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    • 10. 发明公开
    • 박막 트랜지스터 및 그 형성 방법
    • 薄膜晶体管及其形成方法
    • KR1020130134154A
    • 2013-12-10
    • KR1020120057459
    • 2012-05-30
    • 삼성디스플레이 주식회사
    • 이두형김보성양찬우정승호정연택최준환최태영
    • H01L29/786H01L21/336
    • H01L29/66969H01L21/02565H01L21/02614H01L21/385H01L21/441H01L21/477H01L29/7869H01L21/02623H01L21/288H01L29/45H01L29/4908
    • A thin film transistor is provided. According to an embodiment of the present invention, the thin film transistor comprises: a substrate; an oxide semiconductor layer on the substrate; a gate electrode overlapping the oxide semiconductor layer; a gate insulating layer between the gate electrode and the oxide semiconductor layer; and source and drain electrodes which overlap the oxide semiconductor layer at least in part and are separated from each other. The gate insulating layer includes oxide containing a first substance, the oxide semiconductor layer includes oxide manufactured by mixing the first substance and a second substance, and the source and drain electrodes include oxide manufactured by mixing the second substance and a third substance. The gate insulating layer is manufactured through a solution process including the first substance, the oxide semiconductor layer is manufactured through a solution process including the second substance, and the source and drain electrodes are manufactured through a solution process including the third substance. [Reference numerals] (AA) Start;(BB) End;(S1) Precursor deposition for insulating layer formation/semiconductor layer formation/source and drain formation;(S2) Heat treatment
    • 提供薄膜晶体管。 根据本发明的实施例,薄膜晶体管包括:基板; 在所述基板上的氧化物半导体层; 与氧化物半导体层重叠的栅电极; 栅电极和氧化物半导体层之间的栅极绝缘层; 以及至少部分地与氧化物半导体层重叠并且彼此分离的源极和漏极。 栅极绝缘层包括含有第一物质的氧化物,氧化物半导体层包括通过混合第一物质和第二物质而制造的氧化物,源电极和漏电极包括通过混合第二物质和第三物质制造的氧化物。 通过包括第一物质的溶液处理制造栅极绝缘层,通过包括第二物质的溶液处理制造氧化物半导体层,并且通过包括第三物质的溶液法制造源极和漏极。 (AA)开始;(BB)端;(S1)绝缘层形成/半导体层形成/源极和漏极形成的前体沉积;(S2)热处理