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1. 发明授权

US6044705A Micromachined members coupled for relative rotation by torsion bars 失效
标题翻译：通过扭杆相互旋转的微机械构件
公开(公告)号：US6044705A
公开(公告)日：2000-04-04
申请号：US855883
申请日：1997-05-12
申请人： Armand P. Neukermans , Timothy G. Slater , Philip Downing
发明人： Armand P. Neukermans , Timothy G. Slater , Philip Downing
IPC分类号： G01C19/5719 , G02B26/08 , G02B26/10 , G01C19/00
CPC分类号： G01C19/5719 , G02B26/085 , G02B26/101
摘要： Two torsion bars project from a reference member to support at least one plate or frame-shaped first dynamic member for rotation about an axis of the torsion bars. In one embodiment, a frame-shaped first dynamic member and a second pair of torsion bars, oriented non-parallel to the first torsion bars, support a second dynamic member for rotation about an axis that is collinear with the second pair of torsion bars. The vibrational frequency of the principal torsional vibrational mode of the dynamic members are respectively lower by at least 20% than the vibrational frequency of any other vibrational mode thereof. Either an electrostatic or electromagnetic drive means imparts rotary motion to the dynamic members about the collinear torsion bar axis(es). The reference member, the torsion bars and the dynamic member(s) are all monolithically fabricated from a stress-free semiconductor layer of a silicon substrate.
摘要翻译：两个扭杆从参考构件突出，以支撑至少一个板或框架形的第一动态构件，用于围绕扭杆的轴线旋转。在一个实施例中，框架形状的第一动态构件和不平行于第一扭力杆的第二对扭杆支撑第二动态构件，用于围绕与第二对扭杆共线的轴线旋转。动态构件的主要扭转振动模式的振动频率分别比其他振动模式的振动频率低至少20％。静电或电磁驱动装置都可以围绕共线扭杆轴线向动态构件施加旋转运动。参考构件，扭杆和动态构件都是由硅衬底的无应力半导体层整体制造的。

2. 发明授权

US6122394A Compact, simple, 2D raster, image-building fingerprint scanner 失效
标题翻译：紧凑，简单，2D光栅，图像构建指纹扫描仪
公开(公告)号：US6122394A
公开(公告)日：2000-09-19
申请号：US846837
申请日：1997-05-01
申请人： Armand P. Neukermans , Timothy G. Slater , Philip Downing
发明人： Armand P. Neukermans , Timothy G. Slater , Philip Downing
IPC分类号： G02B26/08 , G06K9/00 , G06K9/20
CPC分类号： G06K9/00046 , G02B26/085 , G06K9/00013 , G06K9/00053 , G06K9/2009
摘要： A beam (38) of electromagnetic radiation deflected by a moving mirror plate (56) of a micromachined scanner (54) produces a two dimensional ("2D") raster (132) on a scanned surface (28) of a block (34). The block (34) is transparent to electro-magnetic radiation of pre-established wavelengths. A radiation inlet-face (36) of the block (34) admits the beam (38) that then impinges on the scanned surface (28) to exit the block (34) through a radiation outlet-face (42). After exiting the block (34), the beam (38) impinges upon a radiation detector (142). Total internal reflection ("TIR") of the beam (38) from the scanned surface (28) at fingerprint valleys and frustration of TIR at fingerprint ridges causes the radiation detector (142) to produce a time-varying electrical signal that represents the fingerprint. The scanned surface (28) may be formed by a patch (302) of resilient material, that may be tinted to be transparent only at the pre-established wavelength of the electro-magnetic radiation.
摘要翻译：由微机械扫描器（54）的移动镜板（56）偏转的电磁辐射束（38）在块（34）的扫描表面（28）上产生二维（“2D”）光栅（132）。块（34）对于预先建立的波长的电磁辐射是透明的。块体（34）的辐射入射面（36）允许射束（38）然后撞击在扫描表面（28）上，以通过辐射出射面（42）离开块体（34）。在离开块（34）之后，光束（38）撞击在辐射检测器（142）上。来自扫描表面（28）的光束（38）在指纹谷处的全内反射（“TIR”）和指纹脊上TIR的挫折使得辐射探测器（142）产生代表指纹的时变电信号。扫描表面（28）可以由弹性材料的贴片（302）形成，其可以仅在电磁辐射的预先建立的波长下被着色为透明。

3. 发明授权

US5969465A Adjusting operating characteristics of micromachined torsional oscillators 失效
标题翻译：调整微加工扭转振荡器的工作特性
公开(公告)号：US5969465A
公开(公告)日：1999-10-19
申请号：US53232
申请日：1998-04-01
申请人： Armand P. Neukermans , Timothy G. Slater , Philip Downing
发明人： Armand P. Neukermans , Timothy G. Slater , Philip Downing
IPC分类号： B81B3/00 , G01C19/56 , G01P9/04 , G02B26/08 , G02B26/10 , H01L41/09 , H02K33/18 , H02K33/00
CPC分类号： B81B3/0078 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/0866 , G02B26/101 , H02K33/18 , B81B2203/0109 , B81C2201/0167
摘要： An improved micromachined structure used for beam scanners, gyroscopes, etc. includes a reference member from which project a first pair of axially aligned torsion bars. A first dynamic member, coupled to and supported from the reference member by the torsion bars, oscillates in one-dimension about the torsion bar's axis. A second dynamic member may be supported from the first dynamic member by a second pair of axially aligned torsion bars for two-dimensional oscillation. The dynamic members respectively exhibit a plurality of vibrational modes each having a frequency and a Q. The improvement includes means for altering a characteristic of the dynamic member's frequency and Q. Coupling between dynamic members permits altering the second dynamic member's frequency and Q by techniques applied to the first dynamic member. Some techniques disclosed also increase oscillation amplitude or reduce driving voltage, and also increase mechanical ruggedness of the structure.
摘要翻译：用于光束扫描器，陀螺仪等的改进的微加工结构包括参考构件，从基准构件突出出第一对轴向对准的扭杆。通过扭力杆耦合并由参考构件支撑的第一动态构件围绕扭杆的轴线一维摆动。第二动态构件可以由第二对轴向对准的扭杆从第一动态构件支撑，用于二维振荡。动态构件分别表现出多个具有频率和Q的振动模式。改进包括用于改变动态构件的频率和Q的特性的装置。动态构件之间的耦合允许通过应用的技术改变第二动态构件的频率和Q 到第一个动态成员。公开的一些技术还增加振荡幅度或降低驱动电压，并且还增加了结构的机械坚固性。

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