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1. 发明公开

EP2322690A3 Methods for deposition of group 4 metal containing films 审中-公开
标题翻译：对于含金属膜4族金属前体
公开(公告)号：EP2322690A3
公开(公告)日：2011-06-15
申请号：EP10188627.3
申请日：2010-10-22
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Ivanov, Sergei Vladimirovich , Lei, Xinjian , Cheng, Hansong , Spence, Daniel P. , Kim, Moo-Sung
IPC分类号： C23C16/18 , C23C30/00 , C07F7/00
CPC分类号： C23C16/45553 , C07F7/006 , C23C16/405
摘要： Metal-containing films may be formed by atomic layer deposition using precursors of the formula:

M(OR 1 )(OR 2 )(R 3 C(O)C(R 4 )C(O)XR 5 y ) 2

wherein M is Group 4 metals; wherein R 1 and R 2 are independently selected from the group consisting of linear or branched C 1-10 alkyls and C 6-12 aryls; R 3 is selected from the group consisting of linear or branched C 1-10 alkyls and C 6-12 aryls, and is preferably C 1-3 alkyl; R 4 is selected from the group consisting of hydrogen, C 1-10 alkyls, and C 6-12 aryls, and is preferably hydrogen; R 5 is selected from the group consisting of linear or branched C 1-10 alkyls and C 6-12 aryls, and is preferably a methyl or ethyl group; and X = O or N, wherein when X = O, y = 1 and R 1 , 2 and 5 are the same, and when X = N, y = 2 and each R 5 can be the same or different.

2. 发明公开

EP2322690A2 Methods for deposition of group 4 metal containing films 审中-公开
标题翻译： Gruppe-4-Metallvorläuferfürmetallhaltige Filme
公开(公告)号：EP2322690A2
公开(公告)日：2011-05-18
申请号：EP10188627.3
申请日：2010-10-22
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Ivanov, Sergei Vladimirovich , Lei, Xinjian , Cheng, Hansong , Spence, Daniel P. , Kim, Moo-Sung
IPC分类号： C23C16/18 , C23C30/00 , C07F7/00
CPC分类号： C23C16/45553 , C07F7/006 , C23C16/405
摘要： Metal-containing films may be formed by atomic layer deposition using precursors of the formula:

wherein M is Group 4 metals; wherein R 1 and R 2 are independently selected from the group consisting of linear or branched C 1-10 alkyls and C 6-12 aryls; R 3 is selected from the group consisting of linear or branched C 1-10 alkyls and C 6-12 aryls, and is preferably C 1-3 alkyl; R 4 is selected from the group consisting of hydrogen, C 1-10 alkyls, and C 6-12 aryls, and is preferably hydrogen; R 5 is selected from the group consisting of linear or branched C 1-10 alkyls and C 6-12 aryls, and is preferably a methyl or ethyl group; and X = O or N, wherein when X = O, y = 1 and R 1 , 2 and 5 are the same, and when X = N, y = 2 and each R 5 can be the same or different.
摘要翻译：含金属膜可以通过原子层沉积形成，使用下式的前体：€ƒ€ƒ€ƒ€ƒ€ƒM（OR 1）（OR 2）（R 3 C（O）C R 4）C（O）XR 5 y）2其中M是4族金属; 其中R 1和R 2独立地选自直链或支链C 1-10烷基和C 6-12芳基; R 3选自直链或支链C 1-10烷基和C 6-12芳基，优选C 1-3烷基; R 4选自氢，C 1-10烷基和C 6-12芳基，优选为氢; R 5选自直链或支链C 1-10烷基和C 6-12芳基，优选甲基或乙基; 并且X = O或N，其中当X = O时，y = 1且R 1,2和5相同，并且当X = N，y = 2且每个R 5可以相同或不同时。

3. 发明授权

EP1734004B1 Process for producing boranes 有权
标题翻译：一种用于硼烷的制备方法
公开(公告)号：EP1734004B1
公开(公告)日：2009-03-18
申请号：EP06012257.9
申请日：2006-06-14
申请人： Air Products and Chemicals, Inc.
发明人： Ivanov, Sergei Vladimirovich , Casas, Baldomero
IPC分类号： C01B35/02
CPC分类号： C01B35/026 , C07F5/022

