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    • 6. 发明授权
    • Method for fabricating micromachined members coupled for relative rotation
    • 用于制造耦合用于相对旋转的微加工构件的方法
    • US06426013B1
    • 2002-07-30
    • US09428946
    • 1999-10-28
    • Armand P. NeukermansTimothy G. Slater
    • Armand P. NeukermansTimothy G. Slater
    • G02B2600
    • G02B26/101G01C19/5719G02B26/0841G02B26/085
    • A method for fabricating an integrated, micromachined structure, such as a torsional scanner, that includes a reference member, such as a frame, a pair of torsion hinges, and a dynamic member that is coupled to the reference member by the torsion hinges. The method includes providing a wafer that has been formed from silicon material, and that has both a frontside and a backside. A membrane is formed in the wafer by etching a cavity in the silicon material from the backside of the wafer. The method also includes establishing a pattern that defines the mirror surface and the torsion hinges on the frontside of the wafer at the membrane formed therein. The frontside of the wafer is processed to form therein the dynamic member and the torsion hinges that support the dynamic member for rotation about the axis.
    • 一种用于制造集成的微加工结构的方法,例如扭转扫描器,其包括诸如框架的参考构件,一对扭转铰链和通过扭转铰链联接到参考构件的动态构件。 该方法包括提供由硅材料形成并且具有前侧和后侧的晶片。 通过从晶片的背面蚀刻硅材料中的空腔而在晶片中形成膜。 该方法还包括在其中形成的膜上建立限定晶片表面和扭转铰链的图案。 处理晶片的前侧以在其中形成动态构件和支撑动态构件的扭转铰链以围绕轴线旋转。
    • 7. 发明授权
    • Handheld document scanner
    • 手持文档扫描仪
    • US6064779A
    • 2000-05-16
    • US121439
    • 1998-07-23
    • Armand P. NeukermansJames P. DowningTimothy G. Slater
    • Armand P. NeukermansJames P. DowningTimothy G. Slater
    • G06T1/00H04N1/00H04N1/107H04N1/12H04N1/193H04N1/40
    • H04N1/00689H04N1/00891H04N1/0476H04N1/107H04N1/1072H04N1/1078H04N1/121H04N1/00885H04N1/193H04N2201/0096H04N2201/0471
    • A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.
    • 用于扫描器(100)的文件传送装置具有邻近文件(134)设置的柔性细长的手指(226),并且施加到手指(226)的力促使手指(226)上的齿(233)接触 其中文档(134)沿着通过扫描器(100)的路径敦促文档(134)。 向手指(226)施加力的压电板(222)仅需要少量的电力。 为了横穿扫描器(100),文档(134)也可以沿着引导件(272)手动馈送。 沿着由文件(134)穿过的路径设置的第一和第二速度感测检测器(276a和276b)允许扫描器(100)确定手动馈送的文件(134)穿过扫描仪(100)的速度, 。 为了节省电能,扫描器(100)还包括用于在存在待扫描的文件(134)时启动扫描器(100)的原稿存在检测器(274)。
    • 9. 发明授权
    • Handheld document scanner
    • 手持文档扫描仪
    • US06229139B1
    • 2001-05-08
    • US09547813
    • 2000-04-11
    • Armand P. NeukermansJames P. DowningTimothy G. Slater
    • Armand P. NeukermansJames P. DowningTimothy G. Slater
    • G01D530
    • H04N1/00689H04N1/00885H04N1/00891H04N1/107H04N1/1078H04N1/121H04N1/193H04N2201/0096H04N2201/0471H04N2201/04732H04N2201/04737
    • A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.
    • 用于扫描器(100)的文件传送装置具有邻近文件(134)设置的柔性细长的手指(226),并且施加到手指(226)的力促使手指(226)上的齿(233)接触 其中文档(134)沿着通过扫描器(100)的路径敦促文档(134)。 向手指(226)施加力的压电板(222)仅需要少量的电力。 为了横穿扫描器(100),文档(134)也可以沿着引导件(272)手动馈送。 沿着由文件(134)穿过的路径设置的第一和第二速度感测检测器(276a和276b)允许扫描器(100)确定手动馈送的文件(134)穿过扫描仪(100)的速度, 。 为了节省电能,扫描器(100)还包括用于在存在待扫描的文件(134)时启动扫描器(100)的原稿存在检测器(274)。
    • 10. 发明授权
    • Micromachined members coupled for relative rotation by torsion bars
    • 通过扭杆相互旋转的微机械构件
    • US6044705A
    • 2000-04-04
    • US855883
    • 1997-05-12
    • Armand P. NeukermansTimothy G. SlaterPhilip Downing
    • Armand P. NeukermansTimothy G. SlaterPhilip Downing
    • G01C19/5719G02B26/08G02B26/10G01C19/00
    • G01C19/5719G02B26/085G02B26/101
    • Two torsion bars project from a reference member to support at least one plate or frame-shaped first dynamic member for rotation about an axis of the torsion bars. In one embodiment, a frame-shaped first dynamic member and a second pair of torsion bars, oriented non-parallel to the first torsion bars, support a second dynamic member for rotation about an axis that is collinear with the second pair of torsion bars. The vibrational frequency of the principal torsional vibrational mode of the dynamic members are respectively lower by at least 20% than the vibrational frequency of any other vibrational mode thereof. Either an electrostatic or electromagnetic drive means imparts rotary motion to the dynamic members about the collinear torsion bar axis(es). The reference member, the torsion bars and the dynamic member(s) are all monolithically fabricated from a stress-free semiconductor layer of a silicon substrate.
    • 两个扭杆从参考构件突出,以支撑至少一个板或框架形的第一动态构件,用于围绕扭杆的轴线旋转。 在一个实施例中,框架形状的第一动态构件和不平行于第一扭力杆的第二对扭杆支撑第二动态构件,用于围绕与第二对扭杆共线的轴线旋转。 动态构件的主要扭转振动模式的振动频率分别比其他振动模式的振动频率低至少20%。 静电或电磁驱动装置都可以围绕共线扭杆轴线向动态构件施加旋转运动。 参考构件,扭杆和动态构件都是由硅衬底的无应力半导体层整体制造的。