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1. 发明授权

US4647196A Surface flaw detection method 失效
标题翻译：表面探伤法
公开(公告)号：US4647196A
公开(公告)日：1987-03-03
申请号：US695231
申请日：1985-01-28
申请人： Asahiro Kuni , Kazuo Yamaguchi , Nobuyuki Akiyama , Juro Endo
发明人： Asahiro Kuni , Kazuo Yamaguchi , Nobuyuki Akiyama , Juro Endo
IPC分类号： G01B9/02 , G01N21/88
CPC分类号： G01N21/88 , G01B9/02021 , G01B9/02032
摘要： A flaw detection method for detecting flaw existing in the surface of a substantially plate-shaped examination object by making use of an interference of light. A coherent light is applied to the surface of the examination object and also to a reference mirror surface. The light reflected by the surface of the examination object and the light reflected by the reference mirror surface are made to interfere with each other to form an interference image from which the flaw is detected. The reference mirror surface is disposed at an optical inclination to the surface of the examination object. The reference mirror surface may be the reverse surface of the examination object while the obserse side of the same is being examined. Infrared coherent ray is preferably used as the coherent light.
摘要翻译：一种用于通过利用光的干涉来检测存在于基本上板状的检查对象的表面中的缺陷的探伤方法。相干光被施加到检查对象的表面，并且也被施加到参考镜表面。由检查对象的表面反射的光和由参考镜面反射的光被相互干涉，形成检测出缺陷的干涉图像。参考镜面设置在与检查对象表面成光学倾斜度。参考镜面可以是检查对象的反面，同时正在检查异物侧。红外相干光线优选用作相干光。

2. 发明授权

US4449818A Method of inspecting microscopic surface defects 失效
标题翻译：检查微观表面缺陷的方法
公开(公告)号：US4449818A
公开(公告)日：1984-05-22
申请号：US347248
申请日：1982-02-09
申请人： Kazuo Yamaguchi , Asahiro Kuni , Nobuyuki Akiyama , Juro Endo
发明人： Kazuo Yamaguchi , Asahiro Kuni , Nobuyuki Akiyama , Juro Endo
IPC分类号： G01N21/84 , G01N21/88 , G01N21/94 , G01N21/956 , G01N21/00
CPC分类号： G01N21/88
摘要： A method is provided for inspecting defects in the surface of an object to be inspected, wherein oblique lighting and perpendicular lighting are alternately applied to a location where a defect or a foreign substance possibly exists. Brightness detected in the location under the application of oblique lighting is evaluated as a foreign substance so as to be discriminated from a defect. Defects are classified through shape recognition of a defect pattern obtained under the application of perpendicular lighting.
摘要翻译：提供了一种用于检查待检查物体的表面中的缺陷的方法，其中倾斜照明和垂直照明交替施加到可能存在缺陷或异物的位置。在倾斜照明的应用下，在该位置处检测到的亮度被评价为异物，以便与缺陷区分开来。通过在垂直照明的应用下获得的缺陷图案的形状识别来分类缺陷。

3. 发明授权

US4447731A Exterior view examination apparatus 失效
标题翻译：外观检查装置
公开(公告)号：US4447731A
公开(公告)日：1984-05-08
申请号：US327191
申请日：1981-12-03
申请人： Asahiro Kuni , Yukio Kembo , Nobuyuki Akiyama , Nobuhiko Aoki
发明人： Asahiro Kuni , Yukio Kembo , Nobuyuki Akiyama , Nobuhiko Aoki
IPC分类号： G01B11/02 , G01B21/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/04 , H01J37/20 , H01J37/22 , H01J37/28
CPC分类号： H01J37/226 , H01J37/20
摘要： An exterior view examination apparatus comprising a movable sample stage provided in a sample chamber of a scanning type electron microscope; a sample mounted on the stage; and an optical microscope which can observe the sample from an exterior of the chamber, mounted on the chamber in parallel with the scanning type electron microscope, the position of a surface part of the sample (mounted on the sample stage) to be observed, measured or analyzed being preliminary defined by the optical microscope, and the sample stage being moved by a certain amount thereby to bring the sample at the center of the visual field of the electron microscope.
摘要翻译：一种外观检查装置，包括设置在扫描型电子显微镜的样品室中的可移动样品台; 样品安装在舞台上; 和可以与扫描型电子显微镜平行地安装在室上的室外观察样品的光学显微镜，测量样品表面部分（安装在样品台上）的位置，测量或者通过光学显微镜进行初步定义，并且将样品台移动一定量，从而将样品置于电子显微镜的视野的中心。

