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1. 发明专利

JP2007247052A Method of manufacturing microcomponent 审中-公开
标题翻译：制造微波的方法
公开(公告)号：JP2007247052A
公开(公告)日：2007-09-27
申请号：JP2006110234
申请日：2006-03-16
申请人： Toshiyuki Horiuchi , 敏行堀内
发明人： HORIUCHI TOSHIYUKI , KATAYAMA MASAHIRO , WATABE YUSUKE , NAKAMURA RYOTA , KOUCHI YUUKAI
IPC分类号： C25D1/00 , C25D1/20
摘要： PROBLEM TO BE SOLVED: To provide a method for easily separating a micro component from a substrate without damaging the same, wherein the microcomponent is manufactured by plating a metal on a plating die formed on the substrate.
SOLUTION: A metal 4 having a small ionization tendency is sputtered onto a surface of the substrate 1 onto which a metal film or foil is deposited. The plating die 5 is formed on the sputtered metal 4 using a material soluble in a solvent or a peeling liquid. A plating metal 7 is plated on the plating die 5, and while dissolving and removing the plating die 5 in the solvent or the peeling liquid, the microcomponent manufactured from the plating metal 7 is separated and made independent from the substrate 1 by taking advantage of a weak adhesion between the sputtered metal film 4 and the substrate 1.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于容易地从基板分离微成分而不损坏微组件的方法，其中通过在形成在基板上的电镀模上镀金属来制造微组件。解决方案：将具有小电离倾向的金属4溅射到沉积有金属膜或箔的基板1的表面上。使用可溶于溶剂或剥离液的材料，在溅射金属4上形成电镀模5。电镀金属7镀在电镀模5上，同时在溶剂或剥离液中溶解和除去电镀模5，由电镀金属7制成的微组件通过利用电镀金属7独立于衬底1 溅射金属膜4与基板1之间的弱粘合力。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2005349556A Flying robot 有权
标题翻译：飞行机器人
公开(公告)号：JP2005349556A
公开(公告)日：2005-12-22
申请号：JP2004201188
申请日：2004-06-11
申请人： Toshiyuki Horiuchi , 敏行堀内
发明人： HORIUCHI TOSHIYUKI , KODAMA SATOSHI , KONDO AKIKO
IPC分类号： B25J5/00 , B25J13/08
摘要： PROBLEM TO BE SOLVED: To operate a flying robot for perceiving a situation of a narrow plate where a human being cannot enter or a place where a human being is expected to be harmed, depending on an image of a camera mounted on the flying robot. SOLUTION: Marker objects 4a, 4b, 4c, 4d for recognizing a part or an end of the flying robot 1 are attached to the flying robot 1. The camera 3 for monitoring a periphery of the flying robot 1 including the marker objects 4a, 4b, 4c, 4d are mounted. In a monitor screen projecting a camera image, at least a part of the marker objects 4a, 4b, 4c, 4d is put as a foreground of a monitoring scene. The marker objects 4a, 4b, 4c, 4d are made to be illuminants. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了操作飞行机器人，以感知人类不能进入的狭窄板的状况或人类预期受到伤害的地方，这取决于安装在人身上的相机的图像飞行机器人。解决方案：用于识别飞行机器人1的一部分或末端的标记对象4a，4b，4c，4d附接到飞行机器人1.用于监视包括标记物体的飞行机器人1的周边的照相机3 4a，4b，4c，4d。在投影相机图像的监视器屏幕中，将标记对象4a，4b，4c，4d的至少一部分放置为监视场景的前景。标记对象4a，4b，4c，4d被制成发光体。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2004226940A Optical fiber array and method for manufacturing optical fiber array 审中-公开
公开(公告)号：JP2004226940A
公开(公告)日：2004-08-12
申请号：JP2003051963
申请日：2003-01-24
申请人： Toshiyuki Horiuchi , 敏行堀内
发明人： HORIUCHI TOSHIYUKI , KAWAMURA HIROHISA
IPC分类号： G02B6/24 , G02B6/04 , G02B6/40
摘要： PROBLEM TO BE SOLVED: To solve two problems in which it is hard to secure position precision of the sectional center of an optical fiber of an optical fiber array and optical fibers can not closely be arranged.
SOLUTION: The optical fiber array is manufactured by providing a stopper or step for position reference on a substrate having a plane part or smooth curved surface part on its surface and winding optical fibers in close arrangement on the basis of an end surface of the stopper or step and the plane part or smooth curved surface part of the substrate. Further, when a plurality of optical fiber arrays are necessary, 2nd and succeeding arrays of optical fibers are arrayed under a guidance of a hollow formed as optical fibers come into contact with one another on optical fibers having been arrayed. The optical fibers are held between the substrate and a pressure plate and fixed in one body, and an end surface is finished.
COPYRIGHT: (C)2004,JPO&NCIPI