4. 发明公开

EP2789712A1 Method of making a multicomponent film 有权
标题翻译：赫尔斯特朗·赫斯特伦
公开(公告)号：EP2789712A1
公开(公告)日：2014-10-15
申请号：EP14164386.6
申请日：2014-04-11
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Xiao, Manchao , Buchanana, Iain , Kim, Moo-Sung , Ivanov, Sergei Vladimirovich , Lei, Xinjian , Hwang, Cheol Seong , Kwon, Tae Hong
IPC分类号： C23C16/22 , C23C16/28 , C23C16/30 , C23C16/455
CPC分类号： H01L45/1616 , C23C16/22 , C23C16/28 , C23C16/305 , C23C16/45525 , C23C16/45531 , C23C16/45553 , H01L45/06 , H01L45/144
摘要： Described herein is a method and precursor composition for depositing a multicomponent film. In one embodiment, the method and composition described herein is used to deposit a germanium-containing film such as Germanium Tellurium, Antimony Germanium, and Germanium Antimony Tellurium (GST) films via an atomic layer deposition (ALD) and/or other germanium, tellurium and selenium based metal compounds for phase change memory and photovoltaic devices. In this or other embodiments, the Ge precursor used comprises trichlorogermane.
摘要翻译：本文描述了一种用于沉积多组分膜的方法和前体组合物。在一个实施方案中，本文所述的方法和组合物用于通过原子层沉积（ALD）和/或其它锗，碲沉积含锗的膜，例如锗碲，锑锗和锗锑碲（GST）膜和用于相变存储器和光伏器件的硒基金属化合物。在本实施方案或其它实施方案中，所用的Ge前体包括三氯锗烷。

5. 发明公开

EP2677061A2 Vessel with Filter 审中-公开
标题翻译： Behältermit过滤器
公开(公告)号：EP2677061A2
公开(公告)日：2013-12-25
申请号：EP13169271.7
申请日：2013-05-24
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Steidl, Thomas Andrew , Lei, Xinjian , Ivanov, Sergei Vladimirovich
IPC分类号： C23C16/448
CPC分类号： C23C16/4412 , B01D7/00 , B01D46/02 , B01D46/2403 , B01D2275/203 , B01D2275/206 , B01D2279/00 , C23C16/4402 , C23C16/4481 , C23C16/4485 , C23C16/455 , H01L21/0262 , Y10T137/4891 , Y10T137/794
摘要： A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.
摘要翻译：一种用于从容纳在容器内的前体材料输送含前体物质的流体的容器，所述容器包括：由顶部，一个或多个侧壁和底部限定的内部容积; 和至少一个用于蒸发的前体的流体出口，以及限定内部体积内的至少一个颗粒限制空间的至少一个颗粒屏障，其中所述颗粒屏障包括至少一个3维过滤器。还公开了一种使用该装置的方法。

6. 发明公开

EP2322530A2 Group 4 metal precursors for metal-containing films 有权
标题翻译：第4族金属前体用于含金属膜
公开(公告)号：EP2322530A2
公开(公告)日：2011-05-18
申请号：EP10188585.3
申请日：2010-10-22
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Ivanov, Sergei Vladimirovich , Lei, Xinjian , Cheng, Hansong , Spence, Daniel P. , Kim Moo-Sung
IPC分类号： C07F7/00 , C23C30/00 , C23C16/18
CPC分类号： C23C16/18 , C07F7/006 , C23C16/405 , C23C16/45553 , Y02P20/582
摘要： Group 4 metal containing films may be deposited using a new family of Group 4 metal precursors represented by the formula:

