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    • 7. 发明申请
    • THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH
    • 用于基于MEMS的继电器开关的热致动器
    • US20090040008A1
    • 2009-02-12
    • US11836860
    • 2007-08-10
    • Vladimir Anatolyevich AksyukFlavio PardoMaria Elina Simon
    • Vladimir Anatolyevich AksyukFlavio PardoMaria Elina Simon
    • H01H37/52
    • H01H61/02B81B3/0024B81B2201/014B81B2201/031H01H2061/008
    • A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an “active” arm that is movably mounted on a substrate. The “active” arm has (i) a thermal expansion layer and (ii) a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the “active” arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the “active” arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.
    • 本发明的代表性实施例提供了一种用于基于MEMS的继电器开关的热致动器。 热致动器具有可移动地安装在基板上的“主动”臂。 “主动”臂具有(i)热膨胀层和(ii)与热膨胀层电隔离的电阻加热器。 热膨胀层适应于由流过电阻加热器的控制电流引起的温度变化而膨胀,从而弯曲“主动”臂并相对于基板移动该臂。 由于“主动”臂的机械和电气特性分别主要由热膨胀层和电阻加热器控制,可以独立地优化这些特性以获得本发明的基于MEMS的继电器开关更好的工作特性 与现有技术中获得的相比。
    • 9. 发明授权
    • Robust MEMS actuator for relays
    • 用于继电器的强大的MEMS执行器
    • US07471184B1
    • 2008-12-30
    • US11866154
    • 2007-10-02
    • Vladimir Anatolyevich AksyukFlavio PardoMaria Elina Simon
    • Vladimir Anatolyevich AksyukFlavio PardoMaria Elina Simon
    • H01H61/01H01L23/58H01L31/04H01L21/00
    • B81B3/0072B81B2201/032H01H61/04H01H2061/006H01H2061/008
    • An apparatus comprising a microelectromechanical system (MEMS) device. The MEMS device includes a substrate having an anchoring pad thereon and a structural element. The structural element has a beam that includes a first part and a second part. The first part is attached to both the anchoring pad and to the second part. The second part is movable with respect to the substrate and made of an electrically conductive material. Additionally, at least one of the following conditions hold: the first part is made of a material having: a first yield stress that is greater than a second yield stress of the electrically conductive material of the second part; a fatigue resistance that is greater than a second fatigue resistance of the electrically conductive material of the second part; or, a creep rate that is less than a second creep rate of the electrically conductive material of the second part.
    • 一种包括微机电系统(MEMS)装置的装置。 MEMS器件包括其上具有锚定垫的衬底和结构元件。 结构元件具有包括第一部分和第二部分的梁。 第一部分连接到锚固垫和第二部分。 第二部分可相对于基板移动并由导电材料制成。 另外,以下条件中的至少一个成立:第一部分由具有第二部分的导电材料的第二屈服应力的第一屈服应力的材料制成; 大于第二部分的导电材料的第二耐疲劳性的耐疲劳性; 或者小于第二部分的导电材料的第二蠕变速率的蠕变速率。