩擦系数的材料制成的圆筒部分附接到锁定轴的顶端,以便在表面接触状态下与锁定板接触。 通过另一端口将油引入往复式油压缸的内部,通过油压拉回锁定轴来执行级锁定的释放。 因此,样品台锁定机构在x方向的刚度变大,并且在y方向和z方向上的摩擦力也变大。 因此,可以有效地抑制倾斜台在x,y和z方向上的振动。