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    • 3. 发明申请
    • Double-layered perpendicular magnetic recording media
    • 双层垂直磁记录介质
    • US20080062561A1
    • 2008-03-13
    • US11895320
    • 2007-08-23
    • Jianzhong ShiS.N. Piramanayagam
    • Jianzhong ShiS.N. Piramanayagam
    • G11B5/82
    • G11B5/82G11B5/667G11B5/7325G11B5/8404G11B5/851
    • Embodiments of the present invention provide solutions in the form of reducing the head to keeper spacing in a double-layered perpendicular magnetic recording medium, and improving the recording performance of the magnetic recording medium. A double-layered perpendicular magnetic recording medium and a method of fabricating the same are provided, for data storage devices and systems. The medium includes a base structure and a seedlayer disposed on the base structure. Further layers sequentially formed above the base structure are a soft magnetic underlayer, an intermediate layer and a magnetic recording layer. Because the soft magnetic underlayer is formed between the seedlayer and the intermediate layer, the seedlayer is excluded from the distance between the soft magnetic underlayer and the magnetic recording layer. The soft magnetic underlayer is therefore brought closer to the magnetic recording layer, providing a narrowed head-to-keeper spacing in a data storage system.
    • 本发明的实施例提供了在双层垂直磁记录介质中降低磁头与保持器间距的形式的解决方案,并提高了磁记录介质的记录性能。 提供了一种双层垂直磁记录介质及其制造方法,用于数据存储设备和系统。 介质包括设置在基部结构上的基底结构和种子层。 依次形成在基底结构之上的其它层是软磁性底层,中间层和磁记录层。 由于在层间层和中间层之间形成软磁性底层,所以从软磁性底层和磁记录层之间的距离排除种子层。 因此,软磁性底层更靠近磁记录层,在数据存储系统中提供变窄的保持距离。
    • 5. 发明授权
    • Method and means for enhancing utilization of sputtering targets
    • 提高溅射靶的利用率的方法和手段
    • US06702930B1
    • 2004-03-09
    • US10431472
    • 2003-05-08
    • Yuanda Randy ChengDennis BrownJianzhong ShiWee Ching Freddy GohWah Meng John SohSteven Hiroshi Sawasaki
    • Yuanda Randy ChengDennis BrownJianzhong ShiWee Ching Freddy GohWah Meng John SohSteven Hiroshi Sawasaki
    • C23C1435
    • H01J37/3482C23C14/3407C23C14/35G11B5/851G11B7/266G11B11/10582
    • A method of sputtering a target, comprising steps of: (a) providing a magnetically enhanced sputtering apparatus comprising a sputtering target having a first, sputtering surface and a second, opposing surface in electrical contact with a cathode electrode of the sputtering apparatus; (b) sputtering the first surface of the target to form a first erosion track therein; (c) removing the target from the sputtering apparatus when the first erosion track reaches a predetermined depth below the first surface; (d) reinstalling the sputtering target in the sputtering apparatus such that the second surface is the sputtering surface and the first surface is the opposing surface and is in electrical contact with the cathode via an intervening backing plate comprised of at least one material selected for causing a second erosion track to be formed in the second surface of the target during sputtering therefrom which is laterally displaced from the first erosion track; and (e) sputtering the second surface of the target to form the laterally displaced second erosion track therein to a predetermined depth below the second surface, thereby increasing the utilization of the sputtering target.
