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1. 发明授权

US06632346B2 Process for electrodepositing zinc oxide film 失效
标题翻译：电沉积氧化锌膜的工艺
公开(公告)号：US06632346B2
公开(公告)日：2003-10-14
申请号：US09897947
申请日：2001-07-05
申请人： Kozo Arao , Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
发明人： Kozo Arao , Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
IPC分类号： C25D1100
CPC分类号： H01G9/2027 , C25D9/08 , C25D21/02 , H01L31/03921 , H01L31/1836 , Y02E10/542 , Y02P70/521
摘要： The present process for electrodepositing a zinc oxide film comprises the steps of immersing a substrate and an opposing electrode in an electrodeposition bath which contains zinc nitrate and is kept heated, and forming the zinc oxide film on the substrate by passing a current between the substrate and the opposing electrode, wherein the process further includes a step of trapping the particles of zinc oxide precipitated in the electrodeposition bath by circulating or stirring the bath before the formation of the zinc oxide film, whereby the present process can prevent the generated zinc oxide powder from depositing on the surfaces of the substrate and the zinc oxide film formed by electrodeposition when restarting or starting the formation of a zinc oxide film by the electrodeposition using an electrodeposition apparatus, and hence the formation of a uniform zinc oxide film free from defects.
摘要翻译：本发明的电沉积氧化锌膜的方法包括以下步骤：将基材和相对电极浸入含有硝酸锌的电沉积浴中并保持加热，并通过在基板和基板之间传递电流而在基板上形成氧化锌膜所述对置电极，其中，所述方法还包括通过在形成所述氧化锌膜之前循环或搅拌所述浴来捕集在所述电沉积浴中析出的氧化锌颗粒的步骤，由此本发明的方法可以防止所产生的氧化锌粉末当通过使用电沉积装置的电沉积来重新启动或开始形成氧化锌膜时，通过电沉积形成的基板和氧化锌膜的表面上沉积，从而形成均匀的没有缺陷的氧化锌膜。 PTEXT>

2. 发明授权

US06471848B1 Electrodeposition method of forming an oxide film 失效
标题翻译：电沉积法形成氧化膜
公开(公告)号：US06471848B1
公开(公告)日：2002-10-29
申请号：US09248891
申请日：1999-02-12
申请人： Kozo Arao , Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
发明人： Kozo Arao , Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
IPC分类号： C25D548
CPC分类号： H01L31/02167 , C23C8/40 , C25D5/48 , C25D7/0621 , C25D9/08 , Y02E10/50 , Y10S205/917
摘要： This invention provides an electrodeposition apparatus, comprising at least one electrodeposition vessel for supplying a current between a substrate and an electrode in an electrodeposition bath to form an oxide film or the substrate and a rinsing means for rinsing the substrate after passing the electrodeposition tank with water, wherein a humidifying means for preventing drying of at least the film forming surface of the substrate is provided along the transporting path of the substrate at least at the exit side of the electrodeposition vessel and an oxide film forming method. Thus a uniform oxide film without unevenness can be formed on the substrate.
摘要翻译：本发明提供了一种电沉积装置，其包括至少一个电沉积容器，用于在电沉积浴中在基底和电极之间提供电流以形成氧化膜或基底;以及漂洗装置，用于在使电沉积槽通过水后漂洗基底其特征在于，至少在所述电沉积容器的出口侧，沿着所述基板的输送路径设置防止至少所述基板的成膜面干燥的加湿机构和氧化膜形成方法。因此，可以在基板上形成不均匀的均匀的氧化膜。

3. 发明授权

US06383359B2 Method for forming a zinc oxide layer and method for producing a photovoltaic device 有权
标题翻译：氧化锌层的形成方法及其制造方法
公开(公告)号：US06383359B2
公开(公告)日：2002-05-07
申请号：US09824041
申请日：2001-04-03
申请人： Kozo Arao , Hideo Tamura , Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
发明人： Kozo Arao , Hideo Tamura , Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
IPC分类号： C23C2800
CPC分类号： H01L31/1884 , C25D9/08 , H01L31/022483 , H01L31/02366 , H01L31/056 , H01L31/206 , Y02E10/52 , Y02P70/521 , Y10S428/935 , Y10T428/12549 , Y10T428/1259 , Y10T428/12611 , Y10T428/12618 , Y10T428/12639 , Y10T428/12743 , Y10T428/1275 , Y10T428/12757 , Y10T428/12764 , Y10T428/12979 , Y10T428/12986 , Y10T428/265
摘要： Provided are a substrate with a zinc oxide layer, in which at least a zinc oxide layer is provided on a support substrate, wherein the zinc oxide layer comprises a zinc oxide layer having the c axis perpendicular to the support substrate and a zinc oxide layer having the c axis slantindicular to the support substrate in the order from the side of the support substrate; and a photovoltaic device in which a semiconductor layer is formed on the substrate with the zinc oxide layer. Thus provided is the inexpensive photovoltaic device with excellent reflective performance and optical confinement effect and with high photoelectric conversion efficiency.
摘要翻译：本发明提供一种具有氧化锌层的基板，其中至少在支撑基板上设置有氧化锌层，其中氧化锌层包括具有垂直于支撑基板的c轴的氧化锌层和具有与支撑基板垂直的氧化锌层， c轴从支撑基板的一侧依次倾斜到支撑基板; 以及在氧化锌层的基板上形成有半导体层的光电转换装置。因此提供了具有优异的反射性能和光限制效应以及高光电转换效率的便宜的光电器件。

