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1. 发明授权

US07022435B2 Method for the manufacture of phase shifting masks for EUV lithography 有权
标题翻译：用于制造用于EUV光刻的相移掩模的方法
公开(公告)号：US07022435B2
公开(公告)日：2006-04-04
申请号：US10256454
申请日：2002-09-27
申请人： Daniel G. Stearns , Donald W. Sweeney , Paul B. Mirkarimi , Anton Barty
发明人： Daniel G. Stearns , Donald W. Sweeney , Paul B. Mirkarimi , Anton Barty
IPC分类号： G01F9/00
CPC分类号： G03F7/70283 , B82Y10/00 , B82Y40/00 , G03F1/24 , G03F1/30
摘要： A method for fabricating an EUV phase shift mask is provided that includes a substrate upon which is deposited a thin film multilayer coating that has a complex-valued reflectance. An absorber layer or a buffer layer is attached onto the thin film multilayer, and the thickness of the thin film multilayer coating is altered to introduce a direct modulation in the complex-valued reflectance to produce phase shifting features.
摘要翻译：提供了一种制造EUV相移掩模的方法，其包括在其上沉积具有复值反射率的薄膜多层涂层的基底。将吸收层或缓冲层附着到薄膜多层上，改变薄膜多层涂层的厚度，以便在复值反射率中引入直接调制以产生相移特征。

2. 发明授权

US06885442B1 Phase determination of a radiation wave field 有权
标题翻译：辐射波场的相位确定
公开(公告)号：US06885442B1
公开(公告)日：2005-04-26
申请号：US09830393
申请日：1999-11-01
申请人： Keith Nugent , David Paganin , Anton Barty
发明人： Keith Nugent , David Paganin , Anton Barty
IPC分类号： G01B9/02 , G01J9/00 , G02B27/46 , G06T5/10 , G01J1/00
CPC分类号： G01B9/02084 , G01B9/02083 , G01J9/00 , G02B27/46 , G06T5/002 , G06T5/10 , G06T2207/20056
摘要： A method of quantitative determination of the phase of a radiation wave field including the steps of producing a representative measure of the rate of change of intensity of the radiation wave field over a selected surface extending generally across the wave field; producing a representative measure of intensity of the radiation wave filed over the selected surface; transforming the measure of rate of change of intensity to produce a first integral transform representation and applying to the first integral transform representation a first filter corresponding to the inversion of a first differential operator reflected in the measure of rate of change of intensity to produce a first modified integral transform representation; applying an inverse of the first integral transform to the first modified integral transform representation to produce an untransformed representation; applying a correction based on the measure of intensity over the selected surface to the untransformed representation; transforming the corrected untransformed representation to produce a second integral transform representation and applying to the second integral transform representation a second filter corresponding to the inversion of a second differential operator reflected in the corrected untransformed representation to produce a second modified integral transform representation; and applying an inverse of the second integral transform to the second modified integral transform representation to produce a measure of phase of the radiation wave field across the selected plane.
摘要翻译：一种定量确定辐射波场的相位的方法，包括以下步骤：在通常在波场上延伸的选定表面上产生辐射波场的强度变化率的代表性测量步骤; 产生在所选表面上的辐射波强度的代表性测量; 转换强度变化率的度量以产生第一积分变换表示，并且向第一积分变换表示应用对应于在强度变化率的度量中反映的第一微分算子的反演的第一过滤器，以产生第一改进的积分变换表示; 将第一积分变换的倒数应用于第一修正积分变换表示以产生未转换的表示; 将基于所选表面上的强度的度量的校正应用于未转换的表示; 变换经校正的未变换表示以产生第二积分变换表示，并向第二积分变换表示应用对应于经校正的未变换表示中反映的第二微分算子的反演的第二滤波器，以产生第二修正积分变换表示; 以及将所述第二积分变换的反相应用于所述第二修正积分变换表示，以产生穿过所选择的平面的辐射波场的相位的测量。

3. 发明授权

US07039553B2 Phase determination of a radiation wave field 有权
标题翻译：辐射波场的相位确定
公开(公告)号：US07039553B2
公开(公告)日：2006-05-02
申请号：US10979554
申请日：2004-11-02
申请人： Keith Nugent , David Paganin , Anton Barty
发明人： Keith Nugent , David Paganin , Anton Barty
IPC分类号： G06F19/00
CPC分类号： G01B9/02084 , G01B9/02083 , G01J9/00 , G02B27/46 , G06T5/002 , G06T5/10 , G06T2207/20056
摘要： A method and apparatus for quantitative determination of the phase of a radiation wave field is disclosed. A representative measure of the rate of change of intensity of the radiation wave field over a selected surface extending generally across the wave field is transformed to produce a first integral transform representation. A first filter is applied to the first integral transform representation corresponding to the inversion of a first differential operator reflected in the measure of rate of change of intensity to produce a first modified integral transform representation. An inverse of the first integral transform is applied to the first modified integral transform representation to produce an untransformed representation. The untransformed representation is corrected based on a measure of intensity over said selected surface and again transformed to produce a second integral transform representation. A second filter is applied to the second integral transform representation corresponding to the inversion of a second differential operator reflected in the corrected untransformed representation to produce a second modified integral transform representation. An inverse of the second integral transform is applied to the second modified integral transform representation to produce a measure of phase of the radiation wave field across the selected plane.
摘要翻译：公开了用于定量确定辐射波场的相位的方法和装置。在通常跨越波场延伸的选定表面上的辐射波场的强度变化率的代表性度量被变换以产生第一积分变换表示。将第一滤波器应用于对应于在强度变化率的测量中反映的第一微分算子的反演的第一积分变换表示，以产生第一修正积分变换表示。将第一积分变换的逆值应用于第一修正积分变换表示以产生未转换的表示。基于在所述选择的表面上的强度的度量来校正未变换的表示，并且再转换以产生第二积分变换表示。将第二滤波器应用于对应于在经校正的未变换表示中反映的第二微分算子的反演的第二积分变换表示，以产生第二修正积分变换表示。将第二积分变换的倒数应用于第二修正积分变换表示，以产生跨所选平面的辐射波场的相位的测量。

