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    • 3. 发明授权
    • Antireflective film and exposure method
    • 防反射膜和曝光方法
    • US07582411B2
    • 2009-09-01
    • US11467983
    • 2006-08-29
    • Nobuyuki MatsuzawaYoko WatanabeBoontarika ThunnakartKen Ozawa
    • Nobuyuki MatsuzawaYoko WatanabeBoontarika ThunnakartKen Ozawa
    • H01L21/027G03F7/20G03F7/11
    • H01L21/0276G03F7/091G03F7/2041Y10S438/952
    • An antireflective film is provided between a resist layer and a silicon oxide layer formed on a surface of a silicon substrate, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93 to 1.2. Assuming that the complex refractive indexes of upper and lower layers constituting the antireflective film are N1 (=n1−k1i) and N2 (=n2−k2i), respectively, and the thicknesses of both layers are d1 and d2, when a predetermined combination of values of [n10, k10, d10, n20, k20, d20] is selected, n1, k1, d1, n2, k2, and d2 satisfy the relational expression {(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1.
    • 在抗蚀剂层和形成在硅衬底的表面上的氧化硅层之间设置防反射膜,用于在波长为190nm至195nm的曝光系统中曝光抗蚀剂层,并将数值孔径NA为0.93至 1.2。 假设构成防反射膜的上层和下层的复折射率分别为N1(= n1-k1i)和N2(= n2-k2i),并且两层的厚度分别为d1和d2, 选择[n10,k10,d10,n20,k20,d20]的值,n1,k1,d1,n2,k2和d2满足关系式<?in-line-formula description =“In-line Formulas”end =“lead”→> {(n1-n10)/(n1m-n10)} 2 + {(k1-k10)/(k1m-k10)} 2 + {(d1-d10)/(d1m-d10)} 2 + {(n2-n20)/(n2m-n20)} 2 + {(k2-k20)/(k2m-k20)} 2 + {(d2-d20)/(d2m-d20)} 2 < ?in-line-formula description =“In-line Formulas”end =“tail”?>
    • 4. 发明授权
    • Packet processing device implementing scheduling and priority for improved efficiency
    • 分组处理设备实现调度和优先级,提高效率
    • US07496034B2
    • 2009-02-24
    • US11077868
    • 2005-03-11
    • Hideyo FukunagaKatsumi ImamuraYasushi KurokawaHideyuki KudouYoko Watanabe
    • Hideyo FukunagaKatsumi ImamuraYasushi KurokawaHideyuki KudouYoko Watanabe
    • H04L12/56
    • H04L47/6215H04L47/50
    • A packet transmission device improved in packet transmission efficiency. Each packet input processor generates a pointer and identifies a packet type with respect to a received packet, and generates identification data including the pointer and the packet type identification result. A memory access controller detects a header readout amount of the packet based on the packet type identification result, generates first readout data including the header readout amount and a readout pointer indicative of a storage location of the packet in a shared memory, and adaptively reads out header data of the packet from the shared memory in accordance with the first readout data. A protocol processor analyzes the destination of the read header data, and a packet updater updates the old destination address of the packet to a new one to generate a packet with the updated destination address, and outputs the generated packet.
    • 分组传输设备提高了分组传输效率。 每个分组输入处理器产生指针并且相对于接收到的分组标识分组类型,并且生成包括指针和分组类型识别结果的标识数据。 存储器访问控制器基于分组类型识别结果来检测分组的报头读出量,产生包括报头读出量的第一读出数据和表示分组在共享存储器中的存储位置的读出指针,并自适应地读出 根据第一读出数据来自共享存储器的分组的报头数据。 协议处理器分析读取标题数据的目的地,并且分组更新器将分组的旧目的地地址更新为新的分组,以生成具有更新的目的地地址的分组,并输出生成的分组。
    • 8. 发明授权
    • Method for producing hydrogen gas utilizing mechano-corrosive reaction
    • 利用机械腐蚀反应生产氢气的方法
    • US07008609B2
    • 2006-03-07
    • US10658106
    • 2003-09-09
    • Masao WatanabeYoko Watanabe
    • Masao WatanabeYoko Watanabe
    • C01B3/08C01F7/42
    • B01J7/02B01J19/18B01J2219/182C01B3/08Y02E60/36
    • There is provided a method of producing hydrogen gas serving as fuel for a portable fuel cell, whereby hydrogen gas can be provided easily, safely, and at a low cost. To that end, the method of producing hydrogen gas comprises the steps of causing friction and mechanical fracture accompanying the friction to occur to a metallic material under water and increasing thereby chemical reactivity of atoms of the metallic material, in close proximity of the surface thereof; wherein water molecules are decomposed by accelerating corrosion reaction of water with the metallic material. Further, for the metallic material, an aluminum or aluminum alloy material is used as industrial waste including refuse and cutting chips (curls) of an industrial aluminum material. Meanwhile, pure water not substantially containing ionic impurities and organic molecules is used for the water.
    • 提供了一种生产用作便携式燃料电池的燃料的氢气的方法,由此可以容易地,安全地和低成本地提供氢气。 为此,制造氢气的方法包括以下步骤:伴随摩擦的摩擦和机械断裂发生在水下的金属材料上,从而增加金属材料的原子在其表面附近的化学反应性; 其中水分子通过加速水与金属材料的腐蚀反应而分解。 此外,对于金属材料,使用铝或铝合金材料作为工业废物,包括工业铝材料的垃圾和切割屑(卷曲)。 同时,水中不含有离子杂质和有机分子的纯水。