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1. 发明授权

US07851759B2 Infrared imaging apparatus 有权
标题翻译：红外成像装置
公开(公告)号：US07851759B2
公开(公告)日：2010-12-14
申请号：US11766430
申请日：2007-06-21
申请人： Vladimir Anatolyevich Aksyuk , Cristian A. Bolle , Christopher D. W. Jones , Flavio Pardo , Roland Ryf , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Cristian A. Bolle , Christopher D. W. Jones , Flavio Pardo , Roland Ryf , Maria Elina Simon
IPC分类号： G01J5/58
CPC分类号： G01J5/08 , G01J5/02 , G01J5/0205 , G01J5/023 , G01J5/0806 , G01J5/0825 , G01J5/0831 , G01J5/40 , G01J2005/0077
摘要： A representative embodiment of the invention provides an infrared (IR) imaging system adapted to (i) convert an IR image of an object into mechanical displacements of a plurality of movable plates, (ii) use the mechanical displacements to impart a corresponding spatial phase modulation pattern onto a beam of visible light, and (iii) apply spatial filtering to convert the spatial phase modulation pattern into a visible image of the object.
摘要翻译：本发明的代表性实施例提供一种红外（IR）成像系统，其适于（i）将物体的IR图像转换成多个可移动板的机械位移，（ii）使用机械位移来赋予对应的空间相位调制模式到可见光束，并且（iii）应用空间滤波以将空间相位调制图案转换成对象的可见图像。

2. 发明授权

US06392221B1 Micro-electro-mechanical optical device 有权
标题翻译：微机电光学装置
公开(公告)号：US06392221B1
公开(公告)日：2002-05-21
申请号：US09390158
申请日：1999-09-03
申请人： Vladimir Anatolyevich Aksyuk , David John Bishop
发明人： Vladimir Anatolyevich Aksyuk , David John Bishop
IPC分类号： G02B2600
CPC分类号： G02B26/0841 , B81B3/004 , B81B3/0062 , B81B5/00 , B81B7/0003 , B81B2201/042 , B81B2201/045 , G02B26/0866
摘要： A micro-electro-mechanical optical device is disclosed. The micro-electro-mechanical optical device includes a micro-electro-mechanical structure coupled with an optical device. Both the micro-electro-mechanical structure and the optical device are disposed on a substrate surface. The micro-electro-mechanical structure lifts the optical device a predetermined distance above the plane of the substrate surface. Thereafter, the lifted optical device is moveable relative to the plane of the substrate surface in response to an electrostatic field generated between the optical device and the substrate.
摘要翻译：公开了一种微机电光学装置。微机电光学器件包括与光学器件耦合的微电子机械结构。微电子机械结构和光学装置均设置在基板表面上。微电子机械结构将光学装置提升到衬底表面平面上方一预定的距离。此后，响应于在光学器件和衬底之间产生的静电场，提升的光学器件可相对于衬底表面的平面移动。

3. 发明授权

US08343807B2 Process for making microelectronic element chips 失效
公开(公告)号：US08343807B2
公开(公告)日：2013-01-01
申请号：US12291974
申请日：2008-11-17
申请人： Vladimir Anatolyevich Aksyuk , Nagesh R Basavanhally , Avinoam Kornblit , Warren Yiu-Cho Lai , Joseph Ashley Taylor , Robert Francis Fullowan
发明人： Vladimir Anatolyevich Aksyuk , Nagesh R Basavanhally , Avinoam Kornblit , Warren Yiu-Cho Lai , Joseph Ashley Taylor , Robert Francis Fullowan
IPC分类号： H01L31/0224 , H01L23/535
CPC分类号： H01L21/6835 , B81B7/0006 , B81B7/04 , H01L21/486 , H01L21/6836 , H01L23/147 , H01L23/5384 , H01L24/11 , H01L24/12 , H01L24/16 , H01L24/81 , H01L25/0655 , H01L2221/68318 , H01L2221/68327 , H01L2221/68372 , H01L2224/0401 , H01L2224/0557 , H01L2224/05572 , H01L2224/1147 , H01L2224/11472 , H01L2224/13025 , H01L2224/13099 , H01L2224/13109 , H01L2224/13111 , H01L2224/16 , H01L2224/81001 , H01L2224/81801 , H01L2924/0002 , H01L2924/01006 , H01L2924/01015 , H01L2924/01033 , H01L2924/01049 , H01L2924/0105 , H01L2924/014 , H01L2924/14 , H01L2924/1461 , H01L2924/00 , H01L2224/05552
摘要： Apparatus including a chip substrate having a first chip surface facing away from a second chip surface; an array of microelectronic elements on the first chip surface; and an array of conductors each in communication with one of the microelectronic elements, the conductors passing through the chip substrate and fully spanning a distance between the first and second chip surfaces. Process including: providing an apparatus including a chip substrate having a first chip surface facing away from a second chip surface, an array of microelectronic elements being on the first chip surface, an array of conductors each being in communication with one of the microelectronic elements and partially spanning an average distance between the first and second chip surfaces; bonding a temporary support carrier onto the array of microelectronic elements; removing a portion of the chip substrate, thereby reducing the average distance between the first and second chip surfaces; and forming an under bump metallization pad at the second chip surface in electrical communication with a conductor.

