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1. 发明申请

WO2010025228A2 METHOD AND APPARATUS FOR EXTENDED TEMPERATURE PYROMETRY 审中-公开
标题翻译：用于扩展温度色谱法的方法和装置
公开(公告)号：WO2010025228A2
公开(公告)日：2010-03-04
申请号：PCT/US2009/055162
申请日：2009-08-27
申请人： APPLIED MATERIALS, INC. , HUNTER, Aaron, M. , LI, Jiping , RAMANUJAM, Rajesh, S. , HAW, Thomas
发明人： HUNTER, Aaron, M. , LI, Jiping , RAMANUJAM, Rajesh, S.
IPC分类号： H01L21/324 , H01L21/66
CPC分类号： H01L21/67248 , H01L21/67115
摘要： Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.
摘要翻译：本发明的实施例涉及用于在包括低温的扩展温度范围内快速热处理衬底的方法和装置。公开了使用采用透射辐射探测器系统的扩展温度测温系统的系统和方法。还描述了组合透射辐射检测器系统和发射的辐射探测器系统的系统。

2. 发明申请

WO2013148066A1 LASER NOISE ELIMINATION IN TRANSMISSION THERMOMETRY 审中-公开
标题翻译：传输温度计中的激光消除
公开(公告)号：WO2013148066A1
公开(公告)日：2013-10-03
申请号：PCT/US2013/028654
申请日：2013-03-01
申请人： APPLIED MATERIALS, INC. , LI, Jiping , HUNTER, Aaron, Muir , HAW, Thomas
发明人： LI, Jiping , HUNTER, Aaron, Muir , HAW, Thomas
IPC分类号： H01L21/66
CPC分类号： B23K26/00 , G01J1/0459 , G01J5/0007 , G01J5/02 , G01J5/06 , G01J5/0896 , G01J5/58 , G01N21/59
摘要： Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.
摘要翻译：公开了用于测量基板的温度的设备和方法。该设备包括温度指示辐射源，用于温度指示辐射的检测器以及设置在温度指示辐射源和用于温度指示辐射的检测器之间的光路中的解相关器。解相关器可以是宽带放大器和/或模式扰码器。宽带放大器可以是宽带激光器，布拉格光栅，光纤布拉格光栅，拉曼放大器，布里渊放大器或其组合。选择解相关器以发射至少部分由被监测的衬底传输的辐射。如果解相关器是增益驱动装置，则该源与解相关器匹配，使得源的发射频谱在解相关器的增益带宽内。

3. 发明申请

WO2012177649A1 COMPENSATION OF STRAY LIGHT INTERFERENCE IN SUBSTRATE TEMPERATURE MEASUREMENT 审中-公开
标题翻译：基板温度测量中光线干涉的补偿
公开(公告)号：WO2012177649A1
公开(公告)日：2012-12-27
申请号：PCT/US2012/043163
申请日：2012-06-19
申请人： ADVANCED ENERGY INDUSTRIES, INC. , HAW, Thomas
发明人： HAW, Thomas
IPC分类号： G01J5/06 , G01N25/00
CPC分类号： G01J5/06 , G01J5/061 , G01J5/522 , G01J2005/0048
摘要： This disclosure describes systems, methods, and apparatuses for making a non-contact measurement of a substrate in a plasma processing chamber that accounts for stray blackbody radiation. In particular, a photocurrent is calculated that can be attributed to the stray blackbody radiation based upon a temperature of the stray blackbody radiation, a reflectance of a target substrate, and a temperature of the substrate. Knowing the photocurrent attributable to the stray blackbody radiation, a non-contact temperature measurement can be made, and the photocurrent attributable to the stray blackbody radiation can be subtracted out to arrive at a more accurate non-contact substrate temperature measurement.
摘要翻译：本公开描述了用于对处理杂散黑体辐射的等离子体处理室中的衬底进行非接触式测量的系统，方法和装置。特别地，计算出可以归因于杂散黑体辐射基于杂散黑体辐射的温度，目标衬底的反射率和衬底的温度的光电流。了解归因于杂散黑体辐射的光电流，可以进行非接触式温度测量，并且可以减去归因于杂散黑体辐射的光电流以获得更准确的非接触式基板温度测量。

4. 发明申请

WO2010025228A8 METHOD AND APPARATUS FOR EXTENDED TEMPERATURE PYROMETRY 审中-公开
标题翻译：用于扩展温度色谱法的方法和装置
公开(公告)号：WO2010025228A8
公开(公告)日：2011-04-07
申请号：PCT/US2009055162
申请日：2009-08-27
申请人： APPLIED MATERIALS INC , HUNTER AARON M , LI JIPING , RAMANUJAM RAJESH S , HAW THOMAS
发明人： HUNTER AARON M , LI JIPING , RAMANUJAM RAJESH S , HAW THOMAS
IPC分类号： H01L21/324 , H01L21/66
CPC分类号： H01L21/67248 , H01L21/67115
摘要： Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.
摘要翻译：本发明的实施例涉及用于在包括低温的扩展温度范围内快速热处理衬底的方法和装置。公开了使用采用透射辐射探测器系统的扩展温度测温系统的系统和方法。还描述了组合透射辐射检测器系统和发射的辐射探测器系统的系统。

5. 发明申请

WO2013148119A1 LASER NOISE ELIMINATION IN TRANSMISSION THERMOMETRY 审中-公开
标题翻译：传感器热噪声消除噪声
公开(公告)号：WO2013148119A1
公开(公告)日：2013-10-03
申请号：PCT/US2013/029973
申请日：2013-03-08
申请人： APPLIED MATERIALS, INC. , LI, Jiping , HUNTER, Aaron Muir , HAW, Thomas
发明人： LI, Jiping , HUNTER, Aaron Muir , HAW, Thomas
IPC分类号： G01J5/02 , H01L21/324
CPC分类号： B23K26/00 , G01J1/0459 , G01J5/0007 , G01J5/02 , G01J5/06 , G01J5/0896 , G01J5/58 , G01N21/59
摘要： Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.
摘要翻译：公开了用于测量衬底温度的装置和方法。该装置包括温度指示辐射源，用于温度指示辐射的检测器，以及设置在温度指示辐射源和温度指示辐射检测器之间的光路中的去相关器。去相关器可以是宽带放大器和/或模式扰频器。宽带放大器可以是宽带激光器，布拉格光栅，光纤布拉格光栅，拉曼放大器，布里渊放大器或其组合。选择去相关器以发射至少部分由被监测的衬底透射的辐射。如果解相关器是增益驱动装置，则源与去相关器匹配，使得源的发射光谱在解相关器的增益带宽内。

6. 发明申请

WO2010025228A3 METHOD AND APPARATUS FOR EXTENDED TEMPERATURE PYROMETRY 审中-公开
标题翻译：用于延长温度梯度的方法和设备
公开(公告)号：WO2010025228A3
公开(公告)日：2010-04-15
申请号：PCT/US2009055162
申请日：2009-08-27
申请人： APPLIED MATERIALS INC , HUNTER AARON M , LI JIPING , RAMANUJAM RAJESH S , HAW THOMAS
发明人： HUNTER AARON M , LI JIPING , RAMANUJAM RAJESH S
IPC分类号： H01L21/324 , H01L21/66
CPC分类号： H01L21/67248 , H01L21/67115
摘要： Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.
摘要翻译：本发明的实施例涉及用于在扩展温度范围（包括低温）下快速热处理衬底的方法和设备。公开了使用采用透射辐射探测器系统的扩展温度高温测量系统的系统和方法。还描述了结合透射辐射探测器系统和发射辐射探测器系统的系统。

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