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1. 发明申请

WO2010036621A2 DEFECT-FREE JUNCTION FORMATION USING OCTADECABORANE SELF-AMORPHIZING IMPLANTS 审中-公开
标题翻译：使用OCTADECABORANE自补偿植入物进行无缺陷断层形成
公开(公告)号：WO2010036621A2
公开(公告)日：2010-04-01
申请号：PCT/US2009/057708
申请日：2009-09-21
申请人： APPLIED MATERIALS, INC. , LI, Jiping , HUNTER, Aaron Muir , ADAMS, Bruce E. , MOFFITT, Theodore , MOFFATT, Stephen
发明人： LI, Jiping , HUNTER, Aaron Muir , ADAMS, Bruce E. , MOFFITT, Theodore , MOFFATT, Stephen
IPC分类号： H01L21/265
CPC分类号： H01L21/265 , H01J37/32357 , H01J37/32412 , H01L21/26513 , H01L21/324
摘要： A method and apparatus for implanting a semiconductor substrate with boron clusters. A substrate is implanted with octadecaborane by plasma immersion or ion beam implantation. The substrate surface is then annealed to completely dissociate and activate the boron clusters. The annealing may take place by melting the implanted regions or by a sub-melt annealing process.
摘要翻译：一种用硼簇植入半导体衬底的方法和装置。通过等离子体浸渍或离子束注入，注入十八硼烷衬底。然后将衬底表面退火以完全解离并激活硼簇。退火可以通过熔化注入区域或通过亚熔融退火工艺进行。

2. 发明申请

WO2013090581A1 MULTIPLE BEAM COMBINER FOR LASER PROCESSING APPARATUS 审中-公开
标题翻译：用于激光加工设备的多光束组合器
公开(公告)号：WO2013090581A1
公开(公告)日：2013-06-20
申请号：PCT/US2012/069518
申请日：2012-12-13
申请人： APPLIED MATERIALS, INC. , MOFFATT, Stephen , HOLMGREN, Douglas E. , HOWELLS, Samuel C. , TONG, Edric , ADAMS, Bruce E. , LI, Jiping , HUNTER, Aaron Muir
发明人： MOFFATT, Stephen , HOLMGREN, Douglas E. , HOWELLS, Samuel C. , TONG, Edric , ADAMS, Bruce E. , LI, Jiping , HUNTER, Aaron Muir
IPC分类号： H01L21/268 , H01L21/26
CPC分类号： G02B27/106 , G02B17/0888 , G02B27/0025 , G02B27/10 , G02B27/1006 , G02B27/12 , G02B27/123 , G02B27/126 , G02B27/14 , G02B27/143 , G02B27/30
摘要： Apparatus and methods for combining beams of amplified radiation are disclosed. A beam combiner has a collimating optic positioned to receive a plurality of coherent radiation beams at a constant angle of incidence with respect to an optical axis of the collimating optic. The respective angles of incidence may also be different in some embodiments. The collimating optic has an optical property that collimates the beams. The optical property may be refractive or reflective, or a combination thereof. A collecting optic may also be provided to direct the plurality of beams to the collimating optic. The beam combiner may be used in a thermal processing apparatus to combine more than two beams of coherent amplified radiation, such as lasers, into a single beam.
摘要翻译：公开了用于组合放大辐射束的装置和方法。光束组合器具有准直光学器件，其被定位成以相对于准直光学器件的光轴的恒定入射角接收多个相干辐射束。在一些实施例中，相应的入射角也可以不同。准直光学元件具有使光束准直的光学特性。光学性质可以是折射或反射的，或其组合。还可以提供收集光学器件以将多个光束引导到准直光学元件。光束组合器可以用在热处理装置中，以将多于两个的相干放大辐射束（例如激光器）组合成单个光束。

