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1. 发明授权

US4788596A Image stabilizing device 失效
标题翻译：影像稳定装置
公开(公告)号：US4788596A
公开(公告)日：1988-11-29
申请号：US855732
申请日：1986-04-25
申请人： Eigo Kawakami , Yukichi Niwa , Mitsutoshi Ohwada , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda
发明人： Eigo Kawakami , Yukichi Niwa , Mitsutoshi Ohwada , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda
IPC分类号： H04N5/232 , H04N5/228
CPC分类号： H04N5/23254 , H04N5/23212 , H04N5/23248 , H04N5/23287
摘要： A characteristic point such as an image contrast of a target image in an image screen of an object produced by an image sensor is counted, a correlation between counts at two points in time is determined. A drive means for preventing vibration of an imaging lens is controlled in accordance with the correlation signal and imaging information such as in-focus or out-of-focus information.
摘要翻译：计算特征点，例如由图像传感器产生的对象的图像画面中的目标图像的图像对比度，确定两个时间点的计数之间的相关性。根据相关信号和诸如焦点内或焦点外信息的成像信息来控制用于防止成像镜头的振动的驱动装置。

2. 发明授权

US4780739A Anti-vibration imaging device 失效
标题翻译：防震成像装置
公开(公告)号：US4780739A
公开(公告)日：1988-10-25
申请号：US900997
申请日：1986-08-27
申请人： Eigo Kawakami , Yukichi Niwa , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda , Mitsutoshi Ohwada
发明人： Eigo Kawakami , Yukichi Niwa , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda , Mitsutoshi Ohwada
IPC分类号： G02B27/64 , H04N5/232 , G03B7/08
CPC分类号： H04N5/23254 , G02B27/646 , H04N5/23248 , H04N5/23287 , G03B2217/005
摘要： An imaging device has detection means for detecting an image vibration of the imaging device and drive means for driving at least one of a photoelectric conversion device for converting a light of an object transmitted through a lens system of the imaging device to an electrical signal and the imaging device itself in a direction to cancel the vibration. For a high frequency image vibration, the vibration is compensated by using a piezoelectric device.
摘要翻译：一种成像装置具有用于检测成像装置的图像振动的检测装置和用于驱动用于将通过成像装置的透镜系统传输的物体的光转换成电信号的光电转换装置中的至少一个的驱动装置，成像装置本身在消除振动的方向上。对于高频图像振动，通过使用压电装置来补偿振动。

3. 发明授权

US4667316A Information recording-reproducing apparatus 失效
标题翻译：信息记录再现装置
公开(公告)号：US4667316A
公开(公告)日：1987-05-19
申请号：US586973
申请日：1984-03-07
申请人： Shigeyuki Suda , Yukichi Niwa , Yasuo Ogino , Eigo Kawakami , Mitsutoshi Ohwada
发明人： Shigeyuki Suda , Yukichi Niwa , Yasuo Ogino , Eigo Kawakami , Mitsutoshi Ohwada
IPC分类号： G11B7/09 , G11B7/08 , G11B7/12 , G11B7/095
CPC分类号： G11B7/08 , G11B7/12
摘要： An information recording-reproducing apparatus provided with a first light beam for recording information on a recording medium and a monitoring second light beam for reproducing the recorded information simultaneously with the recording is characterized in that when only the reproduction of already recorded information is effected, a focus control signal or a tracking control signal is obtained by the use of the first light beam.
摘要翻译：一种信息记录再现装置，其特征在于，当仅记录已经记录的信息的再现时，具有用于在记录介质上记录信息的第一光束和用于在记录中同时再现记录信息的监视第二光束，通过使用第一光束获得聚焦控制信号或跟踪控制信号。

4. 发明授权

US4985186A Process for producing optical element 失效
标题翻译：光学元件制造工艺
公开(公告)号：US4985186A
公开(公告)日：1991-01-15
申请号：US35773
申请日：1987-04-08
申请人： Noriyuki Nose , Toshiyuki Nakajima , Eigo Kawakami , Takeshi Baba , Nobuo Kushibiki , Masakazu Matsugu , Yukichi Niwa
发明人： Noriyuki Nose , Toshiyuki Nakajima , Eigo Kawakami , Takeshi Baba , Nobuo Kushibiki , Masakazu Matsugu , Yukichi Niwa
IPC分类号： B29C33/46 , B29C37/00 , B29C43/50 , B29D11/00
CPC分类号： B29D11/00855 , B29C33/46 , B29C37/0007 , B29C43/50 , B29D11/00432 , B29D11/00548 , B29L2011/0016 , Y10S425/808
摘要： A process for producing an optical element wherein an optical molding is formed by using a mold and thereafter released from the mold by supplying a gas to the boundary between the mold surface and the optical molding. In the process, no localized external force is applied to the optical molding during the release thereof, and therefore undesirable deformation or flaws of the optical molding are not caused.
摘要翻译：一种光学元件的制造方法，其中通过使用模具形成光学模制件，然后通过向模具表面和光学模制件之间的边界提供气体从模具中释放。在该过程中，在光学成型件的释放过程中不会施加局部的外力，因此不会引起不期望的光学成型的变形或缺陷。