4. 发明授权

US07282132B2 Zinc oxide film treatment method and method of manufacturing photovoltaic device utilizing the same 失效
标题翻译：氧化锌膜处理方法及利用该方法制造光伏器件的方法
公开(公告)号：US07282132B2
公开(公告)日：2007-10-16
申请号：US10805323
申请日：2004-03-22
申请人： Masumitsu Iwata , Noboru Toyama , Ryo Hayashi , Yuichi Sonoda , Tomonori Nishimoto , Takaharu Kondo , Satoru Yamada , Yusuke Miyamoto
发明人： Masumitsu Iwata , Noboru Toyama , Ryo Hayashi , Yuichi Sonoda , Tomonori Nishimoto , Takaharu Kondo , Satoru Yamada , Yusuke Miyamoto
IPC分类号： C25D5/50
CPC分类号： H01L31/1884 , C25D9/04 , H01L31/056 , H01L31/1864 , Y02E10/52 , Y02P70/521
摘要： A film of zinc oxide electrochemically deposited from an aqueous solution is subjected to heat treatment at a temperature equal to or higher than 150° C. and equal to or lower than 400° C. in a nitrogen or inert gas atmosphere that contains oxygen, thereby obtaining a zinc oxide film that is low in electric resistance without impairing the light transmittance of the zinc oxide film.
摘要翻译：在含有氧的氮气或惰性气体气氛中，将从水溶液电化学沉积的氧化锌薄膜在等于或高于150℃等于或低于400℃的温度下进行热处理，由此获得电阻低而不损害氧化锌膜的透光率的氧化锌膜。

5. 发明授权

US06475367B1 Electrodeposition method 失效
标题翻译：电沉积法
公开(公告)号：US06475367B1
公开(公告)日：2002-11-05
申请号：US09501522
申请日：2000-02-09
申请人： Noboru Toyama , Kozo Arao , Yuichi Sonoda , Yusuke Miyamoto
发明人： Noboru Toyama , Kozo Arao , Yuichi Sonoda , Yusuke Miyamoto
IPC分类号： C25D706
CPC分类号： C25D9/08 , C25D7/0614 , C25D7/0657
摘要： There is disclosed an electrodeposition method capable of suppressing the drop in the power supply voltage and minimizing the heat loss by the electrodeposition current, thereby achieving uniform film formation with satisfactory characteristics. A conductive substrate is dipped in an electrodeposition bath held in an electrodeposition tank, and an oxide is electrolytically deposited on the conductive substrate. An electricity feed means as at least one electrode of the electrodeposition tank is composed of a conductive member so provided as to be in contact with a back surface of the conductive substrate, wherein the contact position of the electricity feed means and the conductive substrate is outside the electrodeposition bath, and wherein the resistance, including contact resistance, between the closer to the electricity feed means of a position of entry of the conductive substrate into the electrodeposition bath and a position of discharge of the conductive substrate from the electrodeposition bath, and the contact position of the conductive substrate with the electricity feed means is 20&OHgr; or less.
摘要翻译：公开了一种能够抑制电源电压降低并且通过电沉积电流最小化热损失的电沉积方法，从而获得具有令人满意的特性的均匀成膜。将导电性基材浸渍在保持在电沉积槽中的电沉积浴中，氧化物电解沉积在导电性基材上。一种供电装置，其特征在于，所述电沉积槽的至少一个电极由导电构件构成，所述导电构件设置为与所述导电基板的背面接触，其中所述供电装置和所述导电基板的接触位置在外部电沉积浴，并且其中在导电基底进入电沉积浴的位置更接近馈电装置之间的电阻（包括接触电阻）和导电基底从电沉积浴放电的位置，以及导电基板与供电装置的接触位置为20OMEGA以下。

