基本信息:
- 专利标题： Liquid crystal matrix projection aligner and method thereof
- 专利标题（中）：液晶矩阵投影对准器及其方法
- 申请号：JP2001295060 申请日：2001-08-23
- 公开(公告)号：JP2003068634A 公开(公告)日：2003-03-07
- 发明人： HORIUCHI TOSHIYUKI
- 申请人： Toshiyuki Horiuchi , 敏行 堀内
- 专利权人： Toshiyuki Horiuchi,敏行 堀内
- 当前专利权人： Toshiyuki Horiuchi,敏行 堀内
- 优先权： JP2001295060 2001-08-23
- 主分类号： G03F1/00
- IPC分类号： G03F1/00 ; G03F1/68 ; G03F7/20 ; H01L21/027 ; G03F1/08
摘要：
PROBLEM TO BE SOLVED: To provide an aligner and a method for liquid crystal matrix projection exposure, by which a pattern having a smooth external form can be formed by eliminating the constrictions and projections of the pattern caused by opaque parts in the boundaries of liquid crystal cells or in the cells at liquid crystal matrix projection exposure, and in addition, a pattern having a width narrower than the size of the liquid crystal cells or a pitch smaller than that of the cells can be formed.
SOLUTION: Projection exposure is conducted, in a state where an opening control plate having openings of circular shapes, etc., for limiting the transmitting regions of the liquid crystal cells of a liquid crystal panel to parts is inserted close to of in contact with the liquid crystal panel. The parts exposed at once form separated or slightly overlapping very small circular shapes, but the pattern, having the smooth external form can be formed when the exposure is conducted by superimposing the liquid crystal panel or a substrate to be exposed, by slightly shifting the panel or substrate. In addition, the pattern, having width smaller than the size of the liquid crystal cells or the pitch smaller than that of the cells, can be formed.
COPYRIGHT: (C)2003,JPO
摘要（中）：
SOLUTION: Projection exposure is conducted, in a state where an opening control plate having openings of circular shapes, etc., for limiting the transmitting regions of the liquid crystal cells of a liquid crystal panel to parts is inserted close to of in contact with the liquid crystal panel. The parts exposed at once form separated or slightly overlapping very small circular shapes, but the pattern, having the smooth external form can be formed when the exposure is conducted by superimposing the liquid crystal panel or a substrate to be exposed, by slightly shifting the panel or substrate. In addition, the pattern, having width smaller than the size of the liquid crystal cells or the pitch smaller than that of the cells, can be formed.
COPYRIGHT: (C)2003,JPO
要解决的问题：提供一种用于液晶矩阵投影曝光的对准器和方法，由此通过消除由液晶边界中的不透明部分引起的图案的收缩和突起，可以形成具有平滑外形的图案 在液晶矩阵投影曝光中，在单元中或在单元中，形成具有比液晶单元的尺寸窄的宽度或比单元的间距小的间距的图形。 解决方案：在具有用于将液晶面板的液晶单元的透射区域限制到部件的开口的具有圆形形状的开口控制板等的状态下进行投影曝光， 液晶面板。 立即暴露的部分形成分开的或略微重叠的非常小的圆形，但是当通过将液晶面板或待曝光的基板叠加进行曝光时，可以形成具有平滑外部形状的图案，通过稍微移动面板 或底物。 此外，可以形成具有小于液晶单元的尺寸的宽度或比单元的间距小的间距的图案。