    • 一种溅射靶的方法,包括以下步骤:(a)提供一种磁增强溅射装置,其包括具有与溅射装置的阴极电接触的第一溅射表面和第二相对表面的溅射靶;(b )溅射靶的第一表面以在其中形成第一侵蚀轨迹;(c)当第一侵蚀轨道到达第一表面下方的预定深度时,从溅射装置移除靶;(d)在溅射中重新安装溅射靶 装置,使得第二表面是溅射表面,并且第一表面是相对的表面,并且通过中间衬垫与阴极电接触,所述中间衬板包括至少一种材料,所述至少一种材料被选择用于在第二表面形成第二侵蚀轨道 在溅射过程中靶的表面从第一侵蚀轨迹横向移位; 和(e)溅射靶的第二表面以在其中形成横向移位的第二侵蚀轨道到第二表面下方的预定深度,从而增加溅射靶的利用率。
    • 6. 发明授权
    • Facing target assembly and sputter deposition apparatus
    • 面向目标组装和溅射沉积设备
    • US06689253B1
    • 2004-02-10
    • US10170195
    • 2002-06-13
    • Chinsoon KohStephen Hiroshi SawasakiJianzhong ShiYuanda Randy Cheng
    • Chinsoon KohStephen Hiroshi SawasakiJianzhong ShiYuanda Randy Cheng
    • C23C1435
    • G11B11/10582C23C14/352G11B5/851G11B7/266H01J37/3405
    • A facing target sputtering apparatus, comprising: inner and outer spaced-apart, concentric, and coextensive tubular cathodes open at each end, with the inwardly facing surface of the outer cathode and the outwardly facing surface of the inner cathode; a first pair of ring-shaped magnet means extending around the outwardly facing surface of the outer cathode at the ends thereof, with a first polarity magnetic pole facing the outwardly facing surface; a second pair of ring-shaped magnet means extending around the inwardly facing surface of the inner cathode at the ends thereof, with a second, opposite polarity magnetic pole facing the inwardly facing surface; and a substrate positioned in spaced adjacency to an end of the inner and outer cathodes; wherein: magnetic flux lines from the first and second pairs of magnet means uni-directionally pass through portions of an annularly-shaped space between the ends of the inner and outer cathodes, and during sputtering operation, plasma is substantially confined to the portion of the annularly-shaped space between the magnetic flux lines.
    • 一种面对靶溅射装置,包括:在每个端部处开放的内部和外部间隔开的同心和共同延伸的管状阴极,外阴极的向内表面和内阴极的面向外的表面;第一对环 形状的磁体装置,其外端部的外阴极的外表面在其端部处延伸,第一极性磁极面对面向外的表面;第二对环形磁体装置,其围绕内阴极的向内的表面延伸 在其端部具有面向面向内的表面的第二反极性磁极; 以及与所述内阴极和外阴极的端部间隔开的衬底; 其中:来自第一和第二对磁体装置的磁通线单向通过内外阴极的端部之间的环形空间的部分,并且在溅射操作期间,等离子体基本上限制在 磁通线之间的环形空间。
    • 7. 发明申请
    • PERPENDICULAR MAGNETIC RECORDING MEDIA
    • 全能磁记录媒体
    • US20070259215A1
    • 2007-11-08
    • US11744315
    • 2007-05-04
    • Seidikkurippu PiramanayagamJianzhong Shi
    • Seidikkurippu PiramanayagamJianzhong Shi
    • G11B5/66C23C14/00
    • G11B5/7325G11B5/8404G11B5/851
    • A method is provided to fabricate a magnetic recording medium which has a magnetic recording layer with reduced grain size. Prior to forming the magnetic recording layer, an intermediate layer is firstly formed, with a boundary phase surrounding and isolating the grains in the intermediate layer. With the formation of the boundary phase, the grain size of the intermediate layer can be successfully reduced. A magnetic recording medium includes an intermediate layer and a magnetic recording layer formed on the intermediate layer. In the intermediate layer, there is formed of segregate grains and a boundary phase which surrounds and isolates the grains, The magnetic layer has magnetic grains formed following the structure of the intermediate layer. The magnetic layer therefore has a relatively smaller grain size than that of conventional medium.
    • 提供了一种制造具有减小的晶粒尺寸的磁记录层的磁记录介质的方法。 在形成磁记录层之前,首先形成中间层,边界相包围并分离中间层中的晶粒。 随着边界相的形成,可以成功地减少中间层的晶粒尺寸。 磁记录介质包括形成在中间层上的中间层和磁记录层。 在中间层中,形成有隔离颗粒和围绕并分离晶粒的边界相。磁性层具有按照中间层的结构形成的磁性颗粒。 因此,磁性层具有比常规介质更小的晶粒尺寸。