4. 发明专利

JP2003275645A Chemicals coating device and chemicals coating method 审中-公开
标题翻译：化学涂料装置和化学品涂料方法
公开(公告)号：JP2003275645A
公开(公告)日：2003-09-30
申请号：JP2002127608
申请日：2002-03-26
申请人： Toshiyuki Horiuchi , 敏行堀内
发明人： HORIUCHI TOSHIYUKI , UEJIMA HISAO , KOKUBO TADASHI
IPC分类号： B05D1/18 , B05C3/02
摘要： PROBLEM TO BE SOLVED: To coat an outer periphery surface of a rotation body at axial symmetry or an outer periphery surface of an object having a linear gravity center axis such as a columnar or cylindrical object of which a thickness is constant or gradually varies having a cross section of a shape surrounded by an optional closed curve with chemicals such as a resist at a uniform film thickness.
SOLUTION: The object to be coated is coated with the chemicals at a uniform film thickness by immersing the object in the chemicals in a chemicals container while vertically retaining a rotation symmetrical axis or a gravity center axis and relatively pulling up the object from the chemicals by descending the chemicals container in a vertical direction or raising the object or descending a liquid level of the chemicals by reducing an amount of the chemicals in the chemicals container. In the case where the object is the axial symmetrical rotation body, a rotation of the object is imparted for relative pulling up from the chemicals. In the case of the object of which a cross section shape is varied in an axis direction for pulling up, a pulling up speed or the like is varied corresponding to a place.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：为了以轴向对称的方式涂覆旋转体的外周面或具有线性重心的物体的外周面，例如柱状或圆柱形物体的厚度恒定或逐渐地具有由具有均匀膜厚度的抗蚀剂等化学物质的可选闭合曲线围绕的形状的横截面变化。
解决方案：通过将化学品中的物质浸入化学品容器中，同时垂直保持旋转对称轴或重心轴线并相对地拉起物体从而将待涂覆的物体以均匀的膜厚度涂覆在化学品上通过减少化学品容器中的化学物质的量，使化学品容器沿垂直方向下降或升高物体或降低化学品的液面。在物体是轴向对称旋转体的情况下，赋予物体的旋转以相对于化学品的上拉。在其对象的横截面形状在轴向方向上变化以提起的情况下，提升速度等相应于一个位置变化。版权所有（C）2003，JPO

