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1. 发明申请

US20140117251A1 STAGE DEVICE AND CONTROL METHOD FOR STAGE DEVICE 有权
标题翻译：舞台设备和舞台设备的控制方法
公开(公告)号：US20140117251A1
公开(公告)日：2014-05-01
申请号：US14124722
申请日：2012-06-06
申请人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
发明人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/28
摘要： In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
摘要翻译：在本发明中，舞台装置被配置为：在标本，样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值，进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。

2. 发明申请

US20130082190A1 STAGE APPARATUS 审中-公开
标题翻译：阶段装置
公开(公告)号：US20130082190A1
公开(公告)日：2013-04-04
申请号：US13703688
申请日：2011-06-15
申请人： Yasuyuki Momoi , Koichiro Tekeuchi , Kaname Takahashi , Shigeru Haneda
发明人： Yasuyuki Momoi , Koichiro Tekeuchi , Kaname Takahashi , Shigeru Haneda
IPC分类号： G21K5/08
CPC分类号： G21K5/08 , H01J37/20 , H01J2237/20278
摘要： Fluctuation in speed when a stage with a sample mounted thereon is moved at low speed is reduced such that an image to be observed is moved at constant speed when performing high-magnification observation using a scanning electron microscope. A control amount is obtained by compensation means from the deviation between position information obtained from position information detected by position detection means through a first low-pass filter and a command value obtained by integrating a speed command value input from stage operation input means and through a second low-pass filter having the same frequency characteristic as the first low-pass filter, and a driving signal to be output to driving means is generated from the added value of the control amount and the speed command value by waveform output means.
摘要翻译：当安装其上的样品的载物台以低速移动时，速度波动减小，使得使用扫描电子显微镜进行高倍率观察时，要观察的图像以恒定速度移动。通过补偿装置，通过由位置检测装置通过第一低通滤波器检测到的位置信息和通过积分从载物台操作输入装置输入的速度指令值而获得的指令值，通过补偿装置获得控制量，并通过具有与第一低通滤波器相同的频率特性的第二低通滤波器，并且通过波形输出装置从控制量和速度指令值的相加值产生要输出到驱动装置的驱动信号。

3. 发明授权

US07977693B2 Semiconductor light-emitting material with tetrahedral structure formed therein 有权
标题翻译：在其中形成四面体结构的半导体发光材料
公开(公告)号：US07977693B2
公开(公告)日：2011-07-12
申请号：US11531426
申请日：2006-09-13
申请人： Tatsuo Shimizu , Kazushige Yamamoto , Shigeru Haneda
发明人： Tatsuo Shimizu , Kazushige Yamamoto , Shigeru Haneda
IPC分类号： H01L33/00
CPC分类号： H01L33/34 , H01L27/1443 , H01L31/153 , H01S5/0207 , H01S5/0261 , H01S5/0262 , H01S5/028 , H01S5/18311 , H01S5/18369 , H01S5/22 , H01S5/305 , H01S5/3054 , H01S5/3201 , H01S5/3224 , H01S5/423
摘要： A semiconductor light-emitting material includes a semiconductor substance including a matrix semiconductor whose constituent atoms are bonded to form a tetrahedral structure, an impurity atom S substituted for an atom in a lattice site of the matrix semiconductor, and an impurity atom I inserted in a interstitial site of the matrix semiconductor, the impurity atom S and the impurity atom I being bonded through charge transfer therebetween in a state that the impurity atom S has an electric charge coincident with that of the constituent atom of the matrix semiconductor and the impurity atom I has an electron configuration of a closed shell structure, in which the semiconductor substance is stretched in a direction of a bond forming the tetrahedral structure.
摘要翻译：半导体发光材料包括半导体物质，其包含其组成原子键合以形成四面体结构的基质半导体，取代基质半导体的晶格位置中的原子的杂质原子S和插入到基质半导体中的杂质原子I 在杂质原子S的电荷与矩阵半导体的构成原子的电荷一致的状态下，杂质原子S和杂质原子I通过电荷转移而键合的杂质原子I和杂质原子I 具有闭合壳结构的电子构造，其中半导体物质沿形成四面体结构的键的方向被拉伸。

