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    • 1. 发明授权
    • Semiconductor laser device and method for manufacturing the same
    • 半导体激光装置及其制造方法
    • US5504768A
    • 1996-04-02
    • US161422
    • 1993-12-06
    • Chan-Yong ParkJi-Beom YooKyung-Hyun ParkHong-Man KimDong-Hoon JangJung-Kee Lee
    • Chan-Yong ParkJi-Beom YooKyung-Hyun ParkHong-Man KimDong-Hoon JangJung-Kee Lee
    • H01S5/00H01S5/042H01S5/12H01S5/20H01S5/22H01S3/18H01L21/31
    • H01S5/22H01S5/0425H01S5/12H01S5/2081
    • A method for manufacturing the semiconductor laser device comprising the steps of sequentially forming an active layer, a photo-waveguide layer, a cladding layer, and an ohmic contact layer on an upper surface of an InP substrate; forming a first patterned dielectric layer on the ohmic contact layer; depositing a patterned photoresist on the ohmic contact layer to define a p- electrode stripe layer; forming the p- electrode stripe layer only on a part of the ohmic contact layer; performing an annealing process; etching back the layers until the photo-waveguide layer is exposed, using the first patterned dielectric layer and the p- electrode stripe layer as an etching mask, to form a ridge; depositing a second dielectric layer on the substrate formed thus; selectively removing the second dielectric layer to form a contact hole on the p- electrode stripe layer; coating a bonding pad metal layer on the second dielectric layer and in the contact hole; and coating an n- electrode metal layer on bottom surface of the substrate. Since ohmic contact resistance is lowered, thermal generation and threshold current of oscillation are decreased. As a result, operating characteristics of the laser device can be largely improved.
    • 一种制造半导体激光器件的方法,包括以下步骤:在InP衬底的上表面上依次形成有源层,光波导层,包层和欧姆接触层; 在所述欧姆接触层上形成第一图案化电介质层; 在欧姆接触层上沉积图案化的光致抗蚀剂以限定p-电极条纹层; 仅在欧姆接触层的一部分上形成p-电极条纹层; 进行退火处理; 使用第一图案化电介质层和p-电极条纹层作为蚀刻掩模,蚀刻层,直到光波导层被曝光,以形成脊; 在由此形成的衬底上沉积第二介电层; 选择性地去除所述第二电介质层以在所述p电极条带层上形成接触孔; 在所述第二电介质层和所述接触孔中涂覆焊垫金属层; 并在衬底的底表面上涂覆n-电极金属层。 由于欧姆接触电阻降低,所以发热和振荡的阈值电流降低。 结果,可以大大提高激光器件的工作特性。
    • 2. 发明授权
    • Method for fabricating a planar buried heterostructure laser diode
    • 制造平面埋入异质结激光二极管的方法
    • US5665612A
    • 1997-09-09
    • US512224
    • 1995-08-07
    • Jung-Kee LeeDong-Hoon JangJeong-Soo KimKyung-Hyun Park
    • Jung-Kee LeeDong-Hoon JangJeong-Soo KimKyung-Hyun Park
    • H01S5/00H01S5/20H01S5/227H01S5/30H01S5/343H01L21/265
    • B82Y20/00H01S5/227H01S5/2081H01S5/2275H01S5/34306H01S5/34313
    • Disclosed is a method for fabricating a planar buried heterostructure laser diode, comprising the steps of sequentially forming a first clad layer, an undoped active layer and a second clad layer on a substrate so as to complete a first crystal growth; forming a patterned mask layer on the second clad layer; non-selectively etching the second clad layer, the active layer, the first clad layer and the substrate using the mask layer as an etching mask; selectively etching the substrate and the first and second layers; sequentially forming a first and second current blocking layers on a structure formed by the selective etching step so as to complete a second crystal growth; sequentially forming a third clad layer and an ohmic contact layer thereon after removal of the mask layer so as to complete a third crystal growth; and forming a first electrode on a rear surface of the substrate and forming a second electrode on a surface of the third clad layer. By the method, a leakage current induced in an interface between the active layer and the first current blocking layer provided therein can be reduced in proportion to a distance between the active layer and the second current blocking layer formed on the first current blocking layer, and therefore performance of the laser diode can be enhanced.