4. 发明申请

US20060234135A1 Method for repairing mask-blank defects using repair-zone compensation 审中-公开
标题翻译：使用修补区补偿修复掩模 - 空白缺陷的方法
公开(公告)号：US20060234135A1
公开(公告)日：2006-10-19
申请号：US11109026
申请日：2005-04-18
申请人： Stefan Hau-Riege , Donald Sweeney , Anton Barty , Paul Mirkarimi , Daniel Stearns
发明人： Stefan Hau-Riege , Donald Sweeney , Anton Barty , Paul Mirkarimi , Daniel Stearns
IPC分类号： G03C5/00 , G21K5/00 , G03F1/00
CPC分类号： G21K1/062 , B82Y10/00 , B82Y40/00 , G03F1/24 , G03F1/72 , G21K2201/067
摘要： A method for repairing mask-blank defects uses repair-zone compensation. Local disturbances are compensated over the post-defect-repair repair-zone by altering a portion of the absorber pattern on the surface of the mask blank. This enables the fabrication of defect-free (since repaired) X-ray Mo—Si multilayer mirrors. Repairing Mo—Si multilayer-film defects on mask blanks is a key for the commercial success of EUVL. It is known that particles are added to the Mo—Si multilayer film during the fabrication process. There is a large effort to reduce this contamination, but results are not sufficient, and defects continue to be a major mask yield limiter.
摘要翻译：修复掩模 - 空白缺陷的方法使用修补区补偿。通过改变掩模毛坯表面上的部分吸收体图案来补偿在缺陷后修复区域上的局部扰动。这使得能够制造无缺陷（自修复的）X射线Mo-Si多层反射镜。在掩模板上修复Mo-Si多层膜缺陷是EUVL商业成功的关键。已知在制造过程中将颗粒加入到Mo-Si多层膜中。减少这种污染有很大的努力，但结果是不够的，缺陷仍然是主要的面膜产量限制。

5. 发明申请

US20050062957A1 Phase determination of a radiation wave field 有权
标题翻译：辐射波场的相位确定
公开(公告)号：US20050062957A1
公开(公告)日：2005-03-24
申请号：US10979554
申请日：2004-11-02
申请人： Keith Nugent , David Paganin , Anton Barty
发明人： Keith Nugent , David Paganin , Anton Barty
IPC分类号： G01B9/02 , G01J9/00 , G02B27/46 , G06T5/10 , G01B11/02
CPC分类号： G01B9/02084 , G01B9/02083 , G01J9/00 , G02B27/46 , G06T5/002 , G06T5/10 , G06T2207/20056
摘要： A method and apparatus for quantitative determination of the phase of a radiation wave field is disclosed. A representative measure of the rate of change of intensity of the radiation wave field over a selected surface extending generally across the wave field is transformed to produce a first integral transform representation. A first filter is applied to the first integral transform representation corresponding to the inversion of a first differential operator reflected in the measure of rate of change of intensity to produce a first modified integral transform representation. An inverse of the first integral transform is applied to the first modified integral transform representation to produce an untransformed representation. The untransformed representation is corrected based on a measure of intensity over said selected surface and again transformed to produce a second integral transform representation. A second filter is applied to the second integral transform representation corresponding to the inversion of a second differential operator reflected in the corrected untransformed representation to produce a second modified integral transform representation. An inverse of the second integral transform is applied to the second modified integral transform representation to produce a measure of phase of the radiation wave field across the selected plane.
摘要翻译：公开了用于定量确定辐射波场的相位的方法和装置。在通常跨越波场延伸的选定表面上的辐射波场的强度变化率的代表性度量被变换以产生第一积分变换表示。将第一滤波器应用于对应于在强度变化率的测量中反映的第一微分算子的反演的第一积分变换表示，以产生第一修正积分变换表示。将第一积分变换的逆值应用于第一修正积分变换表示以产生未转换的表示。基于在所述选择的表面上的强度的度量来校正未变换的表示，并且再转换以产生第二积分变换表示。将第二滤波器应用于对应于在经校正的未变换表示中反映的第二微分算子的反演的第二积分变换表示，以产生第二修正积分变换表示。将第二积分变换的倒数应用于第二修正积分变换表示，以产生跨所选平面的辐射波场的相位的测量。

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