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1. 发明公开

EP2803955A2 Ultrasonic liquid level sensing systems 有权转让
标题翻译：超声波液位传感系统
公开(公告)号：EP2803955A2
公开(公告)日：2014-11-19
申请号：EP14168052.0
申请日：2014-05-13
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Steidl, Thomas Andrew
IPC分类号： G01F23/296
CPC分类号： G01F23/2962 , G01F23/2968
摘要： Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.
摘要翻译：本发明的实施例提供了一种具有增加数量（例如十二个）的超声波传感器的超声波探头，用于测量密封容器内液体的液位。超声探头包括颈管，使得超声探头能够与现有的标准化容器配件一起使用，尽管具有扩大的桶以容纳增加数量的超声传感器。本发明的实施例还提供了一种系统和方法，其中一次激活超声波探头内的超声波传感器，以减少超声波传感器与其布线之间的串扰。

2. 发明公开

EP1288544A3 Diaphragm valved manifold for chemicals 有权
标题翻译：隔膜阀化学品
公开(公告)号：EP1288544A3
公开(公告)日：2004-01-02
申请号：EP02018166.5
申请日：2002-08-19
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Zorich, Robert Sam , Steidl, Thomas Andrew , Silva, David James , Vivanco, Gil , Trent, Cynthia Lee
IPC分类号： F16K7/17 , F16K27/00
CPC分类号： F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2221/05 , F17C2227/044 , F17C2270/0518 , Y10T137/87684
摘要： A manifold for transfer of chemical, comprising; a heated first conduit (26) for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly (14) having first and second diaphragm valves (75,77), each valve having a diaphragm (74,74a) and a valve seat side (78,78a) and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit (16); a first connector in the first conduit for detaching the conduit from the vessel; a second conduit (12), for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve (75); and a third conduit (18), for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve (77).

3. 发明公开

EP1288544A2 Diaphragm valved manifold for chemicals 有权
标题翻译： Chemikalien公司
公开(公告)号：EP1288544A2
公开(公告)日：2003-03-05
申请号：EP02018166.5
申请日：2002-08-19
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Zorich, Robert Sam , Steidl, Thomas Andrew , Silva, David James , Vivanco, Gil , Trent, Cynthia Lee
IPC分类号： F16K7/17 , F16K27/00
CPC分类号： F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2221/05 , F17C2227/044 , F17C2270/0518 , Y10T137/87684
摘要： A manifold for transfer of chemical, comprising; a heated first conduit (26) for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly (14) having first and second diaphragm valves (75,77), each valve having a diaphragm (74,74a) and a valve seat side (78,78a) and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit (16); a first connector in the first conduit for detaching the conduit from the vessel; a second conduit (12), for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve (75); and a third conduit (18), for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve (77).
摘要翻译：用于转移化学品的歧管，包括：用于将容纳化学品的容器连接到另一容器的加热的第一导管（26），加压气体源和真空源; 具有第一和第二隔膜阀（75,77）的加热的第一截止阀组件（14），每个阀具有隔膜（74,74a）和阀座侧（78,78a）和隔膜侧，其中阀座每个阀的侧面与另一个阀的阀座侧并置，并且每个阀的每个阀座侧与第一管道（16）连通; 第一连接器，用于将管道从容器中分离出来; 用于将化学品输送到容器的第二导管（12），连接到第一阀（75）的隔膜侧的第二导管; 以及第三导管（18），用于将加压气体和真空传送到连接到第二阀（77）的隔膜侧的第一导管。