6. 发明授权

US07445952B2 Method of forming laminate and method of manufacturing photovoltaic device 失效
标题翻译：形成层压板的方法和制造光伏器件的方法
公开(公告)号：US07445952B2
公开(公告)日：2008-11-04
申请号：US11197512
申请日：2005-08-05
申请人： Takaharu Kondo , Hideo Tamura , Atsushi Yasuno , Noboru Toyama , Yuichi Sonoda , Masumitsu Iwata , Akiya Nakayama , Yusuke Miyamoto
发明人： Takaharu Kondo , Hideo Tamura , Atsushi Yasuno , Noboru Toyama , Yuichi Sonoda , Masumitsu Iwata , Akiya Nakayama , Yusuke Miyamoto
IPC分类号： H01L21/00 , H01L31/18 , B05D5/12
CPC分类号： H01L31/02168 , H01L31/056 , Y02E10/52
摘要： A method of forming a laminate and a method of manufacturing a photovoltaic device using the laminate are provided. The laminate forming method includes a first step of forming an intermediate layer on a base member, and a second step of forming a metal layer on the intermediate layer, the adhesion of the metal layer to the base member being lower than that of the intermediate layer, the reflectance of the metal layer being higher than that of the intermediate layer. The rate of formation of the metal layer is increased at an intermediate stage in the second step. The laminate thereby formed has improved characteristics and is capable of maintaining improved reflection characteristics and adhesion even under high-temperature and high-humidity conditions or during long-term use.
摘要翻译：提供一种形成层压体的方法和使用该层压体制造光伏器件的方法。层压体形成方法包括在基材上形成中间层的第一工序和在中间层上形成金属层的第二工序，金属层与基材的密合性比中间层低，金属层的反射率高于中间层的反射率。在第二步骤的中间阶段，金属层的形成速率增加。由此形成的层压件具有改进的特性，并且即使在高温和高湿度条件下或在长期使用中也能够保持改进的反射特性和粘附性。

7. 发明授权

US06802953B2 Method of producing zinc oxide thin film, method of producing photovoltaic device and method of producing semiconductor device 失效
标题翻译：生产氧化锌薄膜的方法，制造光伏器件的方法和制造半导体器件的方法
公开(公告)号：US06802953B2
公开(公告)日：2004-10-12
申请号：US10046903
申请日：2002-01-17
申请人： Masafumi Sano , Yuichi Sonoda
发明人： Masafumi Sano , Yuichi Sonoda
IPC分类号： C25D1100
CPC分类号： C25D9/04 , H01L31/02167 , H01L31/02363 , Y02E10/50
摘要： The present invention provides a method of producing a zinc oxide thin film in which a current is passed between a conductive substrate immersed in an aqueous solution containing at least zinc ions, ammonium ions and zinc ammonia complex ions, and an electrode as an anode immersed in the aqueous solution to form a zinc oxide thin film on the conductive substrate. This method stabilizes formation of the zinc oxide thin film and improves adhesion between the thin film and the substrate.
摘要翻译：本发明提供一种氧化锌薄膜的制造方法，其中，在浸渍在至少含有锌离子，铵离子和锌氨络离子的水溶液中的导电性基板之间通过电流，以及作为阳极浸渍的电极该水溶液在导电基材上形成氧化锌薄膜。该方法稳定了氧化锌薄膜的形成，提高了薄膜与基板的粘合性。

8. 发明授权

US06752915B2 Web conveying apparatus, and apparatus and method for electrodeposition using web conveying apparatus 失效
标题翻译：纸幅输送装置以及使用纸幅输送装置的电沉积的装置和方法
公开(公告)号：US06752915B2
公开(公告)日：2004-06-22
申请号：US09817301
申请日：2001-03-27
申请人： Kozo Arao , Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
发明人： Kozo Arao , Noboru Toyama , Yuichi Sonoda , Yusuke Miyamoto
IPC分类号： C25D2112
CPC分类号： B65H23/105 , B21B37/68 , B21C47/003 , B21C47/34 , B21C47/3425 , B21C47/345 , B65H23/038 , B65H2511/214 , B65H2555/24 , B65H2220/01
摘要： The present invention provides a web conveying apparatus for conveying a web while holding the web and applying tension to the web, wherein the conveying apparatus has a plurality of rollers with which the web contacts to be conveyed, and at least one roller of the plurality of rollers has a mechanism for limiting deformation of the web within Y/E, and a web conveying method using a web conveying apparatus for conveying a web while holding the web and applying tension to the web, wherein the conveying apparatus has a plurality of rollers with which the web contacts to be conveyed, and the web is conveyed while the deformation of the web is limited within Y/E by a mechanism that is provided for at least one roller of the plurality of rollers. The apparatus and the method prevent meandering of the web.
摘要翻译：本发明提供一种纸幅输送装置，用于在保持纸幅并且向纸幅施加张力的同时传送纸幅，其中，所述输送装置具有多个辊，所述纸幅与所述辊接触以被输送，并且所述多个辊中的至少一个辊辊子具有用于限制幅材在Y / E内的变形的机构，以及使用幅材输送装置的幅材输送方法，所述幅材输送装置用于在保持纸幅并且向纸幅施加张力的同时输送纸幅，其中所述输送装置具有多个辊，当纸幅的变形被限制在Y / E内时，通过为多个辊中的至少一个辊提供的机构来传送纸幅。该装置和方法防止网页的曲折。