4. 发明授权

US4788577A Substrate surface deflecting device 失效
标题翻译：基板表面偏转装置
公开(公告)号：US4788577A
公开(公告)日：1988-11-29
申请号：US142698
申请日：1988-01-11
申请人： Nobuyuki Akiyama , Asahiro Kuni , Yukio Kembo , Toshihiko Nakata
发明人： Nobuyuki Akiyama , Asahiro Kuni , Yukio Kembo , Toshihiko Nakata
IPC分类号： G02F1/13 , G03B27/32 , G03F7/20 , H01L21/027 , H01L21/68 , H05K3/00 , G03B27/42
CPC分类号： G03F7/70691
摘要： An exposure apparatus comprises a stage; a base plate provided on the stage; a flexible chuck plate which is capable of sucking under vacuum a substantially entire surface of a substrate to a surface thereof; a plurality of vertical displacement generating mechanism including a plurality of feedscrews provided at the base plate with predetermined intervals therebetween, a plurality of rotational actuators for rotatively driving each of the feedscrews, and a plurality of spring members interposed between the chuck plate and the base plate so as to allow a tip of each of the feedscrews to be engaged with a rear surface of the chuck plate; restricting mechanism for restricting the chuck plate in such a manner as not to be displaced horizontally relative to the base plate; a mask holder for holding a mask; a mechanism for measuring a level of the mask held by the mask holder; and a mechanism for measuring a level of the substrate sucked onto the chuck plate, whereby each of the rotational actuators of the vertical displacement generating mechanism is driven on the basis of gaps between the mask and the substrated measured by the mechanism for measuring the level of the mask and the mechanism for measuring the level of the substrate so as to subject the substrate to deflection via the flexible chuck plate, thereby producing a uniform gap between the mask and the substrate.
摘要翻译：曝光装置包括：设置在舞台上的底板; 柔性卡盘板，其能够在真空下将基板的大致整个表面吸附到其表面; 多个垂直位移产生机构，包括设置在基板处的预定间隔的多个进给螺杆，用于旋转地驱动每个进给螺杆的多个旋转致动器，以及插入在卡盘板和基板之间的多个弹簧构件以允许每个所述进给螺杆的末端与所述卡盘板的后表面接合; 限制机构，用于以不相对于基板水平位移的方式限制卡盘板; 用于保持面罩的面罩座; 用于测量由所述面罩支架保持的面罩的高度的机构; 以及用于测量吸附到卡盘板上的基板的高度的机构，由此垂直位移产生机构的旋转致动器中的每个旋转致动器基于掩模和由用于测量液面的机构测量的底板之间的间隙而被驱动掩模和用于测量基板的水平的机构，以便使基板经由柔性卡盘板偏转，从而在掩模和基板之间产生均匀的间隙。

5. 发明授权

US4504045A Wafer transforming device 失效
标题翻译：晶圆转换装置
公开(公告)号：US4504045A
公开(公告)日：1985-03-12
申请号：US434397
申请日：1982-10-14
申请人： Yukio Kenbo , Nobuyuki Akiyama , Mitsuyoshi Koizumi , Asahiro Kuni
发明人： Yukio Kenbo , Nobuyuki Akiyama , Mitsuyoshi Koizumi , Asahiro Kuni
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30 , H01L21/673 , H05K3/00 , B25B11/00
CPC分类号： G03F7/707 , H01L21/30
摘要： A wafer transforming device defines an airtight space by means of a base, a hollow case, and a diaphragm type chuck which is fixed to the upper end of the case by suction. In this space, a large number of vertically moving elements are arranged at predetermined intervals. In the state in which a wafer is held by suction by means of the chuck and in which the chuck is held in contact with the upper ends of the vertically moving elements by supplying a vacuum pressure into the space, the vertically moving elements located within a required range are selectively actuated. Thus, the chuck is pushed up, and the wafer held on the chuck by the suction is transformed into a desired state.
摘要翻译：晶片转换装置通过基座，中空壳体和隔膜式卡盘来限定气密空间，其通过抽吸固定到壳体的上端。在该空间中，大量的垂直移动元件以预定的间隔布置。在通过卡盘吸附保持晶片的状态下，通过向该空间内供给真空压力使卡盘与垂直移动的元件的上端保持接触的状态下，位于所需范围被选择性地启动。因此，卡盘被向上推动，并且通过抽吸将保持在卡盘上的晶片转变成期望的状态。

