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    • 4. 发明公开
    • 표시장치 및 그 제작 방법
    • 显示装置及其制造方法
    • KR1020160119935A
    • 2016-10-17
    • KR1020150048610
    • 2015-04-06
    • 삼성디스플레이 주식회사
    • 정창오신현억양수경양찬우이동민
    • G02F1/1368H01L27/32H01L29/786G09F9/30G02F1/1343
    • H01L27/124G02F2001/13629H01L27/1259H01L27/3262H01L27/3276H01L29/42384H01L29/4908H01L51/5281H01L2251/306
    • 본발명의일 실시예에따른표시장치는, 게이트라인, 상기게이트라인과교차하는데이터라인및 그게이트전극이상기게이트라인에전기적으로접속되고그 제1 전극이상기데이터라인에전기적으로접속되는제1 트랜지스터를포함할수 있고, 상기제1 트랜지스터의상기게이트전극, 상기제1 트랜지스터의상기제1 전극및 상기제1 트랜지스터의제2 전극중 적어도하나가제1 도전체층또는제2 도전체층을포함할수 있으며, 상기제1 도전체층은제1 금속층및 상기제1 금속층위에형성되는제2 금속층을포함하고, 상기제2 도전체층은제3 금속층및 상기제3 금속층위에형성되는제4 금속층을포함할수 있으며, 상기제2 금속층의반사율은상기제1 금속층의반사율보다낮고, 상기제4 금속층의반사율은상기제3 금속층의반사율보다낮을수 있다.
    • 显示装置包括栅极线,与栅极线交叉的数据线,以及第一晶体管,其包括电耦合到栅极线的栅电极和与数据线电耦合的第一电极。 第一晶体管的栅电极,第一晶体管的第一电极和第一晶体管的第二电极中的至少一个包括第一导体层和第二导体层中的至少一个。 第一导体层包括设置在第一金属层上的第一金属层和第二金属层。 第二导体层包括设置在第三金属层上的第三金属层和第四金属层。 第二金属层的反射率比第一金属层低。 第四金属层的反射率比第三金属层低。
    • 6. 发明公开
    • 박막 트랜지스터 및 그 형성 방법
    • 薄膜晶体管及其形成方法
    • KR1020130134154A
    • 2013-12-10
    • KR1020120057459
    • 2012-05-30
    • 삼성디스플레이 주식회사
    • 이두형김보성양찬우정승호정연택최준환최태영
    • H01L29/786H01L21/336
    • H01L29/66969H01L21/02565H01L21/02614H01L21/385H01L21/441H01L21/477H01L29/7869H01L21/02623H01L21/288H01L29/45H01L29/4908
    • A thin film transistor is provided. According to an embodiment of the present invention, the thin film transistor comprises: a substrate; an oxide semiconductor layer on the substrate; a gate electrode overlapping the oxide semiconductor layer; a gate insulating layer between the gate electrode and the oxide semiconductor layer; and source and drain electrodes which overlap the oxide semiconductor layer at least in part and are separated from each other. The gate insulating layer includes oxide containing a first substance, the oxide semiconductor layer includes oxide manufactured by mixing the first substance and a second substance, and the source and drain electrodes include oxide manufactured by mixing the second substance and a third substance. The gate insulating layer is manufactured through a solution process including the first substance, the oxide semiconductor layer is manufactured through a solution process including the second substance, and the source and drain electrodes are manufactured through a solution process including the third substance. [Reference numerals] (AA) Start;(BB) End;(S1) Precursor deposition for insulating layer formation/semiconductor layer formation/source and drain formation;(S2) Heat treatment
    • 提供薄膜晶体管。 根据本发明的实施例,薄膜晶体管包括:基板; 在所述基板上的氧化物半导体层; 与氧化物半导体层重叠的栅电极; 栅电极和氧化物半导体层之间的栅极绝缘层; 以及至少部分地与氧化物半导体层重叠并且彼此分离的源极和漏极。 栅极绝缘层包括含有第一物质的氧化物,氧化物半导体层包括通过混合第一物质和第二物质而制造的氧化物,源电极和漏电极包括通过混合第二物质和第三物质制造的氧化物。 通过包括第一物质的溶液处理制造栅极绝缘层,通过包括第二物质的溶液处理制造氧化物半导体层,并且通过包括第三物质的溶液法制造源极和漏极。 (AA)开始;(BB)端;(S1)绝缘层形成/半导体层形成/源极和漏极形成的前体沉积;(S2)热处理