4. 发明授权

US07598578B2 Magnetic element and signal processing device 失效
标题翻译：磁性元件和信号处理装置
公开(公告)号：US07598578B2
公开(公告)日：2009-10-06
申请号：US11390475
申请日：2006-03-28
申请人： Shiho Nakamura , Hirofumi Morise , Shigeru Haneda
发明人： Shiho Nakamura , Hirofumi Morise , Shigeru Haneda
IPC分类号： H01L41/00
CPC分类号： H01F10/3268 , B82Y25/00 , G11C11/16 , H01F10/3254 , H01F10/329 , H01L29/66984 , H01L43/08 , Y10S977/933
摘要： A magnetic element includes a channel layer, a first magnetic electrode which is in contact with the channel layer, a second magnetic electrode which is in contact with the channel layer and is insulated from the first magnetic electrode, a first intermediate layer which is provided adjacent to the first magnetic electrode and has a first insulating layer, a first magnetic layer which is provided in contact with a surface of the first intermediate layer on an opposite side to a surface contacting the first magnetic electrode to transfer magnetization to the first magnetic electrode, a first electrode which is connected to the first magnetic electrode, and a second electrode which is connected to the second magnetic electrode, at least one of the first electrode and the second electrode outputting a first signal which changes depending on a magnetic arrangement of the first magnetic electrode and the second magnetic electrode.
摘要翻译：磁性元件包括沟道层，与沟道层接触的第一磁电极，与沟道层接触并与第一磁极绝缘的第二磁极，邻近设置的第一中间层并且具有第一绝缘层，第一磁性层与第一中间层的与第一磁极接触的表面的相对侧与第一中间层的表面接触以将磁化转移到第一磁极，连接到第一磁极的第一电极和连接到第二磁极的第二电极，第一电极和第二电极中的至少一个输出根据第一电极的磁性排列而变化的第一信号磁极和第二磁极。

5. 发明授权

US07561385B2 Magneto-resistive element in which a free layer includes ferromagnetic layers and a non-magnetic layer interposed therebetween 有权
标题翻译：其中自由层包括铁磁层和插入其间的非磁性层的磁阻元件
公开(公告)号：US07561385B2
公开(公告)日：2009-07-14
申请号：US11087762
申请日：2005-03-24
申请人： Shiho Nakamura , Shigeru Haneda
发明人： Shiho Nakamura , Shigeru Haneda
IPC分类号： G11B5/39
CPC分类号： H01L43/08 , G11B5/39
摘要： A magneto-resistive element comprising a free layer having two ferromagnetic layers having a nonmagnetic layer interposed therebetween are coupled with each other in an anti-ferromagnetic manner, a difference between an absolute value of a total of magnetizations of at least one ferromagnetic layer in which the magnetization direction is a first direction and an absolute value of a total of magnetizations of at least one ferromagnetic layer in which the magnetization direction is a second direction which is opposite to the first direction is equal to or smaller than 5×10−15 emu, and planes parallel to a substrate of the ferromagnetic layers are smaller as the planes are distant from the substrate.
摘要翻译：包括具有插入其间具有非磁性层的两个铁磁层的自由层的磁阻元件以反铁磁方式彼此耦合，其中至少一个铁磁层的总磁化的绝对值之间的差异在其中磁化方向是第一方向，并且其中磁化方向是与第一方向相反的第二方向的至少一个铁磁层的磁化总和的绝对值等于或小于5×10-15emu，并且平行于铁磁性层的基板的平面随着平面远离基板而变小。