3. 发明申请

WO2012177743A2 NOVEL THERMAL PROCESSING APPARATUS 审中-公开
标题翻译：新型热处理装置
公开(公告)号：WO2012177743A2
公开(公告)日：2012-12-27
申请号：PCT/US2012/043323
申请日：2012-06-20
申请人： APPLIED MATERIALS, INC. , MOFFATT, Stephen , HOLMGREN, Douglas, E. , HOWELLS, Samuel, C. , TONG, Edric , ADAMS, Bruce, E. , LI, Jiping , HUNTER, Aaron, Muir
发明人： MOFFATT, Stephen , HOLMGREN, Douglas, E. , HOWELLS, Samuel, C. , TONG, Edric , ADAMS, Bruce, E. , LI, Jiping , HUNTER, Aaron, Muir
IPC分类号： H01L21/324 , H01L21/26
CPC分类号： H01L21/477 , B23K26/0006 , B23K26/0081 , B23K26/03 , B23K26/032 , B23K26/04 , B23K26/0608 , B23K26/0622 , B23K26/08 , B23K26/127 , B23K2201/40 , B23K2203/56 , H01L21/268 , H01S3/0057
摘要： The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field.
摘要翻译：本发明一般涉及能够在包含在基板的表面上的退火区域上可靠地输送均匀的能量的光学系统。光学系统适于在衬底的表面上的期望区域上传送或投影具有期望的二维形状的均匀量的能量。用于光学系统的能量源通常是多个激光器，其被组合以形成能量场。

4. 发明申请

WO2009023423A1 INCREASED NANOSECOND LASER PULSE-TO-PULSE ENERGY REPEATABILITY USING ACTIVE LASER PULSE ENERGY CONTROL 审中-公开
标题翻译：增加激光器激光脉冲能量可重复使用激光脉冲能量控制
公开(公告)号：WO2009023423A1
公开(公告)日：2009-02-19
申请号：PCT/US2008/071246
申请日：2008-07-25
申请人： APPLIED MATERIALS, INC. , LI, Jiping , HUNTER, Aaron Muir , THOMAS, Timothy N. , JENNINGS, Dean , ADAMS, Bruce E.
发明人： LI, Jiping , HUNTER, Aaron Muir , THOMAS, Timothy N. , JENNINGS, Dean , ADAMS, Bruce E.
IPC分类号： H01S3/10 , H01S3/101
CPC分类号： B23K26/0622 , H01L21/02686 , H01L21/2026
摘要： A method and apparatus for reducing the pulse-to-pulse laser energy variation (i.e., increasing the pulse-to-pulse laser energy repeatability) from a pulsed laser source are provided. In this manner, laser pulses impingent on a processing plane, such as the surface of a wafer or other substrate, may have substantially the same energy content leading to a more controlled process when compared to conventional processing. The method may be based on in-situ detection of the pulse energy level and the subsequent active adjustment of the transmitted laser pulse energy in a closed-loop control scheme. Furthermore, the active adjustment of the laser pulse energy may occur within a few nanoseconds after the original laser pulse is generated by a pulsed laser source.
摘要翻译：提供了一种用于从脉冲激光源减少脉冲对脉冲激光能量变化（即，增加脉冲到脉冲激光能量重复性）的方法和装置。以这种方式，与常规处理相比，照射在诸如晶片或其它基板的表面的处理平面上的激光脉冲可具有基本上相同的能量含量，导致更受控制的过程。该方法可以基于在闭环控制方案中脉冲能量水平的现场检测和随后的发射的激光脉冲能量的主动调节。此外，在通过脉冲激光源产生原始激光脉冲之后，激光脉冲能量的主动调节可能在几纳秒内发生。

5. 发明申请

WO2009017894A1 METHOD FOR PARTITIONING AND INCOHERENTLY SUMMING A COHERENT BEAM 审中-公开
标题翻译：用于分离和不可避免地聚集相干光束的方法
公开(公告)号：WO2009017894A1
公开(公告)日：2009-02-05
申请号：PCT/US2008/067493
申请日：2008-06-19
申请人： APPLIED MATERIALS, INC. , JENNINGS, Dean , THOMAS, Timothy N. , MOFFATT, Stephen , LI, Jiping , ADAMS, Bruce E. , HOWELLS, Samuel C.
发明人： JENNINGS, Dean , THOMAS, Timothy N. , MOFFATT, Stephen , LI, Jiping , ADAMS, Bruce E. , HOWELLS, Samuel C.
IPC分类号： B23K26/067 , H01L21/268
CPC分类号： G02B27/283 , B23K26/0604 , B23K26/0613 , B23K26/0622 , B23K26/067 , G02B27/10 , G02B27/144 , G02B27/145 , G02B27/48 , H01L21/268 , H01L21/67115
摘要： A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. For some embodiments employing a pulsed light source, the output pulse may be stretched relative to the input pulse width. The methods and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.
摘要翻译：提供了一种用于在时间和空间上从光源（例如脉冲激光）去除相干光的方法和装置，以提供强烈和均匀的照明。对于采用脉冲光源的一些实施例，可以相对于输入脉冲宽度拉伸输出脉冲。本文描述的方法和装置可以结合到需要强烈均匀照明的任何应用中，例如脉冲激光退火，焊接，烧蚀和晶片步进照明。