9. 发明授权

US06068755A Process for forming zinc oxide film and processes for producing semiconductor device plate and photo-electricity generating device using the film 失效
标题翻译：用于形成氧化锌膜的方法和使用该膜的半导体器件板和光电发生器件的制造方法
公开(公告)号：US06068755A
公开(公告)日：2000-05-30
申请号：US986826
申请日：1997-12-08
申请人： Koichi Matsuda , Yuichi Sonoda , Tetsuro Nakamura
发明人： Koichi Matsuda , Yuichi Sonoda , Tetsuro Nakamura
IPC分类号： C25D5/20 , C25D7/06 , C25D9/08 , H01L31/052 , H01L31/18 , C25D9/00
CPC分类号： C25D9/08 , C25D5/20 , C25D7/0621 , H01L31/056 , H01L31/1836 , H01L31/1884 , Y02E10/52
摘要： A zinc oxide film is formed on an electroconductive substrate by electrodeposition. The electrodeposition is performed by immersing an electroconductive substrate and an electrode in an aqueous solution containing nitrate ion and zinc ion, and supplying a current passing through a gap between the electroconductive substrate and the electrode while vibrating the electroconductive substrate to stably form a uniform zinc oxide film free from anomalous growth of a crystal on the electroconductive substrate. The zinc oxide film is excellent in adhesive properties with the electroconductive substrate and suitable for a light-confining layer of a photo-electricity generating device.
摘要翻译：通过电沉积在导电性基体上形成氧化锌膜。通过将导电性基材和电极浸渍在含有硝酸根离子和锌离子的水溶液中，通过导电性基板与电极间的间隙供给电流，同时使导电性基板振动而稳定地形成均匀的氧化锌导电基材上的晶体不会发生异常生长。氧化锌膜与导电性基材的粘合性优异，适用于光电发生装置的光束限制层。

10. 发明授权

US5603778A Method of forming transparent conductive layer, photoelectric conversion device using the transparent conductive layer, and manufacturing method for the photoelectric conversion device 失效
标题翻译：形成透明导电层的方法，使用透明导电层的光电转换装置以及光电转换装置的制造方法
公开(公告)号：US5603778A
公开(公告)日：1997-02-18
申请号：US424172
申请日：1995-04-19
申请人： Yuichi Sonoda
发明人： Yuichi Sonoda
IPC分类号： H01L31/04 , C23C14/08 , C23C14/34 , H01L31/052 , H01L31/075 , H01L31/18 , H01L31/20
CPC分类号： H01L31/202 , C23C14/086 , C23C14/3414 , H01L31/056 , H01L31/075 , H01L31/1884 , Y02E10/52 , Y02E10/548 , Y02P70/521
摘要： A photoelectric conversion device which has high conversion efficiency and high reliability, and a manufacturing method to make the photoelectric conversion device at a low cost are provided by improving a method of forming a transparent conductive metal oxide film to achieve stable film production for a long period of time and to prevent deterioration in transparency and resistance of such an oxide layer otherwise caused by high-rate film formation. In a method of manufacturing a photoelectric conversion device which comprises a reflecting layer at least one surface of which has high reflectivity to light, and a transparent conductive oxide layer formed by a sputtering process, a thin film semiconductor junction laminate a transparent electrode which are formed on the reflecting layer in this order, the metal oxide layer is formed by sputtering in which a metal oxide target having specific resistance not larger than 5.0 .OMEGA.cm and a crystal particle size not larger than 15 .mu.m is employed and discharge is developed using a gas mixture of an Ar gas with 0.1 to 10% added oxygen (O.sub.2).
摘要翻译：具有高转换效率和高可靠性的光电转换装置以及通过改进形成透明导电金属氧化物膜的方法来提供低成本的光电转换装置的制造方法，以长期实现稳定的膜生产的时间，并且防止由高速成膜引起的这种氧化物层的透明度和电阻的劣化。在制造光电转换装置的方法中，包括至少一个表面对光具有高反射率的反射层和通过溅射工艺形成的透明导电氧化物层的薄膜半导体结叠层体形成的透明电极，在反射层上依次形成金属氧化物层，其中使用电阻率不大于5.0欧姆·厘米且结晶粒径不大于15微米的金属氧化物靶进行溅射形成，并且使用氩气的混合气体与0.1〜10％的氧气（O 2）混合。

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