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    • 5. 发明授权
    • Fabricating method of GaAs substrate having V-shaped grooves
    • 具有V形槽的GaAs衬底的制造方法
    • US5824453A
    • 1998-10-20
    • US946915
    • 1997-10-09
    • Sung-Bock KimSeong-Ju ParkJeong-Rae RoEl-Hang Lee
    • Sung-Bock KimSeong-Ju ParkJeong-Rae RoEl-Hang Lee
    • H01L29/06H01L21/20H01L21/302H01L21/306H01L21/308G03F7/00
    • H01L21/02395H01L21/02433H01L21/02546H01L21/02639H01L21/30617
    • Disclosed is a fabricating method of a GaAs substrate having a V-shaped groove in a higher density, that is a double density, the method comprising the steps of forming a Si.sub.3 N.sub.4 layer on a main surface of the GaAs substrate; patterning the Si.sub.3 N.sub.4 layer using a photo-lithography to form a patterned Si.sub.3 N.sub.4 layer having a minimum width; wet-etching the GaAs substrate using the patterned Si.sub.3 N.sub.4 layer as a mask, so as to form (111) and (100) surfaces of the GaAs substrate beneath the patterned Si.sub.3 N.sub.4 ; selectively growing a GaAs film on the GaAs substrate etched thus using the patterned Si.sub.3 N.sub.4 layer as a mask so as to form the GaAs film with two (111) facets only on a (100) surface of the GaAs substrate; and removing the Si.sub.3 N.sub.4 layer. The V-shaped grooves can be formed on a GaAs substrate utilizing a difference of growth rate caused by surface orientation of the substrate, and therefore the grooves can be formed in double density.
    • 本发明公开了一种GaAs衬底的制造方法,该GaAs衬底具有较高密度的V形沟槽,即双重密度,该方法包括以下步骤:在GaAs衬底的主表面上形成Si 3 N 4层; 使用光刻法构图Si 3 N 4层以形成具有最小宽度的图案化的Si 3 N 4层; 使用图案化的Si 3 N 4层作为掩模对GaAs衬底进行湿法蚀刻,以在图案化的Si 3 N 4之下形成GaAs衬底的(111)和(100)表面; 在GaAs衬底上选择性地生长GaAs膜,使用图案化的Si 3 N 4层作为掩模进行蚀刻,以便仅在GaAs衬底的(100)表面上形成具有两个(111)面的GaAs膜; 并去除Si3N4层。 可以使用由衬底的表面取向引起的生长速度差,在GaAs衬底上形成V形槽,因此可以以双重密度形成沟槽。
    • 6. 发明授权
    • Linear motion apparatus under ultra high vacuum
    • 直线运动装置在超高真空下
    • US6019008A
    • 2000-02-01
    • US903797
    • 1997-07-31
    • Sung-Bock KimWan-Soo YunEl-Hang Lee
    • Sung-Bock KimWan-Soo YunEl-Hang Lee
    • H01L21/68B25J1/08B25J18/02
    • B25J18/025B25J1/08Y10S414/135Y10T403/32467Y10T74/18848Y10T74/20468
    • A linear motion apparatus for moving an object in a vacuum chamber comprising an antenna or a telescoping shaft such as a fishing rod to effectively utilize space, and to avoid the need of a rear projection thereby achieving stability. The linear motion apparatus includes: a body having a space portion penetrated horizontally; a rotary handle which penetrates at a right angle to the space portion of the body thereby controlling a linear motion; locking portion which is mounted in the space portion of the body, is inserted into a shaft of the rotary handle, and used to lock the motion; a guide rod which is formed as a multistage rod, whose one end is inserted and fixed into a predetermined position of the space portion of the body; linear motion force providing portion whose one end is fixed to the rotary plate and the other end is fixed to a nose portion of the guide rod, thereby providing a linear motion force to the guide rod; and a bellows seal which surrounds a circumference of the guide rod, is shrunken or expanded according to a linear motion of the guide rod. As a result, this apparatus performs a linear motion control by a contraction and expansion under ultra high vacuum.
    • 一种用于在包括天线或诸如钓鱼杆的伸缩轴的真空室中移动物体的线性运动装置,以有效利用空间,并且避免了后部突出物的需要,从而实现稳定性。 线性运动装置包括:主体,其具有水平地穿透的空间部分; 旋转手柄,其以直角穿过主体的空间部分,从而控制直线运动; 安装在主体的空间部分中的锁定部分插入旋转手柄的轴中,并用于锁定运动; 导杆,其形成为多级杆,其一端插入并固定到本体的空间部分的预定位置; 直线运动力提供部分,其一端固定在旋转板上,另一端固定在导杆的鼻部,从而向导杆提供线性运动力; 并且围绕导杆的圆周的波纹管密封件根据导杆的直线运动而收缩或膨胀。 结果,该装置通过在超高真空下的收缩和膨胀进行直线运动控制。