6. 发明申请

WO2009023442A1 APPARATUS AND METHOD OF IMPROVING BEAM SHAPING AND BEAM HOMOGENIZATION 审中-公开
标题翻译：改进光束形成和光束均匀化的装置和方法
公开(公告)号：WO2009023442A1
公开(公告)日：2009-02-19
申请号：PCT/US2008/071761
申请日：2008-07-31
申请人： APPLIED MATERIALS, INC. , ADAMS, Bruce, E. , HOWELLS, Samuel, C. , JENNINGS, Dean , LI, Jiping , THOMAS, Timothy, N. , MOFFATT, Stephen
发明人： ADAMS, Bruce, E. , HOWELLS, Samuel, C. , JENNINGS, Dean , LI, Jiping , THOMAS, Timothy, N. , MOFFATT, Stephen
IPC分类号： H01L21/20
CPC分类号： B23K26/073 , B23K26/0613 , B23K26/0622 , B23K26/067 , B23K26/0732 , B23K2203/56 , G02B27/0961
摘要： The present invention generally relates to an optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. Typically, the anneal regions may be square or rectangular in shape. Generally, the optical system and methods of the present invention are used to preferentially anneal one or more regions found within the anneal regions by delivering enough energy to cause the one or more regions to re-melt and solidify.
摘要翻译：本发明一般涉及能够在包含在基板的表面上的退火区域上可靠地输送均匀的能量的光学系统。光学系统适于在衬底的表面上的期望区域上传送或投影具有期望的二维形状的均匀量的能量。通常，退火区域可以是正方形或矩形形状。通常，本发明的光学系统和方法用于通过递送足够的能量以使一个或多个区域再熔化和固化来优先退火在退火区域内发现的一个或多个区域。

7. 发明申请

WO2009017903A1 METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT 审中-公开
标题翻译：用于装饰空间和时间相干光的方法和装置
公开(公告)号：WO2009017903A1
公开(公告)日：2009-02-05
申请号：PCT/US2008/067913
申请日：2008-06-23
申请人： APPLIED MATERIALS, INC. , JENNINGS, Dean , THOMAS, Timothy N. , MOFFATT, Stephen , LI, Jiping , ADAMS, Bruce E. , HOWELLS, Samuel C.
发明人： JENNINGS, Dean , THOMAS, Timothy N. , MOFFATT, Stephen , LI, Jiping , ADAMS, Bruce E. , HOWELLS, Samuel C.
IPC分类号： G02B5/30
CPC分类号： G02B27/28 , G02B27/283 , G02B27/48
摘要： A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.
摘要翻译：提供了一种用于在时间和空间上从光源（例如脉冲激光）去除相干光的方法和装置，以提供强烈和均匀的照明。本文描述的技术和装置可以并入任何需要强烈均匀照明的应用中，例如脉冲激光退火，焊接，烧蚀和晶片步进照明。

8. 发明申请

WO2013148119A1 LASER NOISE ELIMINATION IN TRANSMISSION THERMOMETRY 审中-公开
标题翻译：传感器热噪声消除噪声
公开(公告)号：WO2013148119A1
公开(公告)日：2013-10-03
申请号：PCT/US2013/029973
申请日：2013-03-08
申请人： APPLIED MATERIALS, INC. , LI, Jiping , HUNTER, Aaron Muir , HAW, Thomas
发明人： LI, Jiping , HUNTER, Aaron Muir , HAW, Thomas
IPC分类号： G01J5/02 , H01L21/324
CPC分类号： B23K26/00 , G01J1/0459 , G01J5/0007 , G01J5/02 , G01J5/06 , G01J5/0896 , G01J5/58 , G01N21/59
摘要： Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.
摘要翻译：公开了用于测量衬底温度的装置和方法。该装置包括温度指示辐射源，用于温度指示辐射的检测器，以及设置在温度指示辐射源和温度指示辐射检测器之间的光路中的去相关器。去相关器可以是宽带放大器和/或模式扰频器。宽带放大器可以是宽带激光器，布拉格光栅，光纤布拉格光栅，拉曼放大器，布里渊放大器或其组合。选择去相关器以发射至少部分由被监测的衬底透射的辐射。如果解相关器是增益驱动装置，则源与去相关器匹配，使得源的发射光谱在解相关器的增益带宽内。