6. 发明授权

US4242702A Apparatus for automatically checking external appearance of object 失效
标题翻译：用于自动检查物体外观的装置
公开(公告)号：US4242702A
公开(公告)日：1980-12-30
申请号：US856097
申请日：1977-11-30
申请人： Asahiro Kuni , Nobuyuki Akiyama , Yoshimasa Oshima
发明人： Asahiro Kuni , Nobuyuki Akiyama , Yoshimasa Oshima
IPC分类号： G01B11/02 , G01B11/24 , H04N7/18
CPC分类号： G01B11/24 , G01B11/024
摘要： An apparatus for examining an object such as a contact welded on a leaf spring in respect of geometrical and qualitative factors comprises an image pick-up device such as TV camera for detecting an optical image of the contact and the leaf spring having a dark portion along the contour of the contact and converting the optical image into corresponding video signals which are then compared with a predetermined threshold level to be converted into a binary encoded signal having two logic levels corresponding, respectively, to bright and dark portions of the optical image. Frequency distributions of the binary signal representing the dark portion are determined along two orthogonal directions thereby to define a coordinate of a region in which the contact is located. A first checking device is provided to determine if the above coordinate is located in a preset allowable tolerance range. A second checking device is additionally provided which serves to define a frame of a size differed from that of the contact in dependence on the coordinate thereby dividing the area within the frame into a predetermined number of picture elements in a matrix array, whereby faults of the contact such as injury, welding dust or deformation are detected in dependence upon a predetermined combination of the picture element signals representing the dark portions of the optical image.
摘要翻译：用于检查诸如接触焊接在板簧上的物体的几何和定性因素的装置包括用于检测接触的光学图像的电视摄像机等图像拾取装置和具有暗部分的板簧接触的轮廓并将光学图像转换成相应的视频信号，然后将其与预定的阈值电平进行比较，以转换成具有两个逻辑电平的二进制编码信号，该逻辑电平分别对应于光学图像的明暗部分。根据两个正交方向确定表示暗部分的二进制信号的频率分布，从而定义接触位置的区域的坐标。提供第一检查装置以确定上述坐标是否位于预设的允许公差范围内。另外提供另外提供的第二检查装置，其用于根据坐标定义与触点的尺寸不同的尺寸的框架，从而将框架内的区域划分成矩阵阵列中的预定数量的图像元素，由此，根据表示光学图像的暗部的像素信号的预定组合来检测诸如伤害，焊接灰尘或变形的接触。