wherein M is a Group 4 metals of Ti, Zr, or Hf; wherein R 1 is selected from the group consisting of linear or branched C 1-10 alkyls and C 6-12 aryls, and is preferably methyl, ethyl or n-propyl; R 2 is selected from the group consisting of branched C 3-10 alkyls and C 6-12 aryls, and is preferably iso-propyl, tert-butyl, sec-butyl, iso-butyl, or tert-amyl; and R 3 is selected from the group consisting of hydrogen, C 1-10 alkyls, and C 6-12 aryls, and is preferably hydrogen. In a preferred embodiment of this invention, the precursor is a liquid or a solid with a melting point below 60°C.
摘要翻译：可使用由下式表示的第4族金属前体族来沉积含第4族金属的膜：其中M为Ti，Zr或Hf的第4族金属; 其中R 1选自直链或支链C 1-10烷基和C 6-12芳基，并且优选为甲基，乙基或正丙基; R2选自由支链C 3-10烷基和C 6-12芳基组成的组，并且优选为异丙基，叔丁基，仲丁基，异丁基或叔戊基; 并且R3选自氢，C1-10烷基和C6-12芳基，并且优选为氢。在本发明的一个优选实施方案中，前体是熔点低于60℃的液体或固体。

7. 发明公开

EP1763099A2 Stable electrolyte counteranions for electrochemical devices 有权
标题翻译： Stabile Elektrolyt-Gegenanionenfürelektrochemische Vorrichtungen
公开(公告)号：EP1763099A2
公开(公告)日：2007-03-14
申请号：EP06017458.8
申请日：2006-08-22
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Pez, Guido Peter , Ivanov, Sergei Vladimirovich , Dantsin, Gennady , Casteel, William Jack , Lehmann, John F.
IPC分类号： H01M6/16 , H01M10/40 , H01B1/12
CPC分类号： H01M10/0567 , H01B1/122 , H01M6/166 , H01M10/052 , H01M10/0568 , H01M2300/0017 , Y02T10/7011
摘要： The invention relates to electrolyte salts for electrochemical devices of improved physical, chemical and electrochemical stability.
The improvement resides in the use of anions of salts of the formula comprising:
i) (B 12 F x Z 12-x ) 2- wherein Z comprises at least one of H, Cl, Br or OR; R comprises at least one of H, alkyl or fluoroalkyl, or at least one polymer and x is at least 3 on an average basis but not more than 12;
ii) ((R'R''R''')NB 12 F x Z (11-x) ) - , wherein N is bonded to B and each of R', R", R''' comprise a member independently selected from the group consisting of hydrogen, alkyl, cycloalkyl, aryl and a polymer; Z comprises H, Cl, Br, or OR, where R comprises H, alkyl or perfluoroalkyl or a polymer, and x is an integer from 0 to 11; or
iii) (R""CB 11 F x Z (11-x) ) - , wherein R"" is bonded to C and comprises a member selected from the group consisting of hydrogen, alkyl, cycloalkyl, aryl, and a polymer, Z comprises H, Cl, Br, or OR, wherein R comprises H, alkyl or perfluoroalkyl or a polymer, and x is an integer from 0 to 11.
摘要翻译：本发明涉及具有改进的物理，化学和电化学稳定性的电化学装置的电解质盐。改进在于使用下式的盐阴离子，包括：i）（B 12 F x Z 12-x）2-其中Z包括H，Cl，Br或OR中的至少一个; R包括H，烷基或氟烷基或至少一种聚合物中的至少一种，x平均为至少3，但不超过12; ii）（（R'R''R“'）NB 12 F x Z（11-x）） - ，其中N键合到B，R'，R”，R“'各自独立地包括一个成员选自氢，烷基，环烷基，芳基和聚合物; Z包括H，Cl，Br或OR，其中R包括H，烷基或全氟烷基或聚合物，x是0至11的整数; 或iii）（R“”CB 11 F x Z（11-x）） - ，其中R“”与C键合，并且包含选自氢，烷基，环烷基，芳基和聚合物的成员， Z包括H，Cl，Br或OR，其中R包括H，烷基或全氟烷基或聚合物，x是0至11的整数。

