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    • 6. 发明授权
    • Scanning apparatus linearization and calibration system
    • 扫描仪线性化和校准系统
    • US5469734A
    • 1995-11-28
    • US357133
    • 1994-12-15
    • Marc R. Schuman
    • Marc R. Schuman
    • G01B7/34G01Q40/00H01J37/00H01J37/20
    • G01Q40/00B82Y35/00Y10S977/851
    • The scanning apparatus linearization and calibration system includes an electromechanical scanner having a sample stage portion, and a deflecting member, mounted between the scanning means and a fixed mounting member, that undergoes deflection in response to displacement of the scanner sample stage portion in at least one dimension of displacement. Strain gauges are mounted to the deflecting member for measuring the deflection of the deflecting member and for generating a deflection output signal indicative of an amount of deflection of the deflecting member, to provide a highly sensitive indication of actual displacement of the sample stage of the scanning apparatus. Control circuitry also provides for open loop displacement correction and for closed loop feedback correction of the position of the scanner sample stage.
    • 扫描装置线性化和校准系统包括具有样品台部分的机电扫描器和安装在扫描装置和固定安装构件之间的偏转构件,其响应于扫描仪样品台部分在至少一个中的位移而经历偏转 位移尺寸 应变计被安装到偏转构件,用于测量偏转构件的偏转并产生指示偏转构件的偏转量的偏转输出信号,以提供扫描样本台的实际位移的高度敏感指示 仪器。 控制电路还提供开环位移校正和用于扫描仪样品台位置的闭环反馈校正。