9. 发明申请

WO2013148066A1 LASER NOISE ELIMINATION IN TRANSMISSION THERMOMETRY 审中-公开
标题翻译：传输温度计中的激光消除
公开(公告)号：WO2013148066A1
公开(公告)日：2013-10-03
申请号：PCT/US2013/028654
申请日：2013-03-01
申请人： APPLIED MATERIALS, INC. , LI, Jiping , HUNTER, Aaron, Muir , HAW, Thomas
发明人： LI, Jiping , HUNTER, Aaron, Muir , HAW, Thomas
IPC分类号： H01L21/66
CPC分类号： B23K26/00 , G01J1/0459 , G01J5/0007 , G01J5/02 , G01J5/06 , G01J5/0896 , G01J5/58 , G01N21/59
摘要： Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.
摘要翻译：公开了用于测量基板的温度的设备和方法。该设备包括温度指示辐射源，用于温度指示辐射的检测器以及设置在温度指示辐射源和用于温度指示辐射的检测器之间的光路中的解相关器。解相关器可以是宽带放大器和/或模式扰码器。宽带放大器可以是宽带激光器，布拉格光栅，光纤布拉格光栅，拉曼放大器，布里渊放大器或其组合。选择解相关器以发射至少部分由被监测的衬底传输的辐射。如果解相关器是增益驱动装置，则该源与解相关器匹配，使得源的发射频谱在解相关器的增益带宽内。

10. 发明申请

WO2013119975A1 SPIKE ANNEAL RESIDENCE TIME REDUCTION IN RAPID THERMAL PROCESSING CHAMBERS 审中-公开
标题翻译：快速热处理炉中SPIKE ANNEAL RESIDENCE TIME减少
公开(公告)号：WO2013119975A1
公开(公告)日：2013-08-15
申请号：PCT/US2013/025377
申请日：2013-02-08
申请人： APPLIED MATERIALS, INC. , LI, Jiping , KOELMEL, Blake , HUNTER, Aaron Muir , ADERHOLD, Wolfgang R.
发明人： LI, Jiping , KOELMEL, Blake , HUNTER, Aaron Muir , ADERHOLD, Wolfgang R.
IPC分类号： H01L21/205 , H01L21/324
CPC分类号： H01L21/67109 , F27B17/0025 , H01L21/67115
摘要： The present invention generally relates to methods of cooling a substrate during rapid thermal processing. The methods generally include positioning a substrate in a chamber and applying heat to the substrate. After the temperature of the substrate is increased to a desired temperature, the substrate is rapidly cooled. Rapid cooling of the substrate is facilitated by increasing a flow rate of a gas through the chamber. Rapid cooling of the substrate is further facilitated by positioning the substrate in close proximity to a cooling plate. The cooling plate removes heat from substrate via conduction facilitated by gas located therebetween. The distance between the cooling plate and the substrate can be adjusted to create a turbulent gas flow therebetween, which further facilitates removal of heat from the substrate. After the substrate is sufficiently cooled, the substrate is removed from the chamber.
摘要翻译：本发明一般涉及在快速热处理期间冷却衬底的方法。所述方法通常包括将衬底定位在腔室中并将热量施加到衬底上。在将基板的温度升高到所需温度之后，快速冷却基板。通过增加通过室的气体的流速来促进衬底的快速冷却。通过将衬底定位在靠近冷却板的方式进一步促进衬底的快速冷却。冷却板通过由位于其间的气体促进的传导从衬底去除热量。可以调节冷却板和基板之间的距离以在它们之间产生湍流气流，这进一步有助于从基板去除热量。在衬底充分冷却之后，将衬底从腔室中取出。

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