7. 发明授权

US4153371A Method and apparatus for reduction-projection type mask alignment 失效
标题翻译：用于还原投影型掩模对准的方法和装置
公开(公告)号：US4153371A
公开(公告)日：1979-05-08
申请号：US771201
申请日：1977-02-23
申请人： Mituyoshi Koizumi , Nobuyuki Akiyama , Asahiro Kuni
发明人： Mituyoshi Koizumi , Nobuyuki Akiyama , Asahiro Kuni
IPC分类号： H01L21/30 , G03F9/00 , H01L21/027 , G01B11/27 , H05K13/00
CPC分类号： G03F9/70
摘要： A mask alignment method of the reduction-projection type comprising the steps of illuminating only regions of alignment patterns formed on a mask and a wafer, before a circuit pattern formed on the mask is projected onto the chips of the wafer through a reduction-projection lens, and aligning the mask and the wafer with each other by detecting the reflected images of both the alignment patterns. The alignment pattern region is illuminated by the light having the same wavelength as the exposure light. In addition, a mask alignment apparatus of the reduction-projection type comprising an illumination device for illuminating the mask. The mask is disposed at a distance from the wafer. The illumination light includes g-line or h-line or a combination of g-line and h-line. The projection lens is interposed between the mask and the wafer so that the circuit pattern formed on the mask is projected on the chips of the wafer on a reduced scale thereby to give the optical printing of the circuit pattern to the wafer. A field diaphragm device is disposed in the vicinity of the mask in order to prevent the exposure of the circuit pattern during the alignment operation. The field diaphragm device is provided with an opaque base plate of the size corresponding to the circuit pattern region and a transparent window of the size corresponding to the alignment pattern. The mirror or the semi-transparent mirror is disposed for reflecting optical images of the alignment patterns of the mask and the wafer in a direction toward a detecting system for displacement. The relative displacement between the mask and the wafer is detected by the detecting system thereby to align the mask and the wafer with each other by moving one of them.
摘要翻译：还原投影类型的掩模对准方法包括以下步骤：在形成在掩模上的电路图案之前只照射形成在掩模和晶片上的取向图案的区域通过还原投影透镜投影到晶片的芯片上并且通过检测两个对准图案的反射图像将掩模和晶片彼此对准。对准图案区域被与曝光光波长相同的光照射。此外，还有投影型的掩模对准装置，其包括用于照亮掩模的照明装置。掩模设置在离晶片一定距离处。照明灯包括g线或h线或g线和h线的组合。将投影透镜插入在掩模和晶片之间，使得形成在掩模上的电路图案以缩小的尺度投影在晶片的芯片上，从而将电路图案的光学打印提供给晶片。为了防止在对准操作期间电路图案的曝光，场隔膜装置设置在掩模附近。场隔膜装置设置有与电路图案区域对应的尺寸的不透明基板和与对准图案对应的尺寸的透明窗口。反射镜或半透明反射镜被设置为反射掩模和晶片的对准图案的光学图像朝向用于位移的检测系统的方向。通过检测系统检测掩模和晶片之间的相对位移，从而通过移动其中的一个来使掩模和晶片彼此对准。

8. 发明授权

US4095905A Surface-defect detecting device 失效
标题翻译：表面缺陷检测装置
公开(公告)号：US4095905A
公开(公告)日：1978-06-20
申请号：US715218
申请日：1976-08-17
申请人： Asahiro Kuni , Nobuyuki Akiyama
发明人： Asahiro Kuni , Nobuyuki Akiyama
IPC分类号： G01B11/30 , G01N21/32
CPC分类号： G01B11/303
摘要： A surface-defect detecting device including: illuminating means for illuminating a minute peripheral or annular zone on the surface of a material to be inspected, such as the circumferential surface of a cylindrical body; at least a pair of reflecting mirrors having ellipsoidal or spheroidal surfaces and first focal points positioned at the minute annular zone so as to focus the light reflecting from the aforesaid minute annular zone on the circumferential surface of the body; and photoelectric elements positioned at second the other focal points of the reflecting mirrors, respectively; whereby when a defect is not present in the minute annular zone on the circumferential surface of the body, the light is regularly reflected on the surface of the body to be inspected, so as not to be received by the photoelectric elements, and on the other hand, when a defect is present on the minute annular zone on the circumferential surface of the body, the light is irregularly reflected on the minute annular zone to be received by photoelectric elements, so that the body may be inspected for a defect on its surface according to signals obtained from the photoelectric elements, and the defect thus detected may be determined for its size.
摘要翻译：一种表面缺陷检测装置，包括：照明装置，用于照射待检查材料的表面上的微小周边或环形区域，例如圆柱体的圆周表面; 至少一对具有椭圆形或球形表面的反射镜和位于微小环形区域处的第一焦点，以将从上述微小环形区域反射的光聚焦在本体的圆周表面上; 光电元件分别位于反射镜的其他焦点的第二位置; 由此当身体的圆周表面上的微小环形区域中不存在缺陷时，光被规则地反射到待检查的身体的表面上，以便不被光电元件接收，并且在另一个当身体圆周表面上的微小环形区域上存在缺陷时，光在微小环形区域上不规则地反射以被光电元件接收，从而可以检查身体在其表面上的缺陷根据从光电元件获得的信号，并且可以根据其尺寸确定如此检测到的缺陷。