6. 发明授权

US07494724B2 Magnetoresistance effect element, its manufacturing method, magnetic reproducing element and magnetic memory 有权
标题翻译：磁阻效应元件，其制造方法，磁再现元件和磁存储器
公开(公告)号：US07494724B2
公开(公告)日：2009-02-24
申请号：US11773294
申请日：2007-07-03
申请人： Shiho Okuno , Yuichi Ohsawa , Shigeru Haneda , Yuzo Kamiguchi , Tatsuya Kishi
发明人： Shiho Okuno , Yuichi Ohsawa , Shigeru Haneda , Yuzo Kamiguchi , Tatsuya Kishi
IPC分类号： G11B5/39
CPC分类号： H01L43/08 , B32B7/02 , B82Y10/00 , B82Y25/00 , G01R33/093 , G11B5/39 , G11B5/3929 , G11B2005/3996 , G11C11/16 , H01L43/12 , Y10T29/49043 , Y10T29/49044 , Y10T428/1114 , Y10T428/1143 , Y10T428/12465 , Y10T428/12931 , Y10T428/12986 , Y10T428/325
摘要： A method of manufacturing a magnetoresistance effect element includes forming an insulating layer on a first ferromagnetic layer, forming an aperture reaching the first ferromagnetic layer by thrusting a needle from the top surface of the insulating layer, and depositing a ferromagnetic material to form a second ferromagnetic layer overlying the insulating layer which buries the aperture. The aperture can have an opening width not larger than 20 nm. A current flowing between the first ferromagnetic layer and the needle can be monitored, and thrusting of the needle an be interrupted when the current reaches a predetermined value.
摘要翻译：一种制造磁阻效应元件的方法包括：在第一铁磁层上形成绝缘层，通过从绝缘层的顶表面推出针而形成到达第一铁磁层的孔，以及沉积铁磁材料以形成第二铁磁体覆盖掩埋孔的绝缘层的层。孔径可以具有不大于20nm的开口宽度。可以监测在第一铁磁层和针之间流动的电流，并且当电流达到预定值时针头的推压被中断。

7. 发明授权

US07355883B2 Magnetoresistance effect element, its manufacturing method, magnetic reproducing element and magnetic memory 有权
标题翻译：磁阻效应元件，其制造方法，磁再现元件和磁存储器
公开(公告)号：US07355883B2
公开(公告)日：2008-04-08
申请号：US11006594
申请日：2004-12-08
申请人： Shiho Okuno , Yuichi Ohsawa , Shigeru Haneda , Yuzo Kamiguchi , Tatsuya Kishi
发明人： Shiho Okuno , Yuichi Ohsawa , Shigeru Haneda , Yuzo Kamiguchi , Tatsuya Kishi
IPC分类号： G11C11/00
CPC分类号： H01L43/08 , B32B7/02 , B82Y10/00 , B82Y25/00 , G01R33/093 , G11B5/39 , G11B5/3929 , G11B2005/3996 , G11C11/16 , H01L43/12 , Y10T29/49043 , Y10T29/49044 , Y10T428/1114 , Y10T428/1143 , Y10T428/12465 , Y10T428/12931 , Y10T428/12986 , Y10T428/325
摘要： A magnetoresistance effect element includes a first ferromagnetic layer (1), insulating layer (3) overlying the first ferromagnetic layer, and second ferromagnetic layer (2) overlying the insulating layer. The insulating layer has formed a through hole (A) having an opening width not larger than 20 nm, and the first and second ferromagnetic layers are connected to each other via the through hole.
摘要翻译：磁阻效应元件包括第一铁磁层（1），覆盖第一铁磁层的绝缘层（3）和覆盖绝缘层的第二铁磁层（2）。绝缘层形成了具有不大于20nm的开口宽度的通孔（A），并且第一和第二铁磁层经由通孔相互连接。