5. 发明专利

JP2005193727A Flying robot 审中-公开
标题翻译：飞行机器人
公开(公告)号：JP2005193727A
公开(公告)日：2005-07-21
申请号：JP2003436851
申请日：2003-12-26
申请人： Toshiyuki Horiuchi , 敏行堀内
发明人： HORIUCHI TOSHIYUKI , OTSUKA KENSUKE , SUZUKI HIROHISA , TAKAGI YUUJIYO , NAKAHARA AKIRA
IPC分类号： B25J5/00 , B25J13/00 , B64C13/20 , B64C39/02
摘要： PROBLEM TO BE SOLVED: To provide a flying robot which can automatically hold the horizontal state or the required tilting angle without adding any controlling operation.
SOLUTION: A flying robot is provided with an acceleration sensor 2 for detecting the tilting angle by sensing a component of the gravitational acceleration and an angular velocity sensor 3 for detecting the angular velocity in the tilting direction. The flying robot can automatically hold the horizontal state or the required tilting angle by modifying the tilting angle such that the signal, which has been unified by adding or adding and amplifying the output signal from an acceleration signal reference adjusting circuit 4 for adding or subtracting the output signal from the acceleration sensor and the output signal from an angular velocity signal reference adjusting circuit 5 for adding or subtracting the output signal from the angular velocity sensor, reads null or a required value.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够自动保持水平状态或所需倾斜角度的飞行机器人，而不增加任何控制操作。解决方案：飞行机器人设置有加速度传感器2，用于通过感测重力加速度的分量来检测倾斜角度，以及用于检测倾斜方向上的角速度的角速度传感器3。飞行机器人可以通过修改倾斜角度来自动保持水平状态或所需的倾斜角度，使得通过加法或增加和放大来自加速度信号参考调节电路4的输出信号而被统一的信号，用于增加或减少来自加速度传感器的输出信号和来自角速度信号基准调整电路5的输出信号，用于从角速度传感器增加或减去输出信号，读取零或所需值。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2003068634A Liquid crystal matrix projection aligner and method thereof 有权
标题翻译：液晶矩阵投影对准器及其方法
公开(公告)号：JP2003068634A
公开(公告)日：2003-03-07
申请号：JP2001295060
申请日：2001-08-23
申请人： Toshiyuki Horiuchi , 敏行堀内
发明人： HORIUCHI TOSHIYUKI
IPC分类号： G03F1/00 , G03F1/68 , G03F7/20 , H01L21/027 , G03F1/08
CPC分类号： G03F7/70466
摘要： PROBLEM TO BE SOLVED: To provide an aligner and a method for liquid crystal matrix projection exposure, by which a pattern having a smooth external form can be formed by eliminating the constrictions and projections of the pattern caused by opaque parts in the boundaries of liquid crystal cells or in the cells at liquid crystal matrix projection exposure, and in addition, a pattern having a width narrower than the size of the liquid crystal cells or a pitch smaller than that of the cells can be formed.
SOLUTION: Projection exposure is conducted, in a state where an opening control plate having openings of circular shapes, etc., for limiting the transmitting regions of the liquid crystal cells of a liquid crystal panel to parts is inserted close to of in contact with the liquid crystal panel. The parts exposed at once form separated or slightly overlapping very small circular shapes, but the pattern, having the smooth external form can be formed when the exposure is conducted by superimposing the liquid crystal panel or a substrate to be exposed, by slightly shifting the panel or substrate. In addition, the pattern, having width smaller than the size of the liquid crystal cells or the pitch smaller than that of the cells, can be formed.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种用于液晶矩阵投影曝光的对准器和方法，由此通过消除由液晶边界中的不透明部分引起的图案的收缩和突起，可以形成具有平滑外形的图案在液晶矩阵投影曝光中，在单元中或在单元中，形成具有比液晶单元的尺寸窄的宽度或比单元的间距小的间距的图形。解决方案：在具有用于将液晶面板的液晶单元的透射区域限制到部件的开口的具有圆形形状的开口控制板等的状态下进行投影曝光，液晶面板。立即暴露的部分形成分开的或略微重叠的非常小的圆形，但是当通过将液晶面板或待曝光的基板叠加进行曝光时，可以形成具有平滑外部形状的图案，通过稍微移动面板或底物。此外，可以形成具有小于液晶单元的尺寸的宽度或比单元的间距小的间距的图案。

7. 发明专利

JP2005331893A Exposure method 有权
标题翻译：曝光方法
公开(公告)号：JP2005331893A
公开(公告)日：2005-12-02
申请号：JP2004174807
申请日：2004-05-18
申请人： Toshiyuki Horiuchi , 敏行堀内
发明人： HORIUCHI TOSHIYUKI , HASHIMOTO KOHEI , TAKEUCHI SHO , MATSUOKA TOSHIHARU , SASAKI NOBUO
IPC分类号： G03F7/24
摘要： PROBLEM TO BE SOLVED: To provide an exposure method capable of forming a repeated pattern, with high interval accuracy on the side surface of the sample to be exposed.
SOLUTION: When a repeated pattern on an original substrate is transferred to the side surface of the object sample by exposure, the following steps are alternately repeated which are: a step of exposing; and a step of rotating the object sample to be exposed, in such a manner that the side surface of the sample is rotated by a distance determined by multiplying the distance that corresponds to one period of the repeated pattern by the exposure magnification or by an integer.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够在要暴露的样品的侧表面上以高间隔精度形成重复图案的曝光方法。解决方案：当通过曝光将原始基板上的重复图案转印到对象样品的侧表面时，交替重复以下步骤：曝光步骤; 以及以使得样品的侧表面旋转一定距离而确定的距离的步骤，所述距离通过将对应于重复图案的一个周期的距离乘以曝光倍率或通过整数。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2005326796A Projection aligner 有权
标题翻译：投影对准器
公开(公告)号：JP2005326796A
公开(公告)日：2005-11-24
申请号：JP2004171896
申请日：2004-05-14
申请人： Toshiyuki Horiuchi , 敏行堀内
发明人： HORIUCHI TOSHIYUKI , HASHIMOTO KOHEI , TAKEUCHI SHO , MATSUOKA TOSHIHARU , SASAKI NOBUO
IPC分类号： G03F7/24
摘要： PROBLEM TO BE SOLVED: To provide a projection aligner capable of exposing a side surface of a sample to be exposed with high productivity, applicable to mass production at low cost, and capable of forming a pattern on the side surface of the sample to be exposed with high angular accuracy.
SOLUTION: There are arranged a projection optical system for projection-exposing a side surface of a sample to be exposed through a pattern on an original substrate, a rotating stage for rotating the sample to be exposed about its central axis, and an eccentricity-correcting stage for adjusting the position of the central axis of the sample to be exposed to the rotating shaft of the rotating stage, by moving the sample to be exposed in a direction perpendicular to the rotating shaft of the rotating stage. There is also provided, as needed, an inclining stage for directing the exposure position of the side surface of the sample to be exposed toward a direction perpendicular to the optical axis of the projection optical system.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够以高生产率暴露待暴露样品的侧表面的投影对准器，适用于低成本的批量生产，并且能够在样品的侧表面上形成图案以高角度精度曝光。解决方案：布置有投影光学系统，用于通过原始基板上的图案将用于曝光的样品的侧表面曝光，旋转台，用于旋转待围绕其中心轴线露出的样品，以及偏心校正台，用于通过沿垂直于旋转台的旋转轴的方向移动要暴露的样品来调节待暴露于旋转台的旋转轴的样品的中心轴的位置。根据需要还设置有倾斜台阶，用于将要暴露的样品的侧表面的曝光位置指向垂直于投影光学系统的光轴的方向。版权所有（C）2006，JPO＆NCIPI