8. 发明公开

EP1734004A1 Process for producing boranes 有权
标题翻译： Verfahren zur Herstellung von Boranen
公开(公告)号：EP1734004A1
公开(公告)日：2006-12-20
申请号：EP06012257.9
申请日：2006-06-14
申请人： Air Products and Chemicals, Inc.
发明人： Ivanov, Sergei Vladimirovich , Casas, Baldomero
IPC分类号： C01B35/02
CPC分类号： C01B35/026 , C07F5/022
摘要： This idea relates to the synthesis of salts of dodecahydrododecaborate B12H12 (2-). In the proposed process a metal hydride is reacted with an alkyl borate in the presence of a Lewis base to produce Lewis base-borane complex, which is thermally decomposed to produce salts of B12H12 (2-), while alkyl borate is recovered from the reaction by-product and is recycled.
摘要翻译：这个想法涉及十二氢十二硼酸盐B12H12（2-）的盐的合成。在所提出的方法中，金属氢化物与路易斯碱存在下的硼酸烷基酯反应以产生路易斯碱 - 硼烷络合物，其被热分解以产生B12H12（2-）的盐，而从反应中回收烷基硼酸盐副产品并被回收利用。

9. 发明公开

EP1048344A2 Novel copper complexes for CO and olefin adsorption 审中-公开
标题翻译：新的铜配合物对CO和烯烃的吸附
公开(公告)号：EP1048344A2
公开(公告)日：2000-11-02
申请号：EP00109003.4
申请日：2000-04-26
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Strauss, Steven Howard , Polyakov, Oleg Gennadievich , Hammel, John Wesley , Ivanov, Svetlana Mechaelovna , Ivanov, Sergei Vladimirovich
IPC分类号： B01J20/02 , B01J20/18 , B01D53/02 , B01D53/62
CPC分类号： B01J20/22 , B01D53/02
摘要： A solid state composition is provided having the formula Cu(A) n Z, where A is CO or olefin, n > 1 and Z is a unitary or composite monovalent anion. Further provided are an apparatus adapted to adsorb and a method for adsorbing an adsorbate A from a fluid mixture. The apparatus and method employ an adsorbent having the formula Cu(A) n Z, where A is CO or olefin, n ≥ 0 and Z is a unitary or composite monovalent anion. Z can be selected from the group consisting of: a) X - where X - is BF 4 - , PF 6 - or SbF 6 - ; b) (Al x (OR) y ) - where R is fluoroalkyl or perfluoroalkyl, and x is 0 and y is 1, or x is 1 and y is 4; c) (RCO 2 ) - where R is alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl or perfluoroaryl; d) (RSO 3 ) - where R is alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl or perfluoroaryl; e) (H(RCO 2 ) 2 ) - where R is alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl or perfluoroaryl; f) (H(RSO 3 ) 2 ) - where R is alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl or perfluoroaryl; g) (N(SO 2 R) x R' y ) - where R is fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl or perfluoroaryl, R' is alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl or perfluoroaryl, x + y = 2 and x = 1 or 2; h) (C(SO 2 R) x R' y ) - where R is fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl or perfluoroaryl, R' is hydrogen, alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl or perfluoroaryl, x + y = 3 and x = 1, 2 or 3; i) (CB 11 H 12-m X m ) - where m is from 0 to 12, and X is at least one member selected from the group consisting of halogen, alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl and perfluoroaryl; j) (CB 9 H 10-m X m ) - where m is from 0 to 10, and X is at least one member selected from the group consisting of halogen, alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl and perfluoroaryl; and k) (CB 11 F 11 R) - where R is alkyl, fluoroalkyl, perfluoroalkyl, aryl, fluoroaryl, perfluoroaryl or ammonium.

10. 发明授权

EP2322530B1 Group 4 metal precursors for metal-containing films 有权
标题翻译：对于含金属膜4族金属前体
公开(公告)号：EP2322530B1
公开(公告)日：2016-04-06
申请号：EP10188585.3
申请日：2010-10-22
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Ivanov, Sergei Vladimirovich , Lei, Xinjian , Cheng, Hansong , Spence, Daniel P. , Kim Moo-Sung
IPC分类号： C07F7/00 , C23C30/00 , C23C16/18
CPC分类号： C23C16/18 , C07F7/006 , C23C16/405 , C23C16/45553 , Y02P20/582

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