4. 发明公开

EP1092474A2 Chemical delivery system with ultrasonic fluid sensors 有权
标题翻译：系统的超声波流量计化学饲料
公开(公告)号：EP1092474A2
公开(公告)日：2001-04-18
申请号：EP00122208.2
申请日：2000-10-13
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Steidl, Thomas Andrew , Martinez, Martin Castaneda , Hamidi, Jamshid Jay
IPC分类号： B01L5/00 , B01J4/02 , C23C16/44 , H01L21/00
CPC分类号： B01J4/02 , C23C16/448 , Y02E60/321
摘要： A chemical delivery system for delivering chemicals having at least a high purity includes at least one first reservoir for containing a fluid and at least one second reservoir for containing the fluid. The system also includes a first conduit, a first fluid sensor, and a controller. The first conduit is for transferring the fluid over time from the at least one first reservoir to the at least one second reservoir. The first conduit is metallic and has a first end in communication with the at least one first reservoir and a second end in communication with the at least one second reservoir. The fluid being transferred from the at least one first reservoir to the at least one second reservoir flows through the first conduit from the first end to the second end. The first fluid sensor is adjacent the first conduit, and the first fluid sensor is adapted to detect a presence of the fluid and to detect an absence of the fluid in the first conduit. The first fluid sensor generates at least one first signal indicative of the presence of the fluid or the absence of the fluid. The controller receives the at least one first signal. The controller is adapted to identify an empty condition in the at least one first reservoir upon receiving the at least one first signal indicative of the absence of the fluid in the first conduit or upon not receiving at least one first signal indicative of the presence of the fluid in the first conduit.

5. 发明授权

EP1288544B1 Diaphragm valved manifold for chemicals 有权
标题翻译：隔膜阀化学品
公开(公告)号：EP1288544B1
公开(公告)日：2010-06-02
申请号：EP02018166.5
申请日：2002-08-19
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Zorich, Robert Sam , Steidl, Thomas Andrew , Silva, David James , Vivanco, Gil , Trent, Cynthia Lee
IPC分类号： F16K7/17 , F16K27/00
CPC分类号： F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2221/05 , F17C2227/044 , F17C2270/0518 , Y10T137/87684

6. 发明公开

EP1865091A2 High flow GaCI3 delivery 审中-公开
标题翻译： Verbreichung von GaC13 mit hohem Durchfluss
公开(公告)号：EP1865091A2
公开(公告)日：2007-12-12
申请号：EP07109886.7
申请日：2007-06-08
申请人： Air Products and Chemicals, Inc.
发明人： Steidl, Thomas Andrew , Birtcher, Charles Michael , Clark, Robert Daniel , Senecal, Lee Arthur
IPC分类号： C23C16/448 , C30B25/14
CPC分类号： C23C16/4482 , C23C16/4402 , C30B25/14 , C30B29/406 , C30B29/42
摘要： Vapor phase gallium trichloride is fed to a gallium nitride reactor (52) by injecting a heated (40) carrier gas (10) at an elevated pressure and at least 80°Cinto a container (26) having a supply of melted (40) gallium trichloride (28) to entrain the gallium trichloride, and delivering the carrier gas and entrained gallium trichloride to the reactor through a delivery line (44) at a temperature of at least 80°C. An apparatus for conducting the process is also described.
摘要翻译：将气相三氯化镓通过在升高的压力下注入加热的（40）载体气体（10）并将至少80°的Cin注入到具有熔融（40）镓的供体的容器（26）中而被供给到氮化镓反应器（52）三氯化物（28）夹带三氯化镓，并通过输送管线（44）在至少80℃的温度下将载气和夹带的三氯化镓输送到反应器中。还描述了用于进行该过程的装置。

7. 发明授权

EP1092474B1 Chemical delivery system with ultrasonic fluid sensors 有权
标题翻译：系统的超声波流量计化学饲料
公开(公告)号：EP1092474B1
公开(公告)日：2006-08-09
申请号：EP00122208.2
申请日：2000-10-13
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Steidl, Thomas Andrew , Martinez, Martin Castaneda , Hamidi, Jamshid Jay
IPC分类号： B01L5/00 , B01J4/02 , C23C16/44 , H01L21/00
CPC分类号： B01J4/02 , C23C16/448 , Y02E60/321