5. 发明授权

US4802746A Variable-focus optical element and focus detecting device utilizing the same 失效
标题翻译：可变焦光学元件和利用其的焦点检测装置
公开(公告)号：US4802746A
公开(公告)日：1989-02-07
申请号：US832649
申请日：1986-02-25
申请人： Takeshi Baba , Shigeyuki Suda , Noriyuki Nose , Eigo Kawakami , Toshiyuki Nakajima , Nobuo Kushibiki
发明人： Takeshi Baba , Shigeyuki Suda , Noriyuki Nose , Eigo Kawakami , Toshiyuki Nakajima , Nobuo Kushibiki
IPC分类号： G02B3/14 , G02B7/36
CPC分类号： G02B7/36 , G02B3/14
摘要： A variable focus optical element comprises plural elastic members superposed in the axial direction and a deforming member having an aperture to cause the elastic member to protrude therefrom or descend therein thereby deforming the surface of the elastic members, and the modulus of elasticity of an elastic member at the protruding side is selected larger than that of another elastic member adjacent to first-mentioned elastic member at the protruding side. A focus detecting device comprises an imaging optical system having a variable-focus optical element, an image sensor provided at a determined image plane of the imaging optical system or an optically equivalent position, a sharpness detecting device for detecting the sharpness of the image from image signals obtained from the image sensor, and a device for varying the refractive power of the variable-focus optical element, and the focus state of the image on the image sensor is detected by comparing the sharpnesses detected by the sharpness detecting device at plural refractive powers of the variable-focus optical element.
摘要翻译：可变焦距光学元件包括沿轴向重叠的多个弹性构件和具有孔的变形构件，以使弹性构件从其突出或下降，从而使弹性构件的表面变形，并且弹性构件的弹性模量在突出侧的突出侧被选择为大于在突出侧与第一弹性构件相邻的另一个弹性构件的突出侧。焦点检测装置包括具有可变焦点光学元件的成像光学系统，设置在成像光学系统的确定的图像平面上的图像传感器或光学等效位置，用于从图像中检测图像的清晰度的锐度检测装置通过将由锐度检测装置检测的锐度与多个折射力进行比较来检测从图像传感器获得的信号和用于改变可变焦点光学元件的折射力的装置和图像在图像传感器上的聚焦状态的可变焦光学元件。

6. 发明授权

US5519686A Encoder for controlling measurements in the range of a few angstroms 失效
标题翻译：用于控制几埃范围内测量的编码器
公开(公告)号：US5519686A
公开(公告)日：1996-05-21
申请号：US438079
申请日：1995-05-08
申请人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawasa , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
发明人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawasa , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
IPC分类号： G01B7/00 , G01D5/244 , G01D5/245 , G01Q10/00 , G01Q20/04 , G01Q60/00 , G01Q60/10 , G01Q70/06 , G11B9/00 , G11B7/00
CPC分类号： G01D5/244 , G01B7/003 , G01D5/2451 , G11B9/1418 , G11B9/1427 , G11B9/1481 , B82Y10/00 , G01Q10/06 , G01Q60/16 , G01Q80/00 , G11B9/1472 , Y10S977/851 , Y10S977/861 , Y10S977/947
摘要： An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electrical voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.
摘要翻译：编码器包括具有形成在预定位置处的表面台阶的导电参考标尺; 导电探针，其具有与参考标尺相对设置的尖端; 其中所述参考标尺和所述探针在与所述探针的尖端和所述参考标尺的相反方向不同的方向上相对移动; 用于将电压施加到参考标尺和探针之间的部分; 用于检测参考标尺和探针之间的隧道电流变化的部分，在标尺和探头之间的相对移动时由电压施加部施加电压，检测部分检测当探针经过与参考刻度的表面台阶相对的位置时隧道电流的变化; 以及用于根据变化检测部分的检测来检测标尺和探针之间的相对移动量的部分。

7. 发明授权

US5721721A Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium 失效
标题翻译：两个扫描探针信息记录/再现系统，具有一个探针，用于检测记录介质上的原子参考位置
公开(公告)号：US5721721A
公开(公告)日：1998-02-24
申请号：US589473
申请日：1996-01-22
申请人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawase , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
发明人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawase , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
IPC分类号： G01B7/00 , G01D5/244 , G01D5/245 , G01Q10/00 , G01Q20/04 , G01Q60/00 , G01Q60/10 , G01Q70/06 , G11B9/00 , G11B7/00
CPC分类号： G01D5/244 , G01B7/003 , G01D5/2451 , G11B9/1418 , G11B9/1427 , G11B9/1481 , B82Y10/00 , G01Q10/06 , G01Q60/16 , G01Q80/00 , G11B9/1472 , Y10S977/851 , Y10S977/861 , Y10S977/947
摘要： An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electrical voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.
摘要翻译：编码器包括具有形成在预定位置处的表面台阶的导电参考标尺; 导电探针，其具有与参考标尺相对设置的尖端; 其中所述参考标尺和所述探针在与所述探针的尖端和所述参考标尺的相反方向不同的方向上相对移动; 用于将电压施加到参考标尺和探针之间的部分; 用于检测参考标尺和探针之间的隧道电流变化的部分，在标尺和探头之间的相对移动时由电压施加部施加电压，检测部分检测当探针经过与参考刻度的表面台阶相对的位置时隧道电流的变化; 以及用于根据变化检测部分的检测来检测标尺和探针之间的相对移动量的部分。