9. 发明授权

US5208629A Optical projection exposure method and system using the same 失效
标题翻译：光学投影曝光方法和使用该方法的系统
公开(公告)号：US5208629A
公开(公告)日：1993-05-04
申请号：US863454
申请日：1992-04-03
申请人： Seitaro Matsuo , Yoshinobu Takeuchi , Kazuhiko Komatsu , Emi Tamechika , Katsuhiro Harada , Yoshiaki Mimura , Toshiyuki Horiuchi
发明人： Seitaro Matsuo , Yoshinobu Takeuchi , Kazuhiko Komatsu , Emi Tamechika , Katsuhiro Harada , Yoshiaki Mimura , Toshiyuki Horiuchi
IPC分类号： G03F7/20
CPC分类号： G03F7/705 , G03F7/70091 , G03F7/70125 , G03F7/70241 , G03F7/7025 , G03F7/70308
摘要： According to this invention, illumination light for illuminating a mask on which a micropattern is drawn is inclined at an angle corresponding to a numerical aperture of an optical projection lens located below the mask with respect to an optical axis. The illumination light is obliquely incident on the mask to expose the micropattern on an object located below the optical projection lens.

10. 发明授权

US08421999B2 Projection exposure apparatus and projection exposure method 有权
标题翻译：投影曝光装置和投影曝光方法
公开(公告)号：US08421999B2
公开(公告)日：2013-04-16
申请号：US12523917
申请日：2008-01-17
申请人： Toshiyuki Horiuchi , Hiroshi Kobayashi
发明人： Toshiyuki Horiuchi , Hiroshi Kobayashi
IPC分类号： G03B27/32 , G03B27/44
CPC分类号： G03F7/70191 , G02B3/0056 , G02B3/0087 , G02B26/02 , G02B26/0875 , G03F7/70275 , G03F7/70291 , G03F7/70466 , G03F7/70558
摘要： Exposure areas are wholly overlapped by moving a gradient refractive index lens array in a direction perpendicular to a scanning direction, or by providing a plurality of gradient refractive index lens arrays, an optical filter having a density distribution of lightness and darkness to compensate light transmission nonuniformity of the gradient refractive index lens array is arranged, or an opening control plate for limitedly using only of a uniform portion is provided. Two or more means may be simultaneously provided among the aforementioned mean. Moreover, any one of a microscopic transmission shutter array, a microscopic reflection shutter array, and a microscopic light emitter array is used instead of a mask, or an illuminating device and the mask.
摘要翻译：曝光区域通过在垂直于扫描方向的方向上移动梯度折射率透镜阵列或通过提供多个梯度折射率透镜阵列，具有明暗度密度分布的滤光器来补偿光透射不均匀性而完全重叠设置了梯度折射率透镜阵列，或者仅限于仅使用均匀部分的开启控制板。在上述平均值之间可以同时提供两种或更多种方法。此外，使用微观透射快门阵列，微观反射快门阵列和微观光发射器阵列中的任一种代替掩模，照明装置和掩模。

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