8. 发明公开

EP1188691A3 Chemical delivery system with spill containment door 有权
标题翻译：与Auslaufeinschliessungstür化学品进料系统
公开(公告)号：EP1188691A3
公开(公告)日：2004-01-28
申请号：EP01121865.8
申请日：2001-09-11
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Steidl, Thomas Andrew , Sheehy, William J.
IPC分类号： B65D85/84 , B01L1/00 , B65D90/24 , B65D90/00 , B67D5/64
CPC分类号： B67D7/3209 , B67D7/84
摘要： A high purity chemical storage and delivery system and process with secondary containment, comprising; a cabinet for containing a canister of high purity chemical, a manifold in the cabinet for fluid connection between the canister and the cabinet for controllably dispensing high purity chemical; a control unit for controlling the dispensing of high purity chemical from the canister and the cabinet for a downstream use, a closeable opening in the cabinet for allowing loading and unloading of the canister from the cabinet, at least one door for closing the opening, a liquid tight secondary containment door in the opening for closing off a portion of the opening such that the secondary containment door is sized so that the portion is sufficient to define a volume in conjunction with the cabinet to contain the entire high purity chemical liquid contents of the canister.

9. 发明公开

EP1327603A3 Cabinet for chemical delivery with solvent purge 有权
标题翻译：房屋与设备用于分配冲洗化学品
公开(公告)号：EP1327603A3
公开(公告)日：2003-10-15
申请号：EP03000047.5
申请日：2003-01-07
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Martinez, Martin Casteneda , Steidl, Thomas Andrew , Vivanco, Gil , Silva, David James
IPC分类号： B67D5/02
CPC分类号： F17C13/04 , B67D7/0272 , C23C16/448 , C23C16/45561 , F17C2203/0329 , F17C2203/0643 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0341 , F17C2223/047 , F17C2227/0304 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/0413 , F17C2250/0417 , F17C2250/0434 , F17C2250/0491 , F17C2250/0495 , F17C2260/013 , F17C2260/015 , F17C2260/016 , F17C2265/017 , F17C2270/0518 , F17C2270/0545 , Y10T137/0419 , Y10T137/0424 , Y10T137/3127 , Y10T137/4259 , Y10T137/6606 , Y10T137/87877 , Y10T137/87893
摘要： The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.

10. 发明公开

EP1327603A2 Cabinet for chemical delivery with solvent purge 有权
标题翻译： Gehäusemit Vorrichtung zum Zapfen von Chemikalien mitSpüleinrichtung
公开(公告)号：EP1327603A2
公开(公告)日：2003-07-16
申请号：EP03000047.5
申请日：2003-01-07
申请人： AIR PRODUCTS AND CHEMICALS, INC.
发明人： Birtcher, Charles Michael , Martinez, Martin Casteneda , Steidl, Thomas Andrew , Vivanco, Gil , Silva, David James
IPC分类号： B67D5/02
CPC分类号： F17C13/04 , B67D7/0272 , C23C16/448 , C23C16/45561 , F17C2203/0329 , F17C2203/0643 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0341 , F17C2223/047 , F17C2227/0304 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/0413 , F17C2250/0417 , F17C2250/0434 , F17C2250/0491 , F17C2250/0495 , F17C2260/013 , F17C2260/015 , F17C2260/016 , F17C2265/017 , F17C2270/0518 , F17C2270/0545 , Y10T137/0419 , Y10T137/0424 , Y10T137/3127 , Y10T137/4259 , Y10T137/6606 , Y10T137/87877 , Y10T137/87893
摘要： The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.
摘要翻译：本发明是一种将低蒸气压工艺化学品储存和输送到半导体制造工艺工具的装置，包括：a）用于储存工艺化学品的散装容器; b）用于将过程化学品递送到处理工具的处理容器; c）用于将过程化学品从散装容器输送到处理容器的第一歧管; d）含有一定量溶剂的溶剂容器， e）用于将过程化学品从处理容器输送到处理工具的第二歧管。也考虑了使用该装置的方法。

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