8. 发明申请

US20060002185A1 Magnetic cell and magnetic memory 有权
公开(公告)号：US20060002185A1
公开(公告)日：2006-01-05
申请号：US11213865
申请日：2005-08-30
申请人： Shiho Nakamura , Shigeru Haneda , Yuichi Ohsawa
发明人： Shiho Nakamura , Shigeru Haneda , Yuichi Ohsawa
IPC分类号： G11C11/14
CPC分类号： H01L43/08 , G11C11/15 , G11C11/16 , G11C11/5607 , H01L27/224 , H01L27/228
摘要： A magnetic cell comprises: a first ferromagnetic layer whose magnetization is substantially fixed in a first direction; a second ferromagnetic layer whose magnetization is substantially fixed in a second direction opposite to the first direction; a third ferromagnetic layer provided between the first and the second ferromagnetic layers, a direction of magnetization of the third ferromagnetic layer being variable; a first intermediate layer provided between the first and the third ferromagnetic layers; and a second intermediate layer provided between the second and the third ferromagnetic layers. The direction of magnetization of the third ferromagnetic layer can be determined under an influence of spin-polarized electrons upon the third ferromagnetic layer by passing a current between the first and the second ferromagnetic layers.

9. 发明授权

US06906949B1 Magnetic element and magnetic element array 失效
标题翻译：磁性元件和磁性元件阵列
公开(公告)号：US06906949B1
公开(公告)日：2005-06-14
申请号：US10401865
申请日：2003-03-31
申请人： Shiho Nakamura , Shigeru Haneda , Hiroaki Yoda
发明人： Shiho Nakamura , Shigeru Haneda , Hiroaki Yoda
IPC分类号： G11C11/14 , G11C11/15 , G11C11/16 , H01F10/32 , H01L27/22 , H01L43/08
CPC分类号： H01L43/08 , B82Y25/00 , G11C11/15 , G11C11/16 , H01F10/3263 , H01F10/329 , H01L27/228
摘要： A magnetic element comprises a first magnetic reference part (A) including a first ferromagnetic substance pinned in magnetization (M1) substantially in a first direction, a second magnetic reference part (E) including a second ferromagnetic substance pinned in magnetization (M3) substantially in a second direction, and a magnetic recording part (C) provided between the first and second magnetic reference parts. The magnetic recording part includes a third ferromagnetic substance. A spin transfer intermediate part (B) is provided between the first magnetic reference part and the magnetic recording part. An intermediate part (D) is provided between the second magnetic reference part and the magnetic recording part. A magnetization (M2) of the third ferromagnetic substance can be directed in a direction parallel or anti-parallel to the first direction by passing a writing current between the first magnetic reference part and the magnetic recording part. A relative relation between the second direction and the direction of the magnetization of the third ferromagnetic substance can be detected by passing a sense current between the second magnetic reference part and the magnetic recording part.
摘要翻译：磁性元件包括：第一磁性参考部分（A），包括基本上沿第一方向被钉扎在磁化（M 1）中的第一铁磁物质;第二磁性参考部分（E），包括在磁化（M 3）中被钉扎的第二铁磁性物质，基本上在第二方向上的磁记录部分（C）和设置在第一和第二磁参考部分之间的磁记录部分（C）。磁记录部分包括第三铁磁物质。自旋转移中间部分（B）设置在第一磁参考部分和磁记录部分之间。中间部分（D）设置在第二磁参考部分和磁记录部分之间。第三铁磁性物质的磁化强度（M 2）可以通过使第一磁性参考部件和磁性记录部件之间的写入电流通过而在与第一方向平行或反平行的方向上被引导。可以通过在第二磁参考部分和磁记录部分之间通过感测电流来检测第二方向与第三铁磁物质的磁化方向之间的相对关系。

10. 发明授权

US08907303B2 Stage device and control method for stage device 有权
标题翻译：舞台装置的舞台装置和控制方法
公开(公告)号：US08907303B2
公开(公告)日：2014-12-09
申请号：US14124722
申请日：2012-06-06
申请人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
发明人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
IPC分类号： H01J37/26 , H01J37/20
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/28
摘要： In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
摘要翻译：在本发明中，舞台装置被配置为：在标本，样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值，进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。

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