9. 发明申请

US20130168437A1 NOBLE METAL PASTE FOR BONDING OF SEMICONDUCTOR ELEMENT 有权
标题翻译：用于粘合半导体元件的金属磷酸盐
公开(公告)号：US20130168437A1
公开(公告)日：2013-07-04
申请号：US13822334
申请日：2011-09-30
申请人： Masayuki Miyairi , Nobuyuki Akiyama , Katsuji Inagaki , Toshinori Ogashiwa
发明人： Masayuki Miyairi , Nobuyuki Akiyama , Katsuji Inagaki , Toshinori Ogashiwa
IPC分类号： B23K35/30
CPC分类号： B23K35/3006 , B23K35/3013 , H01L24/29 , H01L24/83 , H01L2224/04026 , H01L2224/05166 , H01L2224/05644 , H01L2224/29101 , H01L2224/29294 , H01L2224/29339 , H01L2224/29344 , H01L2224/83203 , H01L2224/8384 , H01L2924/00011 , H01L2924/00013 , H01L2924/01004 , H01L2924/01006 , H01L2924/01023 , H01L2924/01033 , H01L2924/01047 , H01L2924/01079 , H01L2924/014 , H01L2924/0665 , H01L2924/10253 , H01L2924/351 , H01L2924/3512 , H01L2924/00 , H01L2224/29298 , H01L2924/00015 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2224/2929 , H01L2924/01203 , H01L2224/29144 , H01L2924/00014 , H01L2224/29139
摘要： A precious metal paste which does not cause contamination of a member, which can be uniformly coated to a member to be bonded, and which is in good condition after bonding is provided. The present invention relates to a precious metal paste for bonding a semiconductor element, of the paste including a precious metal powder and an organic solvent, in which the precious metal powder has a purity of 99.9 mass % or more and an average particle diameter of 0.1 to 0.5 μm, the organic solvent has a boiling point of 200 to 350° C., and a thixotropy index (TI) value calculated from a measurement value of a viscosity at a shear rate of 4/s with respect to a viscosity at a shear rate of 40/s at 23° C. by means of a rotational viscometer is 6.0 or more.
摘要翻译：提供了不会使被均匀地涂覆在待接合部件上并且在接合后处于良好状态的部件被污染的贵金属糊料。本发明涉及一种用于粘合半导体元件的贵金属糊料，其中贵金属粉末的纯度为99.9质量％以上且平均粒径为0.1的贵金属粉末和有机溶剂至0.5μm，有机溶剂的沸点为200〜350℃，触变性指数（TI）值由剪切速度4 / s时的粘度的测定值相对于通过旋转粘度计在23℃下的剪切速率为40 / s为6.0以上。

10. 发明申请

US20100073926A1 Flame Detector 有权
标题翻译：火焰探测器
公开(公告)号：US20100073926A1
公开(公告)日：2010-03-25
申请号：US12561185
申请日：2009-09-16
申请人： Akihisa Kudoh , Kazuyoshi Sakurai , Hiroshi Kaneko , Nobuyuki Akiyama , Masahiro Katagiri
发明人： Akihisa Kudoh , Kazuyoshi Sakurai , Hiroshi Kaneko , Nobuyuki Akiyama , Masahiro Katagiri
IPC分类号： F21V1/00 , G01J5/02
CPC分类号： G08B17/12 , G08B29/08
摘要： A flame detector is provided. A circuit board is disposed in a housing. A first light source emits first light. A light guide member comprised of translucent material guides the first light from the first light source to a light emission portion of the light guide member. A first light receiving element detects second light having a predetermined wavelength unique to the flames. A second light source emits third light to a translucent cover which is disposed between an opening of the housing and the first light receiving element. A second light receiving element detects the third light passed through the translucent cover to test the translucency. The first light source, the second light source and the second light receiving element are mounted on the circuit board. The light emission portion is formed into a substantially annular shape which encloses the first light receiving element at a front side of the housing to limit a field of view of the first light receiving element to a predetermined range. And the light guide member has a light entrance portion and a light exit portion for the third light to form a light path from the second light source to the second light receiving element through the translucent cover and the light guide member.
摘要翻译：提供火焰探测器。电路板设置在壳体中。第一光源发射第一光。由半透明材料构成的导光构件将来自第一光源的第一光引导到导光构件的发光部分。第一光接收元件检测具有特定于火焰的预定波长的第二光。第二光源将第三光发射到设置在壳体的开口和第一光接收元件之间的半透明盖。第二光接收元件检测通过半透明盖的第三光以测试半透明度。第一光源，第二光源和第二光接收元件安装在电路板上。光发射部分形成为大致环形的形状，其将第一光接收元件封装在壳体的前侧，以将第一光接收元件的视野限制在预定范围内。并且导光部件具有用于第三光的光入射部分和光出射部分，以通过半透明盖和导光部件形成从第二光源到第二光接收元件的光路。

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