4. 发明授权

US08063456B2 Mechanical switch with a curved bilayer 有权
标题翻译：具有弯曲双层的机械开关
公开(公告)号：US08063456B2
公开(公告)日：2011-11-22
申请号：US11519623
申请日：2006-09-12
申请人： Vladimir Anatolyevich Aksyuk , Omar Daniel Lopez , Flavio Pardo , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Omar Daniel Lopez , Flavio Pardo , Maria Elina Simon
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2001/0042 , Y10T29/49105
摘要： An apparatus includes a mechanical switch. The mechanical switch includes a bilayer with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
摘要翻译：一种装置包括机械开关。机械开关包括具有第一和第二稳定弯曲状态的双层。将双层从第一状态转换为第二状态关闭开关。

5. 发明授权

US07580175B2 Detector of infrared radiation having a bi-material transducer 有权
标题翻译：红外辐射检测器具有双材料传感器
公开(公告)号：US07580175B2
公开(公告)日：2009-08-25
申请号：US11766414
申请日：2007-06-21
申请人： Vladimir Anatolyevich Aksyuk , Cristian A. Bolle , Christopher D. W. Jones , Flavio Pardo , Roland Ryf , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Cristian A. Bolle , Christopher D. W. Jones , Flavio Pardo , Roland Ryf , Maria Elina Simon
IPC分类号： G02B26/00 , G01J5/00
CPC分类号： G01J5/40
摘要： A representative embodiment of the invention provides an infrared (IR) detector having a movable plate supported at an offset distance from a substrate by a suspension arm. In response to a temperature difference between the plate and the substrate generated by the incident IR radiation, the suspension arm deforms and changes the offset distance for the plate. In one embodiment, the suspension arm has three rod-shaped bimorph transducers that lie within a plane that is parallel to the substrate. The transducers are also parallel to one another, with the transducer that is attached to an anchor of the suspension arm being located between the two transducers that are attached to the plate.
摘要翻译：本发明的代表性实施例提供一种红外（IR）检测器，其具有通过悬架臂与基板偏移距离支撑的可移动板。响应于由入射的IR辐射产生的板和衬底之间的温度差，悬架臂变形并改变板的偏移距离。在一个实施例中，悬架臂具有位于平行于基板的平面内的三个棒状双压电晶片换能器。换能器也彼此平行，其中附接到悬架臂的锚定件的换能器位于连接到板的两个换能器之间。