8. 发明授权

US5276725A Exposure system 失效
标题翻译：曝光系统
公开(公告)号：US5276725A
公开(公告)日：1994-01-04
申请号：US996508
申请日：1992-12-14
申请人： Eigo Kawakami , Minoru Yoshii , Shunichi Uzawa
发明人： Eigo Kawakami , Minoru Yoshii , Shunichi Uzawa
IPC分类号： G03F7/20 , G21K5/00
CPC分类号： G03F7/702
摘要： An exposure apparatus usable with a mask having a pattern and a wafer having a radiation-sensitive surface layer, for transferring with a radiation energy beam the pattern of the mask to the wafer, is disclosed. The apparatus includes a mask supporting member for supporting the mask; a wafer supporting member for supporting the wafer; a reflective member having a reflection surface and an indication pattern, the reflective member being supported by one of the mask supporting member and the wafer supporting member; an arrangement for projecting a beam, which is thinner than the radiation energy beam and which advances along or about the axis of the radiation energy beam, upon the reflective member; a device for observing a positional relationship between the indication pattern and a spot formed by projection of the thinner beam upon the reflective member; and a device for correcting a relationship between the indication pattern and the spot, on the basis of the observation.
摘要翻译：公开了一种可用于具有图案的掩模和具有辐射敏感表面层的晶片的曝光装置，用于将辐射能量束将掩模的图案转印到晶片。该装置包括用于支撑面罩的面罩支撑构件; 用于支撑晶片的晶片支撑构件; 反射构件，其具有反射面和指示图案，所述反射构件由所述面罩支撑构件和所述晶片支撑构件中的一个支撑; 用于投射比辐射能量束更薄并且沿辐射能量束的轴线或围绕辐射能量束的轴线前进的光束的反射构件的布置; 用于观察指示图案与通过将较薄光束投射在反射构件上形成的光斑之间的位置关系的装置; 以及用于基于观察来校正指示图案与斑点之间的关系的装置。

9. 发明授权

US08393885B2 Processing apparatus 有权
标题翻译：处理装置
公开(公告)号：US08393885B2
公开(公告)日：2013-03-12
申请号：US12120710
申请日：2008-05-15
申请人： Kazuyuki Kasumi , Hirohisa Ota , Eigo Kawakami , Takashi Nakamura , Toshinobu Tokita
发明人： Kazuyuki Kasumi , Hirohisa Ota , Eigo Kawakami , Takashi Nakamura , Toshinobu Tokita
IPC分类号： B29C59/00 , B29C59/02 , H01L21/302
CPC分类号： B29C43/021 , B29C43/003 , B29C43/04 , B29C43/14 , B29C2043/025 , B29C2043/142 , B29C2043/3438 , B29C2043/3634 , B29L2011/0016 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A processing apparatus for transferring a relief pattern on a mold to a resist on a substrate through a compression of the mold against the resist, includes a supplier for supplying the resist between the substrate and the mold, and a recovery unit for recovering the resist.
摘要翻译：一种处理装置，用于通过将模具压靠在抗蚀剂上将模具上的凸版图案转印到基板上的抗蚀剂上，包括用于在基板和模具之间供应抗蚀剂的供应商和用于回收抗蚀剂的回收单元。

10. 发明申请

US20100314798A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE 有权
标题翻译：印刷装置及其制造方法
公开(公告)号：US20100314798A1
公开(公告)日：2010-12-16
申请号：US12816881
申请日：2010-06-16
申请人： Eigo Kawakami
发明人： Eigo Kawakami
IPC分类号： B29C59/02 , B28B11/08
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An imprint apparatus, which performs an imprint process for forming a pattern of a mold on a resin coated on a substrate, includes an imaging unit configured to image the resin on which the pattern is formed, and a controller configured to control the imprint process. When the pattern is continuously formed on the substrate, the controller compares an image of at least a partial area imaged by the imaging unit and an image of a reference state, which is obtained in advance, and when patterns each having a difference, which falls outside an allowable range, between the images are continuously formed, it determines a transfer error.
摘要翻译：执行用于在涂覆在基板上的树脂上形成模具图案的压印工艺的压印装置包括：成像单元，被配置为对形成有图案的树脂进行成像;以及控制器，被配置为控制压印处理。当在基板上连续地形成图案时，控制器将由成像单元成像的至少一部分区域和预先获得的基准状态的图像以及各自具有差异的图案进行比较在允许范围之外，图像之间连续形成，确定传送错误。

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