    • 公开了一种制造平面埋置异质结激光二极管的方法,包括以下步骤:在衬底上依次形成第一覆层,未掺杂有源层和第二覆层,以完成第一晶体生长; 在所述第二覆盖层上形成图案化掩模层; 使用掩模层作为蚀刻掩模,非选择性地蚀刻第二覆盖层,有源层,第一覆盖层和衬底; 选择性地蚀刻基板和第一和第二层; 在通过选择性蚀刻步骤形成的结构上依次形成第一和第二电流阻挡层,以完成第二晶体生长; 在除去掩模层之后依次形成第三覆层和欧姆接触层,以完成第三晶体生长; 以及在所述基板的后表面上形成第一电极,并在所述第三包覆层的表面上形成第二电极。 通过该方法,可以在有源层和其中设置的第一电流阻挡层之间的界面中感应的漏电流与形成在第一电流阻挡层上的有源层和第二电流阻挡层之间的距离成比例地减小,以及 因此可以提高激光二极管的性能。
    • 3. 发明申请
    • LOWER TRACK OF CRAWLER EXCAVATOR
    • CRAWLER挖掘机的下部轨道
    • US20140246899A1
    • 2014-09-04
    • US14350482
    • 2011-10-12
    • Kyung-Hyun Park
    • Kyung-Hyun Park
    • B62D55/28B62D55/20
    • B62D55/20B62D55/275B62D55/28
    • Disclosed is a lower track for mounting rubber pads on a track shoe to be attachable and detachable after assembling a steel plate which is adhered with divisionally formed rubber pads as a single unit without additionally perforating coupling through-holes in the track shoe when the rubber pad which forms the lower track and the track shoe which is formed of a metal material are coupled. The lower track of a crawler excavator according to the present invention comprises: first and second rubber pads which are divisionally formed; a first steel plate which supports the bottom surface of the first rubber pad by surrounding the same, and has first hooks formed on the bottom surface thereof and coupling holes formed in a connection stepped-portion, which is formed at the opposite side of the first hooks; a second steel plate which supports the bottom surface of the second rubber pad by surrounding the same, and has second hooks formed on the bottom surface thereof, connection protrusions formed at the opposite side of the second hooks so as to be secured on the connection stepped-portion, and connection through-holes formed in the protrusions so as to correspond to the coupling holes; and coupling members sequentially passing through the through-holes formed in the second rubber pad and the through-holes formed in the second steel plate so as to be fixed in the coupling holes of the first steel plate.
    • 公开了一种用于将橡胶垫安装在履带板上的下轨道,用于在组装钢板之后可附接和拆卸,该钢板以分开形成的橡胶垫作为单个单元,而不需要在履带板中另外穿孔耦合通孔,当橡胶垫 其形成下轨道,并且由金属材料形成的履带板被联接。 根据本发明的履带式挖掘机的下轨道包括:分开形成的第一和第二橡胶垫; 第一钢板,其通过围绕其而支撑第一橡胶垫的底面,并且具有形成在其底面上的第一钩和形成在连接阶梯部中的连接孔,该连接孔形成在第一橡胶垫的第一 钩子 第二钢板,其通过围绕第二橡胶垫的底表面而支撑,并且在其底表面上形成有第二钩,形成在第二钩的相对侧的连接突起,以便固定在连接台阶上 以及形成在所述突起中的连接通孔,以对应于所述联接孔; 以及依次穿过形成在第二橡胶垫中的通孔和形成在第二钢板中的通孔的联接构件,以固定在第一钢板的联接孔中。
    • 7. 发明授权
    • Lower track of crawler excavator
    • 履带式挖掘机下轨道
    • US09260144B2
    • 2016-02-16
    • US14350482
    • 2011-10-12
    • Kyung-Hyun Park
    • Kyung-Hyun Park
    • B62D55/28B62D55/20B62D55/275
    • B62D55/20B62D55/275B62D55/28
    • Disclosed is a lower track for mounting rubber pads on a track shoe to be attachable and detachable after assembling a steel plate which is adhered with divisionally formed rubber pads as a single unit without additionally perforating coupling through-holes in the track shoe when the rubber pad which forms the lower track and the track shoe which is formed of a metal material are coupled. The lower track of a crawler excavator according to the present invention comprises: first and second rubber pads which are divisionally formed; a first steel plate which supports the bottom surface of the first rubber pad by surrounding the same, and has first hooks formed on the bottom surface thereof and coupling holes formed in a connection stepped-portion, which is formed at the opposite side of the first hooks; a second steel plate which supports the bottom surface of the second rubber pad by surrounding the same, and has second hooks formed on the bottom surface thereof, connection protrusions formed at the opposite side of the second hooks so as to be secured on the connection stepped-portion, and connection through-holes formed in the protrusions so as to correspond to the coupling holes; and coupling members sequentially passing through the through-holes formed in the second rubber pad and the through-holes formed in the second steel plate so as to be fixed in the coupling holes of the first steel plate.
    • 公开了一种用于将橡胶垫安装在履带板上的下轨道,用于在组装钢板之后可附接和拆卸,该钢板以分开形成的橡胶垫作为单个单元,而不需要在履带板中另外穿孔耦合通孔,当橡胶垫 其形成下轨道,并且由金属材料形成的履带板被联接。 根据本发明的履带式挖掘机的下轨道包括:分开形成的第一和第二橡胶垫; 第一钢板,其通过围绕其而支撑第一橡胶垫的底面,并且具有形成在其底面上的第一钩和形成在连接阶梯部中的连接孔,该连接孔形成在第一橡胶垫的第一 钩子 第二钢板,其通过围绕第二橡胶垫的底表面而支撑,并且在其底表面上形成有第二钩,形成在第二钩的相对侧的连接突起,以便固定在连接台阶上 以及形成在所述突起中的连接通孔,以对应于所述联接孔; 以及依次穿过形成在第二橡胶垫中的通孔和形成在第二钢板中的通孔的联接构件,以固定在第一钢板的联接孔中。