6. 发明授权

US07474005B2 Microelectronic element chips 失效
标题翻译：微电子元件芯片
公开(公告)号：US07474005B2
公开(公告)日：2009-01-06
申请号：US11445072
申请日：2006-05-31
申请人： Vladimir Anatolyevich Aksyuk , Nagesh R Basavanhally , Avinoam Kornblit , Warren Yiu-Cho Lai , Joseph Ashley Taylor , Robert Francis Fullowan
发明人： Vladimir Anatolyevich Aksyuk , Nagesh R Basavanhally , Avinoam Kornblit , Warren Yiu-Cho Lai , Joseph Ashley Taylor , Robert Francis Fullowan
IPC分类号： H01L23/52 , H01L23/48 , H01L29/40
CPC分类号： H01L21/6835 , B81B7/0006 , B81B7/04 , H01L21/486 , H01L21/6836 , H01L23/147 , H01L23/5384 , H01L24/11 , H01L24/12 , H01L24/16 , H01L24/81 , H01L25/0655 , H01L2221/68318 , H01L2221/68327 , H01L2221/68372 , H01L2224/0401 , H01L2224/0557 , H01L2224/05572 , H01L2224/1147 , H01L2224/11472 , H01L2224/13025 , H01L2224/13099 , H01L2224/13109 , H01L2224/13111 , H01L2224/16 , H01L2224/81001 , H01L2224/81801 , H01L2924/0002 , H01L2924/01006 , H01L2924/01015 , H01L2924/01033 , H01L2924/01049 , H01L2924/0105 , H01L2924/014 , H01L2924/14 , H01L2924/1461 , H01L2924/00 , H01L2224/05552
摘要： Apparatus including a chip substrate having a first chip surface facing away from a second chip surface; an array of microelectronic elements on the first chip surface; and an array of conductors each in communication with one of the microelectronic elements, the conductors passing through the chip substrate and fully spanning a distance between the first and second chip surfaces. Process including: providing an apparatus including a chip substrate having a first chip surface facing away from a second chip surface, an array of microelectronic elements being on the first chip surface, an array of conductors each being in communication with one of the microelectronic elements and partially spanning an average distance between the first and second chip surfaces; bonding a temporary support carrier onto the array of microelectronic elements; removing a portion of the chip substrate, thereby reducing the average distance between the first and second chip surfaces; and forming an under bump metallization pad at the second chip surface in electrical communication with a conductor.
摘要翻译：一种装置，包括具有背离第二芯片表面的第一芯片表面的芯片衬底; 第一芯片表面上的微电子元件阵列; 以及每个与所述微电子元件中的一个连通的导体阵列，所述导体穿过所述芯片基板并且完全跨越所述第一和第二芯片表面之间的距离。该方法包括：提供包括芯片衬底的装置，该芯片衬底具有背离第二芯片表面的第一芯片表面，位于第一芯片表面上的微电子元件阵列，每个导体阵列与微电子元件中的一个连接，部分跨越第一和第二芯片表面之间的平均距离; 将临时支撑载体接合到微电子元件阵列上; 去除所述芯片基板的一部分，从而减小所述第一和第二芯片表面之间的平均距离; 以及在所述第二芯片表面处形成与导体电连通的凸块下金属化焊盘。

7. 发明授权

US07471184B1 Robust MEMS actuator for relays 失效
标题翻译：用于继电器的强大的MEMS执行器
公开(公告)号：US07471184B1
公开(公告)日：2008-12-30
申请号：US11866154
申请日：2007-10-02
申请人： Vladimir Anatolyevich Aksyuk , Flavio Pardo , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Flavio Pardo , Maria Elina Simon
IPC分类号： H01H61/01 , H01L23/58 , H01L31/04 , H01L21/00
CPC分类号： B81B3/0072 , B81B2201/032 , H01H61/04 , H01H2061/006 , H01H2061/008
摘要： An apparatus comprising a microelectromechanical system (MEMS) device. The MEMS device includes a substrate having an anchoring pad thereon and a structural element. The structural element has a beam that includes a first part and a second part. The first part is attached to both the anchoring pad and to the second part. The second part is movable with respect to the substrate and made of an electrically conductive material. Additionally, at least one of the following conditions hold: the first part is made of a material having: a first yield stress that is greater than a second yield stress of the electrically conductive material of the second part; a fatigue resistance that is greater than a second fatigue resistance of the electrically conductive material of the second part; or, a creep rate that is less than a second creep rate of the electrically conductive material of the second part.
摘要翻译：一种包括微机电系统（MEMS）装置的装置。 MEMS器件包括其上具有锚定垫的衬底和结构元件。结构元件具有包括第一部分和第二部分的梁。第一部分连接到锚固垫和第二部分。第二部分可相对于基板移动并由导电材料制成。另外，以下条件中的至少一个成立：第一部分由具有第二部分的导电材料的第二屈服应力的第一屈服应力的材料制成; 大于第二部分的导电材料的第二耐疲劳性的耐疲劳性; 或者小于第二部分的导电材料的第二蠕变速率的蠕变速率。

