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    • 1. 发明申请
    • STAGE DEVICE AND CONTROL METHOD FOR STAGE DEVICE
    • 舞台设备和舞台设备的控制方法
    • US20140117251A1
    • 2014-05-01
    • US14124722
    • 2012-06-06
    • Yasuyuki MomoiKaname TakahashiShigeru Haneda
    • Yasuyuki MomoiKaname TakahashiShigeru Haneda
    • H01J37/20
    • H01J37/20H01J2237/20214H01J2237/20242H01J2237/20285H01J2237/20292H01J2237/28
    • In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
    • 在本发明中,舞台装置被配置为:在标本,样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值,进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。
    • 2. 发明申请
    • STAGE APPARATUS
    • 阶段装置
    • US20130082190A1
    • 2013-04-04
    • US13703688
    • 2011-06-15
    • Yasuyuki MomoiKoichiro TekeuchiKaname TakahashiShigeru Haneda
    • Yasuyuki MomoiKoichiro TekeuchiKaname TakahashiShigeru Haneda
    • G21K5/08
    • G21K5/08H01J37/20H01J2237/20278
    • Fluctuation in speed when a stage with a sample mounted thereon is moved at low speed is reduced such that an image to be observed is moved at constant speed when performing high-magnification observation using a scanning electron microscope. A control amount is obtained by compensation means from the deviation between position information obtained from position information detected by position detection means through a first low-pass filter and a command value obtained by integrating a speed command value input from stage operation input means and through a second low-pass filter having the same frequency characteristic as the first low-pass filter, and a driving signal to be output to driving means is generated from the added value of the control amount and the speed command value by waveform output means.
    • 当安装其上的样品的载物台以低速移动时,速度波动减小,使得使用扫描电子显微镜进行高倍率观察时,要观察的图像以恒定速度移动。 通过补偿装置,通过由位置检测装置通过第一低通滤波器检测到的位置信息和通过积分从载物台操作输入装置输入的速度指令值而获得的指令值,通过补偿装置获得控制量,并通过 具有与第一低通滤波器相同的频率特性的第二低通滤波器,并且通过波形输出装置从控制量和速度指令值的相加值产生要输出到驱动装置的驱动信号。
    • 4. 发明授权
    • Magnetic element and signal processing device
    • 磁性元件和信号处理装置
    • US07598578B2
    • 2009-10-06
    • US11390475
    • 2006-03-28
    • Shiho NakamuraHirofumi MoriseShigeru Haneda
    • Shiho NakamuraHirofumi MoriseShigeru Haneda
    • H01L41/00
    • H01F10/3268B82Y25/00G11C11/16H01F10/3254H01F10/329H01L29/66984H01L43/08Y10S977/933
    • A magnetic element includes a channel layer, a first magnetic electrode which is in contact with the channel layer, a second magnetic electrode which is in contact with the channel layer and is insulated from the first magnetic electrode, a first intermediate layer which is provided adjacent to the first magnetic electrode and has a first insulating layer, a first magnetic layer which is provided in contact with a surface of the first intermediate layer on an opposite side to a surface contacting the first magnetic electrode to transfer magnetization to the first magnetic electrode, a first electrode which is connected to the first magnetic electrode, and a second electrode which is connected to the second magnetic electrode, at least one of the first electrode and the second electrode outputting a first signal which changes depending on a magnetic arrangement of the first magnetic electrode and the second magnetic electrode.
    • 磁性元件包括沟道层,与沟道层接触的第一磁电极,与沟道层接触并与第一磁极绝缘的第二磁极,邻近设置的第一中间层 并且具有第一绝缘层,第一磁性层与第一中间层的与第一磁极接触的表面的相对侧与第一中间层的表面接触以将磁化转移到第一磁极, 连接到第一磁极的第一电极和连接到第二磁极的第二电极,第一电极和第二电极中的至少一个输出根据第一电极的磁性排列而变化的第一信号 磁极和第二磁极。
    • 9. 发明授权
    • Magnetic element and magnetic element array
    • 磁性元件和磁性元件阵列
    • US06906949B1
    • 2005-06-14
    • US10401865
    • 2003-03-31
    • Shiho NakamuraShigeru HanedaHiroaki Yoda
    • Shiho NakamuraShigeru HanedaHiroaki Yoda
    • G11C11/14G11C11/15G11C11/16H01F10/32H01L27/22H01L43/08
    • H01L43/08B82Y25/00G11C11/15G11C11/16H01F10/3263H01F10/329H01L27/228
    • A magnetic element comprises a first magnetic reference part (A) including a first ferromagnetic substance pinned in magnetization (M1) substantially in a first direction, a second magnetic reference part (E) including a second ferromagnetic substance pinned in magnetization (M3) substantially in a second direction, and a magnetic recording part (C) provided between the first and second magnetic reference parts. The magnetic recording part includes a third ferromagnetic substance. A spin transfer intermediate part (B) is provided between the first magnetic reference part and the magnetic recording part. An intermediate part (D) is provided between the second magnetic reference part and the magnetic recording part. A magnetization (M2) of the third ferromagnetic substance can be directed in a direction parallel or anti-parallel to the first direction by passing a writing current between the first magnetic reference part and the magnetic recording part. A relative relation between the second direction and the direction of the magnetization of the third ferromagnetic substance can be detected by passing a sense current between the second magnetic reference part and the magnetic recording part.
    • 磁性元件包括:第一磁性参考部分(A),包括基本上沿第一方向被钉扎在磁化(M 1)中的第一铁磁物质;第二磁性参考部分(E),包括在磁化(M 3)中被钉扎的第二铁磁性物质, 基本上在第二方向上的磁记录部分(C)和设置在第一和第二磁参考部分之间的磁记录部分(C)。 磁记录部分包括第三铁磁物质。 自旋转移中间部分(B)设置在第一磁参考部分和磁记录部分之间。 中间部分(D)设置在第二磁参考部分和磁记录部分之间。 第三铁磁性物质的磁化强度(M 2)可以通过使第一磁性参考部件和磁性记录部件之间的写入电流通过而在与第一方向平行或反平行的方向上被引导。 可以通过在第二磁参考部分和磁记录部分之间通过感测电流来检测第二方向与第三铁磁物质的磁化方向之间的相对关系。
    • 10. 发明授权
    • Stage device and control method for stage device
    • 舞台装置的舞台装置和控制方法
    • US08907303B2
    • 2014-12-09
    • US14124722
    • 2012-06-06
    • Yasuyuki MomoiKaname TakahashiShigeru Haneda
    • Yasuyuki MomoiKaname TakahashiShigeru Haneda
    • H01J37/26H01J37/20
    • H01J37/20H01J2237/20214H01J2237/20242H01J2237/20285H01J2237/20292H01J2237/28
    • In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
    • 在本发明中,舞台装置被配置为:在标本,样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值,进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。