8. 发明授权

US06944366B2 Planar lightwave wavelength device using moveable mirrors 有权
标题翻译：平面光波波长设备使用可移动镜
公开(公告)号：US06944366B2
公开(公告)日：2005-09-13
申请号：US10916933
申请日：2004-08-12
申请人： Vladimir Anatolyevich Aksyuk , Christopher Richard Doerr , Dan T. Fuchs
发明人： Vladimir Anatolyevich Aksyuk , Christopher Richard Doerr , Dan T. Fuchs
IPC分类号： G02B6/12 , G02B6/122 , G02B6/28 , G02B6/34 , G02B6/35 , G02F1/01
CPC分类号： G02B6/3516 , G02B6/12019 , G02B6/122 , G02B6/2861 , G02B6/3546 , G02B6/3596 , G02B2006/12145
摘要： A method and apparatus are disclosed for adjusting the phase of an optical signal by varying the path length of the optical signal using one or more moveable mirrors. The phase adjustment techniques of the present invention may be employed in various optical devices, including 1×n optical switches. The position of the mirrors may be controlled, for example, using micromachined control elements that physically move the mirror along the lightpath. An exemplary 2-by-2 optical switch includes two waveguides configured to include a coupler region. A mirror is positioned at the output of each waveguide. The position of at least one of the mirrors may be adjusted along the optical path and the mirrors reflect the light exiting from the end of the waveguides back into the same waveguide after an adjustable phase delay due to the round trip through an adjustable air gap between the waveguides and corresponding mirrors.
摘要翻译：公开了一种用于通过使用一个或多个可移动反射镜改变光信号的路径长度来调整光信号的相位的方法和装置。本发明的相位调整技术可以用在各种光学装置中，包括1xn光开关。可以例如使用微机械加工的控制元件来控制反射镜的位置，该微机械控制元件沿着光路物理地移动反射镜。示例性的2×2光开关包括被配置为包括耦合器区域的两个波导。镜子位于每个波导的输出处。可以沿着光路调整至少一个反射镜的位置，并且在经过可调节的相位延迟之后，由于通过可调节气隙之间的往返，反射镜将从波导末端射出的光反射回相同的波导中波导和相应的反射镜。

9. 发明授权

US08361825B2 Mechanical switch with a curved bilayer background 有权
标题翻译：具有弯曲双层背景的机械开关
公开(公告)号：US08361825B2
公开(公告)日：2013-01-29
申请号：US13270600
申请日：2011-10-11
申请人： Vladimir Anatolyevich Aksyuk , Omar Daniel Lopez , Flavio Pardo , Maria Elina Simon
发明人： Vladimir Anatolyevich Aksyuk , Omar Daniel Lopez , Flavio Pardo , Maria Elina Simon
IPC分类号： H01L21/00
CPC分类号： H01H59/0009 , H01H2001/0042 , Y10T29/49105
摘要： An apparatus includes a mechanical switch. The mechanical switch includes a bilayer with first and second stable curved states. A transformation of the bilayer from the first state to the second state closes the switch.
摘要翻译：一种装置包括机械开关。机械开关包括具有第一和第二稳定弯曲状态的双层。将双层从第一状态转换为第二状态关闭开关。

10. 发明授权

US08139283B2 Surface plasmon polariton modulation 有权
标题翻译：表面等离子体激元调制
公开(公告)号：US08139283B2
公开(公告)日：2012-03-20
申请号：US11983538
申请日：2007-11-09
申请人： Vladimir Anatolyevich Aksyuk , Girsh Blumberg
发明人： Vladimir Anatolyevich Aksyuk , Girsh Blumberg
IPC分类号： G02B26/00
CPC分类号： G02B6/1226 , B82Y20/00 , G02B6/3536 , G02B6/3548 , G02B6/3596
摘要： An apparatus includes a substrate having a metallic surface, a structure, and a dielectric object facing the metallic top surface. The structure is configured to optically produce surface plasmon polaritons that propagate on the metallic surface. The dielectric object is controllable to adjust values of the dielectric constant at an array of different positions along and near to the metallic surface.
摘要翻译：一种装置包括具有面向金属顶表面的金属表面，结构和介电物体的基底。该结构被配置为光学地产生在金属表面上传播的表面等离子体激元。电介质物体是可控制的，以在金属表面沿着和靠近金属表面的不同位置的阵列处调整介电常数的值。

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